WO2008090950A1 - 封止用フィルム、及びそれを用いた半導体装置 - Google Patents

封止用フィルム、及びそれを用いた半導体装置 Download PDF

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Publication number
WO2008090950A1
WO2008090950A1 PCT/JP2008/050978 JP2008050978W WO2008090950A1 WO 2008090950 A1 WO2008090950 A1 WO 2008090950A1 JP 2008050978 W JP2008050978 W JP 2008050978W WO 2008090950 A1 WO2008090950 A1 WO 2008090950A1
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WO
WIPO (PCT)
Prior art keywords
sealing film
component
disclosed
film
semiconductor device
Prior art date
Application number
PCT/JP2008/050978
Other languages
English (en)
French (fr)
Inventor
Hiroyuki Kawakami
Katsuyasu Niijima
Naoki Tomori
Daichi Takemori
Takuya Imai
Original Assignee
Hitachi Chemical Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007016891A external-priority patent/JP2008060523A/ja
Application filed by Hitachi Chemical Co., Ltd. filed Critical Hitachi Chemical Co., Ltd.
Priority to US12/299,714 priority Critical patent/US8771828B2/en
Priority to EP20080703806 priority patent/EP2110851A4/en
Publication of WO2008090950A1 publication Critical patent/WO2008090950A1/ja
Priority to US13/619,314 priority patent/US8715454B2/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/62Alcohols or phenols
    • C08G59/621Phenols
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/38Layered products comprising a layer of synthetic resin comprising epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/01Use of inorganic substances as compounding ingredients characterized by their specific function
    • C08K3/013Fillers, pigments or reinforcing additives
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • H01L23/295Organic, e.g. plastic containing a filler
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2666/00Composition of polymers characterized by a further compound in the blend, being organic macromolecular compounds, natural resins, waxes or and bituminous materials, non-macromolecular organic substances, inorganic substances or characterized by their function in the composition
    • C08L2666/54Inorganic substances
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2666/00Composition of polymers characterized by a further compound in the blend, being organic macromolecular compounds, natural resins, waxes or and bituminous materials, non-macromolecular organic substances, inorganic substances or characterized by their function in the composition
    • C08L2666/66Substances characterised by their function in the composition
    • C08L2666/72Fillers; Inorganic pigments; Reinforcing additives
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12044OLED
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]
    • Y10T428/24967Absolute thicknesses specified
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/25Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31511Of epoxy ether

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Laminated Bodies (AREA)
  • Epoxy Resins (AREA)

Abstract

 下記(A)、(B)及び(C)を含有し、80°Cでのフロー量が150~1800μmである樹脂層を有する封止フィルムとして、充填性及び密着性に優れる封止フィルム、その製造方法及びそれを用いた半導体装置を提供する。 (A)架橋性官能基を含み、重量平均分子量が10万以上でかつTgが-50~50°Cである高分子量成分(a1)と、エポキシ樹脂を主成分とする熱硬化性成分(a2)と、を含む(A)樹脂成分、 (B)平均粒径が1~30μmのフィラー、 (C)着色剤。  または、上記(A)、上記(B)及び(C)を含有し、Bステージ状態のフィルムの熱硬化粘弾性測定における50~100°Cの粘度が10000~100000Pa.sである樹脂層を有する封止用フィルムとして、密着性、形状維持性に優れる封止用フィルム、及びそれを用いた半導体装置を提供する。
PCT/JP2008/050978 2007-01-26 2008-01-24 封止用フィルム、及びそれを用いた半導体装置 WO2008090950A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/299,714 US8771828B2 (en) 2007-01-26 2008-01-24 Sealing film and a semiconductor device using the same
EP20080703806 EP2110851A4 (en) 2007-01-26 2008-01-24 SEALING FILM AND SEMICONDUCTOR ELEMENT FOR THIS
US13/619,314 US8715454B2 (en) 2007-01-26 2012-09-14 Sealing film and a semiconductor device using the same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-016891 2007-01-26
JP2007016891A JP2008060523A (ja) 2006-08-01 2007-01-26 封止フィルム及びそれを用いた半導体装置
JP2007-109316 2007-04-18
JP2007109316 2007-04-18

