WO2006082996A1 - 銀粒子粉末およびその製造法 - Google Patents
銀粒子粉末およびその製造法 Download PDFInfo
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- WO2006082996A1 WO2006082996A1 PCT/JP2006/302109 JP2006302109W WO2006082996A1 WO 2006082996 A1 WO2006082996 A1 WO 2006082996A1 JP 2006302109 W JP2006302109 W JP 2006302109W WO 2006082996 A1 WO2006082996 A1 WO 2006082996A1
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- silver
- less
- particle powder
- dispersion
- producing
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/16—Making metallic powder or suspensions thereof using chemical processes
- B22F9/18—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
- B22F9/24—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from liquid metal compounds, e.g. solutions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/05—Metallic powder characterised by the size or surface area of the particles
- B22F1/054—Nanosized particles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
- B22F1/102—Metallic powder coated with organic material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
- H05K1/097—Inks comprising nanoparticles and specially adapted for being sintered at low temperature
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1241—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing
Definitions
- the present invention relates to a spherical fine particle powder (particularly having a particle size of the order of nanometers) and a dispersion thereof, and more specifically, a wiring forming material for forming a fine circuit pattern, particularly an ink jet method.
- the present invention relates to a method for producing a silver particle powder having a low corrosive component suitable as a wiring forming material.
- the silver particle powder of the present invention is suitable as a wiring formation material for LSI substrate wiring, FPD (Flat Panel Display) electrode and wiring formation, and for filling fine trenches, via holes, contact holes, etc. It can also be used as a coloring material for car coating, etc. Also, it has low impurities and low toxicity, so it can also be applied to carriers that adsorb biochemicals in the medical, diagnostic and biotechnology fields.
- Conventional technology Conventional technology
- nanoparticles When the size of a solid substance is nanometer order ultrafine particles (hereinafter referred to as “nanoparticles”), the specific surface area becomes very large, so that the interface between gas and liquid becomes extremely large even though it is solid. Therefore, the properties of the surface greatly affect the properties of the solid material.
- the melting point In the case of metal nanoparticles, the melting point is known to drop dramatically compared to that in the bulk state. Therefore, compared to conventional micron-order particles, in addition to the feature that fine wiring can be drawn, it has features such as low-temperature sintering.
- silver nanoparticles have low resistance and high weather resistance, and their price is low compared to other precious metals, so they are particularly promising as next-generation wiring materials with fine wiring width. It has been done.
- Patent Document 1 describes a method of evaporating silver in an inert gas atmosphere such as helium and in a low pressure of about 0.5 Torr. Yes.
- Patent Document 2 silver ions are reduced with ammine in an aqueous phase, and the resulting silver precipitation phase is transferred to an organic solvent phase (a high molecular weight dispersant).
- Patent Document 3 discloses the presence of a thiol-based protective agent using a reducing agent (alkali metal borohydride or ammonium borohydride) in a solvent. The method of reduction is described below.
- Patent Document 1 Japanese Patent Laid-Open No. 2 0 0 1-3 5 2 5 5
- Patent Document 2 Japanese Patent Laid-Open No. 11-3 1 9 5 3 8
- Patent Document 3 Japanese Patent Laid-Open No. 2 0 0 3-2 5 3 3 1 1 Problem to be Solved by the Invention
- Silver particles obtained by the vapor phase method of Patent Document 1 have a particle size of 10 nm or less and good dispersibility in a solvent.
- this technology requires special equipment. For this reason, it is difficult to synthesize industrial silver nanoparticles in large quantities.
- the liquid phase method is basically a method suitable for mass synthesis, but has a problem that it is difficult to obtain monodispersed nanoparticle powder because the metal nanoparticles are extremely cohesive in the liquid.
- citrate as a dispersing agent
- Patent document 2 synthesizes silver nanoparticles stably dispersed at a high metal ion concentration of 0.1 lmo 1 / L or more and a high raw material feed concentration by the method described above.
- a high molecular weight dispersant having a number average molecular weight of tens of thousands is used.
- a firing temperature higher than the boiling point of the polymer is required.
- Patent Document 3 the above-described method is used to cause a reaction at a relatively high concentration of a charged concentration of 0.1 lmol / L or more, and the obtained silver particles of 1 Onm or less are dispersed with a dispersant.
- a dispersant a cheo-type dispersant has been proposed. Since this has a low molecular weight of about 200, it can be easily volatilized by low-temperature firing during wiring formation.
- thiol-based surfactants contain sulfur (S), which can cause corrosion of wiring and other electronic components, making it an element that is not suitable for wiring formation applications. It is. Therefore, it is not preferable for wiring formation.
- the liquid phase method is with silver nitrate or silver halides such as silver material (Patent Documents 2 and 3)
- the reaction solution I-, CI-, S_rei_4 2 one, .nu.0 3 - and CN A lot of ions derived from silver raw materials such as — are inevitably contained. In the case of nanoparticles, the specific surface area is extremely large, solid-liquid separation / washing is difficult, and most of these ions originating from the raw materials are originally combined with silver. Due to the high reactivity, ions originating from these raw materials come to adsorb or react with the silver particles after the reaction, and the dispersion using the particles also contains the ions as impurities. It becomes.
