WO2009075124A1 - 半導体装置の製造方法および半導体装置 - Google Patents
半導体装置の製造方法および半導体装置 Download PDFInfo
- Publication number
- WO2009075124A1 WO2009075124A1 PCT/JP2008/064862 JP2008064862W WO2009075124A1 WO 2009075124 A1 WO2009075124 A1 WO 2009075124A1 JP 2008064862 W JP2008064862 W JP 2008064862W WO 2009075124 A1 WO2009075124 A1 WO 2009075124A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- semiconductor device
- wafer
- surface roughness
- activation annealing
- manufacturing
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 230000004913 activation Effects 0.000 abstract 3
- 238000000137 annealing Methods 0.000 abstract 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract 3
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 3
- 230000003746 surface roughness Effects 0.000 abstract 3
- 230000015556 catabolic process Effects 0.000 abstract 2
- 238000006731 degradation reaction Methods 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/0455—Making n or p doped regions or layers, e.g. using diffusion
- H01L21/046—Making n or p doped regions or layers, e.g. using diffusion using ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
- Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA002677412A CA2677412A1 (en) | 2007-12-12 | 2008-08-21 | Semiconductor device manufacturing method and semiconductor device |
US12/526,731 US8697555B2 (en) | 2007-12-12 | 2008-08-21 | Method of producing semiconductor device and semiconductor device |
CN2008800047477A CN101647093B (zh) | 2007-12-12 | 2008-08-21 | 制造半导体装置的方法和半导体装置 |
EP08792583A EP2117036A4 (en) | 2007-12-12 | 2008-08-21 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-320951 | 2007-12-12 | ||
JP2007320951A JP5141227B2 (ja) | 2007-12-12 | 2007-12-12 | 半導体装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009075124A1 true WO2009075124A1 (ja) | 2009-06-18 |
Family
ID=40755370
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/064862 WO2009075124A1 (ja) | 2007-12-12 | 2008-08-21 | 半導体装置の製造方法および半導体装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8697555B2 (ja) |
EP (1) | EP2117036A4 (ja) |
JP (1) | JP5141227B2 (ja) |
KR (1) | KR20100100585A (ja) |
CN (1) | CN101647093B (ja) |
CA (1) | CA2677412A1 (ja) |
TW (1) | TW200926303A (ja) |
WO (1) | WO2009075124A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011016392A1 (ja) * | 2009-08-04 | 2011-02-10 | 昭和電工株式会社 | 炭化珪素半導体装置の製造方法 |
EP2477213A1 (en) * | 2009-09-08 | 2012-07-18 | Sumitomo Electric Industries, Ltd. | Semiconductor device and process for production of semiconductor device |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009231341A (ja) * | 2008-03-19 | 2009-10-08 | Ulvac Japan Ltd | アニール装置、SiC半導体基板の熱処理方法 |
JP2010034481A (ja) * | 2008-07-31 | 2010-02-12 | Sumitomo Electric Ind Ltd | 半導体装置の製造方法および半導体装置 |
SG164324A1 (en) * | 2009-02-20 | 2010-09-29 | Semiconductor Energy Lab | Semiconductor device and manufacturing method of the same |
US8735234B2 (en) * | 2010-02-18 | 2014-05-27 | Varian Semiconductor Equipment Associates, Inc. | Self-aligned ion implantation for IBC solar cells |
JP5564682B2 (ja) * | 2010-04-28 | 2014-07-30 | 学校法人関西学院 | 半導体素子の製造方法 |
DE102010033943A1 (de) * | 2010-08-11 | 2012-02-16 | Osram Opto Semiconductors Gmbh | Verfahren und Vorrichtung zum Heizen von Halbleitermaterial |
KR101926687B1 (ko) * | 2011-10-24 | 2018-12-07 | 엘지이노텍 주식회사 | 에피 웨이퍼 제조 장치, 에피 웨이퍼 제조 방법 및 에피 웨이퍼 |
DE102012003903A1 (de) * | 2012-02-27 | 2013-08-29 | Centrotherm Thermal Solutions Gmbh & Co. Kg | Verfahren zur thermischen Behandlung von Siliziumcarbidsubstraten |
JP2014007310A (ja) * | 2012-06-26 | 2014-01-16 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置の製造方法および炭化珪素半導体装置 |
US9257283B2 (en) * | 2012-08-06 | 2016-02-09 | General Electric Company | Device having reduced bias temperature instability (BTI) |
JP6093154B2 (ja) * | 2012-11-16 | 2017-03-08 | 東洋炭素株式会社 | 収容容器の製造方法 |
US10403509B2 (en) * | 2014-04-04 | 2019-09-03 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Basal plane dislocation elimination in 4H—SiC by pulsed rapid thermal annealing |
