WO2009066950A2 - Heat-radiating substrate and method of manufacturing the same - Google Patents
Heat-radiating substrate and method of manufacturing the same Download PDFInfo
- Publication number
- WO2009066950A2 WO2009066950A2 PCT/KR2008/006865 KR2008006865W WO2009066950A2 WO 2009066950 A2 WO2009066950 A2 WO 2009066950A2 KR 2008006865 W KR2008006865 W KR 2008006865W WO 2009066950 A2 WO2009066950 A2 WO 2009066950A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- heat
- pattern
- radiating
- copper thin
- radiating plate
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 44
- 229910052802 copper Inorganic materials 0.000 claims abstract description 44
- 239000010949 copper Substances 0.000 claims abstract description 44
- 238000010438 heat treatment Methods 0.000 claims abstract description 20
- 238000005530 etching Methods 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims description 24
- 238000003475 lamination Methods 0.000 claims description 6
- 238000011161 development Methods 0.000 claims description 4
- 238000005553 drilling Methods 0.000 claims description 4
- 238000004080 punching Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 abstract description 9
- 238000013461 design Methods 0.000 abstract description 6
- 229910052751 metal Inorganic materials 0.000 abstract description 6
- 239000002184 metal Substances 0.000 abstract description 6
- 239000011347 resin Substances 0.000 abstract description 6
- 229920005989 resin Polymers 0.000 abstract description 6
- 230000003578 releasing effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5386—Geometry or layout of the interconnection structure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
- H05K1/0203—Cooling of mounted components
- H05K1/0204—Cooling of mounted components using means for thermal conduction connection in the thickness direction of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/05—Insulated conductive substrates, e.g. insulated metal substrate
- H05K1/056—Insulated conductive substrates, e.g. insulated metal substrate the metal substrate being covered by an organic insulating layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
- H05K2201/09054—Raised area or protrusion of metal substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09745—Recess in conductor, e.g. in pad or in metallic substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0323—Working metal substrate or core, e.g. by etching, deforming
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/06—Lamination
- H05K2203/063—Lamination of preperforated insulating layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/44—Manufacturing insulated metal core circuits or other insulated electrically conductive core circuits
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Geometry (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Thermal Sciences (AREA)
- Structure Of Printed Boards (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2007-0119864 | 2007-11-22 | ||
KR1020070119864A KR100919539B1 (ko) | 2007-11-22 | 2007-11-22 | 방열기판 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009066950A2 true WO2009066950A2 (en) | 2009-05-28 |
WO2009066950A3 WO2009066950A3 (en) | 2009-07-09 |
Family
ID=40668002
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2008/006865 WO2009066950A2 (en) | 2007-11-22 | 2008-11-21 | Heat-radiating substrate and method of manufacturing the same |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100919539B1 (ko) |
TW (1) | TW200939909A (ko) |
WO (1) | WO2009066950A2 (ko) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101233086B1 (ko) * | 2012-09-04 | 2013-02-18 | 주식회사 썬닉스 | 엘이디 조명용 반사판 및 그의 제조 방법 |
