WO2009104383A1 - 液体材料の塗布方法、その装置およびそのプログラム - Google Patents
液体材料の塗布方法、その装置およびそのプログラム Download PDFInfo
- Publication number
- WO2009104383A1 WO2009104383A1 PCT/JP2009/000649 JP2009000649W WO2009104383A1 WO 2009104383 A1 WO2009104383 A1 WO 2009104383A1 JP 2009000649 W JP2009000649 W JP 2009000649W WO 2009104383 A1 WO2009104383 A1 WO 2009104383A1
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- Prior art keywords
- amount
- liquid material
- discharge
- correction
- coating method
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/004—Arrangements for controlling delivery; Arrangements for controlling the spray area comprising sensors for monitoring the delivery, e.g. by displaying the sensed value or generating an alarm
- B05B12/006—Pressure or flow rate sensors
- B05B12/008—Pressure or flow rate sensors integrated in or attached to a discharge apparatus, e.g. a spray gun
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/08—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape of pulsating nature, e.g. delivering liquid in successive separate quantities ; Fluidic oscillators
- B05B1/083—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape of pulsating nature, e.g. delivering liquid in successive separate quantities ; Fluidic oscillators the pulsating mechanism comprising movable parts
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Definitions
- the present invention relates to a method, an apparatus, and a program for applying a liquid material of a specified amount to a workpiece, and for example, can correct the discharge amount of a liquid material in a semiconductor packaging underfill process without calculating complicated parameters.
- the present invention relates to a method, an apparatus, and a program.
- a resin 104 which is a liquid material, is filled between the semiconductor chip 101 and the substrate 102 using a capillary phenomenon (see FIG. 1). Therefore, when the viscosity of the resin material increases with the passage of time, the discharge amount from the material discharge port decreases, the capillary phenomenon becomes insufficient, and there is a problem that an appropriate amount of material is not filled in the gap. .
- those having a large viscosity change may be reduced by 10% or more in discharge amount after 6 hours.
- Patent Document 2 is a method of discharging a viscous material onto a substrate using a jet dispenser, and prepares a total volume of the viscous material to be discharged and a length for discharging the total volume of the viscous material.
- Operating the weight scale to apply a plurality of viscous material droplets generating a feedback signal representing the weight of the plurality of viscous material droplets applied to the weight scale, the total volume of viscous material being length Determining a maximum relative velocity between the dispenser and the substrate to be dispensed over.
- the respective volumes of a plurality of viscous material droplets are determined, the total number of droplets required to be approximately equal to the total volume is determined, and the viscous material droplets are distributed over a length. Determine the distance between each drop required to distribute almost uniformly, and the maximum relative velocity between the dispenser and the substrate so that the total number of viscous material drops are dispensed almost uniformly over the length Is further disclosed.
- the liquid dispensing apparatus described in Patent Document 1 is a discharge system in which the liquid material comes into contact with the work before being separated from the discharge part
- the discharge method in which the liquid material is in contact with the work after being separated from the discharge part.
- the liquid material is separated from the discharge portion by moving the discharge portion upward or by continuing the relative movement of the discharge portion slightly longer than the coating length. For this reason, the liquid material pulls the yarn between the discharge unit and the workpiece, and when the yarn breaks, the discharge unit side liquid material is attracted to the workpiece and the discharge amount becomes excessive.
- the coating amount varies, for example, the amount of the ink is attracted to the discharge unit and the discharge amount is insufficient.
- Patent Document 2 requires a procedure for obtaining the number of droplets and the interval between each droplet in order to discharge uniformly over the length.
- various parameters are obtained by calculation. Therefore, many errors occur during the calculation.
- it is necessary to align the size of each droplet and special means are required for this purpose.
- the change in the maximum relative speed between the nozzle (discharge unit) and the substrate is a change in a direction in which the speed becomes slower when the viscosity increases. When the speed is slow, the coating time becomes long, and there is a problem that the productivity is affected.
- the present invention provides a liquid material application method, an apparatus therefor, and a program therefor, which solve the above-described problems, do not require calculation of complicated parameters, and do not affect the moving speed of the discharge unit. Objective.
- the inventor tried to easily correct the discharge amount by discharging the liquid material in a pulse shape and changing the frequency of the pulse signal.
- the discharge amount could not be corrected appropriately.
- the frequency of moving the piston (plunger) up and down is slowed or fastened, the liquid material will not leave the tip of the nozzle, or it will separate into two or more drops. was there.
- the inventor has found that there is an optimum pulse signal frequency range for separating one droplet from the nozzle tip for each liquid material, and has made the present invention.
- a coating method in which a desired coating pattern is created, a liquid material is ejected from the nozzle while the nozzle and the workpiece are moved relative to each other, and a prescribed amount of liquid material is coated on the workpiece.
- the initial parameter that defines the number of signal and pause pulse signal transmissions as the total number of pulses, the number of ejection pulse signals necessary to achieve the coating amount of the total number of pulses, and the rest as the pause pulse signal Based on the correction amount calculated in the setting step, the correction amount calculation step of measuring the discharge amount from the nozzle at the time of the correction cycle and calculating the correction amount of the discharge amount, and the correction amount calculated in the correction amount calculation step
- An application method comprising: an ejection amount correction step of adjusting the number of ejection pulse signals and the number of pause pulse signals.
- the discharge amount correction step corrects the discharge amount without changing the frequency at which the discharge pulse signal and the pause pulse signal are transmitted.