JP6395299B2 (ja) * | 2014-09-11 | 2018-09-26 | 国立研究開発法人産業技術総合研究所 | 炭化珪素半導体素子及び炭化珪素半導体素子の製造方法 |
CN105470119B (zh) * | 2015-11-19 | 2018-09-11 | 泰科天润半导体科技(北京)有限公司 | 一种碳化硅器件的正面欧姆接触的加工方法 |
JP6853621B2 (ja) | 2016-03-17 | 2021-03-31 | 国立大学法人大阪大学 | 炭化珪素半導体装置の製造方法 |
US11189493B2 (en) * | 2018-02-19 | 2021-11-30 | Denso Corporation | Silicon carbide semiconductor device and method for manufacturing the same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11274481A (ja) * | 1998-03-20 | 1999-10-08 | Denso Corp | 炭化珪素半導体装置の製造方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995006956A1 (en) | 1993-09-03 | 1995-03-09 | National Semiconductor Corporation | Planar isolation method for use in fabrication of microelectronics |
US5989340A (en) * | 1995-11-14 | 1999-11-23 | Siemens Aktiengesellschaft | Process and device for sublimation growing of silicon carbide monocrystals |
WO1997039477A1 (en) | 1996-04-16 | 1997-10-23 | Rutgers, The State University | P-type silicon carbide formation by ion implantation and p-type silicon carbide |
US5981900A (en) | 1996-06-03 | 1999-11-09 | The United States Of America As Represented By The Secretary Of The Army | Method of annealing silicon carbide for activation of ion-implanted dopants |
DE19633183A1 (de) * | 1996-08-17 | 1998-02-19 | Daimler Benz Ag | Halbleiterbauelement mit durch Ionenimplantation eingebrachten Fremdatomen und Verfahren zu dessen Herstellung |
JP3550967B2 (ja) * | 1997-09-11 | 2004-08-04 | 富士電機ホールディングス株式会社 | 炭化けい素基板の熱処理方法 |
FR2801723B1 (fr) * | 1999-11-25 | 2003-09-05 | Commissariat Energie Atomique | Couche de silicium tres sensible a l'oxygene et procede d'obtention de cette couche |
JP3741283B2 (ja) * | 2003-03-10 | 2006-02-01 | 学校法人関西学院 | 熱処理装置及びそれを用いた熱処理方法 |
JP4666200B2 (ja) * | 2004-06-09 | 2011-04-06 | パナソニック株式会社 | SiC半導体装置の製造方法 |
JP2006339396A (ja) * | 2005-06-02 | 2006-12-14 | Kwansei Gakuin | イオン注入アニール方法、半導体素子の製造方法、及び半導体素子 |
JP4961805B2 (ja) * | 2006-04-03 | 2012-06-27 | 株式会社デンソー | 炭化珪素半導体装置の製造方法 |
JP2008166729A (ja) * | 2006-12-08 | 2008-07-17 | Canon Anelva Corp | 基板加熱処理装置及び半導体製造方法 |
-
2007
- 2007-12-12 JP JP2007320951A patent/JP5141227B2/ja not_active Expired - Fee Related
-
2008
- 2008-08-21 WO PCT/JP2008/064862 patent/WO2009075124A1/ja active Application Filing
- 2008-08-21 US US12/526,731 patent/US8697555B2/en active Active
- 2008-08-21 CA CA002677412A patent/CA2677412A1/en not_active Abandoned
- 2008-08-21 KR KR1020097015890A patent/KR20100100585A/ko not_active Application Discontinuation
- 2008-08-21 EP EP08792583A patent/EP2117036A4/en not_active Withdrawn
- 2008-08-21 CN CN2008800047477A patent/CN101647093B/zh not_active Expired - Fee Related
- 2008-09-01 TW TW097133497A patent/TW200926303A/zh unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11274481A (ja) * | 1998-03-20 | 1999-10-08 | Denso Corp | 炭化珪素半導体装置の製造方法 |
Non-Patent Citations (2)
Title |
---|
See also references of EP2117036A4 * |
Y. NEGORO ET AL.: "Flat Surface after High-Temperature Annealing for Phosphorus-Ion Implanted 4H-SiC (0001) Using Graphite Cap", MATERIALS SCIENCE FORUM, vol. 457-460, 2004, pages 933 - 936 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011016392A1 (ja) * | 2009-08-04 | 2011-02-10 | 昭和電工株式会社 | 炭化珪素半導体装置の製造方法 |
JP2011035257A (ja) * | 2009-08-04 | 2011-02-17 | Showa Denko Kk | 炭化珪素半導体装置の製造方法 |
EP2477213A1 (en) * | 2009-09-08 | 2012-07-18 | Sumitomo Electric Industries, Ltd. | Semiconductor device and process for production of semiconductor device |
EP2477213A4 (en) * | 2009-09-08 | 2014-05-14 | Sumitomo Electric Industries | SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING THE SEMICONDUCTOR DEVICE |
Also Published As
Publication number | Publication date |
---|---|
CN101647093A (zh) | 2010-02-10 |
EP2117036A1 (en) | 2009-11-11 |
JP5141227B2 (ja) | 2013-02-13 |
CN101647093B (zh) | 2012-02-01 |
US8697555B2 (en) | 2014-04-15 |
KR20100100585A (ko) | 2010-09-15 |
CA2677412A1 (en) | 2009-06-18 |
TW200926303A (en) | 2009-06-16 |
EP2117036A4 (en) | 2012-02-08 |
JP2009146997A (ja) | 2009-07-02 |
US20100044721A1 (en) | 2010-02-25 |
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