WO2009069773A1 - 石英ガラスルツボの製造方法および製造装置 - Google Patents

石英ガラスルツボの製造方法および製造装置 Download PDF

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Publication number
WO2009069773A1
WO2009069773A1 PCT/JP2008/071704 JP2008071704W WO2009069773A1 WO 2009069773 A1 WO2009069773 A1 WO 2009069773A1 JP 2008071704 W JP2008071704 W JP 2008071704W WO 2009069773 A1 WO2009069773 A1 WO 2009069773A1
Authority
WO
WIPO (PCT)
Prior art keywords
quartz glass
glass crucible
transparent layer
controls
manufacturing quartz
Prior art date
Application number
PCT/JP2008/071704
Other languages
English (en)
French (fr)
Inventor
Hiroshi Kishi
Minoru Kanda
Masaki Morikawa
Original Assignee
Japan Super Quartz Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Super Quartz Corporation filed Critical Japan Super Quartz Corporation
Priority to JP2009543884A priority Critical patent/JP5541777B2/ja
Priority to EP08825887.6A priority patent/EP2226300B1/en
Priority to CN2008800003182A priority patent/CN101605732B/zh
Priority to US12/303,994 priority patent/US8196430B2/en
Publication of WO2009069773A1 publication Critical patent/WO2009069773A1/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

　回転モールド法による石英ガラスルツボを製造する方法において、電極をモールド中心線に対して偏った位置に設けてアーク溶融することを特徴とし、この偏芯アークによって、ルツボの直胴部、湾曲部、および底部の溶融中のガラス温度の差を３００°C以下に制御し、該直胴部および底部の透明層の層厚を、湾曲部の透明層の層厚に対して７０～１２０％に制御する石英ガラスルツボの製造方法。
PCT/JP2008/071704 2007-11-30 2008-11-28 石英ガラスルツボの製造方法および製造装置 WO2009069773A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009543884A JP5541777B2 (ja) 2007-11-30 2008-11-28 石英ガラスルツボの製造方法および製造装置
EP08825887.6A EP2226300B1 (en) 2007-11-30 2008-11-28 Method for manufacturing quartz glass crucible
CN2008800003182A CN101605732B (zh) 2007-11-30 2008-11-28 石英玻璃坩埚的制造方法以及制造装置
US12/303,994 US8196430B2 (en) 2007-11-30 2008-11-28 Method and apparatus for manufacturing vitreous silica crucible

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007310193 2007-11-30
JP2007-310193 2007-11-30

Publications (1)

Publication Number Publication Date
WO2009069773A1 true WO2009069773A1 (ja) 2009-06-04

Family

ID=40678662

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/071704 WO2009069773A1 (ja) 2007-11-30 2008-11-28 石英ガラスルツボの製造方法および製造装置

Country Status (7)

