WO2009012750A3 - Verfahren und vorrichtung zur laserstrukturierung von solarzellen - Google Patents

Verfahren und vorrichtung zur laserstrukturierung von solarzellen Download PDF

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Publication number
WO2009012750A3
WO2009012750A3 PCT/DE2008/001153 DE2008001153W WO2009012750A3 WO 2009012750 A3 WO2009012750 A3 WO 2009012750A3 DE 2008001153 W DE2008001153 W DE 2008001153W WO 2009012750 A3 WO2009012750 A3 WO 2009012750A3
Authority
WO
WIPO (PCT)
Prior art keywords
solar cells
structuring
laser structuring
speeds
roll
Prior art date
Application number
PCT/DE2008/001153
Other languages
English (en)
French (fr)
Other versions
WO2009012750A2 (de
Inventor
Mario Schroedner
Ralph-Ingo Stohn
Original Assignee
Thueringisches Inst Textil
Mario Schroedner
Ralph-Ingo Stohn
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thueringisches Inst Textil, Mario Schroedner, Ralph-Ingo Stohn filed Critical Thueringisches Inst Textil
Priority to DE112008002580T priority Critical patent/DE112008002580A5/de
Publication of WO2009012750A2 publication Critical patent/WO2009012750A2/de
Publication of WO2009012750A3 publication Critical patent/WO2009012750A3/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
    • B23K26/0846—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt for moving elongated workpieces longitudinally, e.g. wire or strip material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80—Constructional details
    • H10K30/81—Electrodes
    • H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/621—Providing a shape to conductive layers, e.g. patterning or selective deposition

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Photovoltaic Devices (AREA)

Abstract

Mit einem Verfahren und einer Vorrichtung zur Laserstrukturierung von Elektroden und Funktionsschichten werden in einem kontinuierlichen Rolle-zu-Rolle-Prozess Solarmodule in einzelne Solarzellen separiert und miteinander elektrisch verschaltet. Durch eine Vergrößerung der pro Laserimpuls bearbeiteten Fläche sowie bei Bandgeschwindigkeiten von mehreren Metern/s der ein- oder mehrfach mit Funktionsmaterialien beschichteten flexiblen Trägerfolie wird eine thermisch schonende Strukturierung bei hohen Prozessgeschwindigkeiten erzielt.
PCT/DE2008/001153 2007-07-23 2008-07-12 Verfahren und vorrichtung zur laserstrukturierung von solarzellen WO2009012750A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE112008002580T DE112008002580A5 (de) 2007-07-23 2008-07-12 Verfahren und Vorrichtung zur Laserstrukturierung von Solarzellen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007034644.3 2007-07-23
DE102007034644A DE102007034644A1 (de) 2007-07-23 2007-07-23 Verfahren und Vorrichtung zur Laserstrukturierung von Solarzellen

Publications (2)

Publication Number Publication Date
WO2009012750A2 WO2009012750A2 (de) 2009-01-29
WO2009012750A3 true WO2009012750A3 (de) 2009-07-09

Family

ID=40157168

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2008/001153 WO2009012750A2 (de) 2007-07-23 2008-07-12 Verfahren und vorrichtung zur laserstrukturierung von solarzellen

Country Status (2)

Country Link
DE (2) DE102007034644A1 (de)
WO (1) WO2009012750A2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009037964A1 (de) 2009-08-15 2011-03-03 Frank Bentzinger Photovoltaikmodul mit wenigstens einer Solarzelle und Verfahren zur Strukturierung einer Solarzelle
DE202009011260U1 (de) 2009-08-15 2009-10-22 Bentzinger, Frank Photovoltaikmodul mit wenigstens einer Solarzelle
DE102010001036A1 (de) * 2010-01-20 2011-07-21 Robert Bosch GmbH, 70469 Verfahren und Vorrichtung zur mehrfachen Nutzung von Laserquellen
DE102010038259B4 (de) * 2010-10-19 2013-02-07 4Jet Sales + Service Gmbh Verfahren und Vorrichtung zum Gravieren eines flexiblen Bands
CN109841549B (zh) * 2017-11-28 2020-11-13 中国科学院金属研究所 一种无损转移自支撑低维材料的方法
WO2024046736A1 (de) 2022-09-01 2024-03-07 Saint-Gobain Glass France Verbundglasscheibe mit verbesserter spektraler reflektion
CN115815821B (zh) * 2022-12-08 2023-08-11 深圳铭创智能装备有限公司 激光加工连续图形的装置与方法及电子器件蚀刻装置与方法

Citations (11)