- the frequency is several tens of hertz to several hundreds of hertz.
- the correction amount calculating step includes a difference value between a value obtained by measuring the weight of the liquid material discharged in a certain time and a theoretical value in the certain time. Based on the above, the correction amount of the discharge amount is calculated.
- the correction amount calculating step includes a value obtained by measuring an area and / or height of the liquid material discharged in a certain time, and a theory in the certain time. The correction amount of the discharge amount is calculated based on a difference value from the value.
- the correction amount calculating step includes a value obtained by measuring a fillet width of a liquid material formed on a workpiece end applied based on the application pattern; The correction amount of the discharge amount is calculated based on a difference value from the theoretical value in the application pattern.
- an allowable range for determining whether to perform correction in a step before the correction amount calculation step is set, and the correction amount calculation step A discharge amount correction amount is calculated when the allowable range is exceeded.
- the eighth invention is characterized in that, in any one of the first to seventh inventions, the application is performed by a discharge method in which the liquid material comes into contact with the work after being separated from the nozzle.
- a ninth invention is characterized in that, in the eighth invention, the coating is performed by filling a gap between a substrate and a workpiece placed thereon with a liquid material having a coating amount defined by utilizing a capillary phenomenon.
- the ejection amount correction step reduces the number of ejection pulse signals with respect to the number of pause pulse signals when increasing the pause pulse signal.
- the correction cycle is set based on time information, a number of workpieces, or a number of substrates input as a correction cycle by a user.
- the discharge amount correction step corrects the discharge amount without changing the application length of the application pattern and the speed of relative movement between the nozzle and the workpiece. It is characterized by performing.
- a thirteenth invention measures a liquid material supply unit that supplies a liquid material, a discharge unit that has a discharge port that discharges the liquid material supplied from the liquid material supply unit, and an amount of the liquid material discharged from the discharge port
- An applicator comprising a weighing unit, a drive unit that moves the discharge port and the workpiece relative to each other, and a control unit that controls the operation thereof, wherein the control unit is the one according to any one of the first to twelfth aspects.
- An apparatus having a program for performing the coating method.
- a fourteenth aspect of the present invention is a liquid material supply unit that supplies a liquid material, a discharge unit that has a discharge port that discharges the liquid material, a measuring unit that measures the amount of liquid material discharged from the discharge port, and a discharge port.
- the coating apparatus provided with the drive part which moves a workpiece
- a coating pattern can be freely created without being restricted by uniform coating over the entire length of the coating pattern. Further, the procedure is simpler than the case where correction is performed on each droplet, and errors due to calculation are less likely to occur. Moreover, since the moving speed of the discharge device is not changed, the application time is not affected.
- the discharge amount can be corrected without changing the coating length and the frequency of the pulse signal, the correction does not affect the coating quality on the workpiece.
- FIG. 6 is a diagram illustrating a measuring unit according to a second embodiment. 6 is a diagram illustrating a measuring unit according to a third embodiment. 10 is a diagram illustrating a measuring unit according to a fourth embodiment.
- [1] a coating pattern is created, [2] initial parameters (the number of ejection pulses and the number of pause pulses) in the coating pattern are set, and [3] as time elapses, etc.
- the period for correcting the changed discharge amount is set, and the coating operation is started.
- the correction amount is calculated at the correction cycle set in [3], and [5] it is determined whether the discharge amount needs to be corrected, and the discharge amount is corrected as necessary.
- a coating pattern is created in consideration of the coating amount and coating length determined by the workpiece shape.
- “application amount” is the amount of liquid material required for the application pattern
- “application length” means the total length of relative movement between the nozzle and the workpiece.
- the coating pattern includes one or more ejection pulses 601 and zero or more pause pulses 602.
- a pulse signal composed of the ejection pulse 601 and the pause pulse 602 is transmitted at a predetermined frequency. In principle, the frequency and the number of shots / second are the same. The frequency is preferably several tens of hertz or more, and more preferably several hundreds of hertz.
- the application region 141 corresponds to the ejection pulse 601.
- the ejection amount in the application region 141 is controlled by setting the ejection pulse 601, and thereby the length of the application region 141 is expanded and contracted. Further, by setting the pause pulse 602, the non-application region 142 expands and contracts.
- it is not limited to what follows the one side of the chip
- the workpiece is not limited to a rectangular shape, and may be a circle or a polygon.
- the total length of the coating pattern and the number of coating areas 141 and non-coating areas 142 are determined from the weight or volume of the liquid material 5 required for the desired coating pattern.
- the application region 141 is not limited to a linear shape but may be a dot shape. For example, when the chip 101 is small in the underfill process or when it is desired to increase the yield (when reducing defects due to bubble entrainment), near the center of the side. May be discharged at a single point, or the nozzle may be stopped at a single point and discharged for a fixed time.
- a setting table 301 that prescribes combinations of the number of ejection pulses 601 and the number of pause pulses 602 is stored in the controller in advance.
- Table 1 is an example of the setting table 301 stored in the control unit.
- setting example A shows a setting example of the discharge amount when the total number of pulses is 100
- setting example B shows a setting example of the discharge amount when the total number of pulses is 111
- setting example C shows the total number of pulses.
- An example of setting the discharge amount when the number is 125 is shown.
- the number of ejection pulses corresponds to the ejection amount, and the ejection amount can be adjusted by increasing or decreasing the number of pause pulses in the total number of pulses.
