Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
  • F17C7/02—Discharging liquefied gases
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C13/00—Details of vessels or of the filling or discharging of vessels
  • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
  • F17C13/023—Special adaptations of indicating, measuring, or monitoring equipment having the mass as the parameter
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C13/00—Details of vessels or of the filling or discharging of vessels
  • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
  • F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C2221/00—Handled fluid, in particular type of fluid
  • F17C2221/01—Pure fluids
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C2221/00—Handled fluid, in particular type of fluid
  • F17C2221/03—Mixtures
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
  • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
  • F17C2223/0107—Single phase
  • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
  • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
  • F17C2223/0146—Two-phase
  • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
  • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
  • F17C2223/035—High pressure (>10 bar)
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
  • F17C2250/03—Control means
  • F17C2250/032—Control means using computers
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
  • F17C2250/04—Indicating or measuring of parameters as input values
  • F17C2250/0404—Parameters indicated or measured
  • F17C2250/0421—Mass or weight of the content of the vessel
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
  • F17C2250/04—Indicating or measuring of parameters as input values
  • F17C2250/0404—Parameters indicated or measured
  • F17C2250/043—Pressure
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C2260/00—Purposes of gas storage and gas handling
  • F17C2260/02—Improving properties related to fluid or fluid transfer
  • F17C2260/024—Improving metering
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
  • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
  • F17C2270/00—Applications
  • F17C2270/05—Applications for industrial use
  • F17C2270/0518—Semiconductors

