WO2009028709A1 - 被検体の欠陥検査方法 - Google Patents

被検体の欠陥検査方法 Download PDF

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Publication number
WO2009028709A1
WO2009028709A1 PCT/JP2008/065691 JP2008065691W WO2009028709A1 WO 2009028709 A1 WO2009028709 A1 WO 2009028709A1 JP 2008065691 W JP2008065691 W JP 2008065691W WO 2009028709 A1 WO2009028709 A1 WO 2009028709A1
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WO
WIPO (PCT)
Prior art keywords
end surface
inspected
photographing
vicinity
sending
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/065691
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English (en)
French (fr)
Inventor
Tatsuhiko Hatano
Kouichi Miyashita
Isao Shikata
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NGK Insulators Ltd
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NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP2009530230A priority Critical patent/JP5508852B2/ja
Priority to CN2008801049588A priority patent/CN101796381B/zh
Publication of WO2009028709A1 publication Critical patent/WO2009028709A1/ja
Priority to US12/712,419 priority patent/US8422014B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/38—Investigating fluid-tightness of structures by using light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G01N2015/0846—Investigating permeability, pore-volume, or surface area of porous materials by use of radiation, e.g. transmitted or reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

　（１）微粒子を含有する気体を被検体の一方の端面に加圧下送出し、第一のレーザー光を被検体の他方の端面の近傍に、前記他方の端面に平行に照射し、かつ、前記他方の端面に垂直な位置から前記他方の端面を撮影する過程、（２）微粒子を含有する気体を被検体の一方の端面に加圧下送出し、第二のレーザー光を被検体の他方の端面の近傍に、前記他方の端面に平行に照射し、かつ、前記他方の端面に垂直な位置から前記他方の端面を撮影する過程、および、（３）前記（１）および（２）の過程の撮影結果から被検体の欠陥部位を特定する過程、を含む被検体の欠陥検査方法である。
PCT/JP2008/065691 2007-08-30 2008-09-01 被検体の欠陥検査方法 Ceased WO2009028709A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009530230A JP5508852B2 (ja) 2007-08-30 2008-09-01 被検体の欠陥検査方法
CN2008801049588A CN101796381B (zh) 2007-08-30 2008-09-01 被检体的缺陷检查方法
US12/712,419 US8422014B2 (en) 2007-08-30 2010-02-25 Method for inspecting defect of article to be inspected

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-224083 2007-08-30
JP2007224083 2007-08-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/712,419 Continuation US8422014B2 (en) 2007-08-30 2010-02-25 Method for inspecting defect of article to be inspected

Publications (1)

Publication Number Publication Date
WO2009028709A1 true WO2009028709A1 (ja) 2009-03-05

Family

ID=40387412

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065691 Ceased WO2009028709A1 (ja) 2007-08-30 2008-09-01 被検体の欠陥検査方法

Country Status (4)

Country Link
US (1) US8422014B2 (ja)
JP (1) JP5508852B2 (ja)
CN (1) CN101796381B (ja)
WO (1) WO2009028709A1 (ja)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010230460A (ja) * 2009-03-26 2010-10-14 Ngk Insulators Ltd ハニカム構造体欠陥検査装置、及びハニカム構造体欠陥検査方法
JP2012101469A (ja) * 2010-11-11 2012-05-31 Sumitomo Chemical Co Ltd ハニカム構造体の検査方法、及び、ハニカム構造体の検査装置
WO2012117942A1 (ja) * 2011-02-28 2012-09-07 日立金属株式会社 セラミックハニカムフィルタの製造方法、及びセラミックハニカムフィルタ
WO2012124773A1 (ja) * 2011-03-15 2012-09-20 住友化学株式会社 フィルタの欠陥の検査方法、及び、フィルタの欠陥の検査装置
WO2012124772A1 (ja) * 2011-03-15 2012-09-20 住友化学株式会社 フィルタ検査用ミスト供給装置
WO2013008848A1 (ja) * 2011-07-11 2013-01-17 住友化学株式会社 ハニカムフィルタの欠陥の検査方法及び検査装置並びにハニカムフィルタの製造方法
JP2013519897A (ja) * 2010-02-17 2013-05-30 ダウ グローバル テクノロジーズ エルエルシー フィルターおよび膜の欠陥検知システム
JP2013113806A (ja) * 2011-11-30 2013-06-10 Jfe Steel Corp 貫通欠陥検出装置及び貫通欠陥検出方法
WO2013105467A1 (ja) * 2012-01-12 2013-07-18 住友化学株式会社 グリーンハニカム成形体の欠陥を検査する方法、グリーンハニカム構造体の製造方法及びグリーンハニカム成形体の欠陥の検査装置
JP2013174492A (ja) * 2012-02-24 2013-09-05 Denso Corp 検査装置および検査方法
JP2014046285A (ja) * 2012-08-31 2014-03-17 Ngk Insulators Ltd モノリス型分離膜構造体の強度検査装置
JP2014046286A (ja) * 2012-08-31 2014-03-17 Ngk Insulators Ltd モノリス型分離膜構造体の強度検査方法
CN104677303A (zh) * 2009-03-23 2015-06-03 日本碍子株式会社 封堵蜂窝结构的检查装置和封堵蜂窝结构的检查方法
CN104865019A (zh) * 2015-05-11 2015-08-26 广西汽车集团有限公司 一种整车密封性试验方法
KR101798268B1 (ko) * 2010-10-01 2017-11-15 다우 글로벌 테크놀로지스 엘엘씨 기판들의 기공 크기들을 분석하기 위한 시스템 및 방법
DE102021001112A1 (de) 2020-03-31 2021-09-30 Ngk Insulators, Ltd. Prüfverfahren für säulenförmigen Wabenfilter
KR20230065913A (ko) * 2021-11-05 2023-05-12 한국전자기술연구원 셀의 기공 구조 분석 장치, 시스템 및 방법
CN118603440A (zh) * 2024-08-06 2024-09-06 山西四建集团有限公司 一种楼板漏水位置快速定位装置
KR20240139826A (ko) * 2023-03-15 2024-09-24 조성천 레이저를 이용한 필터 리킹계측장치

