WO2008032523A1 - Canon à plasma à gradient de pression - Google Patents

Canon à plasma à gradient de pression Download PDF

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Publication number
WO2008032523A1
WO2008032523A1 PCT/JP2007/065959 JP2007065959W WO2008032523A1 WO 2008032523 A1 WO2008032523 A1 WO 2008032523A1 JP 2007065959 W JP2007065959 W JP 2007065959W WO 2008032523 A1 WO2008032523 A1 WO 2008032523A1
Authority
WO
WIPO (PCT)
Prior art keywords
housing
pressure gradient
plasma gun
sleeve
intermediate electrode
Prior art date
Application number
PCT/JP2007/065959
Other languages
English (en)
Japanese (ja)
Inventor
Atsuhiro Terakura
Masao Marunaka
Takayuki Tsuchiya
Original Assignee
Shinmaywa Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinmaywa Industries, Ltd. filed Critical Shinmaywa Industries, Ltd.
Publication of WO2008032523A1 publication Critical patent/WO2008032523A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/31—Electron-beam or ion-beam tubes for localised treatment of objects for cutting or drilling
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/52—Generating plasma using exploding wires or spark gaps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/54—Plasma accelerators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources

Definitions

  • the present invention relates to a pressure gradient type plasma gun used as a plasma source of a film forming apparatus.
  • the pressure gradient plasma gun includes a force sword, a first intermediate electrode having an annular first housing (first housing), and a second intermediate electrode having an annular second housing (second housing). It is equipped with.
  • the first housing and the second housing may be destroyed by being exposed to high temperatures due to collision of electrons in the generated plasma. Therefore, a pressure gradient plasma gun is disclosed in which a conductive sleeve made of a refractory metal such as tungsten is provided along the inner peripheral surfaces of the first casing and the second casing (for example, (See FIG. 14 of Patent Document 1). In such a pressure gradient type plasma gun, the heat resistance of the first casing and the second casing against the generated plasma is improved.
  • Patent Document 1 Japanese Patent Laid-Open No. 2001-143895
  • Patent Document 1 the first casing and the second casing force S stainless steel are used (see paragraph [0003] of Patent Document 1). Since stainless steel has poor heat dissipation, the configuration of Patent Document 1 has a problem that when the sleeve is heated by the generated plasma, the first housing and the second housing are welded to the sleeve. .
  • the present invention has been made to solve the above-described problems, and provides a pressure gradient plasma gun capable of suppressing welding of the first housing and the second housing to the sleeve. For this purpose.
  • a pressure gradient plasma gun of the present invention includes a force sword mount, a cylindrical body that constitutes a plasma outlet by having one end closed by the force sword mount and the other end opened.
  • a force sword provided on the force sword mount so as to protrude on a central axis of the cylinder, and a portion of the cylinder that is coaxial with the cylinder and on a front side of the force sword.
  • a ring-shaped sleeve and a housing which are provided so as to constitute an intermediate electrode together with the sleeve, and a cylindrical sleeve which is provided concentrically with the housing and in contact with the inner peripheral surface of the housing;
  • An annular magnet housed concentrically with the housing, and a discharge gas introduction hole formed in the force sword mount or the cylindrical body, the housing being an aluminum alloy It is configured.
  • the aluminum alloy has high cooling efficiency, so that welding between the housing (housing) and the sleeve is prevented. Thereby, even when the sleeve is deteriorated, it becomes easy to replace the deteriorated sleeve alone.
  • an aluminum alloy has a specific gravity smaller than that of conventionally used stainless steel, so that the weight of the housing can be reduced. Therefore, workability when attaching the intermediate electrode having the housing is improved.
  • a surface treatment layer having conductivity, non-magnetism, and corrosion resistance may be formed on the surface of the housing.
  • a cooling medium flow path is formed inside the housing, and the cooling medium is circulated in the cooling medium flow path. Therefore, with such a configuration, deterioration at a location where the housing and the cooling medium come into contact is suppressed.
