WO2009034954A1 - ＴｉＯ2含有石英ガラス基板 - Google Patents

ＴｉＯ2含有石英ガラス基板 Download PDF

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Publication number
WO2009034954A1
WO2009034954A1 PCT/JP2008/066199 JP2008066199W WO2009034954A1 WO 2009034954 A1 WO2009034954 A1 WO 2009034954A1 JP 2008066199 W JP2008066199 W JP 2008066199W WO 2009034954 A1 WO2009034954 A1 WO 2009034954A1
Authority
WO
WIPO (PCT)
Prior art keywords
tio2
quartz glass
glass substrate
containing quartz
substrate
Prior art date
Application number
PCT/JP2008/066199
Other languages
English (en)
French (fr)
Inventor
Yoshiaki Ikuta
Yasutomi Iwahashi
Kenji Okamura
Original Assignee
Asahi Glass Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co., Ltd. filed Critical Asahi Glass Co., Ltd.
Priority to EP08830689.9A priority Critical patent/EP2199049A4/en
Priority to JP2009532178A priority patent/JP5064508B2/ja
Priority to KR1020107005440A priority patent/KR101479804B1/ko
Publication of WO2009034954A1 publication Critical patent/WO2009034954A1/ja
Priority to US12/659,595 priority patent/US20100234205A1/en
Priority to US12/978,837 priority patent/US20110089612A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/08—Doped silica-based glasses containing boron or halide
    • C03C2201/12—Doped silica-based glasses containing boron or halide containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/30—Doped silica-based glasses containing metals
    • C03C2201/40—Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
    • C03C2201/42—Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn containing titanium

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Compositions (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

　本発明は、ナノインプリントリソグラフィ用モールド基材として使用した場合に、寸法のばらつきが±１０％以内の凹凸パターンを形成することができるＴｉＯ2含有石英ガラス基板を提供することを課題とする。本発明は、１５～３５°Cにおける熱膨張係数が±２００ｐｐｂ／°C以内であり、ＴｉＯ2濃度が４～９ｗｔ％であり、転写パターンを形成する側の基板表面におけるＴｉＯ2濃度分布が、±１ｗｔ％以内であることを特徴とするＴｉＯ2含有石英ガラス基板に関する。
PCT/JP2008/066199 2007-09-13 2008-09-09 ＴｉＯ2含有石英ガラス基板 WO2009034954A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP08830689.9A EP2199049A4 (en) 2007-09-13 2008-09-09 TiO2-containing quartz glass substrate
JP2009532178A JP5064508B2 (ja) 2007-09-13 2008-09-09 ＴｉＯ２含有石英ガラス基板
KR1020107005440A KR101479804B1 (ko) 2007-09-13 2008-09-09 ＴｉＯ２ 함유 석영 유리 기판
US12/659,595 US20100234205A1 (en) 2007-09-13 2010-03-15 TiO2-containing quartz glass substrate
US12/978,837 US20110089612A1 (en) 2007-09-13 2010-12-27 Tio2-containing quartz glass substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007237989 2007-09-13
JP2007-237989 2007-09-13

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/659,595 Continuation US20100234205A1 (en) 2007-09-13 2010-03-15 TiO2-containing quartz glass substrate

Publications (1)

Publication Number Publication Date
WO2009034954A1 true WO2009034954A1 (ja) 2009-03-19

Family

ID=40451961

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/066199 WO2009034954A1 (ja) 2007-09-13 2008-09-09 ＴｉＯ2含有石英ガラス基板

Country Status (6)

Country Link
US (2) US20100234205A1 (ja)
EP (1) EP2199049A4 (ja)
JP (2) JP5064508B2 (ja)
KR (1) KR101479804B1 (ja)
TW (1) TWI451188B (ja)
WO (1) WO2009034954A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011068100A1 (ja) 2009-12-04 2011-06-09 旭硝子株式会社 インプリントモールド用石英系ガラス基材の製造方法およびインプリントモールドの製造方法
WO2011096368A1 (ja) * 2010-02-03 2011-08-11 旭硝子株式会社 微細凹凸構造を表面に有する物品の製造方法
WO2012008343A1 (ja) * 2010-07-12 2012-01-19 旭硝子株式会社 インプリントモールド用ＴｉＯ２含有石英ガラス基材およびその製造方法
JP2012166380A (ja) * 2011-02-10 2012-09-06 Shin-Etsu Chemical Co Ltd 金型用基板及び金型用基板の検査方法
JP2014013902A (ja) * 2013-07-30 2014-01-23 Dainippon Printing Co Ltd 光インプリント用モールドおよびその製造方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009274947A (ja) 2008-04-16 2009-11-26 Asahi Glass Co Ltd ＴｉＯ２を含有するＥＵＶリソグラフィ光学部材用シリカガラス
JP5500686B2 (ja) * 2010-11-30 2014-05-21 株式会社Ｓｕｍｃｏ シリカガラスルツボ
CN103268919B (zh) * 2013-05-13 2016-07-13 河南师范大学 一种TiO2薄膜及P3HT/TiO2有机无机杂化的异质结薄膜的制备方法
KR20150124408A (ko) * 2014-04-28 2015-11-05 아사히 가라스 가부시키가이샤 임프린트 몰드, 및 임프린트 방법
WO2024008676A1 (de) * 2022-07-05 2024-01-11 Carl Zeiss Smt Gmbh Verfahren zur herstellung eines grundkörpers eines optischen elementes für die halbleiterlithografie, grundkörper, optisches element und projektionsbelichtungsanlage

