WO2007097198A1 - ダイクロイックフィルタ - Google Patents
ダイクロイックフィルタ Download PDFInfo
- Publication number
- WO2007097198A1 WO2007097198A1 PCT/JP2007/052136 JP2007052136W WO2007097198A1 WO 2007097198 A1 WO2007097198 A1 WO 2007097198A1 JP 2007052136 W JP2007052136 W JP 2007052136W WO 2007097198 A1 WO2007097198 A1 WO 2007097198A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- filter
- wavelength
- light
- incident
- frequency
- Prior art date
Links
- 230000003595 spectral effect Effects 0.000 claims abstract description 42
- 230000005540 biological transmission Effects 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 238000002834 transmittance Methods 0.000 claims description 53
- 230000004907 flux Effects 0.000 claims description 4
- 239000011521 glass Substances 0.000 abstract description 7
- 239000000463 material Substances 0.000 description 23
- 239000010408 film Substances 0.000 description 19
- 239000012788 optical film Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 5
- 238000010030 laminating Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
Definitions
- the present invention relates to a dichroic filter.
- a dichroic filter is used for the purpose of transmitting light having a first wavelength and reflecting light without transmitting light having a second wavelength in the field of optical communication or the like.
- a dichroic filter designed to transmit light having a wavelength of 1560 nm and reflect light without transmitting light having a wavelength of 1310 nm
- light having a wavelength of 1560 nm emitted from an optical fiber is dimmed.
- a light of 1310 ⁇ m which is transmitted through a vertical filter and is also transmitted by another light source, is reflected by the same dichroic filter and is incident on the optical fiber.
- the optical system as described above 1560 nm light is perpendicularly incident on the dichroic filter and is transmitted with a high transmittance. Therefore, the amount of stray light does not need to be substantially considered. .
- the 1310 nm light is incident on the dichroic filter at a predetermined angle and reflected, so after being reflected, it becomes stray light in the optical system and enters the dichroic filter again at a large incident angle. Sometimes.
- a filter formed of a multilayer film means a material having predetermined optical characteristics by alternately superposing high refractive materials and low refractive materials) Is known to shift to a shorter wavelength side (high frequency side) as the incident angle increases.
- FIG. 8 shows the spectral transmission characteristics of a high-pass filter formed of a multilayer film having a film structure as shown in Table 1 formed on glass. It can be seen that the transmittance for 1310 nm light is nearly 40% when the incident angle reaches 60 ° or more until the incident angle reaches 40 °.
- n represents the refractive index
- nm represents the film thickness
- nd represents the optical film thickness ( nm ), which is the same in the following tables. 8 and 9, the horizontal axis is the wavelength (nm).
- such a filter is designed so that the ratio of the optical thickness of the high refractive material to the low refractive material is approximately 1.
- the inventor can suppress the above-described wavelength shift to some extent when the ratio of the optical film thickness of the high refractive material to the low refractive material is 2 or more. As a result, it was discovered that the change in characteristics was small even in the case of oblique incidence, and an invention based on this knowledge was made.
- Patent Document 1 Japanese Patent Application Laid-Open No. 11-101913
- Patent Document 1 JP-A-11 101913
- FIG. 9 shows the spectral transmission characteristics of a high-pass filter made of a multilayer film having a film structure as shown in Table 2 formed on glass. Compared to Fig. 8, the transmittance for 1310 light with improved characteristics is recognized at about 2% at an incident angle of 60 degrees and reaches about 30% at an incident angle of 80 degrees.
- the present invention has been made in view of such circumstances, and an object thereof is to provide a dichroic filter that hardly transmits stray light even when the incident angle of stray light is large.
- a first means for achieving the above-mentioned object includes a filter composed of two types of multilayer films formed on one side of the substrate or formed on both sides of the substrate.
- a dichroic filter having a greater transmittance than the first wavelength light wherein the multilayer filter includes a low-pass filter portion and a high-pass filter portion, and the low-pass filter portion includes:
- the cut-off frequency for incident light at the designed use angle to the filter is between the frequency corresponding to the first wavelength and the frequency corresponding to the second wavelength, and the high-pass filter unit
- the cutoff frequency with respect to the incident light at the design use angle to the filter is lower than the frequency corresponding to the second wavelength, and the light flux is incident on the filter larger than the design use angle. Due to the shift of the spectral transmission characteristic of the filter caused by incident at an angle, the transmittance of the low-pass filter unit at the first wavelength is greater than the incident light at an incident angle larger than the designed use angle.
- the cutoff frequency for incident light that is larger than the design use angle of the high-nos filter section is equal to or higher than the frequency corresponding to the first wavelength, and as a result, the incident frequency exceeding the design value is exceeded.
