WO2009110342A1 - 多孔質部材 - Google Patents
多孔質部材 Download PDFInfo
- Publication number
- WO2009110342A1 WO2009110342A1 PCT/JP2009/053189 JP2009053189W WO2009110342A1 WO 2009110342 A1 WO2009110342 A1 WO 2009110342A1 JP 2009053189 W JP2009053189 W JP 2009053189W WO 2009110342 A1 WO2009110342 A1 WO 2009110342A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- carbon fiber
- porous member
- porous
- fluororesin
- ozone
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/16—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres
- B01D39/1669—Cellular material
- B01D39/1676—Cellular material of synthetic origin
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J9/00—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof
- C08J9/26—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof by elimination of a solid phase from a macromolecular composition or article, e.g. leaching out
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2201/00—Foams characterised by the foaming process
- C08J2201/04—Foams characterised by the foaming process characterised by the elimination of a liquid or solid component, e.g. precipitation, leaching out, evaporation
- C08J2201/044—Elimination of an inorganic solid phase
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
- C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
- C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C08J2327/18—Homopolymers or copolymers of tetrafluoroethylene
Definitions
- the present invention relates to a porous member.
- filters such as air filters and filtration filters have been widely used in the semiconductor manufacturing industry and the like.
- a filter a filter made of a polytetrafluoroethylene (PTFE) porous film having a very low pressure loss and a very high collection efficiency has attracted attention.
- PTFE polytetrafluoroethylene
- the PTFE porous membrane filter can be manufactured, for example, by the following method. First, an unsintered or semi-sintered PTFE sheet-like molded body is produced, and a hole is formed in the sheet-like molded body by stretching the obtained sheet-like molded body to form a crack, thereby manufacturing a filter. .
- Japanese Patent Application Laid-Open No. 2003-41083 discloses a technique for adding carbon fiber to PTFE.
- the present invention has been made to solve the above problems. That is, it aims at providing the porous member which improved the uniformity of the hole diameter, and its manufacturing method. Moreover, it aims at providing the filter which can improve the uniformity of a process.
- a member having a predetermined shape formed of a fluororesin containing carbon fiber is prepared, and the member is exposed to an oxidizing gas, so that the carbon fiber contained in the member is prepared.
- a porous member is provided, characterized in that it is formed by removing.
- a member having a predetermined shape formed of a fluororesin containing a carbon material is prepared, the member is exposed to an oxidizing gas, and the carbon fiber contained in the member is prepared.
- a filter comprising the porous member of the present invention.
- a fluororesin member containing carbon fiber is exposed to an oxidizing gas, and the member is exposed to this member. Since the porous member is formed by removing the contained carbon fiber, the diameter of the carbon fiber becomes the diameter of the hole of the porous member. Thereby, the porous member which improved the uniformity of the hole diameter can be provided.
- the filter since the filter is composed of a porous member having improved pore diameter uniformity, the uniformity of processing performed using the filter can be improved.
- FIG.1 (a) and FIG.1 (b) are the top views and longitudinal cross-sectional views of the member based on Embodiment.
- FIG. 2A and FIG. 2B are a plan view and a longitudinal sectional view of the porous member according to the embodiment.
- FIG. 3 is a photograph of the sample before the experiment according to the example.
- FIG. 4 is a schematic configuration diagram of an experimental apparatus for processing a sample according to the example.
- FIG. 5 is a photograph of the sample after the experiment according to the example.
- FIG. 6 is an AA cross-sectional photograph of FIG.
- FIG. 7 is an enlarged photomicrograph of part B of FIG.
- FIG. 8 is an enlarged photomicrograph of part C of FIG.
- FIG. 9 is an enlarged photomicrograph of part D in FIG.
- FIGS. 1 (a) and 1 (b) are a plan view and a longitudinal sectional view of a member according to the present embodiment
- FIGS. 2 (a) and 2 (b) are porous members according to the present embodiment. It is the top view and longitudinal cross-sectional view of these.
