WO2009022590A1 - 加熱炉および加熱炉の加熱方法 - Google Patents

加熱炉および加熱炉の加熱方法 Download PDF

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Publication number
WO2009022590A1
WO2009022590A1 PCT/JP2008/064083 JP2008064083W WO2009022590A1 WO 2009022590 A1 WO2009022590 A1 WO 2009022590A1 JP 2008064083 W JP2008064083 W JP 2008064083W WO 2009022590 A1 WO2009022590 A1 WO 2009022590A1
Authority
WO
WIPO (PCT)
Prior art keywords
heating
heated
subject
heating furnace
chamber
Prior art date
Application number
PCT/JP2008/064083
Other languages
English (en)
French (fr)
Inventor
Masanari Matsuura
Sotaro Oi
Tomoyuki Kubota
Masaya Tsuruta
Original Assignee
Toyota Jidosha Kabushiki Kaisha
Hirata Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Jidosha Kabushiki Kaisha, Hirata Corporation filed Critical Toyota Jidosha Kabushiki Kaisha
Priority to US12/448,356 priority Critical patent/US9033705B2/en
Priority to CN2008800037009A priority patent/CN101600926B/zh
Priority to KR1020097015490A priority patent/KR101107445B1/ko
Priority to DE112008000561.3T priority patent/DE112008000561B4/de
Publication of WO2009022590A1 publication Critical patent/WO2009022590A1/ja

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/0008Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0016Brazing of electronic components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/008Soldering within a furnace
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K31/00Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
    • B23K31/02Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to soldering or welding
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06Details, accessories, or equipment peculiar to furnaces of these types
    • F27B5/14Arrangements of heating devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06Details, accessories, or equipment peculiar to furnaces of these types
    • F27B5/16Arrangements of air or gas supply devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06Details, accessories, or equipment peculiar to furnaces of these types
    • F27B5/18Arrangement of controlling, monitoring, alarm or like devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00Arrangements of controlling devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/06Forming or maintaining special atmospheres or vacuum within heating chambers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • B23K2101/40Semiconductor devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

 水素減圧炉100は,被加熱体10を収納する処理室1と,ヒータランプ25を収納する加熱室2と,被加熱体10とヒータランプ25とを隔離する石英板3とを有している。水素減圧炉100では,ヒータランプ25からの輻射線によって被加熱体10が輻射加熱される。処理室1および加熱室2には,ともに気体の導入口11,21および排出口12,22が設けられ,気体の導入および排出が可能になっている。そして,被加熱体10の加熱処理時では,気体の出し入れにより,加熱室2が処理室1に対して正圧となるように各室の雰囲気圧力を調節する。
PCT/JP2008/064083 2007-08-10 2008-08-06 加熱炉および加熱炉の加熱方法 WO2009022590A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US12/448,356 US9033705B2 (en) 2007-08-10 2008-08-06 Heating furnace and heating method employed by heating furnace
CN2008800037009A CN101600926B (zh) 2007-08-10 2008-08-06 加热炉以及加热炉的加热方法
KR1020097015490A KR101107445B1 (ko) 2007-08-10 2008-08-06 가열로 및 가열로의 가열 방법
DE112008000561.3T DE112008000561B4 (de) 2007-08-10 2008-08-06 Heizofen und Heizverfahren unter Verwendung eines Heizofens

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007208785A JP4974805B2 (ja) 2007-08-10 2007-08-10 加熱炉および加熱炉の加熱方法
JP2007-208785 2007-08-10

Publications (1)

Publication Number Publication Date
WO2009022590A1 true WO2009022590A1 (ja) 2009-02-19

Family

ID=40350643

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/064083 WO2009022590A1 (ja) 2007-08-10 2008-08-06 加熱炉および加熱炉の加熱方法

Country Status (6)

Country Link
US (1) US9033705B2 (ja)
JP (1) JP4974805B2 (ja)
KR (1) KR101107445B1 (ja)
CN (1) CN101600926B (ja)
DE (1) DE112008000561B4 (ja)
WO (1) WO2009022590A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102679720A (zh) * 2012-05-13 2012-09-19 江苏有能电力自动化有限公司 一种容性变压器线圈烧结炉
WO2014115584A1 (ja) * 2013-01-24 2014-07-31 オリジン電気株式会社 加熱接合装置及び加熱接合製品の製造方法
JP6215426B1 (ja) * 2016-09-21 2017-10-18 オリジン電気株式会社 加熱装置及び板状部材の製造方法
CN113385763A (zh) * 2021-07-14 2021-09-14 成都共益缘真空设备有限公司 一种真空回流焊正负压结合焊接工艺