- Setting example A prescribes a setting example for changing the discharge amount based on a combination in which no pause pulse is set for one ejection pulse (zero pause pulse) when the number of ejection pulses is 100.
- Setting example B is a setting example for changing the discharge amount based on the combination of setting one pause pulse (11 pause pulses) for nine discharge pulses when the number of discharge pulses is 100. Is stipulated.
- Setting example C is a setting example for changing the discharge amount based on a combination of setting one pause pulse (25 pause pulses) for four discharge pulses when the number of discharge pulses is 100.
- Table 1 shows an example of a combination in which the number of pause pulses set in one step is set to one, but by increasing the number of pause pulses set in one step to two or three times, Needless to say, the discharge amount can be controlled with fine resolution.
- the initial parameters When increasing the number of pause pulses, or when increasing or decreasing the number of pause pulses in the discharge amount correction described later, it is preferable to set the initial parameters so that the timing of the pause pulses is equally spaced.
- the number of pause pulses when the number of pause pulses is increased to two or three times, the number of ejection pulses relative to the number of pause pulses is reduced rather than increasing the gap (non-coating region) by continuing the number of pause pulses. Therefore, it is preferable to reduce the gap (non-application region) from the viewpoint of preventing entrainment of bubbles.
- a correction cycle which is a cycle for correcting the discharge amount is set.
- the correction cycle for example, time information input by the user, the number of chips 101 or the number of substrates 102, and the like are set.
- the predetermined time the time when the change in the discharge amount of the liquid material 104 is expected to exceed the allowable range from the start of the work is set.
- the number of processed sheets is obtained and set from the time for processing one chip or the time for processing one substrate (loading ⁇ application ⁇ unloading time) and the predetermined time.
- the nozzle is moved above the weighing scale, and the liquid material 104 is discharged at a fixed position. Discharge to the weighing scale is continuously performed for the calculated appropriate discharge time.
- the appropriate discharge time is calculated from the appropriate discharge amount obtained by discharging the initial setting parameters including the discharge pulse 601 and the pause pulse 602 at the appropriate application speed with respect to the appropriate application length.
- the steps [4] and [5] are executed in the correction cycle set in [3] or when the type (size or shape) of the substrate is changed. Regardless of the change in viscosity of the liquid material over time, it is possible to always achieve the best coating amount.
- a coating apparatus 401 is, for example, a coating apparatus used in an underfill process.
- a discharge apparatus 501 As illustrated in FIG. 3, a discharge apparatus 501, an XY drive mechanism 402, a weighing scale 403 serving as a weighing unit, and a conveyance unit A mechanism 404 and a control unit 502 (not shown in FIG. 3) for controlling these operations are provided.
- the discharge device 501 is a jet type and has a nozzle 506 for discharging the liquid material 104.
- the discharge device 501 is attached to the XY drive mechanism 402 and can move onto the substrate 102 and the weight scale 403.
- the XY drive mechanism 402 can apply the liquid material 104 in a desired pattern while moving in the XY direction above the substrate 102.
- the flip chip mounting substrate 102 that is the object to be applied is transferred to the bottom of the discharge device 501 by the transfer mechanism 404.
- Application by the discharge device 501 is started after the substrate 102 is conveyed to below the nozzle 506 and the substrate 102 is positioned.
- the locus of the application operation of the nozzle 506, that is, the basic application pattern is stored in advance in a memory or the like in the control unit 502.
- the substrate 102 When coating is completed, the substrate 102 is carried out of the coating apparatus 401 by the transport mechanism 404. Subsequently, the next substrate 102 is carried in, and the coating operation is repeated. Thus, carrying-in, coating, and unloading become one process, and the coating operation is repeated until coating on a desired number of substrates is completed.
- the discharge amount is corrected at a preset correction cycle timing. That is, the ejection amount changed due to the change in the viscosity of the liquid material 104 is corrected.
- the correction amount is calculated by moving the nozzle 506 onto the weighing scale 403 by the XY drive mechanism 402 and measuring the weight of the liquid material 104 by the weighing scale 403. Details of the correction procedure will be described later.
- the discharge device 501 includes a piston 504 provided so as to freely move up and down, a storage container 505 that is pressurized by compressed gas adjusted through a compressed gas supply line 507, and a storage container 505.
- the liquid material 104 filled in the storage container 505 is formed into droplets from the nozzle 506 by moving the piston 504 up and down according to the pulse signals (601, 602) transmitted from the control unit 502 through the pulse signal supply line 503. Discharged.
- the liquid material 104 discharged from the nozzle 506 is applied to the substrate 102, the weight scale 403, and the like positioned under the nozzle 506 in a dot shape.
- the storage container 505 is pressurized by the regulated compressed gas supplied from the control unit 502 through the compressed gas supply line 507.
- the discharge device 501 reciprocates the piston 504 once in response to one pulse signal 601, and discharges a drop of the liquid material 104 from the nozzle 506. That is, one cycle corresponds to one shot.
- the pulse signals (601, 602) are given, for example, as shown in FIG. 5, and when the pulse signal is in the on state (601), the piston is raised to open the nozzle opening, and then the pulse signal is turned off. Sometimes the piston is lowered to close the nozzle opening. Then, ascending the piston (opening the nozzle opening) and lowering the piston (closing the nozzle opening) is one cycle, and one drop of liquid material is discharged in one cycle.