- a pre-treatment member 1 having a predetermined shape and from which the carbon fiber 2 described below is not removed is prepared.
- the member 1 is composed of a fluororesin 3 containing carbon fibers 2.
- the carbon fibers 2 are contained almost uniformly in the fluororesin 3, and in the present embodiment, the carbon fibers 2 are arranged so that the longitudinal direction of the carbon fibers 2 is along the thickness direction of the member 1.
- fluororesin 3 examples include tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (PFA), polytetrafluoroethylene (PTFE), tetrafluoroethylene / hexafluoropropylene copolymer (FEP), tetrafluoroethylene / hexa
- PFA tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer
- PTFE polytetrafluoroethylene
- FEP tetrafluoroethylene / hexafluoropropylene copolymer
- EPE fluoropropylene / perfluoroalkyl vinyl ether copolymer
- ETFE tetrafluoroethylene / ethylene copolymer
- Such a member 1 can be manufactured by various methods. Specifically, for example, when the fluororesin 3 is PFA, the carbon fiber 2 is mixed with the PFA material and obliquely molded to produce the member 1 made of PFA containing the carbon fiber 2. it can. Further, when the fluororesin is PTFE, the carbon fiber 2 is mixed with the PTFE powder and sintered, whereby the member 1 made of PTFE containing the carbon fiber 2 can be produced.
- the member 1 is exposed to an oxidizing gas containing ozone and water vapor.
- an oxidizing gas containing ozone and water vapor.
- the carbon fiber 2 is oxidized by ozone and water vapor, becomes carbon dioxide, and leaves the fluororesin 3, and the carbon fiber 2 is removed from the fluororesin 3.
- the oxidizing gas may be composed only of ozone.
- the C—C bond of the carbon fiber 2 is cleaved by the oxidation of ozone and water vapor, but the C—C bond and C—F bond in the fluororesin 3 are not cleaved by the oxidizing power of ozone. It is considered that even if the fluororesin 3 is exposed to, the carbon fiber 2 is simply removed and the composition of the fluororesin 3 is not affected at all.
- the carbon fiber 2 is preferably removed so as to substantially remove the carbon fiber 2. That is, since the removal of the carbon fibers 2 depends on the time of exposure to the oxidizing gas, the depth of removal of the carbon fibers 2 can be controlled by controlling by this time. Therefore, the carbon fiber 2 present in the member 1 can be substantially removed by controlling the exposure time to the oxidizing gas.
- the above “substantially” means not only that all the carbon fibers 2 present in the member 1 are removed, but also includes cases where the carbon fibers 2 remain slightly in the member 1. To do. For example, when the porous member 4 is used as a filter and the carbon fiber 2 itself has an adverse effect, it is desirable to remove all the carbon fibers 2 present in the member 1.
- the porous member 4 shown in FIGS. 2A and 2B is produced.
- the holes 4a are formed at the locations where the carbon fibers 2 were present, so that the porous member 4 becomes porous.
- the carbon fiber 2 is arranged so that the longitudinal direction of the carbon fiber 2 is along the thickness direction of the member 1, the holes 4 a formed by removing the carbon fiber 2 are in the thickness direction of the porous member 4. Are formed along.
- the porous member 4 is formed by exposing the member 1 made of fluororesin 3 containing the carbon fiber 2 to an oxidizing gas and removing the carbon fiber 1 contained in the member 3. Therefore, the diameter of the carbon fiber 1 becomes the diameter of the hole 4 a of the porous member 4. Thereby, the porous member 4 which improved the uniformity of the hole diameter can be provided.
- this porous member 4 when used as a filter, the uniformity of the hole diameter in the holes 4a is improved, so that the uniformity of the processing performed using the filter can be improved. Since the holes 4 a are formed in the thickness direction of the porous member 4, the fluid passed through the filter flows from the thickness direction of the porous member 4.
- the removal rate of the carbon fiber 2 can be increased as compared with using ozone alone. That is, when using ozone alone, only oxygen radicals act, but when using ozone and water vapor, hydroxyl radicals having a strong oxidizing power act in addition to oxygen radicals. Thereby, the removal rate of the carbon fiber 2 can be increased.
