WO2008149730A1 - ポジ型感光性樹脂組成物及びポリヒドロキシアミド樹脂 - Google Patents

ポジ型感光性樹脂組成物及びポリヒドロキシアミド樹脂 Download PDF

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Publication number
WO2008149730A1
WO2008149730A1 PCT/JP2008/059726 JP2008059726W WO2008149730A1 WO 2008149730 A1 WO2008149730 A1 WO 2008149730A1 JP 2008059726 W JP2008059726 W JP 2008059726W WO 2008149730 A1 WO2008149730 A1 WO 2008149730A1
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WO
WIPO (PCT)
Prior art keywords
positive photosensitive
resin composition
photosensitive resin
polyhydroxyamide
aromatic group
Prior art date
Application number
PCT/JP2008/059726
Other languages
English (en)
French (fr)
Inventor
Kazuya Ebara
Hideo Suzuki
Takayuki Tamura
Original Assignee
Nissan Chemical Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Chemical Industries, Ltd. filed Critical Nissan Chemical Industries, Ltd.
Priority to EP08764754A priority Critical patent/EP2159637A4/en
Priority to US12/451,906 priority patent/US20100119969A1/en
Priority to CN2008800183486A priority patent/CN101681099B/zh
Priority to KR1020107000073A priority patent/KR101522583B1/ko
Priority to JP2009517811A priority patent/JP5246441B2/ja
Publication of WO2008149730A1 publication Critical patent/WO2008149730A1/ja
Priority to US15/064,288 priority patent/US9975996B2/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G69/00Macromolecular compounds obtained by reactions forming a carboxylic amide link in the main chain of the macromolecule
    • C08G69/02Polyamides derived from amino-carboxylic acids or from polyamines and polycarboxylic acids
    • C08G69/26Polyamides derived from amino-carboxylic acids or from polyamines and polycarboxylic acids derived from polyamines and polycarboxylic acids
    • C08G69/28Preparatory processes
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G69/00Macromolecular compounds obtained by reactions forming a carboxylic amide link in the main chain of the macromolecule
    • C08G69/02Polyamides derived from amino-carboxylic acids or from polyamines and polycarboxylic acids
    • C08G69/26Polyamides derived from amino-carboxylic acids or from polyamines and polycarboxylic acids derived from polyamines and polycarboxylic acids
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G69/00Macromolecular compounds obtained by reactions forming a carboxylic amide link in the main chain of the macromolecule
    • C08G69/02Polyamides derived from amino-carboxylic acids or from polyamines and polycarboxylic acids
    • C08G69/26Polyamides derived from amino-carboxylic acids or from polyamines and polycarboxylic acids derived from polyamines and polycarboxylic acids
    • C08G69/265Polyamides derived from amino-carboxylic acids or from polyamines and polycarboxylic acids derived from polyamines and polycarboxylic acids from at least two different diamines or at least two different dicarboxylic acids
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G69/00Macromolecular compounds obtained by reactions forming a carboxylic amide link in the main chain of the macromolecule
    • C08G69/40Polyamides containing oxygen in the form of ether groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G69/00Macromolecular compounds obtained by reactions forming a carboxylic amide link in the main chain of the macromolecule
    • C08G69/42Polyamides containing atoms other than carbon, hydrogen, oxygen, and nitrogen
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/022Quinonediazides
    • G03F7/023Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0387Polyamides or polyimides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • G03F7/0757Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/40Treatment after imagewise removal, e.g. baking

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Materials For Photolithography (AREA)
  • Polyamides (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

【課題】電気絶縁性、耐熱性、機械的強度及び電気特性に優れ、かつ高解像回路パターン形成が可能なポジ型感光性樹脂組成物を提供する。 【解決手段】式(1)で表される繰り返し単位を含み、重量平均分子量が3000乃至100000である少なくとも1種のポリヒドロキシアミド樹脂(A)、及び、光により酸を発生する化合物(B)を含有することを特徴とするポジ型感光性樹脂組成物。 (式中、Xは4価の脂肪族基又は芳香族基を表し、R1及びR2はそれぞれ独立して水素原子又は炭素原子数1乃至10のアルキル基を表し、Ar1及びAr2はそれぞれ独立して芳香族基を表し、Yは少なくとも1つのOH基で置換された芳香族基を含む有機基を表し、nは1以上の整数を表し、l及びmはそれぞれ独立して0又は1以上の整数を表し、かつl+m≦2を満足する。)
PCT/JP2008/059726 2007-06-05 2008-05-27 ポジ型感光性樹脂組成物及びポリヒドロキシアミド樹脂 WO2008149730A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
EP08764754A EP2159637A4 (en) 2007-06-05 2008-05-27 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION AND POLYHYDROXYAMIDE RESIN
US12/451,906 US20100119969A1 (en) 2007-06-05 2008-05-27 Positive photosensitive resin composition and dpolyhydroxyamide resin
CN2008800183486A CN101681099B (zh) 2007-06-05 2008-05-27 正型感光性树脂组合物和聚羟基酰胺树脂
KR1020107000073A KR101522583B1 (ko) 2007-06-05 2008-05-27 포지티브형 감광성 수지 조성물 및 폴리히드록시아미드 수지
JP2009517811A JP5246441B2 (ja) 2007-06-05 2008-05-27 ポジ型感光性樹脂組成物及びポリヒドロキシアミド樹脂
US15/064,288 US9975996B2 (en) 2007-06-05 2016-03-08 Positive photosensitive resin composition and polyhydroxyamide resin

