WO2006087786A1 - Procede de fabrication de cellule solaire - Google Patents
Procede de fabrication de cellule solaire Download PDFInfo
- Publication number
- WO2006087786A1 WO2006087786A1 PCT/JP2005/002456 JP2005002456W WO2006087786A1 WO 2006087786 A1 WO2006087786 A1 WO 2006087786A1 JP 2005002456 W JP2005002456 W JP 2005002456W WO 2006087786 A1 WO2006087786 A1 WO 2006087786A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- solar cell
- laser
- manufacturing
- type electrode
- pulse width
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 229910021419 crystalline silicon Inorganic materials 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 24
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 238000012423 maintenance Methods 0.000 abstract description 2
- 229910009372 YVO4 Inorganic materials 0.000 abstract 1
- 238000009434 installation Methods 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 20
- 210000004027 cell Anatomy 0.000 description 17
- 238000010292 electrical insulation Methods 0.000 description 13
- 238000012545 processing Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000000926 separation method Methods 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 2
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- YGLMVCVJLXREAK-MTVMDMGHSA-N 1,1-dimethyl-3-[(1S,2R,6R,7S,8R)-8-tricyclo[5.2.1.02,6]decanyl]urea Chemical compound C([C@H]12)CC[C@@H]1[C@@H]1C[C@@H](NC(=O)N(C)C)[C@H]2C1 YGLMVCVJLXREAK-MTVMDMGHSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Abstract
La présente invention décrit un procédé de fabrication de cellule solaire avec lequel on peut utiliser un équipement de fabrication d'entretien facile et une cellule solaire qui ne génère pas facilement de fuites électriques. Dans ledit procédé de fabrication, un faisceau laser à impulsion, d'une largeur d'impulsion de 100 nsec ou moins, sert à isoler électriquement une région de formation d'électrodes de type P d'une région de formation d'électrodes de type N, dans la cellule solaire à base de silicium cristallin et l'on parvient à une isolation PN. La cellule solaire peut être fabriquée à l'aide de l'équipement laser; ce qui n’est pas coûteux, ce qui est d'entretien facile et n'occupe pas beaucoup d'espace à l’installation ; on obtient le faisceau laser à impulsion en utilisant un laser YAG ou un équipement laser YVO4.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007503526A JPWO2006087786A1 (ja) | 2005-02-17 | 2005-02-17 | 太陽電池の製造方法 |
PCT/JP2005/002456 WO2006087786A1 (fr) | 2005-02-17 | 2005-02-17 | Procede de fabrication de cellule solaire |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2005/002456 WO2006087786A1 (fr) | 2005-02-17 | 2005-02-17 | Procede de fabrication de cellule solaire |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006087786A1 true WO2006087786A1 (fr) | 2006-08-24 |
Family
ID=36916202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/002456 WO2006087786A1 (fr) | 2005-02-17 | 2005-02-17 | Procede de fabrication de cellule solaire |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPWO2006087786A1 (fr) |
WO (1) | WO2006087786A1 (fr) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010010493A (ja) * | 2008-06-27 | 2010-01-14 | Sharp Corp | 太陽電池セルおよびその製造方法 |
EP2263263A2 (fr) * | 2008-02-25 | 2010-12-22 | LG Electronics Inc. | Pile solaire et procédé de fabrication |
JP2011009663A (ja) * | 2009-06-29 | 2011-01-13 | Kyocera Corp | 太陽電池素子の製造方法および太陽電池素子の製造装置 |
JP2011049484A (ja) * | 2009-08-28 | 2011-03-10 | Kyocera Corp | 太陽電池素子の製造方法および太陽電池素子の製造装置 |
WO2011040489A1 (fr) * | 2009-09-29 | 2011-04-07 | 京セラ株式会社 | Elément de pile solaire et module de pile solaire |
JP2011151192A (ja) * | 2010-01-21 | 2011-08-04 | Sharp Corp | 太陽電池セル、インターコネクタ付き太陽電池セルおよびその製造方法 |
JP2011187903A (ja) * | 2010-03-11 | 2011-09-22 | Mitsubishi Electric Corp | 太陽電池の製造方法 |
KR20120136014A (ko) * | 2011-06-08 | 2012-12-18 | 엘지전자 주식회사 | 태양 전지 및 그의 반도체 기판 에칭 장비 |
JP2013110406A (ja) * | 2011-11-23 | 2013-06-06 | Samsung Sdi Co Ltd | 光電変換素子の製造方法及び光電変換素子 |
WO2014054350A1 (fr) * | 2012-10-04 | 2014-04-10 | 信越化学工業株式会社 | Procédé de fabrication de cellule photovoltaïque |
JP2014511038A (ja) * | 2011-03-30 | 2014-05-01 | ハンワ ケミカル コーポレイション | 太陽電池の製造方法 |