  • An annular ring that forms the first intermediate electrode together with a first sleeve is provided at a portion of the cylindrical body in front of the force sword so as to be coaxial with the cylindrical body and constitute a part of the cylindrical body.
  • An annular second housing that constitutes the second intermediate electrode together with the second sleeve, and is provided concentrically with the second sleeve and the wing and in contact with the inner peripheral surface of the second housing.
  • the pair of the first intermediate electrode and the first magnet or the pair of the second intermediate electrode and the second magnet may be a pair of the intermediate electrode and the magnet.
  • the first housing (first housing) and the first sleeve, and the second housing (second housing) and the second sleeve are welded. Is prevented. Accordingly, even when the first sleeve and the second sleeve are deteriorated, it becomes easy to replace the deteriorated sleeve alone.
  • the specific gravity of aluminum alloy is smaller than that of conventionally used stainless steel, so that the weight of the first housing and the second housing can be reduced. Therefore, workability when attaching the first intermediate electrode having the first housing and the second intermediate electrode having the second housing is improved.
  • a surface treatment layer having conductivity, non-magnetism, and corrosion resistance is formed on the surface of the first housing and / or the second housing! /.
  • a cooling medium flow path is usually formed inside the first housing and the second housing, and the cooling medium is circulated through the cooling medium flow path. Therefore, with such a configuration, deterioration at a location where the first housing and / or the second housing made of an aluminum alloy and the cooling medium contact is suppressed.
  • the surface treatment layer may be an electroless Ni plating layer.
  • the electroless Ni plating layer strength is preferably formed by electroless Ni plating having a phosphorus concentration in the range of 5 wt% to 15 wt%.
  • the electroless Ni plating layer is formed of an electroless Ni plating having a phosphorus concentration in the range of 10 wt% to 12 wt%.
  • the housing may be a hollow annular housing, and the magnet may be housed in a hollow portion of the housing.
  • the housing may be a bobbin, and the magnet may be accommodated in a space between a body part of the bobbin and a pair of flanges.
  • FIG. 1 is a schematic diagram showing a schematic configuration of a sheet plasma film forming apparatus using a pressure gradient plasma gun according to a first embodiment of the present invention.
  • FIG. 2 is a cross-sectional view showing a configuration of a pressure gradient plasma gun according to the first embodiment of the present invention.
  • FIG. 3 is a cross-sectional view showing a configuration of a pressure gradient plasma gun according to a second embodiment of the present invention.
  • FIG. 4 is a cross-sectional view showing a configuration of a pressure gradient plasma gun according to a third embodiment of the present invention.
  • Second housing (second housing, second bobbin)
  • FIG. 1 is a schematic diagram showing a schematic configuration of a sheet plasma film forming apparatus using a pressure gradient plasma gun according to a first embodiment of the present invention.
  • FIG. 2 shows the pressure of the first embodiment of the present invention.
  • It is sectional drawing which shows the structure of a gradient type plasma gun.
  • the pressure gradient type plasma gun of this embodiment and a sheet plasma film forming apparatus using this pressure gradient type plasma gun will be described with reference to FIG. 1 and FIG.
  • the left side in FIG. 1 is referred to as the front side
  • the right side is referred to as the rear side.
  • the pressure gradient type plasma gun 1 of the present embodiment is used in a sheet plasma film forming apparatus 100.
  • the sheet plasma film forming apparatus 100 is exemplified as the film forming apparatus in which the pressure gradient plasma gun 1 of the present embodiment is used, but it is needless to say that the present invention is not limited to this.
  • the configuration of the pressure gradient plasma gun 1 will be briefly described here, and will be described in detail later.
  • the pressure gradient plasma gun 1 includes a force sword mount 2, a force sword 8, a cylindrical body 10, a first intermediate electrode G, and a second intermediate electrode G.
  • the force sword 8 (force sword mount 2) and an anode 63, which will be described later, are connected to the main buy through the resistor R.
  • the first intermediate electrode G is connected to the positive terminal of the main bias voltage applying device V through the resistor R.
  • the second intermediate electrode G is connected to the main bias voltage sign via the resistor R.