Definitions

• This invention pertains to a fluid supply system such, for example, as a fluid supply system that supplies various gasses, liquid gasses or liquid filled in high- pressure containers.
• Aforementioned filling number 107 is based on the filling order of each high-pressure gas container calculated from the number of systems of aforementioned filling pedestals A and B, the number of filling ports A1 ⁇ A30 and B1 ⁇ B30, and the number of high-pressure gas containers 110 input at the time of filling the gas, and the filling number 107 is printed on aforementioned label 101.
• 103 is the filling pressure
• 104 is the capacity
• 106 is the manufacturer
• 108 represents the bar code (refer, for example, to patent document 1 ).
• a bottom-inspection management device that inspects the bottom of the high-pressure container to be filled with liquefied gas has been proposed as shown in figure 6. That is, the unique number, container type and manufacture date of high- pressure container 201 are input in advance, the filling time-limit, within which the bottom inspection is unnecessary, is calculated at filling time-limit calculation section 207a by adding a prescribed period (15 or 8 years) depending on the container type to the manufacture date, and these data are memorized in memory section 208.
• the unique corresponding number of high-pressure container 201 is read by barcode reader, and if the filling time-limit is before the current time of filling, then warning section 209 alerts the fact the time-limit has expired.
• the renewed data calculation section renews the data to the new filling time-limit by adding a prescribed period to the filling time-limit of the container's unique number.
• 202 represents the filling device
• 203 the barcode label
• 205 the control section
• 206 the key input section
• 207b the renewed data calculation section (refer to patent document 2 for example).
• Patent document 1 Patent published unexamined application JP1995-280190.
• Patent document 2 Patent published unexamined application J P1993-256400.
• the objective of this invention is to provide a fluid supply system that enables swift and safe maintenance and management of filling containers for such materials as liquefied gas to prevent supply system troubles caused by human errors or spread of damage to the consumption facility by employing a simple structure that is easy to operate.
• the inventors of this invention reached completion of this invention after accumulation of dedicated research to realize the aforementioned objective by the fluid supply system as described below.
• This invention is a fluid supply system characterized by having a filling container filled with fluid, a mounting section for said filling container to be mounted, a joint section hermetically connected to the outlet port of aforementioned filling container, a piping section with its one end being said joint section, a facility that consumes aforementioned fluid, and a process control section that controls and manages said fluid consumption facility, characterized by also having a data recording section A that is written so that data a including the attributes of aforementioned filled fluid and its filling condition can be read out, a data recording section B that is written so that data b including the attributes of aforementioned filled fluid to which the piping system including aforementioned joint section and piping section can be applied and its acceptance conditions can be read out, a data recording section C that is written so that data c including the attributes of fluid required for (acceptance by) the facility that consumes aforementioned fluid and its acceptance conditions can be read out, a data readout section that can read out any or all of the data a though c, and a data
• the metal adapter at the outlet may be designated to have a particular shape, and the container may be distinguished by color according to the component to fill.
• the metal adapter for example, there is an exclusive shape for acethylene, and many of the combustible gasses such as hydrogen and methane require a shape that has male- screw that turns counterclockwise.
• the color of the container in many cases, red for hydrogen, green for carbon dioxide, blue for carbon monoxide, and white for ammonia are used. Therefore, if the intake section of the joint section is shaped to fit the shape of the outlet adapter, it is possible to avoid misconnection caused by human error, but this is not necessarily simple.
• this invention introduces a system that automatically assesses the compatibility, rather than leaving it to human judgement, by preparing objective data a including the attributes of aforementioned fluid filled in the filling container and its filling condition, data b including the attributes of fluid to which the piping system including the joint section and piping section thereafter can be applied and its acceptance conditions, and data c including the attributes of fluid required for (acceptance by) the facility that consumes aforementioned fluid and its acceptance conditions.
• a data recording section A such as a 2-dimentional code or IC tag, in which data a is written so that it can be read out, is equipped at such part as the bottom of the filling container
• a data recording section B in which data b is written so that it can be read out, is equipped at either the joint section, piping section or the data processing section
• a data recording section C in which data c is written so that it can be read out, is equipped at the process control section.
• fluid refers to a substance in gaseous or liquid form, or the mixture of the two, under the operational condition, and “attributes of the fluid” include the type(s) of fluid(s) (all in case of multiple types), composition (concentration), boiling point and melting point, vapor pressure, and corrosivity or toxicity.
• This invention is aforementioned fluid supply system characterized by aforementioned filling container with its bottom having an indented form, aforementioned data recording section A installed in said bottom, and aforementioned data readout section installed in aforementioned installation location.
• This invention is aforementioned fluid supply system characterized by inputting data d that includes actual measured values of the internal pressure or weight of the filling container while in operation, and data e that is the operating status of aforementioned consumption facility as data for assessing aforementioned compatibility into aforementioned data readout section, and at the same time, assessing the compatibility of the fluid supply to aforementioned consumption facility at the data processing section.
• This invention is aforementioned fluid supply system, characterized by supplying fluid from aforementioned filling container to aforementioned consumption facility through the following processes:
• This invention is aforementioned fluid supply system characterized by performing the following processes after completing aforementioned processes (1 ) through (5): (6a) connect joint section 3a to outlet port 1 b of filling container 1 , (7a) open aforementioned outlet port,