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EP0536431A1 (de) * 1991-10-07 1993-04-14 Siemens Aktiengesellschaft Laserbearbeitungsverfahren für einen Dünnschichtaufbau
US5216543A (en) * 1987-03-04 1993-06-01 Minnesota Mining And Manufacturing Company Apparatus and method for patterning a film
US6034349A (en) * 1997-05-28 2000-03-07 Komatsu Ltd. Laser machining system for sequential irradiation of machining points
US6040552A (en) * 1997-01-30 2000-03-21 Jain; Kanti High-speed drilling system for micro-via pattern formation, and resulting structure
DE19915666A1 (de) * 1999-04-07 2000-10-19 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur selektiven Kontaktierung von Solarzellen
WO2001041967A1 (en) * 1999-12-07 2001-06-14 First Solar, Llc Apparatus and method for laser scribing a coated substrate
WO2002092274A1 (en) * 2001-05-17 2002-11-21 Laser Machining, Inc. Method and apparatus for improving laser hole resolution
US20030047695A1 (en) * 2001-09-07 2003-03-13 Preco Laser Systems, Llc System and method for synchronizing a laser beam to a moving web
WO2003067671A1 (en) * 2002-02-06 2003-08-14 Bp Corporation North America Inc. Process for producing photovoltaic devices
WO2003080285A1 (de) * 2002-03-21 2003-10-02 Louis Pöhlau Lohrentz Vorrichtung und verfahren zur laserstrukturierung von funktionspolymeren und verwendungen
JP2007027283A (ja) * 2005-07-13 2007-02-01 Fuji Electric Holdings Co Ltd 薄膜太陽電池製造方法および製造装置

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DE3880807T2 (de) 1987-12-23 1993-08-12 Semiconductor Energy Lab Verfahren fuer die herstellung von duennen filmmustern auf substraten.
JP3017422B2 (ja) * 1995-09-11 2000-03-06 キヤノン株式会社 光起電力素子アレー及びその製造方法
JPH10256583A (ja) 1997-03-14 1998-09-25 Mitsubishi Heavy Ind Ltd 集積型薄膜太陽電池
JPH11354818A (ja) 1998-06-05 1999-12-24 Matsushita Battery Industrial Co Ltd 太陽電池の製造方法
JP2000208794A (ja) 1999-01-19 2000-07-28 Fuji Electric Co Ltd 薄膜太陽電池等のパタ―ン状薄膜層のレ―ザパタ―ニング方法および装置
US20020110673A1 (en) 2001-02-14 2002-08-15 Ramin Heydarpour Multilayered electrode/substrate structures and display devices incorporating the same
US6762124B2 (en) 2001-02-14 2004-07-13 Avery Dennison Corporation Method for patterning a multilayered conductor/substrate structure
EP1466368A1 (de) * 2002-01-07 2004-10-13 BP Corporation North America Inc. Herstellungsverfahren für dünnfilm photovoltaic module
DE102004016313A1 (de) * 2004-03-29 2005-10-13 Klaus Dr. Kalberlah Verfahren und Einrichtung zur Separation von Einzelzellen aus einem flexiblen Solarzellen-Band
US20050272175A1 (en) * 2004-06-02 2005-12-08 Johannes Meier Laser structuring for manufacture of thin film silicon solar cells
JP4641172B2 (ja) 2004-10-18 2011-03-02 大日本印刷株式会社 Ｉｔｏ膜のパターンニング方法

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216543A (en) * 1987-03-04 1993-06-01 Minnesota Mining And Manufacturing Company Apparatus and method for patterning a film
EP0536431A1 (de) * 1991-10-07 1993-04-14 Siemens Aktiengesellschaft Laserbearbeitungsverfahren für einen Dünnschichtaufbau
US6040552A (en) * 1997-01-30 2000-03-21 Jain; Kanti High-speed drilling system for micro-via pattern formation, and resulting structure
US6034349A (en) * 1997-05-28 2000-03-07 Komatsu Ltd. Laser machining system for sequential irradiation of machining points
DE19915666A1 (de) * 1999-04-07 2000-10-19 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur selektiven Kontaktierung von Solarzellen
WO2001041967A1 (en) * 1999-12-07 2001-06-14 First Solar, Llc Apparatus and method for laser scribing a coated substrate
WO2002092274A1 (en) * 2001-05-17 2002-11-21 Laser Machining, Inc. Method and apparatus for improving laser hole resolution
US20030047695A1 (en) * 2001-09-07 2003-03-13 Preco Laser Systems, Llc System and method for synchronizing a laser beam to a moving web
WO2003067671A1 (en) * 2002-02-06 2003-08-14 Bp Corporation North America Inc. Process for producing photovoltaic devices
WO2003080285A1 (de) * 2002-03-21 2003-10-02 Louis Pöhlau Lohrentz Vorrichtung und verfahren zur laserstrukturierung von funktionspolymeren und verwendungen
JP2007027283A (ja) * 2005-07-13 2007-02-01 Fuji Electric Holdings Co Ltd 薄膜太陽電池製造方法および製造装置

Also Published As

Publication number Publication date
DE102007034644A1 (de) 2009-01-29
DE112008002580A5 (de) 2010-06-24
WO2009012750A2 (de) 2009-01-29

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