- the pulse signal is in the off state (602)
- the piston is not operated and the nozzle port is closed for one cycle.
- the on-state time (rise time) and the off-state time (fall time) in one cycle may be adjusted.
- the control unit 502 transmits a pulse signal (601, 602) at a preset frequency to the discharge device 501 while moving the nozzle 506 simultaneously with the start of application.
- the liquid material 104 is discharged.
- the liquid material 104 discharged along the work side is filled in the gap between the work 101 and the substrate 102 by capillary action.
- the frequency of the pulse signal transmitted to the discharge device 501 is set based on the mechanical response characteristics of the discharge device 501 and the characteristics of the liquid material 104.
- the optimum frequency varies depending on the discharge amount, but is often used at, for example, about 100 to 200 hertz.
- the discharge amount and the like change.
- the change characteristic of the discharge amount with respect to the change of the frequency is not linear, and depending on the conditions, it may be impossible to inject. Therefore, when correcting the discharge amount during the application work with the same application pattern, it is preferable not to change the frequency once set. That is, in this embodiment, the ejection amount is corrected by adjusting the ratio between the ejection pulse 601 and the pause pulse 602, but the ejection amount is not corrected by changing the frequency of the pulse signal. To do.
- FIG. 6 shows a flowchart for explaining the correction procedure of this embodiment.
- discharge is performed by transmitting a plurality of pulses including a discharge pulse 601 and a pause pulse 602 for an appropriate discharge time determined from an appropriate application length and an appropriate application speed (STEP 11).
- STEP 12 to measure the weight G 1 of the liquid material 104 discharged (STEP 12).
- the appropriate weight G 0 is compared with the measured weight G 1 (STEP 13), and whether or not the correction is made is determined based on whether or not the weight difference exceeds the allowable range (STEP 14).
- the numbers of 601 and pause pulses 602 are reset (STEP 18).
- the allowable range may be set by a rate of change instead of a weight difference, and the presence or absence of correction may be determined. In this case, STEP14 is not performed, and determination is performed between STEP15 and STEP16.
- adjustment can be performed without considering the properties of the liquid material and the like by storing the adjustment ratio (setting table) defined by the previous calculation. Further, by not changing the coating length at the time of correction, it is possible to keep the shape (width, etc.) of the fillet in a stable state.
- the weighing unit is configured by the weighing scale 403 and measures the weight of the liquid material 104.
- different modes are used to measure the amount of the liquid material 104.
- the measuring section is used.
- the liquid material 104 is discharged from a discharge device 501 to an appropriate surface such as the substrate 102 for a certain period of time to form a surface of the liquid material.
- the image is taken from above by an imaging device 801 such as a CCD camera, and the area of the liquid material is measured from the image.
- the rate of change R is calculated based on the measured area, the initial discharge amount of the initial parameter setting, and the theoretical value (appropriate discharge amount) of the discharge amount for a certain period of time, and the correction value of the discharge amount is calculated.
- the imaging device 801 may be provided integrally with the ejection device 501 or may be provided in the XY drive mechanism 402 independently of the ejection device 501.
- the coating apparatus according to the present embodiment is different from the coating apparatus according to the second embodiment in that the discharge amount in a predetermined time is not measured by the area but is measured by the volume. That is, in the coating apparatus of this embodiment, as shown in FIG. 8, the height of a small droplet of the liquid material 104 applied to a suitable surface such as the substrate 102 is measured using a laser displacement meter 901. The volume of the liquid material is measured in combination with the area obtained by using the imaging device 801 described above. The rate of change R is calculated based on the measured volume, the initial discharge amount of the initial parameter setting, and the theoretical value (appropriate discharge amount) of the discharge amount in the predetermined time, and the correction value of the discharge amount is calculated. Similar to the second embodiment.
- the weight may be calculated in consideration of the density of the liquid material 104, and correction may be performed using this as a measurement amount.
- the laser displacement meter 901 may be provided integrally with the ejection device 501 or may be provided in the XY drive mechanism 402 independently of the ejection device 501.
- the coating apparatus according to the present embodiment is the same as the coating apparatus according to the second and third embodiments in that the imaging apparatus 801 is provided, but is different in that a correction amount is calculated based on the width W1 and / or W2 of the fillet 1001. That is, the coating apparatus according to the present embodiment is corrected based on the assumption that the fillet 1001 width, which is the amount of protrusion of the liquid material 104 from the workpiece 101, is within a certain range during actual production in the underfill process. The method is adopted. As shown in FIG.
- the width W1 and / or W2 of the fillet 1001 is measured by photographing the workpiece 101 after application with an imaging device 801 and measuring the amount of protrusion of the liquid material 104 from the workpiece 101 from the image. To do so.
- the width W1 and / or W2 is measured from the measured image of the fillet 1001, the discharge amount at the time is calculated, and the rate of change R is calculated based on the measured discharge amount and the initial discharge amount (theoretical value) of the initial parameter setting. Then, a correction value for the discharge amount is calculated.
- the present invention can be implemented in various apparatuses for discharging a liquid material.
- the present invention moves a jet type or plunger type plunger that causes a valve body to collide with a valve seat to fly and discharge the liquid material from the nozzle tip, then stops suddenly, and also performs the flight discharge from the nozzle tip.
- It can be implemented in a device such as a plunger jet type, a continuous jet type, or a demand type inkjet type.
- the present invention can be implemented in various coating apparatuses that apply a prescribed amount of liquid material.