Country Link
US (1) US8196430B2 (ja)
EP (1) EP2226300B1 (ja)
JP (1) JP5541777B2 (ja)
KR (1) KR20100099763A (ja)
CN (1) CN101605732B (ja)
TW (1) TWI382963B (ja)
WO (1) WO2009069773A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011019012A1 (ja) * 2009-08-12 2011-02-17 ジャパンスーパークォーツ株式会社 シリカガラスルツボの製造装置及びシリカガラスルツボの製造方法
JP2011088761A (ja) * 2009-10-20 2011-05-06 Japan Siper Quarts Corp 石英ガラスルツボの製造方法および製造装置
JP2012116714A (ja) * 2010-12-02 2012-06-21 Japan Siper Quarts Corp シリカガラスルツボの製造方法および製造装置
JP2012116717A (ja) * 2010-12-02 2012-06-21 Japan Siper Quarts Corp シリカガラスルツボ製造装置
JP2012148961A (ja) * 2010-12-31 2012-08-09 Japan Siper Quarts Corp シリカガラスルツボの製造方法
US20120272687A1 (en) * 2011-04-27 2012-11-01 Japan Super Quartz Corporation Apparatus for manufacturing vitreous silica crucible
WO2015099000A1 (ja) * 2013-12-28 2015-07-02 株式会社Sumco 石英ガラスルツボ及びその製造方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5415297B2 (ja) * 2009-01-08 2014-02-12 株式会社Ｓｕｍｃｏ 石英ガラスルツボ製造装置
JP4922355B2 (ja) * 2009-07-15 2012-04-25 信越石英株式会社 シリカ容器及びその製造方法
CN102127806B (zh) * 2010-10-28 2012-09-05 杭州先进石英材料有限公司 一种石英玻璃坩埚及其制备方法
CN102161563B (zh) * 2010-12-14 2012-12-05 维苏威太阳能坩埚(苏州)有限公司 一种石英坩埚的生产系统
JP5781303B2 (ja) * 2010-12-31 2015-09-16 株式会社Sumco シリカガラスルツボ製造方法およびシリカガラスルツボ製造装置
JP5777881B2 (ja) * 2010-12-31 2015-09-09 株式会社Sumco シリカガラスルツボの製造方法
JP5749147B2 (ja) * 2010-12-31 2015-07-15 株式会社Sumco シリカガラスルツボの製造方法
JP5777880B2 (ja) * 2010-12-31 2015-09-09 株式会社Sumco シリカガラスルツボの製造方法
US9193620B2 (en) 2011-03-31 2015-11-24 Raytheon Company Fused silica body with vitreous silica inner layer, and method for making same
US9221709B2 (en) 2011-03-31 2015-12-29 Raytheon Company Apparatus for producing a vitreous inner layer on a fused silica body, and method of operating same
SG11201508512PA (en) * 2013-05-23 2015-12-30 Applied Materials Inc A coated liner assembly for a semiconductor processing chamber
CN116199415A (zh) * 2023-01-03 2023-06-02 宁夏盾源聚芯半导体科技股份有限公司 石英坩埚均匀壁厚的熔制方法

Citations (4)

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Publication number Priority date Publication date Assignee Title
JPS62501067A (ja) * 1984-11-05 1987-04-30 三菱マテリアル株式会社 ガラス質シリカ製容器の品質改良法
JPH01148718A (ja) * 1987-12-03 1989-06-12 Shin Etsu Handotai Co Ltd 石英るつぼの製造方法
JP2000264776A (ja) * 1999-03-15 2000-09-26 Toshiba Ceramics Co Ltd シリコン単結晶引上げ用石英ガラスルツボの製造方法
JP2004502630A (ja) * 2000-07-11 2004-01-29 ヘレウス・クアルツグラース・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンディット・ゲゼルシャフト 回転対称型石英ガラスるつぼの製造方法および該方法を実施するための装置

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DE3014311C2 (de) 1980-04-15 1982-06-16 Heraeus Quarzschmelze Gmbh, 6450 Hanau Verfahren zur Herstellung von Quarzglastiegeln und Vorrichtung zur Durchführung dieses Verfahrens
US4935046A (en) * 1987-12-03 1990-06-19 Shin-Etsu Handotai Company, Limited Manufacture of a quartz glass vessel for the growth of single crystal semiconductor
US6548134B1 (en) * 1996-06-26 2003-04-15 The Procter & Gamble Company Vented container containing a liquid product with particulate solids
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JP4671999B2 (ja) * 2007-11-30 2011-04-20 ジャパンスーパークォーツ株式会社 石英ガラスルツボの試験方法
JP5142912B2 (ja) * 2008-09-22 2013-02-13 ジャパンスーパークォーツ株式会社 アーク放電方法、アーク放電装置、石英ガラスルツボ製造装置
JP2010076949A (ja) * 2008-09-24 2010-04-08 Japan Siper Quarts Corp 石英ガラスルツボの製造方法と装置、および石英ガラスルツボ
JP5415297B2 (ja) * 2009-01-08 2014-02-12 株式会社Ｓｕｍｃｏ 石英ガラスルツボ製造装置
JP5397857B2 (ja) * 2009-10-20 2014-01-22 株式会社Ｓｕｍｃｏ 石英ガラスルツボの製造方法および製造装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62501067A (ja) * 1984-11-05 1987-04-30 三菱マテリアル株式会社 ガラス質シリカ製容器の品質改良法
JPH01148718A (ja) * 1987-12-03 1989-06-12 Shin Etsu Handotai Co Ltd 石英るつぼの製造方法
JP2000264776A (ja) * 1999-03-15 2000-09-26 Toshiba Ceramics Co Ltd シリコン単結晶引上げ用石英ガラスルツボの製造方法
JP2004502630A (ja) * 2000-07-11 2004-01-29 ヘレウス・クアルツグラース・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンディット・ゲゼルシャフト 回転対称型石英ガラスるつぼの製造方法および該方法を実施するための装置

