WO2009012750A2 - Verfahren und vorrichtung zur laserstrukturierung von solarzellen - Google Patents
Verfahren und vorrichtung zur laserstrukturierung von solarzellen Download PDFInfo
- Publication number
- WO2009012750A2 WO2009012750A2 PCT/DE2008/001153 DE2008001153W WO2009012750A2 WO 2009012750 A2 WO2009012750 A2 WO 2009012750A2 DE 2008001153 W DE2008001153 W DE 2008001153W WO 2009012750 A2 WO2009012750 A2 WO 2009012750A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- laser
- roll
- solar cells
- substrate
- parallel
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 36
- 239000002346 layers by function Substances 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 21
- 239000010410 layer Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 9
- 238000007493 shaping process Methods 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 5
- 239000012876 carrier material Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 claims description 3
- 238000002955 isolation Methods 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 2
- 238000003754 machining Methods 0.000 claims 1
- 239000008204 material by function Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000002985 plastic film Substances 0.000 description 5
- 229920006255 plastic film Polymers 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229920001002 functional polymer Polymers 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
- B23K26/0846—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt for moving elongated workpieces longitudinally, e.g. wire or strip material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
- H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/621—Providing a shape to conductive layers, e.g. patterning or selective deposition
Definitions
- the invention relates to a device and a method for continuous, highly productive and thermally gentle roll-to-roll laser structuring of electrodes and functional layers on a solar module with the aim of separating individual solar cells and interconnecting them in parallel or in series.
- EP 0962990 uses a laser for structuring a cadmium sulfide film of a solar cell. Also known is the laser structuring of transparent metal oxide layers such as indium tin oxide (ITO), eg EP 0322258, JP 10256583, JP 2006114428 and thin metallic layers, eg WO 03/061013.
- ITO indium tin oxide
- JP 2000208794 a laser structuring method for solar cells is described, in which a plurality of thin rectangular beam profiles are generated by pumping a plurality of laser oscillators (dye lasers) and with these the solar module, which can be moved with an x-y table in two mutually perpendicular directions, is structured.
- the known structuring and separation techniques are not or only partially suitable.
- DE 10212639 describes a roll-to-roll laser structuring method for structuring functional polymers in which a homogeneously illuminated mask is used. This method allows the production of arbitrary electrode structures with high resolution.
- a disadvantage, however, is that for energetic reasons, the area structurable per laser pulse can amount to only a few square centimeters. As a result, only substrate widths smaller than approx. 4 cm can be processed continuously in the roll-to-roll process.
- a mask method with an excimer laser for structuring ITO and metallic conductors in multilayer structures on plastic films for use in LCDs and OLEDs is also described in WO02065527 as well as the thus structured multilayer structures in US 2002/0110673.
- the disadvantage of this method is again the small surface processable per laser pulse and the resulting small processing width of a few centimeters.
- UV lasers with very short pulse lengths of 20 ns and below, since here the material removal occurs predominantly photochemically without significant thermal stress.
- UV light is absorbed well by almost all plastic films, so that no additional absorber layers are needed.
- a major disadvantage of all previously known methods is the limitation of the process speed to values of a few square meters / hour.
- the object of the invention is to specify a method and a device for the efficient roll-to-roll laser structuring of electrodes and functional layers on a solar module, with the aim of separating individual solar cells and connecting them to one another in series boarded. Larger working widths are to be achieved by enlarging the area which can be processed per laser pulse, as well as high belt speeds, and thermal loading of the flexible carrier material or of thermally sensitive organic functional materials is to be avoided.
- This object is achieved in that the laser structuring of the relevant layers, which were previously deposited on a flexible carrier material, occurs with continuous movement of the coated carrier material in a roll-to-roll process and the available laser light is efficiently utilized, by focusing on the very narrow, only about 100 micron wide areas to be exposed via a beam shaping unit.
- belt speeds of several meters / second can be achieved with a web width of 5 cm to about 1 m, which enables process speeds of a few thousand square meters / hour.
- the structuring takes place by local removal of the layers with a UV laser pulse of sufficiently high intensity. It must be ensured that the complete removal takes place with only one laser pulse so as not to interrupt the process flow. With a laser pulse one or more layers can be removed simultaneously. In order to minimize the thermal damage to the adjacent, non-ablated areas, a pulse duration of a few nanoseconds and below is preferably used. At the same time, this ensures that the strip moves only insignificantly during the exposure time, ie, significantly less than 1 ⁇ m.
- the belt speed and the pulse rate of the laser are coordinated so that a complete structuring takes place in the running direction.
- a powerful suction is used.
- the structuring can take place in a vacuum and / or a subsequent one
- the cleaning step must be such that loosely-adhering material is removed but the functionalities remaining on the substrate are removed. layers are not replaced. For this purpose, for example, compressed air or a high pressure water jet into consideration.
- the device according to the invention for roll-to-roll laser structuring of solar modules consists of an unwinding unit 3, a take-up unit 4, a laser 1, a beam shaping unit 2, a substrate table 7, a synchronization unit 8 and an extraction unit.