- the dichroic filter is characterized in that the transmittance of light of the first wavelength with respect to light is not more than the design value.
- a second means for solving the above-described problem includes a filter formed of two types of multilayer films formed on one side of the substrate or formed on both sides of the substrate. Light having a second wavelength longer than the first wavelength incident on the filter at the designed use angle and having a transmittance equal to or lower than the design value with respect to the first wavelength light incident on the filter at the designed use angle.
- the dichroic filter having a greater transmittance than that of the light of the first wavelength
- the multilayer filter includes a low-pass filter unit and a band-pass filter unit
- the low-pass filter unit includes: A cutoff frequency for incident light at the designed use angle to the filter is between a frequency corresponding to the first wavelength and a frequency corresponding to the second wavelength, and the bandpass filter To the filter
- the cut-off frequency on the low frequency side that transmits the light of the second wavelength is lower than the frequency corresponding to the second wavelength, and the luminous flux is Due to the shift of the spectral transmission characteristic of the filter caused by entering the filter at an incident angle larger than the designed use angle, the transmittance of the low-pass filter unit at the first wavelength is larger than the designed use angle.
- the low frequency side cutoff frequency for the incident light larger than the designed use angle of the band-pass filter section becomes the first wavelength.
- the dichroic is characterized in that the transmittance of the light of the first wavelength with respect to the incident light exceeding the design value is not more than the design value. Filter.
- a third means for solving the above-described problem has a filter composed of two types of multilayer films formed on one side of the substrate or formed on both sides of the substrate, and is designed for the filter.
- a dichroic filter having a transmittance greater than that of the light of the first wavelength wherein the multilayer film filter includes a band pass filter unit and a high pass filter unit, and the band pass filter unit includes: With respect to the incident light incident on the filter at the design use angle, the light having the second wavelength is transmitted, and the cutoff frequency on the high-frequency side has a frequency corresponding to the first wavelength and the second wavelength.
- the high-pass filter unit has a cutoff frequency with respect to incident light at a design use angle to the filter that is lower than a frequency corresponding to the second wavelength, and a light flux
- the transmittance force of the bandpass filter section at the first wavelength due to the shift of the spectral transmission characteristic of the filter caused by entering the filter at an incident angle larger than the designed use angle.
- the cutoff frequency for incident light larger than the designed use angle of the high-pass filter section is a frequency corresponding to the first wavelength.
- the transmittance of the light of the first wavelength with respect to incident light larger than the designed use angle is set to be equal to or less than the designed value.
- a fourth means for solving the above-described problem has a filter formed of two types of multilayer films formed on one side of the substrate or formed on both sides of the substrate, respectively.
- the first wavelength light incident on the filter at the design use angle has a transmittance equal to or lower than the design value, and the light having the second wavelength longer than the first wavelength incident on the filter at the design use angle.
- a dichroic filter having a higher transmittance than that of the light of the first wavelength the filter comprising the multilayer film is composed of a bandpass filter having a change in spectral transmittance characteristics with respect to an incident angle, One filter transmits light of the second wavelength with respect to incident light incident at a design use angle to the filter, and a cutoff frequency on a high frequency side is a frequency corresponding to the first wavelength.
- Said second A first bandpass filter between the frequency corresponding to the length, and the other filter transmits light of the second wavelength with respect to incident light incident at a design use angle to the filter.
- Cut-off frequency force on the low frequency side A second band-pass filter having a frequency lower than the frequency corresponding to the second wavelength, and a light beam is incident on the filter at an incident angle larger than the designed use angle.
- the low frequency side cutoff frequency for the obliquely incident light of the second bandpass filter is equal to or higher than the frequency corresponding to the first wavelength, Result, the light transmittance of the first wavelength for a large listening incident light than the design using angle, a dichroic filter, characterized in that which is less than the design value.
- the present invention it is possible to provide a dichroic filter that hardly transmits stray light even when the incident angle of stray light is large.
- FIG. 1 is a diagram for explaining the principle of the present invention.
- FIG. 2 is a schematic diagram showing a configuration of a dichroic filter according to an embodiment of the present invention.
- FIG. 3 shows a first multilayer filter 2 and a second multilayer film according to the first embodiment of the present invention.
- FIG. 3 is a schematic diagram showing the spectral transmission characteristics of filter 3.
- FIG. 4 is a schematic diagram showing spectral transmission characteristics of the first multilayer filter 2 and the second multilayer filter 3 in the second embodiment of the present invention.
- FIG. 5 is a schematic diagram showing spectral transmission characteristics of a first multilayer filter 2 and a second multilayer filter 3 in a third embodiment of the present invention.