JP2014158043A (ja) * | 2014-04-22 | 2014-08-28 | Sanyo Electric Co Ltd | 太陽電池モジュール |
WO2014188773A1 (fr) * | 2013-05-21 | 2014-11-27 | 信越化学工業株式会社 | Procédé de fabrication de cellule solaire, et cellule solaire |
WO2015064354A1 (fr) * | 2013-11-01 | 2015-05-07 | パナソニックIpマネジメント株式会社 | Photopile |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11312815A (ja) * | 1998-04-28 | 1999-11-09 | Matsushita Electric Ind Co Ltd | 薄膜太陽電池の製造方法 |
JP2002198546A (ja) * | 2000-12-27 | 2002-07-12 | Kyocera Corp | 太陽電池素子の形成方法 |
JP2002231986A (ja) * | 2001-02-07 | 2002-08-16 | Mitsubishi Heavy Ind Ltd | 集積型薄膜太陽電池の製造方法 |
JP2002324768A (ja) * | 2001-02-21 | 2002-11-08 | Nec Machinery Corp | 基板切断方法 |
JP2002329880A (ja) * | 2001-04-23 | 2002-11-15 | Samsung Sdi Co Ltd | 太陽電池及びその製造方法 |
JP2004039891A (ja) * | 2002-07-04 | 2004-02-05 | Mitsubishi Heavy Ind Ltd | 薄膜太陽電池の製造方法及び装置 |
-
2005
- 2005-02-17 JP JP2007503526A patent/JPWO2006087786A1/ja active Pending
- 2005-02-17 WO PCT/JP2005/002456 patent/WO2006087786A1/fr not_active Application Discontinuation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11312815A (ja) * | 1998-04-28 | 1999-11-09 | Matsushita Electric Ind Co Ltd | 薄膜太陽電池の製造方法 |
JP2002198546A (ja) * | 2000-12-27 | 2002-07-12 | Kyocera Corp | 太陽電池素子の形成方法 |
JP2002231986A (ja) * | 2001-02-07 | 2002-08-16 | Mitsubishi Heavy Ind Ltd | 集積型薄膜太陽電池の製造方法 |
JP2002324768A (ja) * | 2001-02-21 | 2002-11-08 | Nec Machinery Corp | 基板切断方法 |
JP2002329880A (ja) * | 2001-04-23 | 2002-11-15 | Samsung Sdi Co Ltd | 太陽電池及びその製造方法 |
JP2004039891A (ja) * | 2002-07-04 | 2004-02-05 | Mitsubishi Heavy Ind Ltd | 薄膜太陽電池の製造方法及び装置 |
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2263263A2 (fr) * | 2008-02-25 | 2010-12-22 | LG Electronics Inc. | Pile solaire et procédé de fabrication |
EP2263263A4 (fr) * | 2008-02-25 | 2012-08-08 | Lg Electronics Inc | Pile solaire et procédé de fabrication |
JP2010010493A (ja) * | 2008-06-27 | 2010-01-14 | Sharp Corp | 太陽電池セルおよびその製造方法 |
JP2011009663A (ja) * | 2009-06-29 | 2011-01-13 | Kyocera Corp | 太陽電池素子の製造方法および太陽電池素子の製造装置 |
JP2011049484A (ja) * | 2009-08-28 | 2011-03-10 | Kyocera Corp | 太陽電池素子の製造方法および太陽電池素子の製造装置 |
JP5289578B2 (ja) * | 2009-09-29 | 2013-09-11 | 京セラ株式会社 | 太陽電池素子および太陽電池モジュール |
WO2011040489A1 (fr) * | 2009-09-29 | 2011-04-07 | 京セラ株式会社 | Elément de pile solaire et module de pile solaire |
JP2013102217A (ja) * | 2009-09-29 | 2013-05-23 | Kyocera Corp | 太陽電池素子および太陽電池モジュール |
US8912431B2 (en) | 2009-09-29 | 2014-12-16 | Kyocera Corporation | Solar cell element and solar cell module |
JP2011151192A (ja) * | 2010-01-21 | 2011-08-04 | Sharp Corp | 太陽電池セル、インターコネクタ付き太陽電池セルおよびその製造方法 |
JP2011187903A (ja) * | 2010-03-11 | 2011-09-22 | Mitsubishi Electric Corp | 太陽電池の製造方法 |
US9093580B2 (en) | 2011-03-30 | 2015-07-28 | Hanwha Chemical Corporation | Method for manufacturing solar cell |
JP2014511038A (ja) * | 2011-03-30 | 2014-05-01 | ハンワ ケミカル コーポレイション | 太陽電池の製造方法 |
KR101708240B1 (ko) * | 2011-06-08 | 2017-02-20 | 엘지전자 주식회사 | 태양 전지 및 그의 반도체 기판 에칭 장비 |
KR20120136014A (ko) * | 2011-06-08 | 2012-12-18 | 엘지전자 주식회사 | 태양 전지 및 그의 반도체 기판 에칭 장비 |
JP2013110406A (ja) * | 2011-11-23 | 2013-06-06 | Samsung Sdi Co Ltd | 光電変換素子の製造方法及び光電変換素子 |
JPWO2014054350A1 (ja) * | 2012-10-04 | 2016-08-25 | 信越化学工業株式会社 | 太陽電池セルの製造方法 |
WO2014054350A1 (fr) * | 2012-10-04 | 2014-04-10 | 信越化学工業株式会社 | Procédé de fabrication de cellule photovoltaïque |
US9614117B2 (en) | 2012-10-04 | 2017-04-04 | Shin-Etsu Chemical Co., Ltd. | Solar cell manufacturing method |
WO2014188773A1 (fr) * | 2013-05-21 | 2014-11-27 | 信越化学工業株式会社 | Procédé de fabrication de cellule solaire, et cellule solaire |
JPWO2014188773A1 (ja) * | 2013-05-21 | 2017-02-23 | 信越化学工業株式会社 | 太陽電池の製造方法及び太陽電池 |
WO2015064354A1 (fr) * | 2013-11-01 | 2015-05-07 | パナソニックIpマネジメント株式会社 | Photopile |
US20160233368A1 (en) * | 2013-11-01 | 2016-08-11 | Panasonic Intellectual Property Management Co., Ltd. | Solar cell |
JPWO2015064354A1 (ja) * | 2013-11-01 | 2017-03-09 | パナソニックIpマネジメント株式会社 | 太陽電池 |
JP2014158043A (ja) * | 2014-04-22 | 2014-08-28 | Sanyo Electric Co Ltd | 太陽電池モジュール |
Also Published As
Publication number | Publication date |
---|---|
JPWO2006087786A1 (ja) | 2008-07-03 |
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