- the winding and unwinding units ensure the transport of the coated substrate 5 at a constant, adjustable speed. This speed is matched to the pulse rate of the laser and the length of the laser pulse to be ablated lines.
- the regulation of the pulse rate relative to the belt speed is handled by the synchronization unit, which may be a camera system, for example.
- the substrate table is adjustable in height and ensures that the coated substrate is held in a defined plane, eg by suction with slight negative pressure.
- the laser used may be pulsed excimer lasers or a frequency-tripled Nd: YAG laser whose pulse energy and pulse rate can be regulated within a certain range.
- the beam shaping unit can be designed differently.
- the laser beam is split with one or more beam splitters 10 into a plurality of beams. These partial beams are then focused with cylindrical lenses 11 and 12 so that a plurality of parallel line-shaped exposure zones are formed. All optical elements are made of UV-transparent quartz glass. This field of parallel lines can be aligned either parallel or perpendicular to the direction of travel of the belt so that insulating trenches can be created either longitudinally or transversely to the direction of travel. In this embodiment of the method and the device, tape speeds of the moving coated substrate of several m / s can be achieved.
- the workable web width results from the number of sub-beams produced and the line spacing required for the optimum function of the solar module on the substrate.
- the machinable web width results from the geometric length of the cylindrical lens 12 used for focusing.
- Another variant of the beamforming unit produces a focused laser beam having a square or circular beam profile both transversely and at a high pulse repetition rate across the substrate surface is moved longitudinally to the direction. The distraction can be done with a galvano scanner.
- the achievable belt speeds of the moving coated substrate are in the range of a few cm / s.
- An ITO-coated polyester film with an ITO layer thickness of 100 nm and a surface resistance of 60 ⁇ is irradiated with an excimer laser pulse of wavelength 248 nm, the pulse energy 45 mJ and a pulse duration of about 20 ns.
- two crossed plano-convex cylindrical lenses made of quartz glass are used for focusing and beam shaping. The distance of the lenses was 25 cm.
- the laser-side lens has a focal length of 100 mm and a length of 50 mm.
- the substrate-side lens has a focal length of 60 mm and a length of 50 mm. In this way, an insulating trench is obtained in the ITO layer with a width of 117 ⁇ m and a length of 50 mm.
- a coating coated with ITO and / or the solar-active layer tetes band with a width of 30 cm is to be divided longitudinally into 25, electrically insulated strips of 1 cm width.
- an array of 26 cylindrical lenses (according to Fig. 2) is used to generate 26 line-shaped, parallel partial beams with a length of 3 cm.
- the coated surface is exactly or at least approximately in the focus of the cylindrical lenses.
- an excimer laser with a wavelength of 248 nm, a pulse energy of 650 mJ, a pulse duration of about 20 ns and a repetition rate of 100 Hz is used.
- the coated belt can be moved at a speed of up to 3 m / s to obtain continuous lines, resulting in a process speed of 3240 m 2 / h.
- Such tape speeds are not feasible with a writing beam.
- even higher belt speeds and / or greater processing widths can be achieved with a further optimized device according to the invention.
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Laser Beam Processing (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112008002580T DE112008002580A5 (de) | 2007-07-23 | 2008-07-12 | Verfahren und Vorrichtung zur Laserstrukturierung von Solarzellen |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007034644.3 | 2007-07-23 | ||
DE102007034644A DE102007034644A1 (de) | 2007-07-23 | 2007-07-23 | Verfahren und Vorrichtung zur Laserstrukturierung von Solarzellen |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009012750A2 true WO2009012750A2 (de) | 2009-01-29 |
WO2009012750A3 WO2009012750A3 (de) | 2009-07-09 |
Family
ID=40157168
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2008/001153 WO2009012750A2 (de) | 2007-07-23 | 2008-07-12 | Verfahren und vorrichtung zur laserstrukturierung von solarzellen |
Country Status (2)
Country | Link |
---|---|
DE (2) | DE102007034644A1 (de) |
WO (1) | WO2009012750A2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115815821A (zh) * | 2022-12-08 | 2023-03-21 | 深圳铭创智能装备有限公司 | 激光加工连续图形的装置与方法及电子器件蚀刻装置与方法 |
WO2024046736A1 (de) | 2022-09-01 | 2024-03-07 | Saint-Gobain Glass France | Verbundglasscheibe mit verbesserter spektraler reflektion |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202009011260U1 (de) | 2009-08-15 | 2009-10-22 | Bentzinger, Frank | Photovoltaikmodul mit wenigstens einer Solarzelle |