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-149088 2007-06-05
JP2007149088 2007-06-05

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/451,906 A-371-Of-International US20100119969A1 (en) 2007-06-05 2008-05-27 Positive photosensitive resin composition and dpolyhydroxyamide resin
US15/064,288 Continuation US9975996B2 (en) 2007-06-05 2016-03-08 Positive photosensitive resin composition and polyhydroxyamide resin

Publications (1)

Publication Number Publication Date
WO2008149730A1 true WO2008149730A1 (ja) 2008-12-11

Family

ID=40093551

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Application Number Title Priority Date Filing Date
PCT/JP2008/059726 WO2008149730A1 (ja) 2007-06-05 2008-05-27 ポジ型感光性樹脂組成物及びポリヒドロキシアミド樹脂

Country Status (7)

Country Link
US (2) US20100119969A1 (ja)
EP (1) EP2159637A4 (ja)
JP (1) JP5246441B2 (ja)
KR (1) KR101522583B1 (ja)
CN (1) CN101681099B (ja)
TW (1) TWI468855B (ja)
WO (1) WO2008149730A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010005028A1 (ja) * 2008-07-09 2010-01-14 日産化学工業株式会社 ポジ型感光性樹脂組成物及びポリヒドロキシアミド樹脂
WO2010044275A1 (ja) * 2008-10-16 2010-04-22 住友ベークライト株式会社 ポジ型感光性樹脂組成物、硬化膜、保護膜、絶縁膜およびそれを用いた半導体装置、表示体装置、ならびにレジスト膜形成方法
WO2011058756A1 (ja) * 2009-11-13 2011-05-19 株式会社Adeka ポリアミド化合物及びそれを含有してなるエポキシ樹脂組成物
KR101781702B1 (ko) 2012-09-18 2017-09-25 아사히 가세이 이-매터리얼즈 가부시키가이샤 감광성 수지 조성물

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101522583B1 (ko) * 2007-06-05 2015-05-22 닛산 가가쿠 고교 가부시키 가이샤 포지티브형 감광성 수지 조성물 및 폴리히드록시아미드 수지
CN108383998B (zh) * 2018-05-24 2019-10-08 安徽农业大学 一种高强度湿度响应聚羟基酰胺及其制备方法

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010005028A1 (ja) * 2008-07-09 2010-01-14 日産化学工業株式会社 ポジ型感光性樹脂組成物及びポリヒドロキシアミド樹脂
WO2010044275A1 (ja) * 2008-10-16 2010-04-22 住友ベークライト株式会社 ポジ型感光性樹脂組成物、硬化膜、保護膜、絶縁膜およびそれを用いた半導体装置、表示体装置、ならびにレジスト膜形成方法
WO2011058756A1 (ja) * 2009-11-13 2011-05-19 株式会社Adeka ポリアミド化合物及びそれを含有してなるエポキシ樹脂組成物
CN102575004A (zh) * 2009-11-13 2012-07-11 Adeka株式会社 聚酰胺化合物及含有它而成的环氧树脂组合物
CN102575004B (zh) * 2009-11-13 2014-06-25 Adeka株式会社 聚酰胺化合物及含有它而成的环氧树脂组合物
TWI496815B (zh) * 2009-11-13 2015-08-21 Adeka Corp 聚醯胺化合物及含有它而成之環氧樹脂組成物
KR101740081B1 (ko) 2009-11-13 2017-05-25 가부시키가이샤 아데카 폴리아미드 화합물 및 그것을 함유하여 이루어지는 에폭시 수지 조성물
KR101781702B1 (ko) 2012-09-18 2017-09-25 아사히 가세이 이-매터리얼즈 가부시키가이샤 감광성 수지 조성물

Also Published As

Publication number Publication date
US20100119969A1 (en) 2010-05-13
TW200916951A (en) 2009-04-16
EP2159637A4 (en) 2011-12-21
US9975996B2 (en) 2018-05-22
EP2159637A1 (en) 2010-03-03
JPWO2008149730A1 (ja) 2010-08-26
CN101681099B (zh) 2013-02-20
KR101522583B1 (ko) 2015-05-22
KR20100022512A (ko) 2010-03-02
CN101681099A (zh) 2010-03-24
TWI468855B (zh) 2015-01-11
US20160185905A1 (en) 2016-06-30
JP5246441B2 (ja) 2013-07-24

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