  • the rear end of the sheet plasma forming chamber 30 is connected to the front end of the pressure gradient plasma gun 1.
  • the sheet plasma forming chamber 30 is formed such that the rear end and the front end of the cylindrical member 31 are closed by an insulating lid member 29 having an open central portion and a first flange 39 having an open central portion, respectively.
  • the cylindrical member 31 is made of a nonmagnetic material.
  • a first annular coin 32 for adjusting the shape of the introduced cylindrical plasma 36 is disposed.
  • a pair of permanent magnets 33 is disposed in front of the position where the first annular coil 32 of the cylindrical member 31 is disposed.
  • the pair of permanent magnets 33 are arranged so that their north poles face each other.
  • the pair of permanent magnets 33 forms the introduced cylindrical plasma 36 into a sheet-like plasma (hereinafter referred to as sheet-like plasma) 37. Further, a second annular coil 34 for adjusting the shape of the formed sheet-like plasma 37 is disposed around the front end side of the cylindrical member 31.
  • the rear end of the film forming chamber 40 is connected to the front end of the sheet plasma forming chamber 30! /.
  • the sheet plasma 37 formed in the sheet plasma forming chamber 30 is introduced into the film forming chamber 40.
  • the film forming chamber 40 includes a cylindrical chamber 41. One end of the chamber 41 is closed by an upper lid 42, and the other end of the chamber 41 is closed by a lower lid 43.
  • the chamber 41 is made of a nonmagnetic material such as stainless steel.
  • An exhaust port 52 is formed at an appropriate position of the chamber 41. The exhaust port 52 is configured to be opened and closed by a valve 53.
  • a vacuum pump 54 is connected to the exhaust port 52. The vacuum pump 54 evacuates the film forming chamber 40 (chamber 41) to a predetermined pressure at which the sheet plasma 37 can be transported.
  • a target holder 48 and a base material holder 44 are disposed inside the chamber 41 so as to face each other with the introduced sheet-like plasma 37 interposed therebetween.
  • the target holder 48 holds the target material 49.
  • the target holder 48 is attached to the chamber 41 via an insulating member 51.
  • the target holder 48 is hermetically attached to the chamber 41.
  • a bias voltage applying device V is connected to the target holder 48. This bias voltage application device V allows the sheet plasma
  • a negative bias voltage for a potential of 37 is applied to the target holder 48.
  • the target material 49 is sputtered by the plasma particles in the sheet-like plasma 37.
  • the substrate holder 44 holds the substrate 45 that forms a film.
  • the base material holder 44 is attached to the chamber 41 via the insulating member 50.
  • the substrate holder 44 is hermetically attached to the chamber 41.
  • the substrate holder 44 has a bias voltage application device V
  • a negative bias voltage is applied to the substrate holder 44.
  • the sputtered target material 49 is deposited on the base material 45 to form a film.
  • the rear end of the anode chamber 60 is connected to the front end of the film forming chamber 40.
  • the anode chamber 60 includes a second flange 59 and an anode having a cylindrical part 62 whose rear end and front end are open at the center part, respectively. Closed at 63 and formed.
  • the cylindrical member 62 is made of glass, for example.
  • a third annular coil 61 that arranges the shape of the sheet-like plasma 37 is arranged.
  • the anode 63 is connected to the positive terminal of the main bias voltage applying device V as described above.
  • a permanent magnet 64 is provided on the back surface of the anode 63.
  • the permanent magnet 64 is provided such that its south pole is in contact with the anode 63.
  • the permanent magnet 64 adjusts the shape of the end of the sheet plasma 37.
  • the sheet plasma film forming apparatus 100 includes a control device (not shown).
  • the control device controls the operation of the main bias voltage application device V, bias voltage application devices V, V, etc.
  • the control device is configured by an arithmetic device such as a microcomputer, and controls necessary components of the sheet plasma film forming apparatus 100 to control the operation of the sheet plasma film forming apparatus 100.
