Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
  • F04D19/00—Axial-flow pumps
  • F04D19/02—Multi-stage pumps
  • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
  • F04D19/042—Turbomolecular vacuum pumps
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
  • F04D25/00—Pumping installations or systems
  • F04D25/02—Units comprising pumps and their driving means
  • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
  • F04D25/068—Mechanical details of the pump control unit

Definitions

• the present invention relates to a vacuum pump device and a controller thereof used in, for example, equipment such as a semiconductor manufacturing apparatus, an electron microscope, and a mass spectrometer.
• a vacuum pump device has been used to create a high vacuum in the vacuum chamber, and this type of vacuum pump device is a pump body that is attached to the vacuum chamber. And a controller for controlling the operation thereof.
• a turbo-molecular pump is generally known as a pump body.
• the turbo-molecular pump has a rotor rotatably supported in a pump case, and a radial and multi-stage rotor blade is provided on the outer wall surface of the rotor. Plural stages of stator blades positioned between the rotor blades are arranged on the inner wall surface of the pump case facing this.
• a control circuit board for mainly controlling the rotation operation of the rotor is built in the controller.
• the elements that make up the electronic circuit are mounted on the control circuit board.
• some of these elements, such as transistors and resistors generate heat during operation, and these elements generate heat during operation of the pump body.
• the control circuit board becomes very hot. In this way, if the control circuit board heated up by the heat generating element is left as it is, the operation of the pump body will continue to cause a significant decrease in the life of the element due to the heat, leading to a failure of the controller, The pump body cannot be operated correctly. Therefore, it is indispensable to remove the heat from the control circuit board built in the controller in the vacuum pump device.
• a cooling fan is installed inside the controller, and the cooling fan power is generated.
• vibration must be suppressed as much as possible because vibration is a great enemy. Therefore, magnetic bearings are used as a structure to support the rotating rotor, which is the source of vibration, and mechanical contact is eliminated to reduce the vibration of the pump body.
• Patent Document 1 discloses a method for cooling a controller without using a cooling fan.
• the method is to connect the pump body and controller with a connector and install a cooling jacket that is in close contact with both. Then, cooling water is supplied to the piping in the cooling jacket, and the controller is cooled with water through the cooling jacket.
• a separate piping facility for flowing cooling water is required, which increases the size of the vacuum pump device and makes it difficult to handle.
• the cooling power must be kept flowing during the operation of the pump body, and the running cost is high.
• Patent Document 1 Japanese Patent Laid-Open No. 11 173293
• the present invention has been made in view of such circumstances, and the object of the present invention is to efficiently use the heat of the control circuit board built in the controller without using the conventional forced air cooling or water cooling method.
• An object of the present invention is to provide a vacuum pump device and its controller that can be removed well, have less vibration and can be downsized. Means for solving the problem
• a vacuum pump device is installed in a vacuum chamber.
• a pump body that sucks and exhausts gas molecules in the vacuum chamber; a controller that is mounted outside the pump body and includes a control circuit board that controls the operation of the pump body; and the controller
• a heat sink that contacts the control circuit board to conduct heat and conducts heat to dissipate the heat to the outside air from a plurality of fins arranged on the outer wall surface.
• the fins of the heat sink are configured to be inclined with respect to the rotation center axis of the pump body.
• the controller of the vacuum pump device is detachably mounted outside the pump body of the vacuum pump device and controls the operation of the pump body.
• a heat sink that contacts the control circuit board and conducts heat, and dissipates the heat to the outside air from a plurality of fins arranged on the outer wall surface, and the direction of the fins of the heat sink is that of the pump body. It is configured to be inclined with respect to the rotation center axis.
• a vacuum pump device is attached to a vacuum chamber and sucks and exhausts gas molecules in the vacuum chamber, and the outside of the pump body.
• a controller with a built-in control circuit board that controls the operation of the pump body, and a vent hole that covers the periphery of the controller and vents the hot air heated by the heat of the control circuit board to the outside. And a controller case.
