WO2008156057A1 - 接合方法、接合体、液滴吐出ヘッドおよび液滴吐出装置 - Google Patents

接合方法、接合体、液滴吐出ヘッドおよび液滴吐出装置 Download PDF

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Publication number
WO2008156057A1
WO2008156057A1 PCT/JP2008/060987 JP2008060987W WO2008156057A1 WO 2008156057 A1 WO2008156057 A1 WO 2008156057A1 JP 2008060987 W JP2008060987 W JP 2008060987W WO 2008156057 A1 WO2008156057 A1 WO 2008156057A1
Authority
WO
WIPO (PCT)
Prior art keywords
droplet ejection
bonding method
bonded body
bonded
plasma
Prior art date
Application number
PCT/JP2008/060987
Other languages
English (en)
French (fr)
Inventor
Yasuhide Matsuo
Original Assignee
Seiko Epson Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2008145158A external-priority patent/JP4670905B2/ja
Application filed by Seiko Epson Corporation filed Critical Seiko Epson Corporation
Priority to US12/665,259 priority Critical patent/US20100200144A1/en
Priority to KR1020097025697A priority patent/KR101123261B1/ko
Priority to CN200880020534A priority patent/CN101688083A/zh
Publication of WO2008156057A1 publication Critical patent/WO2008156057A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • C09J5/02—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers involving pretreatment of the surfaces to be joined

Abstract

　本発明の接合方法は、第１の基材の表面上に、プラズマ重合膜を形成し、第１の被着体を得る第１の工程と、プラズマ重合膜の表面に紫外光を照射して、表面を活性化させる第２の工程と、少なくとも第１の被着体との接合に供される面にプラズマ重合膜を備えない第２の被着体（第２の基材）を用意し、この第２の被着体と、活性化させたプラズマ重合膜の表面とが接触するように、第１の被着体と第２の被着体とを貼り合わせ、接合体を得る第３の工程とを有する。
PCT/JP2008/060987 2007-06-18 2008-06-16 接合方法、接合体、液滴吐出ヘッドおよび液滴吐出装置 WO2008156057A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/665,259 US20100200144A1 (en) 2007-06-18 2008-06-16 Bonding method, bonded body, droplet ejection head, and droplet ejection apparatus
KR1020097025697A KR101123261B1 (ko) 2007-06-18 2008-06-16 접합방법, 접합체, 액적 토출 헤드 및 액적 토출 장치
CN200880020534A CN101688083A (zh) 2007-06-18 2008-06-16 接合方法、接合体、液滴喷出头及液滴喷出装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-160797 2007-06-18
JP2007160797 2007-06-18
JP2008-145158 2008-06-02
JP2008145158A JP4670905B2 (ja) 2007-06-18 2008-06-02 接合方法、接合体、液滴吐出ヘッドおよび液滴吐出装置

Publications (1)

Publication Number Publication Date
WO2008156057A1 true WO2008156057A1 (ja) 2008-12-24

Family

ID=40156216

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060987 WO2008156057A1 (ja) 2007-06-18 2008-06-16 接合方法、接合体、液滴吐出ヘッドおよび液滴吐出装置

Country Status (1)

Country Link
WO (1) WO2008156057A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109166793A (zh) * 2018-08-30 2019-01-08 哈尔滨工业大学 一种利用先真空紫外光再氮等离子体两步活化直接键合铌酸锂和硅晶片的方法

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS623050A (ja) * 1985-06-26 1987-01-09 Yokohama Rubber Co Ltd:The 合わせガラス用中間膜
JPH01207475A (ja) * 1988-02-10 1989-08-21 Kuraray Co Ltd ポリエステル布帛の製造方法
JPH02286222A (ja) * 1989-04-03 1990-11-26 Internatl Business Mach Corp <Ibm> 重合体積層構造体の層間接着方法
JPH03262636A (ja) * 1990-03-14 1991-11-22 Bridgestone Corp ゴム系複合材料の製造方法
JPH05194770A (ja) * 1992-01-17 1993-08-03 Mitsubishi Kasei Corp 表面被覆プラスチックス製品
JPH0766549A (ja) * 1993-08-23 1995-03-10 Matsushita Electric Works Ltd 金属と有機物の接合方法および配線板の製造方法
JP2000256625A (ja) * 1999-03-08 2000-09-19 Nitto Denko Corp 粘着部材
JP2002524597A (ja) * 1998-09-04 2002-08-06 サイムド ライフ システムズ， インコーポレイテッド ポリマーを結合させる方法及びこの方法により結合された材料を備えている医療機器
JP2002539004A (ja) * 1999-03-17 2002-11-19 ゼネラル・エレクトリック・カンパニイ 金属酸化物ｕｖフィルタ用接着層
JP2005206824A (ja) * 2003-12-26 2005-08-04 Jsr Corp ポリブタジエン成形品の接着方法、これより得られるポリブタジエン複合成形品、医療用部材、および輸液セット
JP2005246707A (ja) * 2004-03-02 2005-09-15 Seiko Epson Corp 成膜方法および膜

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS623050A (ja) * 1985-06-26 1987-01-09 Yokohama Rubber Co Ltd:The 合わせガラス用中間膜
JPH01207475A (ja) * 1988-02-10 1989-08-21 Kuraray Co Ltd ポリエステル布帛の製造方法
JPH02286222A (ja) * 1989-04-03 1990-11-26 Internatl Business Mach Corp <Ibm> 重合体積層構造体の層間接着方法
JPH03262636A (ja) * 1990-03-14 1991-11-22 Bridgestone Corp ゴム系複合材料の製造方法
JPH05194770A (ja) * 1992-01-17 1993-08-03 Mitsubishi Kasei Corp 表面被覆プラスチックス製品
JPH0766549A (ja) * 1993-08-23 1995-03-10 Matsushita Electric Works Ltd 金属と有機物の接合方法および配線板の製造方法
JP2002524597A (ja) * 1998-09-04 2002-08-06 サイムド ライフ システムズ， インコーポレイテッド ポリマーを結合させる方法及びこの方法により結合された材料を備えている医療機器
JP2000256625A (ja) * 1999-03-08 2000-09-19 Nitto Denko Corp 粘着部材
JP2002539004A (ja) * 1999-03-17 2002-11-19 ゼネラル・エレクトリック・カンパニイ 金属酸化物ｕｖフィルタ用接着層
JP2005206824A (ja) * 2003-12-26 2005-08-04 Jsr Corp ポリブタジエン成形品の接着方法、これより得られるポリブタジエン複合成形品、医療用部材、および輸液セット
JP2005246707A (ja) * 2004-03-02 2005-09-15 Seiko Epson Corp 成膜方法および膜

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109166793A (zh) * 2018-08-30 2019-01-08 哈尔滨工业大学 一种利用先真空紫外光再氮等离子体两步活化直接键合铌酸锂和硅晶片的方法

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