- the present invention is not limited to the description of the above embodiment, and the structure, material, arrangement of each member, and the like can be changed as appropriate without departing from the gist of the present invention.
- the porous member 4 is used as a filter has been described in the above embodiment, the use of the porous member 4 is not limited to the filter.
- FIG. 3 is a photograph of the sample before the experiment according to the example
- FIG. 4 is a schematic configuration diagram of an experimental apparatus for processing the sample according to the example
- FIG. 5 is an experiment according to the example.
- 6 is a photograph of a later sample
- FIG. 6 is an AA cross-sectional photograph of FIG. 5
- FIG. 7 is an enlarged micrograph of part B of FIG. 6
- FIG. 8 is an enlarged microscope of part C of FIG.
- FIG. 9 is a photomicrograph in which the portion D in FIG. 6 is enlarged.
- the experimental apparatus 10 shown in FIG. 4 was used for the experiment.
- the experimental apparatus 10 mainly includes a chamber 11 for processing the sample S, an ozone generator 12 for generating ozone, a water vapor generator 13 for generating water vapor, an ozone generator 12 and a water vapor generator 13.
- the carbon fiber of the sample can be removed by ozone and water vapor.
- the removal of carbon fiber depends on the time of exposure to ozone and water vapor, so if the time of exposure to ozone and water vapor is longer than the time of exposure in this example, the size used in this example. It is considered that all the carbon fibers remaining inside the sample can be removed even if it is the same.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Filtering Materials (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
- Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
Abstract
Description
まず、PFAに炭素繊維を含有させた試料を用意した。通常、PFAは半透明であるが、PFA全体に炭素繊維が含有されているため、試料は図3に示されるように黒色となっていた。この試料を個片化して実験に使用した。
実験には、図4に示される実験装置10を使用した。実験装置10は、主に、試料Sを処理するためのチャンバー11、オゾンを発生させるためのオゾン発生器12、水蒸気を発生させるための水蒸気発生器13、オゾン発生器12および水蒸気発生器13で発生したオゾンおよび蒸気の流量を調節するためのバルブ14、チャンバー11内の圧力を調節するためのバルブ15、チャンバー11から排気されたオゾンを分解するためのオゾン分解器16、および排気系17等から構成されている。
チャンバー11内に試料Sを入れて、温度105℃、圧力75KPaに維持した。また、オゾン発生器12でオゾンを発生させるとともに水蒸気発生器13で水蒸気を発生させ、オゾン9%volおよび水蒸気4.5cc/minとなるようにバルブ14で調節して、これらをチャンバー11に供給した。なお、オゾンおよび水蒸気を供給した時間は30時間であった。
図5および図6に示されるように試料の表面部は、白濁色となっていた。これは、試料の表面部の炭素繊維が除去されたためであると考えられる。一方、図5に示されるように試料の内部は、黒色のままであった。これは、試料の内部の炭素繊維が残存しているためであると考えられる。
Claims (9)
- 炭素繊維を含有するフッ素樹脂によって形成された、所定形状を有する部材を用意し、
前記部材を、酸化性ガスに曝して、前記部材に含まれる前記炭素繊維を除去することにより形成されたことを特徴とする、多孔質部材。 - 前記炭素繊維が前記部材から実質的に除去されている、請求項1に記載の多孔質部材。
- 前記フッ素樹脂がテトラフルオロエチレン・パーフルオロアルキルビニルエーテル共重合体またはポリテトラフルオロエチレンである、請求項1に記載の多孔質部材。