• the controller of the vacuum pump device according to the present invention is detachably attached to the outside of the pump body of the vacuum pump device, and controls the operation of the pump body, and the surroundings of the control circuit board And a controller case having a vent hole through which hot air heated by the heat of the control circuit board is vented to the outside.
• the heat sink has fins on both sides that are inclined at an arbitrary angle on the outer plate facing the outside air, and the fins on both sides of the heat sink. It is possible to adopt a configuration in which a communication path through which air passes is formed at a position where the intersections are connected. Similarly, the heat sink has fins on both sides that are inclined at an arbitrary angle to the inner plate facing the pump body. A communication path through which air passes may be formed at a position where the intersections of the fins on both sides of the pipe are connected. According to such a configuration, natural convection of the air flowing between the fins on both sides through the fins to the outside air is likely to occur, and the heat exchange efficiency between the heat sink and the outside air that is heated is increased.
• the heat sink can adopt a configuration in which the tips of the fins of the inner plate facing the pump main body are extended along the outer shape of the pump case. If this configuration is adopted, the pump case can be removed while the controller is attached, so that the assembly workability of the pump is improved.
• the vacuum pump device if the pump mechanism in the pump body is a magnetic bearing type rotating body, the vacuum pump device can be mounted in a horizontal posture with respect to the vacuum chamber. Even if the mounting posture of the vacuum pump device is changed, the advantage of the present invention that the same air cooling action can be obtained without deteriorating the heat radiation performance is produced. The invention's effect
• the heat dissipation surface of the fin of the heat sink covering the periphery of the controller faces obliquely upward.
• natural convection of the air flowing between the fins is likely to occur, and the controller case's vent hole force Since heat is released to the outside, the heat dissipation efficiency of the controller heated at a high temperature is greatly improved. Therefore, a sufficient cooling effect can be obtained without installing a cooling fan inside the controller as in the conventional forced air cooling method, so that the cooling fan can be eliminated.
• the controller in the vacuum pump device and the controller thereof according to the present invention, by adopting a configuration in which the tip of the fin of the inner plate of the heat sink extends along the outer shape of the pump case, the controller remains mounted. Since the pump case can be removed and attached, the assembly work of the pump is improved. For this reason, the pump body maintainer Maintenance work can be easily performed, and the time required for the assembly work can be shortened and the cost can be reduced.
• FIG. 1 is a front view showing the external appearance of the vacuum pump device
• Fig. 2 is a left side view of the device
• Fig. 3 is a top view of the device
• Fig. 4 is a bottom view of the device
• Fig. 5 is a rear view of the device.
• FIG. 6 is an enlarged plan view showing a modification of the apparatus
• FIG. 7 is a partially enlarged sectional view of the apparatus
• FIG. 8 is an explanatory view showing the mounting posture of the apparatus.
• the vacuum pump device 1 of the present embodiment is used as a means for creating a high vacuum in the vacuum chamber 10 (see Fig. 8) of a target device such as a semiconductor manufacturing device, an electron microscope, or a mass spectrometer. . As shown in FIG. 1, this vacuum pump device 1 removes heat from the pump body 2 that sucks and exhausts gas molecules from the vacuum chamber 10, the controller 3 that controls the operation of the pump body 2, and the controller 3. The heat sink 4 and the heat sink 4 are integrated.
• the pump body 2 has a structure in which a cylindrical pump case 22 is covered on a base 21 and a bottom opening of the base 21 shown in FIG.
• a flange 24 is provided on the bottom periphery of the pump case 22! /, And this flange 24 is placed on the base 21 and bolts 52, 52,... Are fastened at equal intervals in the circumferential direction as shown in FIG.
• the pump case 22 can be detachably attached to the base 21! /.
• the upper opening of the pump case 22 is a gas molecule inlet 25, and the gas molecule exhaust 26 is opened on the side of the base 21.
• a pump mechanism (not shown) that has a turbo molecular pump and the like is built in the pump case 22, and gas molecules sucked from the intake port 25 are transferred by the pump mechanism while being compressed, and the gas is The molecules are exhausted from the exhaust port 26 to the outside of the pump body 2.
• a well-known pump mechanism can be applied to the internal structure of the pump case 22 and is not related to the gist of the present invention, so that detailed description thereof will be omitted.
• the controller 3 controls the operation of the pump mechanism of the pump body 2, and as shown in FIG. 1, as an interface 32 for connecting various peripheral devices to the front panel 31-1 constituting the controller case 31.
