WO2009011233A1 - 焼結シリコンウエハ - Google Patents
焼結シリコンウエハ Download PDFInfo
- Publication number
- WO2009011233A1 WO2009011233A1 PCT/JP2008/062172 JP2008062172W WO2009011233A1 WO 2009011233 A1 WO2009011233 A1 WO 2009011233A1 JP 2008062172 W JP2008062172 W JP 2008062172W WO 2009011233 A1 WO2009011233 A1 WO 2009011233A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- silicon wafer
- average
- sintered
- sintered silicon
- 20kgf
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/21—Circular sheet or circular blank
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/268—Monolayer with structurally defined element
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Silicon Compounds (AREA)
- Physical Vapour Deposition (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200880023643.0A CN101687709B (zh) | 2007-07-13 | 2008-07-04 | 烧结硅晶片 |
EP08777887A EP2168934B1 (en) | 2007-07-13 | 2008-07-04 | Sintered silicon wafer |
JP2009523599A JP5432712B2 (ja) | 2007-07-13 | 2008-07-04 | 焼結シリコンウエハ |
US12/668,239 US20100330325A1 (en) | 2007-07-13 | 2008-07-04 | Sintered Silicon Wafer |
AT08777887T ATE540906T1 (de) | 2007-07-13 | 2008-07-04 | Gesinterter silicium-wafer |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-184756 | 2007-07-13 | ||
JP2007184756 | 2007-07-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009011233A1 true WO2009011233A1 (ja) | 2009-01-22 |
Family
ID=40259571
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/062172 WO2009011233A1 (ja) | 2007-07-13 | 2008-07-04 | 焼結シリコンウエハ |
Country Status (8)
Country | Link |
---|---|
US (1) | US20100330325A1 (ja) |
EP (1) | EP2168934B1 (ja) |
JP (1) | JP5432712B2 (ja) |
KR (1) | KR101211983B1 (ja) |
CN (1) | CN101687709B (ja) |
AT (1) | ATE540906T1 (ja) |
TW (1) | TWI489015B (ja) |
WO (1) | WO2009011233A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120009374A1 (en) * | 2010-07-08 | 2012-01-12 | Nippon Mining & Metals Co., Ltd. | Hybrid Silicon Wafer and Method of Producing the Same |
US8236428B2 (en) | 2008-07-10 | 2012-08-07 | Jx Nippon Mining & Metals Corporation | Hybrid silicon wafer and method for manufacturing same |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4323562B2 (ja) * | 2007-07-13 | 2009-09-02 | 日鉱金属株式会社 | 焼結シリコンウエハ |
EP2497848A4 (en) | 2009-11-06 | 2014-08-06 | Jx Nippon Mining & Metals Corp | HYBRID SILICON WAFER |
EP2497849A4 (en) | 2009-11-06 | 2014-08-06 | Jx Nippon Mining & Metals Corp | HYBRID SILICON WAFER |
US8252422B2 (en) | 2010-07-08 | 2012-08-28 | Jx Nippon Mining & Metals Corporation | Hybrid silicon wafer and method of producing the same |
US8987737B2 (en) | 2011-03-15 | 2015-03-24 | Jx Nippon Mining & Metals Corporation | Polycrystalline silicon wafer |
US9982334B2 (en) | 2012-02-01 | 2018-05-29 | Jx Nippon Mining & Metals Corporation | Polycrystalline silicon sputtering target |
JP5826915B2 (ja) | 2012-03-12 | 2015-12-02 | Jx日鉱日石金属株式会社 | 多結晶シリコンウエハ |
JP6502399B2 (ja) | 2017-02-06 | 2019-04-17 | Jx金属株式会社 | 単結晶シリコンスパッタリングターゲット |
JP6546953B2 (ja) | 2017-03-31 | 2019-07-17 | Jx金属株式会社 | スパッタリングターゲット−バッキングプレート接合体及びその製造方法 |
CN115012027A (zh) * | 2022-06-29 | 2022-09-06 | 山东大学 | 一种生长氮化铝单晶用可控粒径氮化铝原料的制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11340155A (ja) * | 1998-05-22 | 1999-12-10 | Toshiba Ceramics Co Ltd | 半導体ウェーハ熱処理用部材およびこれを用いた治具 |