- 炭素材料を含有するフッ素樹脂によって形成された、所定形状を有する部材を用意し、
前記部材を、酸化性ガスに曝して、前記部材に含まれる前記炭素繊維を除去することを特徴とする、多孔質部材の製造方法。 - 前記炭素繊維を前記部材から実質的に除去する、請求項4に記載の多孔質部材の製造方法。
- 前記フッ素樹脂がテトラフルオロエチレン・パーフルオロアルキルビニルエーテル共重合体またはポリテトラフルオロエチレンである、請求項4に記載の多孔質部材の製造方法。
- 前記酸化性ガスがオゾンを含んでいる、請求項4に記載の多孔質部材の製造方法。
- 前記酸化性ガスが水蒸気を含んでいる、請求項7に記載の多孔質部材の製造方法。
- 請求項1に記載の多孔質部材からなることを特徴とする、フィルタ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/677,182 US8409482B2 (en) | 2008-03-04 | 2009-02-23 | Porous member |
JP2010501853A JP5198553B2 (ja) | 2008-03-04 | 2009-02-23 | 多孔質部材 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008-053530 | 2008-03-04 | ||
JP2008053530 | 2008-03-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009110342A1 true WO2009110342A1 (ja) | 2009-09-11 |
Family
ID=41055903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2009/053189 WO2009110342A1 (ja) | 2008-03-04 | 2009-02-23 | 多孔質部材 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8409482B2 (ja) |
JP (1) | JP5198553B2 (ja) |
TW (1) | TWI391437B (ja) |
WO (1) | WO2009110342A1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61291634A (ja) * | 1985-06-18 | 1986-12-22 | Japan Synthetic Rubber Co Ltd | ポリフツ化ビニリデンの成形物 |
JPS6320339A (ja) * | 1986-07-14 | 1988-01-28 | Mitsubishi Rayon Co Ltd | 多孔質膜の製造方法 |
JPH02160924A (ja) * | 1988-12-08 | 1990-06-20 | Mitsubishi Rayon Co Ltd | 多孔質炭素繊維及びその製造法 |
JPH04279639A (ja) * | 1991-03-06 | 1992-10-05 | Nitto Denko Corp | 多孔質体 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0183103B1 (en) * | 1984-11-09 | 1988-08-03 | TERUMO KABUSHIKI KAISHA trading as TERUMO CORPORATION | Flat permeable membrane and method for manufacture thereof |
WO1989000879A1 (en) * | 1987-07-30 | 1989-02-09 | Toray Industries, Inc. | Porous polymetrafluoroethylene membrane, separating apparatus using same, and process for their production |
US5700375A (en) * | 1996-04-29 | 1997-12-23 | Minnesota Mining And Manufacturing Company | Particle loaded membranes as oxidant scavengers |
JP2003041083A (ja) | 2001-07-25 | 2003-02-13 | Du Pont Mitsui Fluorochem Co Ltd | 変性ポリテトラフルオロエチレン組成物 |
EP1531925B1 (en) * | 2002-07-11 | 2013-10-23 | Pall Corporation | Uv treated ptfe membranes |
KR20050032603A (ko) * | 2002-08-14 | 2005-04-07 | 폴 코포레이션 | 불소중합체 막 |
JP3795027B2 (ja) * | 2003-04-02 | 2006-07-12 | 宇明泰化工股▲ふん▼有限公司 | フィルター用非対称性多孔質ポリテトラフルオロエチレン膜 |
JP4540038B2 (ja) * | 2004-01-26 | 2010-09-08 | 株式会社潤工社 | 発泡樹脂組成物、それを用いた発泡体および同軸絶縁ケーブル |
JP4650885B2 (ja) * | 2004-09-07 | 2011-03-16 | 株式会社神戸製鋼所 | 多孔質膜の形成方法及びその方法によって形成された多孔質膜 |
JP4545682B2 (ja) | 2005-12-05 | 2010-09-15 | 株式会社潤工社 | 弗素樹脂積層基板 |
JPWO2007097249A1 (ja) | 2006-02-20 | 2009-07-09 | ダイセル化学工業株式会社 | 多孔性フィルム及び多孔性フィルムを用いた積層体 |