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See also references of EP2226300A4 *

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105712614A (zh) * 2009-08-12 2016-06-29 日本超精石英株式会社 氧化硅玻璃坩埚的制造装置及其制造方法
WO2011019012A1 (ja) * 2009-08-12 2011-02-17 ジャパンスーパークォーツ株式会社 シリカガラスルツボの製造装置及びシリカガラスルツボの製造方法
KR101331181B1 (ko) * 2009-08-12 2013-11-20 쟈판 스파 쿼츠 가부시키가이샤 실리카 유리 도가니의 제조 장치 및 실리카 유리 도가니의 제조 방법
US8739573B2 (en) 2009-08-12 2014-06-03 Japan Super Quartz Corporation Apparatus and method for manufacturing vitreous silica crucible
EP3473602A4 (en) * 2009-08-12 2019-04-24 Japan Super Quartz Corporation PRESENTATION FOR THE PRODUCTION OF A SILICON GLASS TIEGEL AND METHOD FOR THE PRODUCTION OF A SILICON GLASS TIEGEL
JP5713903B2 (ja) * 2009-08-12 2015-05-07 株式会社Sumco シリカガラスルツボの製造装置及びシリカガラスルツボの製造方法
CN102471126A (zh) * 2009-08-12 2012-05-23 日本超精石英株式会社 氧化硅玻璃坩埚的制造装置及其制造方法
TWI399463B (zh) * 2009-08-12 2013-06-21 Japan Super Quartz Corp 二氧化矽玻璃坩堝的製造裝置及其製造方法
JP2011088761A (ja) * 2009-10-20 2011-05-06 Japan Siper Quarts Corp 石英ガラスルツボの製造方法および製造装置
JP2012116714A (ja) * 2010-12-02 2012-06-21 Japan Siper Quarts Corp シリカガラスルツボの製造方法および製造装置
JP2012116717A (ja) * 2010-12-02 2012-06-21 Japan Siper Quarts Corp シリカガラスルツボ製造装置
JP2012148961A (ja) * 2010-12-31 2012-08-09 Japan Siper Quarts Corp シリカガラスルツボの製造方法
US20120272687A1 (en) * 2011-04-27 2012-11-01 Japan Super Quartz Corporation Apparatus for manufacturing vitreous silica crucible
WO2015099000A1 (ja) * 2013-12-28 2015-07-02 株式会社Sumco 石英ガラスルツボ及びその製造方法
CN105849320A (zh) * 2013-12-28 2016-08-10 胜高股份有限公司 石英玻璃坩埚及其制造方法
JP6088666B2 (ja) * 2013-12-28 2017-03-01 株式会社Sumco 石英ガラスルツボ及びその製造方法
US9863061B2 (en) 2013-12-28 2018-01-09 Sumco Corporation Vitreous silica crucible and method for manufacturing the same

Also Published As

Publication number Publication date
JPWO2009069773A1 (ja) 2011-04-21
CN101605732B (zh) 2012-02-22
EP2226300A4 (en) 2011-04-20
TWI382963B (zh) 2013-01-21
US8196430B2 (en) 2012-06-12
JP5541777B2 (ja) 2014-07-09
CN101605732A (zh) 2009-12-16
TW200940460A (en) 2009-10-01
US20100244311A1 (en) 2010-09-30
EP2226300A1 (en) 2010-09-08
KR20100099763A (ko) 2010-09-15
EP2226300B1 (en) 2016-11-09

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