- the present invention has an object to solve such problems and to obtain a silver nanoparticle powder with a small amount of corrosive components suitable for fine wiring formation applications and a dispersion thereof in a large amount at a low cost.
- individual spherical silver nanoparticles having a uniform particle size are independently monodispersed, it is an object to obtain a dispersion of such silver particles.
- the average particle size (DTEM) measured by TEM observation is 200 nm or less, preferably 100 nm or less, more preferably 30 nm or less, and the aspect ratio is less than 2.50, (DTEM) / (Dx) One is less than 5._0 (where (Dx) represents the X-ray crystal particle diameter) and contains I—, Cl—, SO4 2 and ⁇ and CN— Provide silver particle powders each of which is less than 100 ppm.
- the TEM average particle diameter (DTEM) is preferably 100 nm or less, more preferably 30 nm or less, and an organic protective material (typically fatty acid or amine compound) having a molecular weight of 100 to 400 is deposited on the surface of each particle. is doing.
- a dispersion of silver particles in which the silver particle powder is dispersed in an organic dispersion medium (typically a nonpolar or low polarity solvent), which has an average particle diameter determined by a dynamic light scattering method.
- the present invention also provides a method for producing such a silver particle powder, wherein a silver compound other than silver nitrate (typically carbonic acid) is used in an organic solvent (typically alcohol or polyol) having a boiling point of 85 ° C or higher. Silver or silver oxide) is reduced at a temperature of 85 ° C or higher in the presence of an organic protective agent (typically a fatty acid or amino compound having a molecular weight of 100 to 400).
- an organic protective agent typically a fatty acid or amino compound having a molecular weight of 100 to 400.
- FIG. 1 is an electron microscope (TEM) of the silver nanoparticle powder of the present invention.
- FIG. 2 is an electron microscope (TEM) of the silver nanoparticle powder of the present invention having a different magnification from that of FIG.
- FIG. 3 is an electron microscope (TEM) of silver nanoparticle powder of another example of the present invention.
- FIG. 4 is an electron microscope (TEM) of silver nanoparticle powder of another example of the present invention having a different magnification from that of FIG.
- FIG. 5 is an X-ray diffraction chart of the silver nanoparticle powder of the present invention. Preferred embodiments of the invention
- the present inventor has conducted tests for producing silver nanoparticle powders by a liquid phase method.
- a silver compound other than silver nitrate typically silver carbonate or oxidized
- an alcohol or polyol having a boiling point of 85 ° C or higher.
- silver is reduced at a temperature of 85 ° C or higher (with the evaporated alcohol refluxed to the liquid phase) in the presence of a protective agent having a molecular weight of 100 to 400, It was also found that spherical silver particle powder was obtained.
- the silver nanoparticle powder is in a state where the above-mentioned protective agent is adhered to the surface, and can be well dispersed in the dispersant.
- the particle size can be stably obtained in the order of 200 nm or less, preferably 100 nm or less, and more preferably 3 O nm or less.
- wiring forming materials for forming fine circuit patterns especially It has been found that it can be a suitable material as a wiring forming material by the ink jet method.
- the silver particle powder of the present invention has an average particle diameter (DTEM) measured by TEM (transmission electron microscope) observation of 200 nm or less, preferably 100 nm or less, more preferably 30 nm or less. .
- DTEM average particle diameter
- TEM observation the average value is obtained by measuring the diameter of 300 independent particles that do not overlap from the image magnified 600,000 times.
- the aspect ratio can also be obtained from similar observations.
- the aspect ratio (major axis / minor axis ratio) of the silver particle powder of the present invention is less than 2.0, preferably 1.2 or less, and more preferably 1.1 or less.
- the photograph in Fig. 1 is almost spherical, and its aspect ratio (average) is 1.05 or less. Therefore, it is suitable for wiring formation applications.
- the aspect ratio is 2.0 or more, when the dispersion liquid of the particles is applied to the substrate and dried, the packing property of the particles deteriorates, and pores are generated during firing, resulting in high resistance. May cause I. [Single crystallinity]
- Single crystallinity is expressed as the ratio of TEM grain size (DTEM) / X-ray crystal grain size (Dx).
- DTEM TEM grain size
- Dx X-ray crystal grain size
- the X-ray crystal grain size (Dx) can be obtained from the X-ray diffraction results using the Scherrer equation.
- K Scherrer constant
- D crystal particle diameter
- ⁇ measured X-ray wavelength
- ⁇ half width of peak obtained by X-ray diffraction
- ⁇ Bragg angle of diffraction line.
- Single crystallinity (DTEM) / (Dx) roughly corresponds to the number of crystals present in one particle. It can be said that the larger the single crystallinity, the more the particles are made of polycrystals.
- the single crystallinity of the silver particles of the present invention is 5.0 or less, preferably 2.0 or less, and more preferably 1.0 or less. For this reason, there are few crystal grain boundaries in a grain. Although the electrical resistance increases as the crystal grain boundary increases, the silver nanoparticle powder of the present invention has a low single crystallinity and thus has a low resistance and is suitable for use in a conductive member.