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Publication number Priority date Publication date Assignee Title
WO2012023442A1 (ja) * 2010-08-18 2012-02-23 住友化学株式会社 ハニカムフィルタの欠陥の検査方法、ハニカムフィルタの欠陥の検査装置、及び、ハニカムフィルタの製造方法
JP5658070B2 (ja) 2011-03-30 2015-01-21 日本碍子株式会社 フィルタの検査方法、およびフィルタの検査装置
US8605276B2 (en) * 2011-11-01 2013-12-10 Taiwan Semiconductor Manufacturing Company, Ltd. Enhanced defect scanning
DE102012010269B3 (de) * 2012-05-25 2013-05-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur Bestimmung der Permeationsrate von Barriere- und Ultrabarriereelementen
TWI489098B (zh) * 2014-03-11 2015-06-21 Utechzone Co Ltd Defect detection method and defect detection device
US9702817B2 (en) 2015-01-06 2017-07-11 Rolls-Royce Plc Method and apparatus for testing of engine components
US9996766B2 (en) 2015-05-01 2018-06-12 Corning Incorporated Imaging-based methods for detecting and measuring defects in extruded cellular ceramic articles
EP3298583B1 (en) 2015-05-21 2020-04-08 Corning Incorporated Methods for inspecting cellular articles
JP6779284B2 (ja) * 2016-05-02 2020-11-04 吉野石膏株式会社 粉体の飛散性評価方法及び粉体の飛散性評価装置
CN106018225B (zh) * 2016-06-28 2019-01-18 浙江大学 一种基于激光检测pm浓度的dpf准确再生方法及设备
EP3460438B1 (en) * 2017-09-26 2021-02-17 General Electric Company Gas turbomachine leak detection system and method
EP3938751B1 (en) 2019-03-14 2023-03-22 Corning Incorporated Thermal gas inspection of plugged honeycomb body
CN111077156A (zh) * 2019-11-26 2020-04-28 凯龙蓝烽新材料科技有限公司 蜂窝陶瓷过滤体内部缺陷检测装置及方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS643545A (en) * 1987-06-26 1989-01-09 Hitachi Ltd Method and apparatus for inspection
JPH01320445A (ja) * 1988-06-22 1989-12-26 Nec Corp 微小孔検出装置
JPH11326223A (ja) * 1998-05-21 1999-11-26 Sumitomo Wiring Syst Ltd 発煙試験装置及び発煙試験方法
JP2000162141A (ja) * 1998-11-27 2000-06-16 Hitachi Ltd 欠陥検査装置および方法
JP2000216208A (ja) * 1999-01-20 2000-08-04 Hitachi Ltd 外観検査方法および装置ならびに半導体装置の製造方法
JP2002357562A (ja) * 2001-03-30 2002-12-13 Ngk Insulators Ltd 欠陥を検出する検査方法及び検査装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69414297T2 (de) * 1993-03-31 1999-05-06 Ngk Insulators, Ltd., Nagoya, Aichi Verfahren und Vorrichtung zum Prüfen wabenförmiger Objekte mit mehreren Durchgangslöchern
JP4996856B2 (ja) * 2006-01-23 2012-08-08 株式会社日立ハイテクノロジーズ 欠陥検査装置およびその方法
JP5221858B2 (ja) * 2006-08-30 2013-06-26 株式会社日立ハイテクノロジーズ 欠陥検査装置、及び欠陥検査方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS643545A (en) * 1987-06-26 1989-01-09 Hitachi Ltd Method and apparatus for inspection
JPH01320445A (ja) * 1988-06-22 1989-12-26 Nec Corp 微小孔検出装置
JPH11326223A (ja) * 1998-05-21 1999-11-26 Sumitomo Wiring Syst Ltd 発煙試験装置及び発煙試験方法
JP2000162141A (ja) * 1998-11-27 2000-06-16 Hitachi Ltd 欠陥検査装置および方法
JP2000216208A (ja) * 1999-01-20 2000-08-04 Hitachi Ltd 外観検査方法および装置ならびに半導体装置の製造方法
JP2002357562A (ja) * 2001-03-30 2002-12-13 Ngk Insulators Ltd 欠陥を検出する検査方法及び検査装置