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US9084298B2 (en) * 2010-02-26 2015-07-14 Hitachi Kokusai Electric Inc. Substrate processing apparatus including shielding unit for suppressing leakage of magnetic field
GB201111735D0 (en) 2011-07-08 2011-08-24 Rec Wafer Norway As Furnace for semiconductor material and method
CN103374698A (zh) * 2012-04-23 2013-10-30 北京北方微电子基地设备工艺研究中心有限责任公司 加热腔室以及等离子体加工设备
KR101440911B1 (ko) * 2012-06-18 2014-09-18 주식회사 유진테크 기판증착장치
BR102012032031A2 (pt) * 2012-12-14 2014-09-09 Air Liquide Brasil Ltda Equipamento portátil para monitoramento e controle do nível de oxigênio em atmosfera de fornos de refusão
EP2792985B1 (de) * 2013-04-18 2014-11-26 Amann Girrbach AG Sintervorrichtung
EP2792332B1 (de) 2013-04-18 2015-03-11 Amann Girrbach AG Anordnung mit zumindest einem zu sinternden Werkstück
TWI537083B (zh) * 2014-03-18 2016-06-11 永發欣業有限公司 加熱單元及包含其之真空焊接機
DE102014114096A1 (de) 2014-09-29 2016-03-31 Danfoss Silicon Power Gmbh Sinterwerkzeug für den Unterstempel einer Sintervorrichtung
DE102014114093B4 (de) * 2014-09-29 2017-03-23 Danfoss Silicon Power Gmbh Verfahren zum Niedertemperatur-Drucksintern
DE102014114097B4 (de) 2014-09-29 2017-06-01 Danfoss Silicon Power Gmbh Sinterwerkzeug und Verfahren zum Sintern einer elektronischen Baugruppe
JP6575112B2 (ja) * 2015-04-02 2019-09-18 富士電機機器制御株式会社 熱処理装置
WO2017158813A1 (ja) * 2016-03-18 2017-09-21 富士機械製造株式会社 粘性流体供給装置
WO2019108812A1 (en) * 2017-11-29 2019-06-06 Decktop Metal, Inc. Furnace for sintering printed objects
CN109210940A (zh) * 2018-11-15 2019-01-15 开平市佰利丰纺织有限公司 一种高效热处理设备
KR102111960B1 (ko) * 2018-12-04 2020-05-18 주식회사 테스 기판처리장치
CN109631573A (zh) * 2018-12-28 2019-04-16 浙江中晶新能源有限公司 一种自动控温的烧结炉
KR102119402B1 (ko) * 2019-01-14 2020-06-05 주식회사 테스 기판처리장치
CN110394353B (zh) * 2019-07-31 2022-01-18 阜新建兴金属有限公司 一种固体废弃物的造块方法
KR20210001701U (ko) 2020-01-14 2021-07-22 고순남 골프 스윙 교정장치
KR20210001702U (ko) 2020-01-14 2021-07-22 고순남 골프 연습장치
US11317517B2 (en) * 2020-06-12 2022-04-26 PulseForge Incorporated Method for connecting surface-mount electronic components to a circuit board

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Publication number Priority date Publication date Assignee Title
CN102679720A (zh) * 2012-05-13 2012-09-19 江苏有能电力自动化有限公司 一种容性变压器线圈烧结炉
WO2014115584A1 (ja) * 2013-01-24 2014-07-31 オリジン電気株式会社 加熱接合装置及び加熱接合製品の製造方法
JP2014140870A (ja) * 2013-01-24 2014-08-07 Origin Electric Co Ltd 加熱接合装置及び加熱接合製品の製造方法
TWI556900B (zh) * 2013-01-24 2016-11-11 歐利生電氣股份有限公司 加熱接合裝置及加熱接合製品的製造方法
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JP6215426B1 (ja) * 2016-09-21 2017-10-18 オリジン電気株式会社 加熱装置及び板状部材の製造方法
WO2018056223A1 (ja) * 2016-09-21 2018-03-29 オリジン電気株式会社 加熱装置及び板状部材の製造方法
JP2018049727A (ja) * 2016-09-21 2018-03-29 オリジン電気株式会社 加熱装置及び板状部材の製造方法
CN113385763A (zh) * 2021-07-14 2021-09-14 成都共益缘真空设备有限公司 一种真空回流焊正负压结合焊接工艺

Also Published As

Publication number Publication date
JP4974805B2 (ja) 2012-07-11
US9033705B2 (en) 2015-05-19
US20090325116A1 (en) 2009-12-31
CN101600926A (zh) 2009-12-09
DE112008000561B4 (de) 2014-12-04
DE112008000561T5 (de) 2010-06-10
CN101600926B (zh) 2012-05-09
KR101107445B1 (ko) 2012-01-19
JP2009041081A (ja) 2009-02-26
KR20090099072A (ko) 2009-09-21

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