  • the control device also means a controller group in which a plurality of controllers that cooperate with only a single controller cooperate to execute control. Therefore, the control device is configured so that a plurality of controllers that do not necessarily need to be configured by a single controller are arranged in a distributed manner, and they cooperate to control the operation of the sheet plasma film forming apparatus 100. May be
  • the cylindrical plasma 36 generated by the pressure gradient type plasma gun 1 is formed into a sheet-like plasma 37 by a pair of permanent magnets 33 in the sheet plasma forming chamber 30.
  • the sheet-like plasma 37 is introduced into the film formation chamber 40 and the target material 49 is sputtered.
  • the target particles thus deposited are deposited on a base material 45 disposed at an opposite position across the sheet-like plasma 37, forming a film.
  • the pressure gradient type plasma gun 1 of this embodiment includes a force sword mount 2.
  • a discharge gas introduction hole 3 is formed in the central portion of the force sword mount 2 (more precisely, it is located on a central axis 201 of the insulating tube 6 described later), from which a discharge gas such as argon gas is discharged. be introduced.
  • a cooling medium flow path 4 is formed inside the force sword mount 2, and the cooling medium flow path 4 is cooled by a cooling medium flow mechanism (not shown). Medium is distributed.
  • the cooling medium include water, pure water, ethylene glycol aqueous solution (antifreeze), fluorine-based refrigerant, and the like, and examples of gas include helium, argon, and nitrogen.
  • the rear end of the cylindrical insulating tube 6 is attached to the front end of the force sword mount 2.
  • the insulating tube 6 is made of an insulating material such as glass or ceramics.
  • the insulating tube 6 and the first housing (first housing) 11, the first seal collar 16, the second housing (second housing) 17, and the second seal collar 24, which will be described later, constitute the cylindrical body 10. is doing.
  • the cylinder 10 is a cylinder in this embodiment.
  • the opening of the cylinder 10 (see Fig. 1) constitutes the plasma outlet.
  • the force sword mount 2 is provided with a force sword 8 so as to protrude on the central axis 201 of the insulating tube 6 inside the insulating tube 6.
  • the force sword 8 includes a discharge gas flow path 7. The discharge gas introduced from the discharge gas introduction hole 3 flows through the discharge gas flow path 7.
  • the first housing 11 is formed in an annular shape having a rectangular cross section.
  • the shape of the first housing 11 is not limited to an annular shape, and may be formed in an annular shape such as a quadrangle or a hexagon.
  • the first casing 11 is provided with a cylindrical first sleeve 12 along the inner peripheral surface thereof.
  • the first sleeve 12 is provided concentrically with the first housing 11.
  • the first housing 11 and the first sleeve 12 constitute a first intermediate electrode G.
  • the first sleeve 12 is made of a high-melting-point and conductive material such as tandasten or molybdenum. The first sleeve 12 improves the heat resistance of the first housing 11 against the generated cylindrical plasma 36.
  • the first housing 11 is hollow.
  • the hollow portion of the first housing 11 constitutes the cooling medium flow path 14.
  • An annular permanent magnet (first magnet) 15 is accommodated in the hollow portion of the housing 11.
  • the first intermediate electrode contains the permanent magnet 15. That is, a hollow cooling medium flow path 14 is formed inside the first intermediate electrode G, and the cooling medium is circulated through the cooling medium flow path 14 by a cooling medium flow mechanism (not shown).
  • the cooling medium include liquids such as water, pure water, ethylene glycol aqueous solution (antifreeze liquid), and fluorine-based refrigerants, and examples of gases include helium, argon, and nitrogen.
  • the permanent magnet 15 is in contact with the cooling medium.
  • the rear end of the second casing 17 is attached to the front end of the first intermediate electrode via a cylindrical first seal collar 16.
  • the first seal collar 16 is arranged coaxially with the insulating tube 6, and seal members (not shown), for example, O-rings, are arranged on both end faces.
  • the material constituting the first seal collar 16 is an insulator such as polytetrafluoroethylene or ceramics. The first seal collar 16 ensures insulation between the first intermediate electrode G and a second intermediate electrode G described later.
  • the second housing 17 is formed in an annular shape having a rectangular cross section.