- the present invention can be implemented in, for example, a seal coating device, a liquid crystal dropping device, and a solder paste coating device for a printed circuit board in a liquid crystal panel manufacturing process.
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Abstract
Description
そこで、出願人は、先端にノズルを有するシリンジ内の液体材料に調圧されたエアを所望時間だけ印加するエア式の吐出装置において、吐出時間の調整によって吐出量の制御を行う液体定量吐出装置を提言した(特許文献1)。
また、より正確に均一化を図るためには、一つ一つの液滴の大きさを揃える必要があり、このために特別の手段が必要である。
また、ノズル(吐出部)と基板との間の最大相対速度の変更は、粘度が大きくなる場合、速度は遅くなる方向への変化となる。速度が遅くなると塗布時間が長くなり、生産性に影響を及ぼすという課題がある。
第2の発明は、第1の発明において、前記吐出量補正工程は、前記吐出パルス信号および前記休止パルス信号を発信する周波数を変えることなく吐出量の補正を行うことを特徴とする。
第3の発明は、第2の発明において、前記周波数が数十ヘルツ~数百ヘルツであることを特徴とする。
第4の発明は、第1ないし3のいずれかの発明において、前記補正量算出工程は、一定時間に吐出した液体材料の重量を計測した値と、当該一定の時間における理論値との差分値に基づき吐出量の補正量を算出することを特徴とする。
第5の発明は、第1ないし3のいずれかの発明において、前記補正量算出工程は、一定時間に吐出した液体材料の面積および/または高さを計測した値と、当該一定の時間における理論値との差分値に基づき吐出量の補正量を算出することを特徴とする。
第6の発明は、第1ないし3のいずれかの発明において、前記補正量算出工程は、前記塗布パターンに基づく塗布がなされたワーク端に形成される液体材料のフィレット幅を計測した値と、当該塗布パターンにおける理論値との差分値に基づき吐出量の補正量を算出することを特徴とする。
第7の発明は、第4ないし6のいずれかの発明において、前記補正量算出工程以前の工程において補正を行うかを判断する許容範囲を設定し、前記補正量算出工程は、前記差分値が前記許容範囲を越える場合に、吐出量の補正量を算出することを特徴とする。
第8の発明は、第1ないし7のいずれかの発明において、前記塗布は、液体材料がノズルから離間した後にワークに接触する吐出方式により行われることを特徴とする。
第9の発明は、第8の発明において、前記塗布は、基板とその上に載置されたワークとの間隙に毛細管現象を利用して規定した塗布量の液体材料を充填することを特徴とする。
第10の発明は、第9の発明において、前記吐出量補正工程は、休止パルス信号を増加させる際に、休止パルス信号の数に対する吐出パルス信号の数を減らすことを特徴とする。
第11の発明は、第1ないし10のいずれかの発明において、前記補正周期は、ユーザーが補正周期として入力した時間情報、ワークの枚数、または基板の枚数に基づき設定されることを特徴とする。
第12の発明は、第1ないし11のいずれかの発明において、前記吐出量補正工程は、前記塗布パターンの塗布長さ、およびノズルとワークの相対移動の速度を変えることなく吐出量の補正を行うことを特徴とする。
第13の発明は、液体材料を供給する液材供給部と、液材供給部から供給された液体材料を吐出する吐出口を有する吐出部と、吐出口より吐出された液体材料の量を計量する計量部と、吐出口とワークとを相対移動させる駆動部と、これらの作動を制御する制御部とを備える塗布装置において、制御部が、第1ないし12のいずれか一項に係る発明の塗布方法を実施するプログラムを有することを特徴とする装置である。
第14の発明は、液体材料を供給する液材供給部と、液体材料を吐出する吐出口を有する吐出部と、吐出口より吐出された液体材料の量を計量する計量部と、吐出口とワークとを相対移動させる駆動部と、これらの作動を制御する制御部とを備える塗布装置において、制御部に第1ないし12のいずれか一項に係る発明の塗布方法を実施させるプログラムである。
また、一つ一つの液滴に対して補正を行う場合に比べて手順が簡便であり、計算による誤差を生じにくい。
また、吐出装置の移動速度を変更しないため、塗布時間に影響を及ぼさない。
101 チップ、ワーク\102 基板\103 接続部\104 樹脂、液体材料\141 塗布領域\142 非塗布領域\301 設定表\401 塗布装置\402 XY駆動機構\403 重量計\404 搬送機構\501 吐出装置\502 制御部\503 パルス信号供給ライン\504 ピストン\505 貯留容器\506 ノズル\507 圧縮気体供給ライン\601 吐出パルス\602 休止パルス\801 撮像装置\901 レーザー変位計\1001 フィレット\S 面積\H 高さ\W1、W2 幅
ワーク形状により決まる塗布量や塗布長さなどを考慮して塗布パターンを作成する。ここで、「塗布量」とは塗布パターンで必要とされる液体材料の量であり、「塗布長さ」とはノズルとワークとの相対移動量の総長を意味する。
塗布パターンは、一回以上の吐出パルス601と、0回以上の休止パルス602とから構成される。吐出パルス601および休止パルス602からなるパルス信号は、所定の周波数で発信される。周波数とショット数/秒は原則一致する。周波数は数十ヘルツ以上とするのが好ましく、より好ましくは、数百ヘルツとする。