• This system accurately and promptly assesses the compatibility between the filling container and processing device in operation while the delivered filling container is properly connected to the piping system.
• the system uses the data of the filling container including actual measured values of the internal pressure or weight of the filling container while in operation, and the data of the operating status of the processing device, as the criteria for assessing the compatibility to start the operation of supplying the fluid from the filling container to the processing device, the system compares the data of both sides to eliminate human connection error and to enable proper supply of fluid to the processing device via the piping section upon verifying that the delivered filling container is in an adequate condition to satisfy the actual operational conditions.
• the basic composition has a filling container filled with fluid, a mounting section for said filling container to be mounted, a joint section hermetically connected to the outlet port of aforementioned filling container, a piping section with its one end being said joint section, a facility that consumes aforementioned fluid, and a process control section that controls and manages said fluid consumption facility, and also has a data recording section A that is written so that data a including the attributes of aforementioned filled fluid and its filling condition can be read out, a data recording section B that is written so that data b including the attributes of aforementioned filled fluid to which the piping system including aforementioned joint section and piping section can be applied and its acceptance conditions can be read out, a data recording section C that is written so that data c including the attributes of fluid required for (acceptance by) the facility that consumes aforementioned fluid and its acceptance conditions can be read out, a data readout section that can read out any or all of the data a though c,
• Data recording section A is installed in a part of the filling container
• data recording section B is installed in a part of either the joint section, piping section, data readout section or data processing section
• data recording section C is installed in the process control section, and at the same time the system supplies the fluid to the consumption facility when there is compatibility of the data.
• Example of basic composition of fluid supply system pertaining to this invention Example of basic composition of fluid supply system pertaining to this invention.
• FIG. 1 is an outline diagram that shows an example of the fluid supply system (hereinafter referred to as "this system") pertaining to this invention.
• this system bottom section 1a of filling container 1 filled with specified fluid is mounted in a state supported by mounting section 2.
• Outlet port 1 b is connected to joint section 3a, and is further connected to processing device 4 that is the consumption facility, via piping section 3 that is connected to joint section 3a, so that the fluid can be supplied from filling container 1.
• the supply pressure of the fluid supplied from filling container 1 is adjusted by pressure reducing valve 5, and ON/OFF of supply to processing device 4 is controlled by flow-path on-off valve 6.
• These functions at processing device 4 are controlled and managed by process control section 7.
• the fluids that can be used in this system include various gasses, liquefied gas and liquid for which the system that supplies to processing device 4 can be applied, and specifically include compressed gasses such as oxygen, hydrogen and argon, special material gasses (liquefied gasses with low vapor pressure, represented by NH 3 , BCI 3 ,
• liquefied gas such as carbon dioxide, water for hydrogenation and various other refrigerants.
• the system can also be used in such cases as supplying liquefied gas in liquid form.
• the control processing data at aforementioned each section are controlled and managed by data processing section 8.
• This system is characterized by assessing the compatibility between data a including the attributes of the fluid filled in filling container 1 and its filling condition and data b including the attributes of the filled fluid to which the piping system including joint section 3a and piping section 3 can be applied and its acceptance conditions, and the compatibility between data a and data c including the attributes of fluid required by processing device 4 and its acceptance conditions, and then supplying the fluid to processing device 4 when there is compatibility between each group of data.
• the following cases of processing the data can be listed.
• FIG. 1 mounting or replacing filling container 1 is detected by lever type switch 2a (limit switch for example) installed at the side of mounting section 2.
• lever type switch 2a limit switch for example
• the location and function of switch 2a are not limited to these, and it is also possible to apply various methods, such, for example, as installing an optical sensor (not shown in figure) at mounting surface 2b of mounting section 2 to detect mounting of filling container 1 when the optical beam is obstructed.
• Data a that pertains to filling container 1 and the fluid filled in it includes the container number, container capacity, amount of fluid filled (weight or converted volume), filling pressure, filling date, and expiration date, as well as the type(s) (all if multiple types are used), composition (concentration), boiling point and melting point, vapor pressure, and corrosivity or toxicity of the fluid(s), as the filling condition of the fluid. All or part of these data are written in data recording section A, such as a 2- dimensional code or IC tag, attached to filling container 1 , so that they can be read out.
• data recording section A such as a 2- dimensional code or IC tag
• a scanner can be used as data readout section 8a to read data a, and in case an IC tag is used, it is possible read its data by placing data readout section 8a within a specified radius from the tag.
• the location of data recording section A if bottom 1a of filling container 1 has an indented form, it is preferable to place recording section A written-in with data a at this bottom section.
• filling container 1 is a high-pressure container, its bottom 1a generally has a hemispheric protrusion inwards or a ring-shaped inward fold from its circumference as shown in figure 2 (A) and (B) for durability against pressure and mounting stability. Therefore, in this system, by placing data recording section A at these indented sections 1c, it has been made possible to protect data recording section that had been prone to peel-off or damage with conventional methods, and securely integrate data a pertaining to filling container 1 and the container.
• data readout section 8a that reads data a