  • the shape of the second housing 17 is not limited to an annular shape, and may be formed in an annular shape such as a quadrangle or a hexagon.
  • the second casing 17 is provided with a cylindrical second sleeve 18 along the inner peripheral surface thereof.
  • the second sleeve 18 is provided concentrically with the second housing 17.
  • the second housing 17 and the second sleeve 18 constitute a second intermediate electrode G.
  • Second sleeve 18 has high melting point and conductivity
  • the second sleeve 18 improves the heat resistance of the second casing 17 when the generated cylindrical plasma 36 passes.
  • the second casing 17 is formed hollow.
  • the hollow portion of the second housing 17 constitutes the cooling medium flow path 20.
  • An air core coil (electromagnetic coil) (second magnet) 21 is accommodated in the hollow portion of the second housing 17.
  • the second intermediate electrode G incorporates the air-core coil 21.
  • a hollow cooling medium flow path 20 is formed inside the second intermediate electrode G, and a cooling medium (not shown) is formed.
  • the cooling medium is circulated through the cooling medium flow path 20 by the rejection medium distribution mechanism.
  • the cooling medium include water, pure water, ethylene glycol aqueous solution (antifreeze), and fluorine-based refrigerant.
  • the cooling medium include helium, argon, and nitrogen.
  • the air-core coil 21 is in contact with the cooling medium.
  • the air core coil 21 is wound in an annular shape.
  • the first casing 11 and the second casing 17 are made of an aluminum alloy.
  • aluminum alloys include the use of aluminum-magnesium alloys (JIS 5000 series), aluminum-magnesium-silicon alloys (JIS 6000 series), aluminum-zinc-magnesium alloys (JIS 7000 series). It is preferable for maintaining the corrosiveness.
  • aluminum alloy is excellent in heat dissipation, and cooling efficiency is improved by about 50% compared to stainless steel. Therefore, high temperature The parts heated to each other (first casing 11 and first sleeve 12, second casing 17 and second sleeve 18) are prevented from being welded. Thereby, even when the first sleeve 12 and the second sleeve 18 are deteriorated, the first sleeve 12 and the second sleeve 18 can be replaced independently, and the maintenance property is improved.
  • the surfaces of the portions of the first casing 11 and the second casing 17 that come into contact with the cooling medium are electrically conductive and non-conductive.
  • a surface treatment layer having magnetism and corrosion resistance is formed. Examples of the surface treatment layer having such conductivity, non-magnetism, and corrosion resistance include an electroless Ni plating layer.
  • the structure becomes crystalline and magnetic, so that it is suitable as a surface treatment layer for the first casing 11 and the second casing 17. Nare ,.
  • the phosphorus concentration is in the range of 5% by weight or more and less than 8% by weight, the structure is microcrystalline, non-magnetic, and corrosion resistance is improved, so the surfaces of the first casing 11 and the second casing 17 are improved. It can be used as a treatment layer.
  • the phosphorus concentration is 8% by weight or more and less than 10% by weight, the surface of the first casing 11 and the second casing 17 is the surface treatment layer because the structure is non-crystalline, non-magnetic, and has corrosion resistance.
  • the structure is non-crystalline and non-magnetic, and the corrosion resistance is further improved. It can be preferably used as the surface treatment layer of the first casing 11 and the second casing 17. Although not shown in the table, if the phosphorus concentration exceeds 13% by weight and is 15% by weight or less, the conductivity may decrease. Since the force structure is non-crystalline, non-magnetic, and has corrosion resistance, it can be used as a surface treatment layer for the first casing 11 and the second casing 17.
  • Other surface treatment layers that have electrical conductivity, non-magnetic properties, and corrosion resistance include Au plating layer and Cr plating layer (note that Cr plating layer may be magnetized due to the influence of the base) Can be mentioned
  • the second seal collar 24 is arranged coaxially with the insulating tube 6, and a seal member (not shown), for example, an O-ring is provided on both end faces thereof.
  • a seal member for example, an O-ring is provided on both end faces thereof.
  • an insulator such as polytetrafluoroethylene or ceramics is used.
