WO2009031270A1 - ウエハ再生方法およびウエハ再生装置 - Google Patents

ウエハ再生方法およびウエハ再生装置 Download PDF

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Publication number
WO2009031270A1
WO2009031270A1 PCT/JP2008/002285 JP2008002285W WO2009031270A1 WO 2009031270 A1 WO2009031270 A1 WO 2009031270A1 JP 2008002285 W JP2008002285 W JP 2008002285W WO 2009031270 A1 WO2009031270 A1 WO 2009031270A1
Authority
WO
WIPO (PCT)
Prior art keywords
wafer
wafer reclamation
material layer
different material
film
Prior art date
Application number
PCT/JP2008/002285
Other languages
English (en)
French (fr)
Inventor
Shogo Okita
Gaku Sugahara
Hiroyuki Suzuki
Ryuzou Houchin
Mitsuru Hiroshima
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to US12/676,186 priority Critical patent/US8563332B2/en
Priority to JP2009531096A priority patent/JP4519199B2/ja
Publication of WO2009031270A1 publication Critical patent/WO2009031270A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02032—Preparing bulk and homogeneous wafers by reclaiming or re-processing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching

Abstract

　表面に他物質層２１０が形成された半導体ウエハ２００を、前記他物質層２１０を除去し再生するウエハ再生方法であって、前記他物質層２１０を物理的に除去する物理的除去ステップと、前記物理的除去ステップにより他物質層２１０が除去された面に膜２２０を形成する膜形成ステップと、前記膜形成ステップにより形成された膜２２０と共に半導体ウエハ２００をプラズマによりエッチングするドライエッチングステップとを含む。
PCT/JP2008/002285 2007-09-03 2008-08-25 ウエハ再生方法およびウエハ再生装置 WO2009031270A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/676,186 US8563332B2 (en) 2007-09-03 2008-08-25 Wafer reclamation method and wafer reclamation apparatus
JP2009531096A JP4519199B2 (ja) 2007-09-03 2008-08-25 ウエハ再生方法およびウエハ再生装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007228387 2007-09-03
JP2007-228387 2007-09-03
JP2008-133711 2008-05-22
JP2008133711 2008-05-22

Publications (1)

Publication Number Publication Date
WO2009031270A1 true WO2009031270A1 (ja) 2009-03-12

Family

ID=40428594

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/002285 WO2009031270A1 (ja) 2007-09-03 2008-08-25 ウエハ再生方法およびウエハ再生装置

Country Status (4)

Country Link
US (1) US8563332B2 (ja)
JP (1) JP4519199B2 (ja)
TW (1) TW200913044A (ja)
WO (1) WO2009031270A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009147104A (ja) * 2007-12-14 2009-07-02 Ｋ ｓｑｕａｒｅ ｍｉｃｒｏ ｓｏｌｕｔｉｏｎ 株式会社 使用済み半導体ウエハ又は基板の再生方法
JP2010056243A (ja) * 2008-08-27 2010-03-11 Ｋ ｓｑｕａｒｅ ｍｉｃｒｏ ｓｏｌｕｔｉｏｎ 株式会社 使用済み半導体ウエハの再生方法
WO2014097845A1 (ja) * 2012-12-18 2014-06-26 昭和電工株式会社 ＳｉＣ基板の製造方法
KR20170137707A (ko) 2015-04-13 2017-12-13 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 웨이퍼를 재생하기 위한 탄소함유 실리콘 산화물을 포함하는 재료의 세정액 및 세정방법
JP2019527477A (ja) * 2016-07-12 2019-09-26 キューエムエイティ・インコーポレーテッド ドナー基材を再生するための方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201310692A (zh) * 2011-08-31 2013-03-01 Solution Chemicals Inc Ｌｅｄ之基板重製方法
US8956954B2 (en) * 2012-02-21 2015-02-17 Chih-hao Chen Method of processing wafers for saving material and protecting environment
JP6418130B2 (ja) * 2015-10-20 2018-11-07 株式会社Sumco 半導体ウェーハの加工方法
US20180019169A1 (en) * 2016-07-12 2018-01-18 QMAT, Inc. Backing substrate stabilizing donor substrate for implant or reclamation
US20180033609A1 (en) * 2016-07-28 2018-02-01 QMAT, Inc. Removal of non-cleaved/non-transferred material from donor substrate
TWI768329B (zh) * 2020-04-23 2022-06-21 煇特有限公司 半導體晶圓之物理乾式表面處理方法及其表面處理用組成物
CN116031146B (zh) * 2023-02-16 2023-06-13 烟台显华高分子材料有限公司 一种SiC晶圆制造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52131471A (en) * 1976-04-28 1977-11-04 Hitachi Ltd Surface treatment of substrate
JPH08167587A (ja) * 1994-12-12 1996-06-25 Yamaha Corp 半導体ウェハの平坦化法
JPH10209117A (ja) * 1997-01-24 1998-08-07 Matsushita Electric Ind Co Ltd ドライエッチングによる平坦化方法
JPH11288858A (ja) * 1998-01-30 1999-10-19 Canon Inc Ｓｏｉ基板の再生方法及び再生基板
JP2002026096A (ja) * 2000-06-20 2002-01-25 Kobe Precision Inc シリコンウエハーの品質評価方法及び再生方法
JP2003260641A (ja) * 2002-03-04 2003-09-16 Sumitomo Electric Ind Ltd ウエハー加工方法

