WO2008132842A1 - 感光性樹脂組成物、ドライフィルムおよびそれを用いた加工品 - Google Patents

感光性樹脂組成物、ドライフィルムおよびそれを用いた加工品 Download PDF

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Publication number
WO2008132842A1
WO2008132842A1 PCT/JP2008/001063 JP2008001063W WO2008132842A1 WO 2008132842 A1 WO2008132842 A1 WO 2008132842A1 JP 2008001063 W JP2008001063 W JP 2008001063W WO 2008132842 A1 WO2008132842 A1 WO 2008132842A1
Authority
WO
WIPO (PCT)
Prior art keywords
integer
dry film
resin composition
photosensitive resin
hydrogen atom
Prior art date
Application number
PCT/JP2008/001063
Other languages
English (en)
French (fr)
Inventor
Katsuhiko Funaki
Etsuo Ohkawado
Kousuke Hirota
Syuji Tahara
Original Assignee
Mitsui Chemicals, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Chemicals, Inc. filed Critical Mitsui Chemicals, Inc.
Priority to CN2008800133769A priority Critical patent/CN101675387B/zh
Priority to JP2009511686A priority patent/JP5167252B2/ja
Priority to US12/596,952 priority patent/US8409784B2/en
Priority to KR1020097022011A priority patent/KR101161929B1/ko
Publication of WO2008132842A1 publication Critical patent/WO2008132842A1/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F283/00—Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G
    • C08F283/04—Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G on to polycarbonamides, polyesteramides or polyimides
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F283/00—Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/037—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/285—Permanent coating compositions
    • H05K3/287—Photosensitive compositions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Polymerisation Methods In General (AREA)
  • Graft Or Block Polymers (AREA)

Abstract

　本発明は、環境に負荷を与える可能性の高いハロゲン含有化合物類およびアンチモン化合物を含まず、硬化後に良好な難燃性を発現し、特に近年の厳しい屈曲耐性、絶縁信頼性の要求に応える感光性樹脂組成物を提供する。具体的に本発明により、（Ａ）下記一般式（１）で表される（メタ）アクリレート化合物、（Ｂ）ポリイミド前駆体、および（Ｃ）光重合開始剤を含有することを特徴とする感光性樹脂組成物。（式中、Ｒ1は水素原子またはメチル基を表し、Ｒ２は水素原子または一価の有機基を表し、ｎおよびｍはそれぞれ１～５の整数を表す。ｐは０～６の整数を表し、ｑおよびｒはそれぞれ０～４の整数を表し、ｓは０～６の整数を表す。ｐとｑとｒとｓの和は６である。ｐとｓの和は３～６であればよいが、好ましくは６である。）
PCT/JP2008/001063 2007-04-24 2008-04-23 感光性樹脂組成物、ドライフィルムおよびそれを用いた加工品 WO2008132842A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN2008800133769A CN101675387B (zh) 2007-04-24 2008-04-23 感光性树脂组合物、干膜以及使用该干膜的加工品
JP2009511686A JP5167252B2 (ja) 2007-04-24 2008-04-23 感光性樹脂組成物、ドライフィルムおよびそれを用いた加工品
US12/596,952 US8409784B2 (en) 2007-04-24 2008-04-23 Photosensitive resin composition, dry film, and processed product made using the same
KR1020097022011A KR101161929B1 (ko) 2007-04-24 2008-04-23 감광성 수지 조성물, 드라이 필름 및 그것을 이용한 가공품

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-113665 2007-04-24
JP2007113665 2007-04-24
JP2007242638 2007-09-19
JP2007-242638 2007-09-19

Publications (1)

Publication Number Publication Date
WO2008132842A1 true WO2008132842A1 (ja) 2008-11-06

Family

ID=39925313

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001063 WO2008132842A1 (ja) 2007-04-24 2008-04-23 感光性樹脂組成物、ドライフィルムおよびそれを用いた加工品

Country Status (6)