• Figure 1 shows a system in which data recording section B is housed inside data processing section 8, but it is not limited to this location, and it is also possible, for example, to place data recording section B having a display section inside the containment facility of filling container 1 to form a system that displays the compatibility and makes it possible to check data b or data a.
• data readout section 8b is not necessarily required, and the data in data recording section B can be directly transmitted to data processing section 8.
• data readout section 8a also cover the function of data readout section 8b to make the functional system more compact.
• Data c that include the attributes of the fluid and its acceptance condition required by processing device 4, include, to correspond to aforementioned data a, the amount of fluid filled, type of fluid, composition, filling pressure, boiling point and melting point, and corrosivity or toxicity of the fluid. These data are written in data recording section C so that they can be read out.
• Figure 1 shows a system in which data recording section C is housed inside process control section 7, but it is not limited to this location, and it is also possible, for example, to place data recording section C having a display section inside the containment facility of filling container 1 to form a system that displays the compatibility and makes it possible to check part of or all data a, data b and data c. It is also possible to place data recording section C near processing device 4 and transmit the data directly to data processing section 8.
• net weight W1 of the fluid is calculated by actually measuring the weight including filling container 1 , joint section 3a and piping section 3, and subtracting their weight. These data d are transmitted directly to data processing section 8. Weight W1 can be calculated from data d, data a transmitted data processing section 8 and the value of the total weight at the time of starting the operation.
• load cells (not shown in figure) on the reverse side of mounting surface 2a of mounting section 2.
• type of load cell is not limited here as long as it accurately receives the weight of filling container 1 applied on mounting surface 2a, it is most preferable to use a type (not shown in figure) that allows placing cell parts approximately equally spaced at 4 corners of the mounting surface 2a.
• the pressing force at each cell part is output converted by such instruments as the distortion gauge or diaphragm, and transmitted to data processing section 8.
• Data e of the operational state of processing device 4 are transmitted from process control section 7 to data processing section 8.
• the content of data e is information not included in data c, regarding the properties of the fluid (composition, temperature, flow rate, pressure, etc. of fluid) at processing device 4 in operation, and its operational state (progress of production process, operation time, etc.).
• the amount of fluid already consumed up to that time and the amount of fluid that is further needed are compared to data d, and the compatibility is assessed and controlled.
• the assessment of compatibility in this system is basically done by comparing data a and data b, data a and data c, and data d and data e, and the criterion for assessment is checking whether the data written in each item and the values or codes correspond properly or not. For example, in comparing data a and data b, if a non- corrosive gas was planned in data b as the gas type, and a type of gas that contains HF was delivered and written in data a, it can be assessed incompatible. In comparing data a and data c, if a nitrogen-base 3% HF gas was planned in data c, and a nitrogen-base 2% nitrogen gas was delivered and written in data a, it can be assessed incompatible.
• compatibility conditions are compared and assessed in a non-operational state, they can be said to be static compatibility conditions.
• internal pressure P1 of filling container 1 in data d are transmitted as pressure condition of the fluid, and the supply pressure P2 to processing device 4 is transmitted as data e, it can be assessed compatible if P1 >P2, and it can be assessed incompatible if P1 P2. Since such compatibility conditions are compared and assessed in an actual operational state, they can be said to be dynamic compatibility conditions.
• Pressure sensor 9 pressure switch
• switch 2a (corresponds to "sensor section that detects mounting operation”) turns OFF.
• step 1 of the fluid supply method using this system with the following processes:
• the criterion for assessing the compatibility is the task of connecting outlet port 1 b of filling container 1 with joint section 3a, and static compatibility conditions as stated above are the criteria for assessment. That is, by comparing data a and data b, and data a and data c, human connection errors are eliminated, filling container 1 delivered is properly connected, and a proper fluid is supplied to processing device 4 via piping section 3.
• step 2 of the fluid supply method using this system with the following processes: (6a) Connect outlet port 1 b of filling container 1 with joint section 3a; (7a) Open outlet port 1 b;
• the criterion for assessing the compatibility is the operation of flow path on-off valve 6 to supply the fluid from filling container 1 to processing device 4, and in contrast to the static compatibility conditions as mentioned above, it is assessment of dynamic compatibility conditions.
• data d and data e human connection errors are eliminated, and at the same time, proper fluid is supplied to processing device 4 via piping section 3 after confirming that the delivered filling container 1 is in an appropriate state to suit the actual operational conditions.
• FIG 4 is an outline diagram showing another compositional example (compositional example 2) of the fluid supply system pertaining to this invention.
• This system is basically the same as compositional example 1 , but it forms a fluid supply system to processing device 4 by having a multiple number of joint sections 31a, 32a and 33a, a multiple number of piping sections 31 , 32 and 33, and a multiple number of flow path on-off valves 61 , 62 and 63 placed in the middle of piping sections 31 , 32 and 33.
• a fluid supply facility that houses a multiple number of filling containers filled with various different types of fluid to processing device(s) 4 (single or multiple).

Landscapes

• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• General Engineering & Computer Science (AREA)
• Filling Or Discharging Of Gas Storage Vessels (AREA)

Applications Claiming Priority (2)

Publications (2)

Family

ID=40019446

Family Applications (1)

Country Status (2)

Cited By (2)

Families Citing this family (4)

Citations (5)

Family Cites Families (9)

• 2007
  • 2007-06-28 JP JP2007170808A patent/JP5106932B2/ja not_active Expired - Fee Related
• 2008
  • 2008-06-20 WO PCT/EP2008/057838 patent/WO2009000760A2/en active Application Filing

Patent Citations (5)

Also Published As

Similar Documents

Legal Events