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6324973B2 (ja) 1983-11-16 1988-05-23 Tadao Shiraishi
JPH05169459A (ja) * 1991-12-24 1993-07-09 Sumitomo Electric Ind Ltd 樹脂あるいはゴム用金型、樹脂あるいはゴム成形装置部品および樹脂あるいはゴムの成形方法
JPH08300362A (ja) * 1995-05-11 1996-11-19 Olympus Optical Co Ltd 樹脂成形用金型及びその製造方法
JP2003077807A (ja) * 2001-09-04 2003-03-14 Matsushita Electric Ind Co Ltd モールド、モールドの製造方法、および、パターン形成方法
JP2004104114A (ja) 2002-08-23 2004-04-02 Asml Netherlands Bv チャック、リソグラフィ装置、およびデバイスの製造方法
JP2004315351A (ja) * 2003-04-03 2004-11-11 Asahi Glass Co Ltd ＴｉＯ２を含有するシリカガラスおよびＥＵＶリソグラフィ用光学部材
JP2005104820A (ja) * 2003-04-03 2005-04-21 Asahi Glass Co Ltd ＴｉＯ２を含有するシリカガラスおよびその製造方法
JP2005210093A (ja) 2003-12-25 2005-08-04 Hoya Corp 多層反射膜付き基板、露光用反射型マスクブランクス及び露光用反射型マスク、並びにそれらの製造方法
JP2006267595A (ja) 2005-03-24 2006-10-05 Toshiba Corp マスクブランクスとその製造方法及び使用方法、並びにマスクとその製造方法及び使用方法
JP2006306674A (ja) * 2005-04-28 2006-11-09 Shinetsu Quartz Prod Co Ltd ナノインプリントスタンパー用シリカ・チタニアガラス
JP2006324268A (ja) 2005-05-17 2006-11-30 Dainippon Printing Co Ltd Ｅｕｖ露光用マスクブランクスおよびその製造方法、ｅｕｖ露光用マスク
JP2007182367A (ja) * 2005-12-08 2007-07-19 Shin Etsu Chem Co Ltd チタニアドープ石英ガラス、ｅｕｖリソグラフィ用部材、ｅｕｖリソグラフィ用フォトマスク基板及びチタニアドープ石英ガラスの製造方法
JP2007237989A (ja) 2006-03-09 2007-09-20 Equos Research Co Ltd 車両