Country Link
US (1) US8409784B2 (ja)
JP (1) JP5167252B2 (ja)
KR (1) KR101161929B1 (ja)
CN (1) CN101675387B (ja)
TW (1) TWI477894B (ja)
WO (1) WO2008132842A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009186861A (ja) * 2008-02-08 2009-08-20 Asahi Kasei E-Materials Corp 感光性樹脂組成物
JP2010113245A (ja) * 2008-11-07 2010-05-20 Taiyo Ink Mfg Ltd 難燃性光硬化性樹脂組成物、そのドライフィルム及び硬化物並びにそれらを用いたプリント配線板
JP2013054361A (ja) * 2012-10-01 2013-03-21 Taiyo Holdings Co Ltd 難燃性光硬化性樹脂組成物、そのドライフィルム及び硬化物並びにそれらを用いたプリント配線板
WO2017169763A1 (ja) * 2016-03-30 2017-10-05 東レ株式会社 ネガ型感光性樹脂組成物、硬化膜、硬化膜を具備する表示装置、並びにその製造方法

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CN103694701B (zh) * 2012-09-27 2017-07-21 新日铁住金化学株式会社 聚酰胺酸组合物、聚酰亚胺组合物、电路基板及其使用方法与层压体以及其制造方法
KR20150045329A (ko) * 2013-10-18 2015-04-28 삼성디스플레이 주식회사 유기 발광 장치
CN109438735B (zh) * 2018-11-08 2021-07-20 株洲时代华鑫新材料技术有限公司 一种高导热聚酰亚胺基复合薄膜及其制备方法

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JP2000338667A (ja) * 1999-03-24 2000-12-08 Fujitsu Ltd 感光性高誘電体組成物、その組成物からなる感光性高誘電体膜のパターン形成方法、及びその組成物を用いて製造したコンデンサ内蔵型多層回路基板
JP2001163936A (ja) * 1999-12-03 2001-06-19 Nippon Kayaku Co Ltd 樹脂組成物、ソルダーレジスト樹脂組成物及びこれらの硬化物
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JP2000338667A (ja) * 1999-03-24 2000-12-08 Fujitsu Ltd 感光性高誘電体組成物、その組成物からなる感光性高誘電体膜のパターン形成方法、及びその組成物を用いて製造したコンデンサ内蔵型多層回路基板
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JP2007293001A (ja) * 2006-04-25 2007-11-08 Mitsui Chemicals Inc 保護膜形成用ドライフィルムおよびそれを用いた加工品

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009186861A (ja) * 2008-02-08 2009-08-20 Asahi Kasei E-Materials Corp 感光性樹脂組成物
JP2010113245A (ja) * 2008-11-07 2010-05-20 Taiyo Ink Mfg Ltd 難燃性光硬化性樹脂組成物、そのドライフィルム及び硬化物並びにそれらを用いたプリント配線板
JP2013054361A (ja) * 2012-10-01 2013-03-21 Taiyo Holdings Co Ltd 難燃性光硬化性樹脂組成物、そのドライフィルム及び硬化物並びにそれらを用いたプリント配線板
WO2017169763A1 (ja) * 2016-03-30 2017-10-05 東レ株式会社 ネガ型感光性樹脂組成物、硬化膜、硬化膜を具備する表示装置、並びにその製造方法
JPWO2017169763A1 (ja) * 2016-03-30 2019-02-07 東レ株式会社 ネガ型感光性樹脂組成物、硬化膜、硬化膜を具備する表示装置、並びにその製造方法
US11086219B2 (en) 2016-03-30 2021-08-10 Toray Industries, Inc. Negative-type photosensitive resin composition, cured film, display device that includes the cured film, and production method therefor

Also Published As

Publication number Publication date
JPWO2008132842A1 (ja) 2010-07-22
TW200907568A (en) 2009-02-16
US8409784B2 (en) 2013-04-02
JP5167252B2 (ja) 2013-03-21
CN101675387A (zh) 2010-03-17
KR101161929B1 (ko) 2012-07-03
TWI477894B (zh) 2015-03-21
US20100084172A1 (en) 2010-04-08
KR20100009551A (ko) 2010-01-27
CN101675387B (zh) 2012-10-10

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