- FIG. 6 is a schematic diagram showing spectral transmission characteristics of a first multilayer filter 2 and a second multilayer filter 3 in a fourth embodiment of the present invention.
- FIG. 7 is a diagram showing spectral transmission characteristics of a dichroic filter according to an embodiment of the present invention.
- FIG. 8 is a diagram showing spectral transmission characteristics of a conventional high-pass filter.
- FIG. 9 is a diagram showing spectral transmission characteristics of an improved conventional high-pass filter.
- FIG. 1 is a diagram schematically showing the spectral transmission characteristics of a multilayer filter formed by alternately laminating high refractive materials and low refractive materials.
- the center incident angle when using this multilayer filter is 0 °.
- the solid line shows the spectral transmission characteristics when the incident angle is 0 °, and the broken line shows the spectral transmission characteristics for obliquely incident light.
- FIG. 2 is a schematic diagram showing the configuration of the dichroic filter according to the embodiment of the present invention.
- the first multilayer filter 2 is formed on one surface of a transparent substrate 1 such as glass, and the second multilayer filter 3 is formed on the other surface.
- the first multilayer filter 2 is formed on a transparent substrate such as glass, and the second multilayer filter 3 is further formed thereon. Both have the same effect.
- the first In addition to the multilayer filter 2 and the second multilayer filter 3, other multilayer films may be used.
- FIG. 3 is a schematic diagram showing the spectral transmission characteristics of the first multilayer filter 2 and the second multilayer filter 3 in the first embodiment of the present invention.
- the first multilayer filter 2 is a low-pass filter and the second multilayer filter 3 is a high-pass filter.
- A is the spectral transmission characteristic of the first multilayer filter 2 when the incident angle is 0 °
- B is the spectral transmission characteristic of the second multilayer filter 3 when the incident angle is 0 °
- C is the first Spectral transmission characteristics when the incident angle is larger than the designed and used incident angle of the multilayer filter 2
- D indicates the spectral transmission characteristics when the incident angle is larger than the designed and used incident angle of the second multilayer filter 3. Show.
- the ratio of the optical film thickness of the high refractive material and the optical film thickness of the low refractive material of the first multilayer filter 2 is set large (2 or more). It is preferable that the ratio of the optical film thickness of the high refractive material and the optical film thickness of the low refractive material in the second multilayer filter 3 is small (preferably 1 or less). Therefore, the shift amount of the spectral transmittance curve in the second multilayer filter 3 is much larger than the shift amount of the spectral transmittance curve in the first multilayer filter 2.
- the cutoff frequency of the first multilayer filter 2 is between a frequency corresponding to ⁇ 1 that is a wavelength to be reflected and a frequency corresponding to ⁇ 2 that is a wavelength to be transmitted.
- the cutoff frequency of the second multilayer filter 3 is on the lower frequency side than the frequency corresponding to ⁇ 2.
- the spectral transmittance curve shifts as described above.
- the characteristic 0 at the incident angle of 0 ° is the designed incident angle. At larger angles of incidence it becomes C.
- the transmittance increases at the wavelength ⁇ 1, which exceeds the allowable value in the design.
- the spectral transmittance curve shifts, and the characteristic ⁇ when the incident angle is 0 ° becomes D at an incident angle larger than the designed incident angle.
- the ratio of the optical film thickness of the high refractive material and the optical film thickness of the low refractive material of the first multilayer filter 2 is increased, and the second multilayer filter 3
- the shift amount of the spectral transmittance curve in the second multilayer filter 3 is as follows. Spectral transmittance at 2 As a result, the cutoff frequency in the second multilayer filter 3 is higher than the frequency corresponding to ⁇ 1.
- the spectral transmission characteristic of the dichroic filter as a whole is obtained by multiplying the values indicated by the curve C and the curve D at each frequency, so that the transmittance at the wavelength ⁇ 1 is very small. It is within the allowable range.
- the transmittance of the dichroic filter as a whole at an incident angle larger than the designed use incident angle is a value close to 0 at the wavelength ⁇ 2.
- the transmittance may be 0 at an incident angle that is larger than the designed and used incident angle.
- a similar effect is obtained by using a bandpass filter instead of a highpass filter as the second multilayer filter 3, and a higher frequency side than the frequency corresponding to the cutoff frequency force 2 on the high frequency side of the bandpass filter.
- the cut-off frequency on the low frequency side is located on the low frequency side with respect to the frequency corresponding to ⁇ 2, and the bandpass filter may be the same as in the first embodiment.
- This is the second embodiment.