DE102009037964A1 (de) | 2009-08-15 | 2011-03-03 | Frank Bentzinger | Photovoltaikmodul mit wenigstens einer Solarzelle und Verfahren zur Strukturierung einer Solarzelle |
DE102010001036A1 (de) * | 2010-01-20 | 2011-07-21 | Robert Bosch GmbH, 70469 | Verfahren und Vorrichtung zur mehrfachen Nutzung von Laserquellen |
DE102010038259B4 (de) * | 2010-10-19 | 2013-02-07 | 4Jet Sales + Service Gmbh | Verfahren und Vorrichtung zum Gravieren eines flexiblen Bands |
CN109841549B (zh) * | 2017-11-28 | 2020-11-13 | 中国科学院金属研究所 | 一种无损转移自支撑低维材料的方法 |
Citations (11)
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EP0536431A1 (de) * | 1991-10-07 | 1993-04-14 | Siemens Aktiengesellschaft | Laserbearbeitungsverfahren für einen Dünnschichtaufbau |
US5216543A (en) * | 1987-03-04 | 1993-06-01 | Minnesota Mining And Manufacturing Company | Apparatus and method for patterning a film |
US6034349A (en) * | 1997-05-28 | 2000-03-07 | Komatsu Ltd. | Laser machining system for sequential irradiation of machining points |
US6040552A (en) * | 1997-01-30 | 2000-03-21 | Jain; Kanti | High-speed drilling system for micro-via pattern formation, and resulting structure |
DE19915666A1 (de) * | 1999-04-07 | 2000-10-19 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zur selektiven Kontaktierung von Solarzellen |
WO2001041967A1 (en) * | 1999-12-07 | 2001-06-14 | First Solar, Llc | Apparatus and method for laser scribing a coated substrate |
WO2002092274A1 (en) * | 2001-05-17 | 2002-11-21 | Laser Machining, Inc. | Method and apparatus for improving laser hole resolution |
US20030047695A1 (en) * | 2001-09-07 | 2003-03-13 | Preco Laser Systems, Llc | System and method for synchronizing a laser beam to a moving web |
WO2003067671A1 (en) * | 2002-02-06 | 2003-08-14 | Bp Corporation North America Inc. | Process for producing photovoltaic devices |
WO2003080285A1 (de) * | 2002-03-21 | 2003-10-02 | Louis Pöhlau Lohrentz | Vorrichtung und verfahren zur laserstrukturierung von funktionspolymeren und verwendungen |
JP2007027283A (ja) * | 2005-07-13 | 2007-02-01 | Fuji Electric Holdings Co Ltd | 薄膜太陽電池製造方法および製造装置 |
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US20050272175A1 (en) * | 2004-06-02 | 2005-12-08 | Johannes Meier | Laser structuring for manufacture of thin film silicon solar cells |
JP4641172B2 (ja) | 2004-10-18 | 2011-03-02 | 大日本印刷株式会社 | Ito膜のパターンニング方法 |
-
2007
- 2007-07-23 DE DE102007034644A patent/DE102007034644A1/de not_active Withdrawn
-
2008
- 2008-07-12 WO PCT/DE2008/001153 patent/WO2009012750A2/de active Application Filing
- 2008-07-12 DE DE112008002580T patent/DE112008002580A5/de not_active Ceased
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US5216543A (en) * | 1987-03-04 | 1993-06-01 | Minnesota Mining And Manufacturing Company | Apparatus and method for patterning a film |
EP0536431A1 (de) * | 1991-10-07 | 1993-04-14 | Siemens Aktiengesellschaft | Laserbearbeitungsverfahren für einen Dünnschichtaufbau |
US6040552A (en) * | 1997-01-30 | 2000-03-21 | Jain; Kanti | High-speed drilling system for micro-via pattern formation, and resulting structure |
US6034349A (en) * | 1997-05-28 | 2000-03-07 | Komatsu Ltd. | Laser machining system for sequential irradiation of machining points |
DE19915666A1 (de) * | 1999-04-07 | 2000-10-19 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zur selektiven Kontaktierung von Solarzellen |
WO2001041967A1 (en) * | 1999-12-07 | 2001-06-14 | First Solar, Llc | Apparatus and method for laser scribing a coated substrate |
WO2002092274A1 (en) * | 2001-05-17 | 2002-11-21 | Laser Machining, Inc. | Method and apparatus for improving laser hole resolution |
US20030047695A1 (en) * | 2001-09-07 | 2003-03-13 | Preco Laser Systems, Llc | System and method for synchronizing a laser beam to a moving web |
WO2003067671A1 (en) * | 2002-02-06 | 2003-08-14 | Bp Corporation North America Inc. | Process for producing photovoltaic devices |
WO2003080285A1 (de) * | 2002-03-21 | 2003-10-02 | Louis Pöhlau Lohrentz | Vorrichtung und verfahren zur laserstrukturierung von funktionspolymeren und verwendungen |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024046736A1 (de) | 2022-09-01 | 2024-03-07 | Saint-Gobain Glass France | Verbundglasscheibe mit verbesserter spektraler reflektion |
CN115815821A (zh) * | 2022-12-08 | 2023-03-21 | 深圳铭创智能装备有限公司 | 激光加工连续图形的装置与方法及电子器件蚀刻装置与方法 |
CN115815821B (zh) * | 2022-12-08 | 2023-08-11 | 深圳铭创智能装备有限公司 | 激光加工连续图形的装置与方法及电子器件蚀刻装置与方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2009012750A3 (de) | 2009-07-09 |
DE102007034644A1 (de) | 2009-01-29 |
DE112008002580A5 (de) | 2010-06-24 |
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