JP2003286023A (ja) * | 2002-03-27 | 2003-10-07 | Tdk Corp | シリコン焼結体の製造方法およびシリコン焼結体 |
JP2004289065A (ja) * | 2003-03-25 | 2004-10-14 | Nikko Materials Co Ltd | シリコン焼結体及びその製造方法 |
JP2004284929A (ja) * | 2003-03-25 | 2004-10-14 | Nikko Materials Co Ltd | シリコン焼結体の製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4040849A (en) * | 1976-01-06 | 1977-08-09 | General Electric Company | Polycrystalline silicon articles by sintering |
JP3342898B2 (ja) * | 1991-11-26 | 2002-11-11 | 株式会社東芝 | 硅素焼結体およびこれを用いて形成したウェハ保持用ボード、スパッタリングターゲットおよびシリコンウェハ |
JP2794382B2 (ja) * | 1993-05-07 | 1998-09-03 | 株式会社ジャパンエナジー | スパッタリング用シリサイドターゲット及びその製造方法 |
US5770324A (en) * | 1997-03-03 | 1998-06-23 | Saint-Gobain Industrial Ceramics, Inc. | Method of using a hot pressed silicon carbide dummy wafer |
JP4238357B2 (ja) * | 2003-08-19 | 2009-03-18 | 独立行政法人産業技術総合研究所 | 炭化珪素エピタキシャルウエハ、同ウエハの製造方法及び同ウエハ上に作製された半導体装置 |
CN100376039C (zh) * | 2005-02-05 | 2008-03-19 | 江苏林洋新能源有限公司 | 高效晶体硅电池规模化制造方法 |
CN1941426A (zh) * | 2005-09-26 | 2007-04-04 | 中芯国际集成电路制造(上海)有限公司 | N-型硅片上制造太阳能电池的方法 |
CN1967881A (zh) * | 2005-11-17 | 2007-05-23 | 上海太阳能科技有限公司 | 太阳电池硅表面生成多孔硅的方法 |
US8236428B2 (en) * | 2008-07-10 | 2012-08-07 | Jx Nippon Mining & Metals Corporation | Hybrid silicon wafer and method for manufacturing same |
-
2008
- 2008-07-04 JP JP2009523599A patent/JP5432712B2/ja active Active
- 2008-07-04 WO PCT/JP2008/062172 patent/WO2009011233A1/ja active Application Filing
- 2008-07-04 CN CN200880023643.0A patent/CN101687709B/zh active Active
- 2008-07-04 EP EP08777887A patent/EP2168934B1/en active Active
- 2008-07-04 US US12/668,239 patent/US20100330325A1/en not_active Abandoned
- 2008-07-04 AT AT08777887T patent/ATE540906T1/de active
- 2008-07-04 KR KR1020107000517A patent/KR101211983B1/ko active IP Right Grant
- 2008-07-10 TW TW097126036A patent/TWI489015B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11340155A (ja) * | 1998-05-22 | 1999-12-10 | Toshiba Ceramics Co Ltd | 半導体ウェーハ熱処理用部材およびこれを用いた治具 |
JP2003286023A (ja) * | 2002-03-27 | 2003-10-07 | Tdk Corp | シリコン焼結体の製造方法およびシリコン焼結体 |
JP2004289065A (ja) * | 2003-03-25 | 2004-10-14 | Nikko Materials Co Ltd | シリコン焼結体及びその製造方法 |
JP2004284929A (ja) * | 2003-03-25 | 2004-10-14 | Nikko Materials Co Ltd | シリコン焼結体の製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8236428B2 (en) | 2008-07-10 | 2012-08-07 | Jx Nippon Mining & Metals Corporation | Hybrid silicon wafer and method for manufacturing same |
US20120009374A1 (en) * | 2010-07-08 | 2012-01-12 | Nippon Mining & Metals Co., Ltd. | Hybrid Silicon Wafer and Method of Producing the Same |
Also Published As
Publication number | Publication date |
---|---|
EP2168934A1 (en) | 2010-03-31 |
EP2168934A4 (en) | 2010-08-04 |
TWI489015B (zh) | 2015-06-21 |
ATE540906T1 (de) | 2012-01-15 |
JPWO2009011233A1 (ja) | 2010-09-16 |
KR20100022519A (ko) | 2010-03-02 |
JP5432712B2 (ja) | 2014-03-05 |
TW200907119A (en) | 2009-02-16 |
US20100330325A1 (en) | 2010-12-30 |
CN101687709A (zh) | 2010-03-31 |
CN101687709B (zh) | 2013-02-13 |
EP2168934B1 (en) | 2012-01-11 |
KR101211983B1 (ko) | 2012-12-13 |
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