KR102659135B1 (ko) * | 2015-12-30 | 2024-04-18 | 엘지디스플레이 주식회사 | 피시비 기판 및 이를 포함하는 표시장치 |
US10381562B1 (en) * | 2018-05-17 | 2019-08-13 | Qualcomm Incorporated | Method and apparatus for cooling of an electronic device |
KR20220060943A (ko) | 2020-11-05 | 2022-05-12 | 우리산전 주식회사 | 방열소재 소결체 제조방법 |
KR20220101523A (ko) | 2021-01-11 | 2022-07-19 | (주) 미래이피 | 방열기판 및 이의 제조방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5391841A (en) * | 1992-12-08 | 1995-02-21 | Quick; Nathaniel R. | Laser processed coatings on electronic circuit substrates |
JPH10261847A (ja) * | 1997-03-19 | 1998-09-29 | Matsushita Electric Ind Co Ltd | 電子部品搭載用放熱基板 |
KR20040086679A (ko) * | 2003-04-03 | 2004-10-12 | 대한민국(서울대학교 총장) | 다양한 단차 구조를 형성하기 위한 기판 식각 방법 및이를 이용한 3차원 마이크로시스템용 방열판 제조 방법 |
US7161806B2 (en) * | 2003-09-18 | 2007-01-09 | Fuji Electric Systems Co., Ltd. | Heat sink and method for its production |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20040021040A (ko) * | 2002-09-02 | 2004-03-10 | 박종진 | 고출력 증폭기용 알에프 피씨비 기판 제조방법 |
-
2007
- 2007-11-22 KR KR1020070119864A patent/KR100919539B1/ko not_active IP Right Cessation
-
2008
- 2008-11-21 TW TW097145272A patent/TW200939909A/zh unknown
- 2008-11-21 WO PCT/KR2008/006865 patent/WO2009066950A2/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5391841A (en) * | 1992-12-08 | 1995-02-21 | Quick; Nathaniel R. | Laser processed coatings on electronic circuit substrates |
JPH10261847A (ja) * | 1997-03-19 | 1998-09-29 | Matsushita Electric Ind Co Ltd | 電子部品搭載用放熱基板 |
KR20040086679A (ko) * | 2003-04-03 | 2004-10-12 | 대한민국(서울대학교 총장) | 다양한 단차 구조를 형성하기 위한 기판 식각 방법 및이를 이용한 3차원 마이크로시스템용 방열판 제조 방법 |
US7161806B2 (en) * | 2003-09-18 | 2007-01-09 | Fuji Electric Systems Co., Ltd. | Heat sink and method for its production |
Also Published As
Publication number | Publication date |
---|---|
WO2009066950A3 (en) | 2009-07-09 |
KR20090053170A (ko) | 2009-05-27 |
TW200939909A (en) | 2009-09-16 |
KR100919539B1 (ko) | 2009-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7394028B2 (en) | Flexible circuit substrate for flip-chip-on-flex applications | |
US20130027896A1 (en) | Electronic component embedded printed circuit board and method of manufacturing the same | |
JP2010135713A (ja) | チップ内蔵印刷回路基板及びその製造方法 | |
JPH0669402A (ja) | プリント基板およびその製造方法 | |
US8553417B2 (en) | Heat-radiating substrate and method of manufacturing the same | |
JP2002026187A (ja) | 半導体パッケージ及び半導体パッケージの製造方法 | |
KR20120072689A (ko) | 방열회로기판 및 그 제조 방법 | |
WO2009066950A2 (en) | Heat-radiating substrate and method of manufacturing the same | |
JP2008124247A (ja) | 部品内蔵基板及びその製造方法 | |
CN111132476A (zh) | 双面线路散热基板的制备方法 | |
KR20120051992A (ko) | 방열 기판 및 그 제조 방법, 그리고 상기 방열 기판을 구비하는 패키지 구조체 | |
JP2008091814A (ja) | 回路基板及び回路基板の製造方法 | |
CN111148353B (zh) | 具有铜基散热体的电路板的制备方法 | |
CN102881605B (zh) | 用于制造半导体封装的方法 | |
KR101155645B1 (ko) | 열방출 효과가 우수한 방열 인쇄회로기판 및 그 제조 방법 | |
WO2007105879A1 (en) | Manufacturing method of radiant heat circuit board | |
CN110838475A (zh) | 芯片组件及其制作方法 | |
JP2019029622A (ja) | 放熱基板及び放熱基板の製造方法 | |
KR200394682Y1 (ko) | 인쇄회로기판 | |
KR100771291B1 (ko) | 방열기판 및 그 제조방법 | |
CN113964093A (zh) | 封装结构及其制备方法 | |
KR20150064445A (ko) | 반도체 패키지용 코어리스 기판 및 그 제조 방법, 이를 이용한 반도체 패키지 제조 방법 | |
CN220569634U (zh) | 高导热嵌埋结构 | |
JP2007141887A (ja) | 半導体装置及びこれを用いたプリント配線板 | |
KR20010057046A (ko) | 캐비티를 갖는 패키지 기판 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08853129 Country of ref document: EP Kind code of ref document: A2 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 08853129 Country of ref document: EP Kind code of ref document: A2 |