• a display unit 33 composed of LEDs, and the operation status of the controller 3 is displayed.
• the three LEDs light up to indicate that the controller 3 is powered on and off, and that the controller 3 and peripheral devices are in the normal Z state.
• a control circuit board 34 for mainly controlling the rotation operation of the rotor is accommodated in the controller case 31.
• two control circuit boards 34 are installed, but in order to reduce the thickness of the controller 3, the two control circuit boards 34 and 34 are arranged in an upright state inside the controller case 31.
• the periphery of the controller case 31 is covered with the heat sink 4, and the heat dissipation is enhanced by natural air cooling.
• the heat sink 4 is made of a metal material with high thermal conductivity.As shown in Fig. 7, the control circuit board 34 built in the controller 3 is fixed to the inner wall surface with screws 53 to conduct heat, and the heat is transferred to the outside air. In order to dissipate heat, a plate type with multiple fins 43, 43, ... aligned on the outer wall surface was used.
• the heat sink 4 is composed of two plates, an outer plate 41 facing the outside air and an inner plate 42 facing the pump body 2, and the outer plate 41 touches the outside air as much as possible. It is curved toward the outside. The outer plate 41 and the inner plate 42 hold the controller case 31 between the outer and inner forces, and both plates are fixed to the controller case 31 with bolts 54 and the plates are connected to each other with the bolts 55.
• the heat sink 4 is integrated!
• the direction of the fins 43 is set as follows in this embodiment. , Natural air convection is likely to occur. That is, when the outer plate 41 is viewed from the front as shown in FIG. 2, the direction of the fins 43 is inclined with respect to the rotation center axis L of the pump body 2 at a predetermined angle. In this embodiment, the tilt angle is set to 45 degrees so that the heat release surface of the fin 43 faces obliquely upward regardless of whether the pump body 2 is mounted vertically or horizontally with respect to the vacuum chamber 10.
• the force that the fins 43 of the same height are formed on both the left and right sides of the outer plate 41.
• the left fin 43-1 and the right fin 43-2 are at an arbitrary angle with each other (in this embodiment 90 Intersect at degrees)
• a communication passage 44 through which air passes is formed at a central position connecting the intersections of the fins on both sides.
• the inner plate 42 is provided with a plurality of fins 43 arranged in the vertical direction, and the heights of the fins 43 are different.
• the height of the fin 43 needs to be increased as much as possible. If the height is increased toward the pump body 2 side, it will interfere with the assembly of the pump case 22.
• the tips of the fins 43-3 of the seat 42 extend to the front of the flange 24 so as to follow the outer shape of the pump case 22, respectively.
• the configuration of the inner plate 42 may be modified to the fin shape shown in FIG. 6 instead of the fin shape shown in FIG.
• the shape of Fig. 6 is the same as the outer plate 41, but the fins 43 of the inner plate 42 are also inclined, and the fins 43 are formed on the upper half of the inner plate 42 viewed from the front and avoiding the base 21 portion.
• the orientation of the pump body 2 is inclined at a predetermined angle (45 degrees in this embodiment) with respect to the rotation center axis L of the pump body 2.
• the left and right fins 43-1 and 43-2 intersect each other at an arbitrary angle (90 degrees in this embodiment), and the communication path through which air passes through the center of the intersection of the fins on both sides 44 is formed.
• the following force is applied to the controller 3 itself. That is, as shown in FIG. 5, a large number of ventilation holes 36, 36,... Penetrating into the inside of the case are opened on the rear panel 31-2 constituting the controller case 31 and hot air inside the controller case 31 is passed through It can be vented to the outside.
• These ventilation holes 36 are formed as minute holes of several millimeters so that foreign matter does not enter the inside of the case, and are formed in a high density by arranging the holes in a staggered manner so that more air can escape. .
• the peripheral panel of the rear panel 31-2 which has a punching metal force as in this embodiment, is attached to the controller case 31 with the screw 56, or a hole is directly drilled in the back of the controller case 31. May be adopted.
• a bottom panel 31-3 having a large number of air holes 36, 36,... Is attached to the controller case 31 with screws 56. .
• a similar vent hole is formed on the upper surface of the controller case 31 as well.
• the controller 3 with the heat sink 4 is attached to the pump body 2 via a bracket 51.
• the controller 3 has a V, and the lower back of the controller case 31 protrudes!
• a flat mounting surface 31a for mounting the flat bracket 51 is provided there.
• the pump body 2 is provided with a mounting surface 21a in which a part of the peripheral edge is cut out on the side surface of the base 21 in accordance with the outer shape of the control mouth 3