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US4912063A (en) * 1987-10-26 1990-03-27 North Carolina State University Growth of beta-sic thin films and semiconductor devices fabricated thereon
SG71903A1 (en) * 1998-01-30 2000-04-18 Canon Kk Process of reclamation of soi substrate and reproduced substrate
JP3596363B2 (ja) 1999-08-04 2004-12-02 三菱住友シリコン株式会社 半導体ウェーハの製造方法
US20010039101A1 (en) 2000-04-13 2001-11-08 Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag Method for converting a reclaim wafer into a semiconductor wafer
US7018554B2 (en) * 2003-09-22 2006-03-28 Cree, Inc. Method to reduce stacking fault nucleation sites and reduce forward voltage drift in bipolar devices
US20080318343A1 (en) * 2007-06-25 2008-12-25 Krishna Vepa Wafer reclaim method based on wafer type

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52131471A (en) * 1976-04-28 1977-11-04 Hitachi Ltd Surface treatment of substrate
JPH08167587A (ja) * 1994-12-12 1996-06-25 Yamaha Corp 半導体ウェハの平坦化法
JPH10209117A (ja) * 1997-01-24 1998-08-07 Matsushita Electric Ind Co Ltd ドライエッチングによる平坦化方法
JPH11288858A (ja) * 1998-01-30 1999-10-19 Canon Inc Ｓｏｉ基板の再生方法及び再生基板
JP2002026096A (ja) * 2000-06-20 2002-01-25 Kobe Precision Inc シリコンウエハーの品質評価方法及び再生方法
JP2003260641A (ja) * 2002-03-04 2003-09-16 Sumitomo Electric Ind Ltd ウエハー加工方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009147104A (ja) * 2007-12-14 2009-07-02 Ｋ ｓｑｕａｒｅ ｍｉｃｒｏ ｓｏｌｕｔｉｏｎ 株式会社 使用済み半導体ウエハ又は基板の再生方法
JP2010056243A (ja) * 2008-08-27 2010-03-11 Ｋ ｓｑｕａｒｅ ｍｉｃｒｏ ｓｏｌｕｔｉｏｎ 株式会社 使用済み半導体ウエハの再生方法
WO2014097845A1 (ja) * 2012-12-18 2014-06-26 昭和電工株式会社 ＳｉＣ基板の製造方法
US9390924B2 (en) 2012-12-18 2016-07-12 Showa Denko K.K. Method for manufacturing SiC substrate
KR20170137707A (ko) 2015-04-13 2017-12-13 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 웨이퍼를 재생하기 위한 탄소함유 실리콘 산화물을 포함하는 재료의 세정액 및 세정방법
US10538718B2 (en) 2015-04-13 2020-01-21 Mitsubishi Gas Chemical Company, Inc. Cleaning solution and cleaning method for material comprising carbon-incorporated silicon oxide for use in recycling wafer
JP2019527477A (ja) * 2016-07-12 2019-09-26 キューエムエイティ・インコーポレーテッド ドナー基材を再生するための方法

Also Published As

Publication number Publication date
TW200913044A (en) 2009-03-16
JP4519199B2 (ja) 2010-08-04
US8563332B2 (en) 2013-10-22
JPWO2009031270A1 (ja) 2010-12-09
US20100173431A1 (en) 2010-07-08

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