US20080203012A1 (en) * | 2007-02-22 | 2008-08-28 | General Electric Company | Membrane, apparatus, and associated method |
-
2009
- 2009-02-23 WO PCT/JP2009/053189 patent/WO2009110342A1/ja active Application Filing
- 2009-02-23 US US12/677,182 patent/US8409482B2/en active Active
- 2009-02-23 JP JP2010501853A patent/JP5198553B2/ja not_active Expired - Fee Related
- 2009-03-02 TW TW098106687A patent/TWI391437B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61291634A (ja) * | 1985-06-18 | 1986-12-22 | Japan Synthetic Rubber Co Ltd | ポリフツ化ビニリデンの成形物 |
JPS6320339A (ja) * | 1986-07-14 | 1988-01-28 | Mitsubishi Rayon Co Ltd | 多孔質膜の製造方法 |
JPH02160924A (ja) * | 1988-12-08 | 1990-06-20 | Mitsubishi Rayon Co Ltd | 多孔質炭素繊維及びその製造法 |
JPH04279639A (ja) * | 1991-03-06 | 1992-10-05 | Nitto Denko Corp | 多孔質体 |
Also Published As
Publication number | Publication date |
---|---|
TW200946586A (en) | 2009-11-16 |
US20110011793A1 (en) | 2011-01-20 |
JPWO2009110342A1 (ja) | 2011-07-14 |
US8409482B2 (en) | 2013-04-02 |
JP5198553B2 (ja) | 2013-05-15 |
TWI391437B (zh) | 2013-04-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Mosadegh-Sedghi et al. | Wetting phenomenon in membrane contactors–causes and prevention | |
JP5898800B2 (ja) | 防水通気フィルタおよびその製造方法 | |
TWI712448B (zh) | 膜蒸餾用多孔質膜及膜蒸餾用模組之運轉方法 | |
CN1265868C (zh) | 多层微孔膜 | |
WO2013046975A1 (ja) | ガス分離膜、その製造方法、それを用いたガス分離膜モジュール | |
JP4939124B2 (ja) | フッ素樹脂多孔質膜 | |
KR20090008315A (ko) | 대기압 마이크로파 플라즈마 처리된 다공성 막 | |
JP2010222542A (ja) | 触媒粒子を担持した延伸ポリテトラフルオロエチレン多孔質膜またはテープの製造方法およびオゾン除去用フィルタ | |
EP3088451B1 (en) | Plasma assisted hydrophilicity enhancement of polymer materials | |
JP2011526882A (ja) | ガス状化合物の混合物からガス状成分を回収するガス状成分回収方法 | |
JPH02127516A (ja) | 微孔質重合体中空繊維の内部破裂圧、通気性および透水性を増大する方法 | |
TW201922883A (zh) | 氟系樹脂多孔膜及其製造方法 | |
JP5198553B2 (ja) | 多孔質部材 | |
JP2005220202A (ja) | 多孔質膜の製造方法及び多孔質膜 | |
KR102187975B1 (ko) | 기체 분리막의 제조방법 및 이에 따라 제조되는 기체 분리막 | |
JP5254309B2 (ja) | 表面清浄性を有する機能性部材 | |
JP2000288367A (ja) | 疎水性多孔質膜の製造法 | |
JP3340444B2 (ja) | 脱気モジュールの製造方法 | |
Khongnakorn et al. | Surface modification of CTA-FO membrane by CO2 plasma treatment | |
KR101391650B1 (ko) | 수처리용 중공사 복합막의 제조방법 및 그로부터 제조되는 수처리용 중공사 복합막 | |
JP2010242005A (ja) | ポリテトラフルオロエチレン多孔質シートの製造方法 | |
JP2017074580A (ja) | 半透膜及び半透膜の製造方法 | |
JP5348517B2 (ja) | 分離膜エレメントおよびその製造方法 | |
RU2418621C1 (ru) | Способ изготовления наномембранных фильтров | |
JPH0411932A (ja) | 複合膜の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 09717834 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2010501853 Country of ref document: JP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 12677182 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 09717834 Country of ref document: EP Kind code of ref document: A1 |