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Publication number Priority date Publication date Assignee Title
JP4792705B2 (ja) * 2003-04-03 2011-10-12 旭硝子株式会社 ＴｉＯ２を含有するシリカガラスおよびその製造法
JP2004315247A (ja) * 2003-04-11 2004-11-11 Nikon Corp ＳｉＯ２−ＴｉＯ２系ガラスの製造方法、ＳｉＯ２−ＴｉＯ２系ガラス及び露光装置
DE60336322D1 (de) * 2003-11-21 2011-04-21 Obducat Ab Nanoimprint Lithographie in Mehrschichtsystemem
JP4492123B2 (ja) * 2004-01-05 2010-06-30 旭硝子株式会社 シリカガラス
US7235474B1 (en) * 2004-05-04 2007-06-26 Advanced Micro Devices, Inc. System and method for imprint lithography to facilitate dual damascene integration with two imprint acts
DE102004024808B4 (de) * 2004-05-17 2006-11-09 Heraeus Quarzglas Gmbh & Co. Kg Quarzglasrohling für ein optisches Bauteil zur Übertragung extrem kurzwelliger ultravioletter Strahlung
JP4957249B2 (ja) * 2004-07-01 2012-06-20 旭硝子株式会社 ＴｉＯ２を含有するシリカガラスおよびその製造方法
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JP4487783B2 (ja) * 2005-01-25 2010-06-23 旭硝子株式会社 ＴｉＯ２を含有するシリカガラスの製造方法およびＴｉＯ２を含有するシリカガラスを用いたＥＵＶリソグラフィ用光学部材
US7592063B2 (en) * 2006-09-05 2009-09-22 Asahi Glass Company, Limited Quartz glass substrate and process for its production
JP5042714B2 (ja) * 2007-06-06 2012-10-03 信越化学工業株式会社 ナノインプリントモールド用チタニアドープ石英ガラス
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Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6324973B2 (ja) 1983-11-16 1988-05-23 Tadao Shiraishi
JPH05169459A (ja) * 1991-12-24 1993-07-09 Sumitomo Electric Ind Ltd 樹脂あるいはゴム用金型、樹脂あるいはゴム成形装置部品および樹脂あるいはゴムの成形方法
JPH08300362A (ja) * 1995-05-11 1996-11-19 Olympus Optical Co Ltd 樹脂成形用金型及びその製造方法
JP2003077807A (ja) * 2001-09-04 2003-03-14 Matsushita Electric Ind Co Ltd モールド、モールドの製造方法、および、パターン形成方法
JP2004104114A (ja) 2002-08-23 2004-04-02 Asml Netherlands Bv チャック、リソグラフィ装置、およびデバイスの製造方法
JP2004315351A (ja) * 2003-04-03 2004-11-11 Asahi Glass Co Ltd ＴｉＯ２を含有するシリカガラスおよびＥＵＶリソグラフィ用光学部材
JP2005104820A (ja) * 2003-04-03 2005-04-21 Asahi Glass Co Ltd ＴｉＯ２を含有するシリカガラスおよびその製造方法
JP2005210093A (ja) 2003-12-25 2005-08-04 Hoya Corp 多層反射膜付き基板、露光用反射型マスクブランクス及び露光用反射型マスク、並びにそれらの製造方法
JP2006267595A (ja) 2005-03-24 2006-10-05 Toshiba Corp マスクブランクスとその製造方法及び使用方法、並びにマスクとその製造方法及び使用方法
JP2006306674A (ja) * 2005-04-28 2006-11-09 Shinetsu Quartz Prod Co Ltd ナノインプリントスタンパー用シリカ・チタニアガラス
JP2006324268A (ja) 2005-05-17 2006-11-30 Dainippon Printing Co Ltd Ｅｕｖ露光用マスクブランクスおよびその製造方法、ｅｕｖ露光用マスク
JP2007182367A (ja) * 2005-12-08 2007-07-19 Shin Etsu Chem Co Ltd チタニアドープ石英ガラス、ｅｕｖリソグラフィ用部材、ｅｕｖリソグラフィ用フォトマスク基板及びチタニアドープ石英ガラスの製造方法
JP2007237989A (ja) 2006-03-09 2007-09-20 Equos Research Co Ltd 車両

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Title
A. AGARWAL; K. M. DABIS; M. TOMOZAWA: "A simple IR spectroscopic method for determining fictive temperature of silica glass", J. NON-CRYST. SOLIDS., vol. 185, 71119, pages 191 - 198
See also references of EP2199049A4 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011068100A1 (ja) 2009-12-04 2011-06-09 旭硝子株式会社 インプリントモールド用石英系ガラス基材の製造方法およびインプリントモールドの製造方法
WO2011096368A1 (ja) * 2010-02-03 2011-08-11 旭硝子株式会社 微細凹凸構造を表面に有する物品の製造方法
JP5806121B2 (ja) * 2010-02-03 2015-11-10 旭硝子株式会社 微細凹凸構造を表面に有する物品の製造方法
WO2012008343A1 (ja) * 2010-07-12 2012-01-19 旭硝子株式会社 インプリントモールド用ＴｉＯ２含有石英ガラス基材およびその製造方法
JP2012166380A (ja) * 2011-02-10 2012-09-06 Shin-Etsu Chemical Co Ltd 金型用基板及び金型用基板の検査方法
US10948817B2 (en) 2011-02-10 2021-03-16 Shin-Etsu Chemical Co., Ltd. Mold-forming substrate and inspection method
JP2014013902A (ja) * 2013-07-30 2014-01-23 Dainippon Printing Co Ltd 光インプリント用モールドおよびその製造方法

Also Published As

Publication number Publication date
KR20100058540A (ko) 2010-06-03
TWI451188B (zh) 2014-09-01
KR101479804B1 (ko) 2015-01-06
EP2199049A4 (en) 2014-08-27
TW200916946A (en) 2009-04-16
JPWO2009034954A1 (ja) 2010-12-24
EP2199049A1 (en) 2010-06-23
US20110089612A1 (en) 2011-04-21
US20100234205A1 (en) 2010-09-16
JP2012214382A (ja) 2012-11-08
JP5064508B2 (ja) 2012-10-31

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