- the spectral transmission characteristics in this case are shown in FIG. 4, and the symbols are the same as those shown in FIG. In this case, due to a wavelength shift at an incident angle larger than the designed incident angle, the cut-off frequency on the low frequency side of the bandpass filter becomes higher than the frequency corresponding to ⁇ 1.
- the light having the wavelength ⁇ 1 is also blocked by the second multilayer filter 3 that is a bandpass filter.
- the transmittance corresponding to the light having the wavelength ⁇ 1 as the dichroic filter is designed. The following can be suppressed.
- the band-pass filter is located between the frequency corresponding to the cutoff frequency force ⁇ 1 on the high frequency side and the frequency corresponding to ⁇ 2, and the cutoff frequency on the low frequency side corresponds to the frequency corresponding to ⁇ 2. Try to be on the lower frequency side.
- the spectral transmission characteristics in this case are shown in FIG. 5, and the respective reference numerals are the same as those shown in FIG.
- the cut-off frequency on the low frequency side of the bandpass filter is higher than the frequency corresponding to E1.
- the light having the wavelength ⁇ 1 is blocked by the first multilayer filter 3 which is a low filter at an incident angle larger than the designed use angle, and eventually the wavelength ⁇ 1 as the dichroic filter It is possible to keep the transmittance corresponding to light of less than the designed value.
- the band-pass filter corresponding to the first multilayer filter 2 is located between the frequency corresponding to the cutoff frequency force ⁇ 1 on the high frequency side and the frequency corresponding to ⁇ 2, so that the low frequency side
- the cut-off frequency of is set to be lower than the frequency corresponding to ⁇ 2.
- the frequency corresponding to the cutoff frequency force ⁇ 2 on the high frequency side of the bandpass filter corresponding to the second multilayer filter 3 is higher than the frequency corresponding to the cutoff frequency force ⁇ 2, and the cutoff frequency on the low frequency side corresponds to ⁇ 2. Try to be on the lower frequency side.
- the rest is the same as in the first embodiment.
- the designed use incident angle is preferably set around a force of 0 to 15 ° depending on the use of the multilayer filter 3.
- a dichroic filter was created by laminating high-pass filters formed in this order.
- the low-pass filter first forms SiO on the glass substrate surface at 239.1 nm (optical film thickness: 346.7 nm). Then, a pair of NbO and SiO (NbO film thickness 62.5nm, optical film thickness 138.8nm, SiO
- the high-pass filter is a pair of SiO and NbO (SiO film thickness 95.2nm, optical
- the no-pass filter was laminated on the adjustment layer.
- Fig. 7 shows the spectral transmission characteristics of this dichroic filter.
- the horizontal axis is the wavelength (nm).
- the transmittance of light with a wavelength of 1310 nm is almost 0, and the transmittance of light with a wavelength of 1560 nm is close to 100%.
- the transmittance for light with a wavelength of 1310 nm Even if the angle of incidence reaches 80 °, it is kept at almost 0!
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008501671A JPWO2007097198A1 (ja) | 2006-02-27 | 2007-02-07 | ダイクロイックフィルタ |
US12/224,134 US20090002830A1 (en) | 2006-02-27 | 2007-02-07 | Dichroic Filter |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006049718 | 2006-02-27 | ||
JP2006-049718 | 2006-02-27 |
Publications (1)
Publication Number | Publication Date |
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WO2007097198A1 true WO2007097198A1 (ja) | 2007-08-30 |
Family
ID=38437238
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/052136 WO2007097198A1 (ja) | 2006-02-27 | 2007-02-07 | ダイクロイックフィルタ |
Country Status (6)
Country | Link |
---|---|
US (1) | US20090002830A1 (ja) |
JP (1) | JPWO2007097198A1 (ja) |
KR (1) | KR20080104309A (ja) |
CN (1) | CN101389982A (ja) |
TW (1) | TW200809272A (ja) |
WO (1) | WO2007097198A1 (ja) |
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US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
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US8446579B2 (en) | 2008-05-28 | 2013-05-21 | Nikon Corporation | Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method |
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- 2007-02-07 KR KR1020087022308A patent/KR20080104309A/ko not_active Application Discontinuation
- 2007-02-07 US US12/224,134 patent/US20090002830A1/en not_active Abandoned
- 2007-02-07 CN CNA2007800068322A patent/CN101389982A/zh active Pending
- 2007-02-07 WO PCT/JP2007/052136 patent/WO2007097198A1/ja active Application Filing
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TW200809272A (en) | 2008-02-16 |
KR20080104309A (ko) | 2008-12-02 |
US20090002830A1 (en) | 2009-01-01 |
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