  • the front end of the second seal collar 24 is attached to an annular plate-shaped guide member (not shown). The second seal collar 24 ensures insulation between the second intermediate electrode G and the guide member.
  • the pressure gradient plasma gun 1 is attached to the sheet plasma film forming apparatus 100 (more specifically, the insulating lid member 29 of the sheet plasma forming chamber 30) via a guide member.
  • the pressure gradient plasma gun 1 of the present invention uses an aluminum alloy with high cooling efficiency as a material constituting the first casing 11 and the second casing 17, the generated plasma is generated by the first sleeve 12. Even when the first casing 11 and the second casing 17 are heated when passing through the second sleeve 18, the first casing 11 and the second casing 17 are quickly cooled. Thereby, welding of the first housing 11 and the first sleeve 12 and the second housing 17 and the second sleeve 18 is suppressed.
  • the number can be reduced, and the cost of the pressure gradient plasma gun 1 can be reduced.
  • the aluminum alloy is excellent in free-cutting properties compared to conventionally used stainless steel, the workability of the first casing 11 and the second casing 17 is improved.
  • the cylindrical body 10 constituting the pressure gradient plasma gun 1 is a cylindrical body, but the cross-sectional shape thereof is arbitrary.
  • the cross-sectional shape in a direction perpendicular to the central axis is regular. It may be square.
  • both the first casing 11 and the second casing 17 are made of aluminum alloy.
  • one of the first casing 11 and the second casing 17 is It may be made of an aluminum alloy.
  • FIG. 3 is a cross-sectional view showing the configuration of the pressure gradient plasma gun of the second embodiment.
  • two pairs of the first intermediate electrode G and the first magnet 15 and the second intermediate electrode G and the second magnet 21 are provided in front of the insulating tube 6.
  • a pair of intermediate electrodes and magnets are provided.
  • a pair of intermediate electrodes G and magnets 28 are provided. Other configurations are the same as those of the pressure gradient plasma gun of the first embodiment.
  • an annular casing 25 having a rectangular cross section is attached to the front end of the insulating tube 6.
  • the casing 25 is provided with a cylindrical sleeve 26 along the inner peripheral surface thereof.
  • the sleeve 26 is provided concentrically with the housing 25.
  • the casing 25 and the sleeve 26 constitute the intermediate electrode G.
  • the casing 25 is formed in a hollow shape. This hollow portion constitutes the cooling medium flow path 27.
  • An annular magnet 28 is accommodated in the hollow portion of the housing 25.
  • the intermediate electrode G contains the magnet 28.
  • the magnet 28 is composed of a first magnet (permanent magnet) or a second magnet (air-core coil (electromagnetic coil)).
  • a rear end of a cylindrical seal collar 19 is attached to the front end of the housing 25.
  • the housing 25 is made of an aluminum alloy, like the pressure gradient plasma gun of the first embodiment.
  • Such a configuration also has the same effect as the pressure gradient plasma gun of the first embodiment. That is, also in the pressure gradient type plasma gun 1 of the present embodiment, the welding of the casing 25 and the sleeve 26 is prevented, and the weight of the casing 25 can be reduced. Workability is improved.
  • FIG. 4 is a cross-sectional view showing the configuration of the pressure gradient plasma gun of the third embodiment.
  • the configuration of the first intermediate electrode G and the second intermediate electrode G in the pressure gradient plasma gun of the first embodiment is changed. More than that
  • the other configuration is the same as that of the pressure gradient type plasma gun of the first embodiment.
  • the first housing 11 constituting the first intermediate electrode G has a bobbin having a cylindrical body part 11a and a pair of flange parts 1 lb formed at both ends of the body part 1la.
  • First bobbin 11 A cooling medium flow path 14 is formed in the body portion 11a.
  • the first bobbin 11 has a space formed between the body portion 11a and the pair of flange portions ib.
  • An annular permanent magnet (first magnet) 15 is inserted (accommodated) in this space!
  • the second housing 17 constituting the second intermediate electrode G includes a cylindrical body portion 17a and the body portion 1.