図2を参照しながら、方形状のワークであるチップ101の一辺に沿った線上へ塗布するパターンの作成について説明する。図2中、塗布領域141が吐出パルス601に対応する。塗布領域141における吐出量は、吐出パルス601を設定することにより制御され、これにより塗布領域141の長さが伸縮する。また、休止パルス602を設定することにより、非塗布領域142が伸縮する。
なお、チップ101の一辺に沿うものに限定されず、二辺、三辺あるいは全周に沿うものであってもよい。また、ワークは方形上のものに限定されず、円形や多角形であってもよい。
初期パラメータとして、吐出パルス601の数および休止パルス602の数を設定する。制御部には予め吐出パルス601の数と休止パルス602の数の組み合わせを規定した設定表301が記憶されている。
表1は、制御部に記憶された設定表301の一例である。表1中、設定例Aは総パルス数が100の場合における吐出量の設定例を示し、設定例Bは総パルス数が111の場合における吐出量の設定例を示し、設定例Cは総パルス数が125の場合における吐出量の設定例を示している。設定例A、B、Cでは、吐出パルス数が吐出量に相当しており、総パルス数中の休止パルスの数を増減することで吐出量の調整が可能となる。
設定例Aは、吐出パルス数が100となる場合において、一回の吐出パルスに対し休止パルスを設定しない(0回の休止パルス)組み合わせを基準に吐出量を変化させるための設定例を規定している。
設定例Bは、吐出パルス数が100となる場合において、九回の吐出パルスに対し一回の休止パルス(11回の休止パルス)を設定する組み合わせを基準に吐出量を変化させるための設定例を規定している。
設定例Cは、吐出パルス数が100となる場合において、四回の吐出パルスに対し一回の休止パルス(25回の休止パルス)を設定する組み合わせを基準に吐出量を変化させるための設定例を規定している。
なお、表1では一つのステップにおいて設定する休止パルス数を一回とした組み合わせの例を示しているが、一つのステップにおいて設定する休止パルス数を二回、三回と増加させることで、より細かい分解能で吐出量を制御できることは言うまでもない。
なお、アンダーフィル工程においては、休止パルス数を二回、三回と増加させるときには、休止パルス数を連続させて隙間(非塗布領域)を大きくするよりも、休止パルス数に対する吐出パルス数を減らして隙間(非塗布領域)を小さくする方が、気泡の巻き込みを防止する観点からは好ましい。
吐出量を補正する周期である補正周期を設定する。補正周期としては、例えば、ユーザーが入力した時間情報、チップ101ないしは基板102の枚数などを設定する。所定の時間を設定する場合は、液体材料104の吐出量の変化が作業開始から許容範囲を越えると予想される時間を設定する。枚数を設定する場合は、一枚のチップを処理する時間ないしは一枚の基板を処理する時間(搬入→塗布→搬出の時間)と、上記所定の時間から処理枚数を求め、設定する。
また、液体材料の使用時間の限界値として、メーカーの規定するポットライフに基づいて算出した値を予め記憶しておき、補正周期に組み込んでもよい。
なお、吐出部の温度調整により液体材料の粘度を制御する公知の技術を本発明に併用できることは言うまでもない。
設定された補正周期で、液体材料の粘度変化による吐出量の変化に対応するための補正量を算出する。
補正量の算出手法としては、(A)一定時間吐出した際の重量を測定し、適正重量との差に基づいて補正量を算出する手法、(B)適正重量となるまでに要する吐出時間を測定し、直前の吐出時間との差に基づいて補正量を算出する手法がある。本発明では、いずれの手法を適用してもよいが、以下では(A)の手法に基づき、具体的な補正量の算出手順を説明する。
続いて、重量計へ吐出された液体材料104の重量G1を読み取る。この計測重量G1と適正重量G0とから変化率R(=(G1-G0)/G0×100)を算出することで、当該補正周期における現在の吐出量Vtが分かる。変化率Rがマイナスの場合、適正吐出時間における吐出量Vtが適正重量より少ないことになるので、この変化率Rに応じた吐出量の増加分が加味された設定を、制御部の記憶する設定表301より選択して、補正後の吐出パルス601と休止パルス602との数を設定する。逆に変化率Rがプラスの場合、適正吐出時間における吐出量Vtが適正重量より多いことになるので、この変化率Rに応じた吐出量の減少分が加味された設定を、制御部の記憶する設定表301より選択して、補正後の吐出パルス601と休止パルス602との数を設定する。
上記[4]で、吐出量の補正が必要であると判定された場合には、変化率Rに応じた吐出量の増加あるいは減少分が加味された設定を、制御部の記憶する設定表301より選択し、吐出パルス601と休止パルス602との数の設定を変更することで補正を行う。
ここで、吐出量の判定は、重量差や変化率がゼロで無い場合には常に補正を行うようにするのではなく、計測した吐出量(計測値)の差分や変化率が許容範囲(例えば±5%)を越える場合にのみ補正を行うようにするのが好ましい。許容範囲を設けた補正の好ましい態様は、例えば、本出願人に係る特許第3877038号に詳しい。すなわち、補正を行うかを判断する許容範囲を設け、差分値ないしは変化率が前記許容する範囲を越える場合にのみ塗布パターンを補正する。
本実施例の塗布装置401は、例えば、アンダーフィル工程に用いられる塗布装置であり、図3に示すように、吐出装置501と、XY駆動機構402と、計量部である重量計403と、搬送機構404と、これらの動作を制御する制御部502(図3では不図示)とを備えている。
吐出装置501はジェット式であり、液体材料104を吐出するためのノズル506を有している。吐出装置501は、XY駆動機構402に取り付けられており、基板102の上および重量計403の上へ移動可能である。
XY駆動機構402は、基板102の上方でXY方向に移動しながら液体材料104を所望のパターンに塗布動作することが可能である。