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/299,714 A-371-Of-International US8771828B2 (en) 2007-01-26 2008-01-24 Sealing film and a semiconductor device using the same
US13/619,314 Division US8715454B2 (en) 2007-01-26 2012-09-14 Sealing film and a semiconductor device using the same

Publications (1)

Publication Number Publication Date
WO2008090950A1 true WO2008090950A1 (ja) 2008-07-31

Family

ID=39644524

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050978 WO2008090950A1 (ja) 2007-01-26 2008-01-24 封止用フィルム、及びそれを用いた半導体装置

Country Status (5)

Country Link
US (2) US8771828B2 (ja)
EP (1) EP2110851A4 (ja)
KR (1) KR20090027612A (ja)
TW (1) TW200837137A (ja)
WO (1) WO2008090950A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7511399B2 (ja) 2020-06-26 2024-07-05 太陽ホールディングス株式会社 硬化性樹脂組成物、ドライフィルム、硬化物、電子部品

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110089360A (ko) * 2008-11-26 2011-08-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 복합 구조체용 표면처리 필름
JP5768023B2 (ja) * 2012-08-29 2015-08-26 日東電工株式会社 電子部品封止用熱硬化性樹脂シート、樹脂封止型半導体装置、及び樹脂封止型半導体装置の製造方法
JP2015103572A (ja) * 2013-11-21 2015-06-04 日東電工株式会社 両面セパレータ付き封止用シート、及び、半導体装置の製造方法
CN104091790B (zh) * 2014-07-25 2017-11-14 华进半导体封装先导技术研发中心有限公司 一种半导体封装基板结构及其制作方法
KR102394174B1 (ko) 2015-06-09 2022-05-04 주식회사 케이씨씨 반도체 소자용 봉지 필름
JP6904112B2 (ja) * 2017-06-30 2021-07-14 株式会社オートネットワーク技術研究所 車両用シール部材および車両用電気中継部品
USD962882S1 (en) * 2019-11-14 2022-09-06 Showa Denko Materials Co., Ltd. Temporary protective film for manufacturing semiconductor devices
USD962883S1 (en) * 2020-11-02 2022-09-06 Showa Denko Materials Co., Ltd. Temporary protective film for manufacturing semiconductor devices

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JPH05190697A (ja) 1992-01-10 1993-07-30 Nitto Denko Corp 半導体部品の製造方法
JPH05283456A (ja) 1992-03-31 1993-10-29 Toshiba Corp 封止用シート、樹脂封止装置および樹脂封止型半導体装置の製造方法
JPH0873621A (ja) 1994-09-07 1996-03-19 Toshiba Corp 樹脂シート
JP2004043761A (ja) * 2001-08-27 2004-02-12 Hitachi Chem Co Ltd 接着シート並びに半導体装置及びその製造方法
JP2005060584A (ja) 2003-08-18 2005-03-10 Hitachi Chem Co Ltd 封止用フィルム

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JPH05190697A (ja) 1992-01-10 1993-07-30 Nitto Denko Corp 半導体部品の製造方法
JPH05283456A (ja) 1992-03-31 1993-10-29 Toshiba Corp 封止用シート、樹脂封止装置および樹脂封止型半導体装置の製造方法
JPH0873621A (ja) 1994-09-07 1996-03-19 Toshiba Corp 樹脂シート
JP2004043761A (ja) * 2001-08-27 2004-02-12 Hitachi Chem Co Ltd 接着シート並びに半導体装置及びその製造方法
JP2005060584A (ja) 2003-08-18 2005-03-10 Hitachi Chem Co Ltd 封止用フィルム

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Title
See also references of EP2110851A4

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7511399B2 (ja) 2020-06-26 2024-07-05 太陽ホールディングス株式会社 硬化性樹脂組成物、ドライフィルム、硬化物、電子部品

Also Published As

Publication number Publication date
US20090189300A1 (en) 2009-07-30
US8715454B2 (en) 2014-05-06
KR20090027612A (ko) 2009-03-17
EP2110851A4 (en) 2013-09-04
EP2110851A1 (en) 2009-10-21
US8771828B2 (en) 2014-07-08
US20130093105A1 (en) 2013-04-18
TW200837137A (en) 2008-09-16

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