  • the second bobbin 17 It is formed in a bobbin shape having a pair of flanges 17b formed at both ends of 7a (second bobbin 17).
  • a cooling medium flow path 20 is formed in the body portion 17a.
  • the second bobbin 17 has a space formed between the body portion 17a and the pair of flange portions 17b.
  • An annular air-core coil (electromagnetic coil) (second magnet) 21 is fitted (accommodated) in this space!
  • the first bobbin 11 and the second bobbin 17 are made of an aluminum alloy, as in the pressure gradient type plasma gun of the first embodiment. ing.
  • Such a configuration also has the same effect as the pressure gradient plasma gun of the first embodiment. That is, also in the pressure gradient plasma gun 1 of the present embodiment, welding between the first bobbin 11 and the first sleeve 12 and between the second bobbin 17 and the second sleeve 18 is prevented. In addition, the weights of the first bobbin 11 and the second bobbin 17 can be reduced, and the handling workability is improved.
  • one of the first bobbin 11 and the second bobbin 17 may be made of an aluminum alloy.
  • the pressure gradient type plasma gun of the present invention is useful as a pressure gradient type plasma gun in which welding between the housing and the sleeve is suppressed.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)

Abstract

L'invention concerne un canon à plasma (1) à gradient de pression muni d'un ensemble de cathode (2); d'un corps de tube (10); d'une cathode (8); d'un premier boîtier (11) installé dans le corps cylindrique (10) à l'avant de la cathode (8) et formant une première électrode intermédiaire (G1) conjointement à un premier manchon (12); d'un premier manchon (12) disposé de façon concentrique au premier boîtier (11); d'un second boîtier (17) installé dans le corps cylindrique (10) à l'avant du premier boîtier (11), les deux boitiers étant séparés par un intervalle et formant une seconde électrode intermédiaire (G2) conjointement au second manchon (18), ledit second manchon (18) étant disposé de façon concentrique au second boîtier (17). Le premier boîtier (11) et/ou le second boîtier (17) sont faits d'un alliage d'aluminium.
PCT/JP2007/065959 2006-09-11 2007-08-16 Canon à plasma à gradient de pression WO2008032523A1 (fr)

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JP2006-245594 2006-09-11

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015062255A (ja) * 2014-12-15 2015-04-02 国立大学法人名古屋大学 分子線エピタキシー装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06128730A (ja) * 1992-10-20 1994-05-10 Nikon Corp 金属薄膜の製造方法
JPH09260355A (ja) * 1996-03-22 1997-10-03 Toshiba Corp マグネトロン放電型プラズマ表面処理装置およびその処理方法
JP2001143895A (ja) * 1999-08-31 2001-05-25 Chugai Ro Co Ltd 圧力勾配型プラズマガン
JP2002270395A (ja) * 2001-03-14 2002-09-20 Stanley Electric Co Ltd 圧力勾配型プラズマ発生装置の中間電極構造
JP2004195942A (ja) * 2002-12-20 2004-07-15 Mitsubishi Materials Corp 成形用金型装置
JP2005126737A (ja) * 2003-10-21 2005-05-19 Riken Corp アーク式蒸発源

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06128730A (ja) * 1992-10-20 1994-05-10 Nikon Corp 金属薄膜の製造方法
JPH09260355A (ja) * 1996-03-22 1997-10-03 Toshiba Corp マグネトロン放電型プラズマ表面処理装置およびその処理方法
JP2001143895A (ja) * 1999-08-31 2001-05-25 Chugai Ro Co Ltd 圧力勾配型プラズマガン
JP2002270395A (ja) * 2001-03-14 2002-09-20 Stanley Electric Co Ltd 圧力勾配型プラズマ発生装置の中間電極構造
JP2004195942A (ja) * 2002-12-20 2004-07-15 Mitsubishi Materials Corp 成形用金型装置
JP2005126737A (ja) * 2003-10-21 2005-05-19 Riken Corp アーク式蒸発源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015062255A (ja) * 2014-12-15 2015-04-02 国立大学法人名古屋大学 分子線エピタキシー装置

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