吐出装置501による塗布は、基板102がノズル506の下まで運ばれ、基板102の位置決めされた後、開始される。ノズル506の塗布動作の軌跡、すなわち基本となる塗布パターンは、制御部502内のメモリ等へ予め記憶されている。
吐出装置501は、図4に示すように、上下動自在に内設されたピストン504と、圧縮気体供給ライン507を通して調圧された圧縮気体により加圧されている貯留容器505と、貯留容器505と連通するノズル506とを備えている。
貯留容器505に充填された液体材料104は、制御部502からパルス信号供給ライン503を通して発信されるパルス信号(601、602)に応じ、ピストン504を上下させることにより、ノズル506から液滴状に吐出される。ノズル506から吐出された液体材料104は、ノズル506の下に位置決めされた基板102や重量計403などへ点状に塗布される。ここで、貯留容器505は、制御部502から圧縮気体供給ライン507を通して供給される調圧された圧縮気体により加圧されている。
パルス信号(601、602)は、例えば図5に示すように与えられ、パルス信号がオン状態(601)のときにピストンを上昇させてノズル口を開放し、続いてパルス信号がオフとなったときにピストンを下降させてノズル口を閉鎖する。そして、ピストンの上昇(ノズルの口開放)とピストンの下降(ノズル口の閉鎖)を一サイクルとし、一サイクルの動作で一滴の液体材料を吐出する。他方、パルス信号がオフ状態(602)のときには、ピストンを作動させず、ノズル口が一サイクル閉鎖される。
なお、一サイクル内のオン状態の時間(上昇の時間)とオフ状態の時間(下降の時間)を調整してもよい。
周波数を変更すると吐出量などが変わるが、周波数の変更に対する吐出量の変化特性は線形ではなく、条件によっては噴射できなくなる場合もある。したがって、同一の塗布パターンでの塗布作業中に吐出量の補正を行う際には、一度設定した周波数は変更しないことが好ましい。すなわち、本実施例では、吐出パルス601および休止パルス602の割合を調整することにより吐出量の補正を行うが、パルス信号の周波数を変更することによっては吐出量の補正を行わないことを特徴とする。
図6に本実施例の補正手順を説明するフローチャートを示す。
まず、吐出パルス601と休止パルス602とを含む複数パルスを、適正塗布長さと適正塗布速度とから求まる適正吐出時間分発信した吐出を行う(STEP11)。次に、吐出された液体材料104の重量G1を計測する(STEP12)。続いて、適正重量G0と計測重量G1とを比較し(STEP13)、重量差が許容範囲を越えるか否かにより補正の有無を判定する(STEP14)。
STEP14で補正が必要と判断された場合には、適正重量G0と計測重量G1とから変化率R(=(G1-G0)/G0×100)を算出し(STEP15)、変化率Rの正負を判断する(STEP16)。
変化率Rがマイナスの場合、吐出量が適正重量より少ないことになるので、この変化率に応じた吐出量の増加分が加味された設定を制御部へ記憶させた表より選択して吐出パルス601と休止パルス602との数を再設定する(STEP17)。
変化率Rがプラスの場合、吐出量が適正重量より多いことになるので、この変化率に応じた吐出量の減少分が加味された設定を制御部へ記憶させた表より選択して吐出パルス601と休止パルス602との数を再設定する(STEP18)。
上記補正手順の変形例としては、許容範囲を重量差ではなく変化率で設定し、補正の有無を判定してもよい。この場合、STEP14を行わず、STEP15とSTEP16との間で判定を行う。
本実施例では、図7に示すように、吐出装置501から基板102などの適当な面に液体材料104を一定時間吐出し、液体材料の面を形成する。それをCCDカメラなどの撮像装置801により上方から撮影し、その画像から液体材料の面積を計測する。この計測した面積と、初期パラメータ設定当初の吐出量と、上記の一定時間における吐出量の理論値(適正吐出量)に基づき変化率Rを算出し、吐出量の補正値を算出する。
なお、上記の撮像装置801は、吐出装置501の横に一体的に設けてもよいし、吐出装置501とは独立してXY駆動機構402に設けてもよい。
なお、上記のレーザー変位計901は、吐出装置501の横に一体として設けてもよいし、吐出装置501とは独立してXY駆動機構402に設けてもよい。
フィレット1001の幅W1および/またはW2の計測は、図9に示すように、塗布後のワーク101を撮像装置801にて撮影し、その画像から液体材料104のワーク101からのはみ出し量をフィレット1001とすることにより行う。計測したフィレット1001の画像から幅W1および/またはW2を計測し、当該時点における吐出量を算出し、この計測した吐出量と初期パラメータ設定当初の吐出量(理論値)に基づき変化率Rを算出し、吐出量の補正値を算出する。
また、本発明は、規定した塗布量の液体材料を塗布する種々の塗布装置において実施可能である。本発明は、例えば、液晶パネル製造工程におけるシール塗布装置や液晶滴下装置、プリント基板への半田ペースト塗布装置などにおいて実施可能である。
Claims (14)
- 所望の塗布パターンを作成し、ノズルとワークとを相対移動しながら液体材料をノズルから吐出し、ワークに対し規定した塗布量の液体材料を塗布する塗布方法において、
吐出パルス信号および休止パルス信号を送信する回数を総パルス数として規定し、総パルス数のうち塗布量を達成するために必要な吐出パルス信号の数を規定し、残りを休止パルス信号として規定する初期パラメータ設定工程、
予め設定した補正周期で、補正周期の時点におけるノズルからの吐出量を計測し、吐出量の補正量を算出する補正量算出工程、および、
補正量算出工程で算出した補正量に基づき吐出パルス信号の数と休止パルス信号の数を調整する吐出量補正工程、とを含むことを特徴とする塗布方法。 - 前記吐出量補正工程は、前記吐出パルス信号および前記休止パルス信号を発信する周波数を変えることなく吐出量の補正を行うことを特徴とする請求項1に記載の塗布方法。