• the bracket 51 is formed with a case mounting hole (not shown) for fastening to the controller case 31 and a through hole 51a for connecting a connector with a built-in current conductor or control signal line in the center.
• Base mounting holes 51b for fastening to the screw 21 are formed on the upper and lower sides of the left and right sides.
• this vacuum pump device 1 can be used by being connected to a vacuum chamber 10 of a measuring instrument using, for example, an electron microscope.
• FIG. 8 (A) shows a state in which the vacuum pump device 1 is mounted in a vertical position.
• the suction port flange 28 of the pump body 2 and the exhaust port flange 11 of the vacuum chamber 10 are brought into contact with each other.
• the vacuum pump device 1 is mounted in a suspended state.
• the control circuit board 34 built in the controller 3 is a transistor, resistor, etc.
• the power S which is heated by the heat generating element, is removed by natural air cooling of the heat sink 4 as follows.
• the two control circuit boards 34 and 34 come into contact with the outer plate 41 and the inner plate 42, which have high thermal conductivity, respectively. Heat is transferred to both plates 41 and 42 quickly.
• the outer wall surfaces of both plates 41, 42 are enlarged in surface area by a plurality of fins 43, 43,..., And the outer surface force of these fins 43 is radiated to the outside air.
• the directions of the fins 43-1 and 43-2 on both the left and right sides of the outer plate 41 are diagonally upward! /! Therefore, heat dissipation is superior to those with fins facing downward or sideways.
• the air flowing between the fins 43-1 and 43-2 on both the left and right sides is free from clearance between the fins. Since the air is surely escaped to the outside air, this air flow increases the efficiency of heat exchange between the heat sink 4 heated to the outside temperature.
• the plurality of ventilation holes 36, 36,... are opened in the back panel 31-2 and the bottom panel 31-3 of the controller case 31, respectively, Do not get stuck inside the case through the air vent 36.
• the heat radiating surface of the fin 43 faces obliquely upward, and natural convection of the air flowing between the fins 43 and 43 easily occurs! /, And from the vent hole 36 of the controller case 31.
• the heat release efficiency of the controller 3 is greatly improved by reliably removing hot air.
• a magnetic bearing type turbo molecular pump is adopted as the pump mechanism of the pump body 2, so that the vacuum pump device 1 is installed as shown in FIG. It is also possible to mount the vacuum chamber 10 in a horizontal position. In this way, when the vacuum pump device 1 is mounted in a horizontal posture, the heat sink 4 The fin 43 is inclined and turned diagonally upward, and natural convection of the air flowing between the fins 43 and 43 tends to occur. Therefore, even if the mounting posture of the vacuum pump device 1 is changed, there is an advantage that a similar air cooling effect can be obtained without reducing the heat dissipation performance.
• the vacuum pump device 1 of this embodiment is also excellent in assembling workability.
• the tip of the fin 43-3 extends along the outer shape of the flange 24 of the pump case 22 in the inner plate 42 of the heat sink 4. Therefore, when the bolt 52 is loosened, the fin 43-3 does not get in the way, and if the force is removed and the pump case 22 is lifted vertically, the controller 3 with this heat sink 4 is connected to the pump body 2 It can be removed while attached to. It is also possible to attach the removed pump case 22 without removing the controller 3. As described above, the pump case 22 can be removed and attached while the controller 3 is attached, so that the maintenance work of the pump body 2 can be easily performed, and the time required for the assembly work can be shortened and the cost can be reduced. be able to.
• FIG. 1 is a front view showing an appearance of a vacuum pump device according to the present invention.
• FIG. 2 is a left side view showing the appearance of the vacuum pump device of FIG.
• FIG. 3 is a top view showing the appearance of the vacuum pump device of FIG.
• FIG. 4 is a bottom view showing the appearance of the vacuum pump device of FIG.
• FIG. 5 is a rear view showing the appearance of the vacuum pump device of FIG.
• FIG. 6 is an enlarged plan view showing a modification of the controller in the vacuum pump device of FIG.
• FIG. 7 is an enlarged sectional view of a part showing a fixing structure of a pump body and a controller in the vacuum pump device of FIG.
• FIG. 8 is an explanatory view showing a mounting posture of the vacuum pump device of FIG.

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• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• General Engineering & Computer Science (AREA)
• Non-Positive Displacement Air Blowers (AREA)
• Compressor (AREA)
• Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=37683175

Family Applications (1)

Country Status (2)

Cited By (10)

Families Citing this family (6)

Citations (7)

• 2005
  • 2005-07-29 JP JP2005221319A patent/JP4796795B2/ja not_active Expired - Lifetime
• 2006
  • 2006-07-06 WO PCT/JP2006/313456 patent/WO2007013274A1/ja active Application Filing

Patent Citations (7)

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