WO2009048020A1 - 流体機器ユニット構造 - Google Patents

流体機器ユニット構造 Download PDF

Info

Publication number
WO2009048020A1
WO2009048020A1 PCT/JP2008/068026 JP2008068026W WO2009048020A1 WO 2009048020 A1 WO2009048020 A1 WO 2009048020A1 JP 2008068026 W JP2008068026 W JP 2008068026W WO 2009048020 A1 WO2009048020 A1 WO 2009048020A1
Authority
WO
WIPO (PCT)
Prior art keywords
flow path
valve
fluid
device unit
unit structure
Prior art date
Application number
PCT/JP2008/068026
Other languages
English (en)
French (fr)
Inventor
Hiroki Igarashi
Original Assignee
Surpass Industry Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surpass Industry Co., Ltd. filed Critical Surpass Industry Co., Ltd.
Priority to KR1020107007697A priority Critical patent/KR101527392B1/ko
Priority to EP08838450.8A priority patent/EP2196711B1/en
Priority to US12/734,007 priority patent/US8707997B2/en
Publication of WO2009048020A1 publication Critical patent/WO2009048020A1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • F16K11/22—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members with an actuating member for each valve, e.g. interconnected to form multiple-way valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0263—Construction of housing; Use of materials therefor of lift valves multiple way valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85954—Closed circulating system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87877—Single inlet with multiple distinctly valved outlets

Abstract

　液体主流路のバルブとリターン流路の分岐部との間に形成される薬液滞留部を最小限とし、薬液の凝固が生じにくい流体機器ユニット構造を提供する。流路を介して接続される複数の流体機器類をベース部材（１０）に集積して一体化され、ベース部材（１０）に形成された流体主流路（１１）及びリターン流路（１２）にそれぞれ流路切替用の第１バルブ（２０）及び第２バルブ（４０）が設けられている流体機器ユニット構造において、リターン流路（１２）が流体主流路（１１）から分岐する分岐入口（１２ａ）を第１バルブ（２０）の上流側近傍とした。
PCT/JP2008/068026 2007-10-11 2008-10-03 流体機器ユニット構造 WO2009048020A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020107007697A KR101527392B1 (ko) 2007-10-11 2008-10-03 약액용 기기 유닛 구조
EP08838450.8A EP2196711B1 (en) 2007-10-11 2008-10-03 Fluid device unit structure
US12/734,007 US8707997B2 (en) 2007-10-11 2008-10-03 Fluid device unit structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-265586 2007-10-11
JP2007265586A JP5096864B2 (ja) 2007-10-11 2007-10-11 流体機器ユニット構造

Publications (1)

Publication Number Publication Date
WO2009048020A1 true WO2009048020A1 (ja) 2009-04-16

Family

ID=40549165

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/068026 WO2009048020A1 (ja) 2007-10-11 2008-10-03 流体機器ユニット構造

Country Status (5)

Country Link
US (1) US8707997B2 (ja)
EP (1) EP2196711B1 (ja)
JP (1) JP5096864B2 (ja)
KR (1) KR101527392B1 (ja)
WO (1) WO2009048020A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011202780A (ja) * 2010-03-26 2011-10-13 Ckd Corp 流体制御弁及び弁部流路構造

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102470750B (zh) 2009-07-21 2015-11-25 丰田自动车株式会社 燃料系统及车辆
JP6186275B2 (ja) 2013-12-27 2017-08-23 株式会社フジキン 流体制御装置
WO2016114266A1 (ja) * 2015-01-16 2016-07-21 株式会社キッツエスシーティー ブロック弁と原料容器用ブロック弁
DE102020118180A1 (de) 2020-07-09 2022-01-13 A. u. K. Müller GmbH & Co KG. Stagnationsspülventilvorrichtung

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000120903A (ja) 1998-10-09 2000-04-28 Ckd Corp 薬液用流体機器の連結構造
JP2000240900A (ja) * 1999-02-19 2000-09-08 Ckd Corp バルブユニット
JP2001182849A (ja) * 1999-12-22 2001-07-06 Advance Denki Kogyo Kk マニホールド弁構造体
JP2005207496A (ja) * 2004-01-22 2005-08-04 Advance Electric Japan Kk 混合弁及び混合装置
JP2006057645A (ja) * 2004-08-17 2006-03-02 Ckd Corp 流路ブロック構造
JP2007002902A (ja) * 2005-06-22 2007-01-11 Ckd Corp マニホールド構造体及びそれを用いたバルブユニット
JP2007092959A (ja) * 2005-09-30 2007-04-12 Ckd Corp 複合流体制御ユニット
WO2007100106A1 (ja) * 2006-03-02 2007-09-07 Surpass Industry Co., Ltd. 流体機器ユニット構造

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL112011C (ja) *
AU473069B2 (en) * 1973-05-24 1976-05-26 Evans Deakem Industries Ltd Fluid valves
US4627465A (en) * 1984-12-10 1986-12-09 Nordson Corporation Color changer
FR2579293B1 (fr) * 1985-03-25 1987-12-11 Trouvay & Cauvin Ets Ensemble de robinets a volant destine a une installation de distribution de vapeur
JP3650859B2 (ja) * 1996-06-25 2005-05-25 忠弘 大見 遮断開放器およびこれを備えた流体制御装置
EP1608902B1 (de) * 2003-04-03 2006-08-16 Alois Schwarz Einrichtung zur steuerung der strömung von flüssigen oder gasförmigen medien
US7418978B2 (en) * 2004-01-30 2008-09-02 Applied Materials, Inc. Methods and apparatus for providing fluid to a semiconductor device processing apparatus
US7644725B2 (en) * 2005-12-16 2010-01-12 Advance Electric Japan Kabushiki Kaisha Mixing valve and mixing device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000120903A (ja) 1998-10-09 2000-04-28 Ckd Corp 薬液用流体機器の連結構造
JP2000240900A (ja) * 1999-02-19 2000-09-08 Ckd Corp バルブユニット
JP2001182849A (ja) * 1999-12-22 2001-07-06 Advance Denki Kogyo Kk マニホールド弁構造体
JP2005207496A (ja) * 2004-01-22 2005-08-04 Advance Electric Japan Kk 混合弁及び混合装置
JP2006057645A (ja) * 2004-08-17 2006-03-02 Ckd Corp 流路ブロック構造
JP2007002902A (ja) * 2005-06-22 2007-01-11 Ckd Corp マニホールド構造体及びそれを用いたバルブユニット
JP2007092959A (ja) * 2005-09-30 2007-04-12 Ckd Corp 複合流体制御ユニット
WO2007100106A1 (ja) * 2006-03-02 2007-09-07 Surpass Industry Co., Ltd. 流体機器ユニット構造

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2196711A4 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011202780A (ja) * 2010-03-26 2011-10-13 Ckd Corp 流体制御弁及び弁部流路構造

Also Published As

Publication number Publication date
JP2009092191A (ja) 2009-04-30
EP2196711B1 (en) 2019-09-25
KR20100080531A (ko) 2010-07-08
US8707997B2 (en) 2014-04-29
EP2196711A4 (en) 2017-04-26
JP5096864B2 (ja) 2012-12-12
EP2196711A1 (en) 2010-06-16
KR101527392B1 (ko) 2015-06-09
US20100252134A1 (en) 2010-10-07

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