- 前記周波数が数十ヘルツ~数百ヘルツであることを特徴とする請求項2に記載の塗布方法。
- 前記補正量算出工程は、一定時間に吐出した液体材料の重量を計測した値と、当該一定の時間における理論値との差分値に基づき吐出量の補正量を算出することを特徴とする請求項1ないし3のいずれか一項に記載の塗布方法。
- 前記補正量算出工程は、一定時間に吐出した液体材料の面積および/または高さを計測した値と、当該一定の時間における理論値との差分値に基づき吐出量の補正量を算出することを特徴とする請求項1ないし3のいずれか一項に記載の塗布方法。
- 前記補正量算出工程は、前記塗布パターンに基づく塗布がなされたワーク端に形成される液体材料のフィレット幅を計測した値と、当該塗布パターンにおける理論値との差分値に基づき吐出量の補正量を算出することを特徴とする請求項1ないし3のいずれか一項に記載の塗布方法。
- 前記補正量算出工程以前の工程において補正を行うかを判断する許容範囲を設定し、
前記補正量算出工程は、前記差分値が前記許容範囲を越える場合に、吐出量の補正量を算出することを特徴とする請求項4ないし6のいずれか一項に記載の塗布方法。 - 前記塗布は、液体材料がノズルから離間した後にワークに接触する吐出方式により行われることを特徴とする請求項1ないし7のいずれか一項に記載の塗布方法。
- 前記塗布は、基板とその上に載置されたワークとの間隙に毛細管現象を利用して規定した塗布量の液体材料を充填することを特徴とする請求項8に記載の塗布方法。
- 前記吐出量補正工程は、休止パルス信号を増加させる際に、休止パルス信号の数に対する吐出パルス信号の数を減らすことを特徴とする請求項9に記載の塗布方法。
- 前記補正周期は、ユーザーが補正周期として入力した時間情報、ワークの枚数、または基板の枚数に基づき設定されることを特徴とする請求項1ないし10のいずれか一項に記載の塗布方法。
- 前記吐出量補正工程は、前記塗布パターンの塗布長さ、およびノズルとワークの相対移動の速度を変えることなく吐出量の補正を行うことを特徴とする請求項1ないし11のいずれか一項に記載の塗布方法。
- 液体材料を供給する液材供給部と、液材供給部から供給された液体材料を吐出する吐出口を有する吐出部と、吐出口より吐出された液体材料の量を計量する計量部と、吐出口とワークとを相対移動させる駆動部と、これらの作動を制御する制御部とを備える塗布装置において、制御部が、請求項1ないし12のいずれか一項に記載の塗布方法を実施するプログラムを有することを特徴とする装置。
- 液体材料を供給する液材供給部と、液体材料を吐出する吐出口を有する吐出部と、吐出口より吐出された液体材料の量を計量する計量部と、吐出口とワークとを相対移動させる駆動部と、これらの作動を制御する制御部とを備える塗布装置において、制御部に請求項1ないし12のいずれか一項に記載の塗布方法を実施させるプログラム。
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2008
- 2008-02-18 JP JP2008036628A patent/JP5280702B2/ja active Active
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2009
- 2009-02-18 US US12/918,256 patent/US8821959B2/en active Active
- 2009-02-18 KR KR1020107020431A patent/KR101605434B1/ko active IP Right Grant
- 2009-02-18 WO PCT/JP2009/000649 patent/WO2009104383A1/ja active Application Filing
- 2009-02-18 CN CN200980105241.XA patent/CN102066008B/zh active Active
- 2009-02-18 EP EP09713491.0A patent/EP2246125B1/en active Active
- 2009-02-18 TW TW98105085A patent/TWI471177B/zh active
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Also Published As
Publication number | Publication date |
---|---|
HK1153426A1 (en) | 2012-03-30 |
KR101605434B1 (ko) | 2016-03-22 |
KR20100124763A (ko) | 2010-11-29 |
TW200946242A (en) | 2009-11-16 |
CN102066008B (zh) | 2014-03-19 |
TWI471177B (zh) | 2015-02-01 |
US20110042478A1 (en) | 2011-02-24 |
US8821959B2 (en) | 2014-09-02 |
EP2246125B1 (en) | 2019-05-22 |
EP2246125A1 (en) | 2010-11-03 |
CN102066008A (zh) | 2011-05-18 |
JP2009190012A (ja) | 2009-08-27 |
EP2246125A4 (en) | 2016-03-02 |
JP5280702B2 (ja) | 2013-09-04 |
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