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104677303A (zh) * 2009-03-23 2015-06-03 日本碍子株式会社 封堵蜂窝结构的检查装置和封堵蜂窝结构的检查方法
JP2010230460A (ja) * 2009-03-26 2010-10-14 Ngk Insulators Ltd ハニカム構造体欠陥検査装置、及びハニカム構造体欠陥検査方法
JP2013519897A (ja) * 2010-02-17 2013-05-30 ダウ グローバル テクノロジーズ エルエルシー フィルターおよび膜の欠陥検知システム
KR101798268B1 (ko) * 2010-10-01 2017-11-15 다우 글로벌 테크놀로지스 엘엘씨 기판들의 기공 크기들을 분석하기 위한 시스템 및 방법
JP2012101469A (ja) * 2010-11-11 2012-05-31 Sumitomo Chemical Co Ltd ハニカム構造体の検査方法、及び、ハニカム構造体の検査装置
WO2012117942A1 (ja) * 2011-02-28 2012-09-07 日立金属株式会社 セラミックハニカムフィルタの製造方法、及びセラミックハニカムフィルタ
WO2012124773A1 (ja) * 2011-03-15 2012-09-20 住友化学株式会社 フィルタの欠陥の検査方法、及び、フィルタの欠陥の検査装置
WO2012124772A1 (ja) * 2011-03-15 2012-09-20 住友化学株式会社 フィルタ検査用ミスト供給装置
JP2012208119A (ja) * 2011-03-15 2012-10-25 Sumitomo Chemical Co Ltd フィルタの欠陥の検査方法、及び、フィルタの欠陥の検査装置
WO2013008848A1 (ja) * 2011-07-11 2013-01-17 住友化学株式会社 ハニカムフィルタの欠陥の検査方法及び検査装置並びにハニカムフィルタの製造方法
JP2013113806A (ja) * 2011-11-30 2013-06-10 Jfe Steel Corp 貫通欠陥検出装置及び貫通欠陥検出方法
JP2013142669A (ja) * 2012-01-12 2013-07-22 Sumitomo Chemical Co Ltd グリーンハニカム成形体の欠陥を検査する方法、グリーンハニカム構造体の製造方法及びグリーンハニカム成形体の欠陥の検査装置
WO2013105467A1 (ja) * 2012-01-12 2013-07-18 住友化学株式会社 グリーンハニカム成形体の欠陥を検査する方法、グリーンハニカム構造体の製造方法及びグリーンハニカム成形体の欠陥の検査装置
US9067376B2 (en) 2012-01-12 2015-06-30 Sumitomo Chemical Company, Limited Green honeycomb molding defect examination method, green honeycomb structure manufacturing method, and green honeycomb molding defect examination device
JP2013174492A (ja) * 2012-02-24 2013-09-05 Denso Corp 検査装置および検査方法
JP2014046285A (ja) * 2012-08-31 2014-03-17 Ngk Insulators Ltd モノリス型分離膜構造体の強度検査装置
JP2014046286A (ja) * 2012-08-31 2014-03-17 Ngk Insulators Ltd モノリス型分離膜構造体の強度検査方法
CN104865019A (zh) * 2015-05-11 2015-08-26 广西汽车集团有限公司 一种整车密封性试验方法
DE102021001112A1 (de) 2020-03-31 2021-09-30 Ngk Insulators, Ltd. Prüfverfahren für säulenförmigen Wabenfilter
JP2021162488A (ja) * 2020-03-31 2021-10-11 日本碍子株式会社 柱状ハニカムフィルタの検査方法
US11662293B2 (en) 2020-03-31 2023-05-30 Ngk Insulators, Ltd. Inspection method for pillar-shaped honeycomb filter
DE102021001112B4 (de) * 2020-03-31 2026-02-05 Ngk Insulators, Ltd. Prüfverfahren für säulenförmigen Wabenfilter
KR20230065913A (ko) * 2021-11-05 2023-05-12 한국전자기술연구원 셀의 기공 구조 분석 장치, 시스템 및 방법
KR102813892B1 (ko) 2021-11-05 2025-05-28 한국전자기술연구원 셀의 기공 구조 분석 장치, 시스템 및 방법
KR20240139826A (ko) * 2023-03-15 2024-09-24 조성천 레이저를 이용한 필터 리킹계측장치
KR102760348B1 (ko) 2023-03-15 2025-01-24 조성천 레이저를 이용한 필터 리킹계측장치
CN118603440A (zh) * 2024-08-06 2024-09-06 山西四建集团有限公司 一种楼板漏水位置快速定位装置

Also Published As

Publication number Publication date
US20100201983A1 (en) 2010-08-12
JPWO2009028709A1 (ja) 2010-12-09
JP5508852B2 (ja) 2014-06-04
CN101796381B (zh) 2013-05-01
CN101796381A (zh) 2010-08-04
US8422014B2 (en) 2013-04-16

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