- the silver particle powder of the present invention can be easily dispersed in a dispersion medium and can take a stable dispersion state in the dispersion medium.
- the dispersion state of silver nanoparticles in the dispersion medium can be evaluated by the dynamic scattering method, and the average particle size can also be calculated.
- the principle is as follows. In general, particles with a particle size in the range of about ln rn to 5 / zm change their position and orientation from moment to moment by Brownian motion such as translation and rotation in the liquid, but these particles are irradiated with laser light. When the scattered light that comes out is detected, the fluctuation of the scattered light intensity depending on the Brownian motion is observed.
- the speed of the Brownian motion (diffusion coefficient) of the particles can be obtained, and the size of the particles can be determined.
- the average particle size in the dispersion medium is measured, and when the measured value is close to the average particle size obtained by TEM observation, the particles in the liquid are monodispersed individually. This means that the particles are not joined or agglomerated. That is, each particle is dispersed with a space in the dispersion medium, and can move independently.
- the average particle size obtained by the dynamic light scattering method performed on the silver particle powder in the dispersion according to the present invention shows a level that is not so different from the average particle size obtained by TEM observation. That is, the average particle diameter measured by the dynamic light scattering method measured for the dispersion according to the present invention is 200 nm or less, preferably 100 nm or less, more preferably 30 nm or less. Is not much different. Therefore, a monodispersed state is realized, and according to the present invention, a dispersion in which silver nanoparticle powders are independently dispersed is provided.
- the concentration of the solution at the time of measurement must be suitable for the performance of the measuring device and the scattered light detection method. If the concentration is sufficient to ensure sufficient light transmission, errors will occur. Also, when measuring nano-order particles, the signal strength obtained is weak, so the dust is strongly affected and causes errors. It is necessary to pay attention to the sample pretreatment and cleanliness of the measurement environment. For nano-order particle measurement, a laser light source with an output power of 1 OO mW or more is suitable for increasing the scattered light intensity.
- the particle size is increased even if the dispersion medium is completely dispersed because of the influence of the adsorption layer of the dispersion medium.
- the silver particle powder of the present invention has a content of each ion of I—, CI—, S04 2 —, N O3—, and CN— of 10 ppm or less, and this is used in the dispersion medium.
- the dispersion liquid also contains I—, CI—, S 0 4 2 —, N 03— and CN— — ions.
- the dispersion medium that can be used in the present invention is preferably a nonpolar or low-polar organic dispersion medium such as hexane, toluene, kerosene, decane, dodecane, or tetradecane.
- the silver particle powder of the present invention comprises a silver compound other than silver nitrate (typically silver carbonate or silver oxide) in an alcohol or polyol having a boiling point of 85 ° C or higher in the presence of an organic protective agent at 85 ° C. It can manufacture by carrying out the reduction process at the above temperature.
- a silver compound other than silver nitrate typically silver carbonate or silver oxide
- an alcohol or polyol having a boiling point of 85 ° C or higher in the presence of an organic protective agent at 85 ° C. It can manufacture by carrying out the reduction process at the above temperature.
- the alcohol or polyol as the organic solvent and reducing agent used in the present invention is not particularly limited as long as it has a boiling point of 85 ° C. or higher. If a boiling point of less than 85 ° C is used, it is difficult to raise the reaction temperature to 85 ° C or higher unless it is a special reactor such as an autoclave. When the reaction temperature is less than 85 ° C, it is difficult to completely reduce silver carbonate or silver oxide to silver.
- a preferred organic solvent and reducing agent is preferably a mixture of either one or two of isobutanol and n-ptanol, but is not limited thereto as long as the boiling point is 85 ° C or higher. .
- silver compounds that are sparingly soluble in organic solvents such as silver carbonate and silver oxide, are used.
- Silver carbonate or acid silver is used in powder form.
- a metal coordinating compound having a coordination property to silver and having a molecular weight of 100 to 400 typically a fatty acid or an amino compound is used.
- the use of non-coordinating or low-coordinating compounds in silver requires a large amount of protective agent to produce nanoparticles.
- metal coordinating compounds include isonitrile compounds, io compounds, amino compounds, and fatty acids with carboxyl groups.
- io compounds contain io and cause corrosion, making them more reliable for electronic components. It causes lowering. Isonitrile compounds have problems such as being toxic.
- a wiring forming material free from such problems can be obtained.
- the amino compounds are preferred. Since secondary amines or tertiary amines themselves act as reducing agents, when alcohol is already used as a reducing agent, there are inconveniences that it becomes difficult to control the reduction rate and the like because there are two types of reducing agents.
- the molecular weight of the amino compound or fatty acid is less than 100, the particle aggregation inhibitory effect is low, while when the molecular weight exceeds 400, the aggregation suppression force is high but the boiling point is high.
- the attached silver particle powder is used as a wiring forming material, it acts as a sintering inhibitor during firing, and the resistance of the wiring increases, and in some cases, it is not preferable because it impairs conductivity.
- Use 1 00-0 400 amino compounds or fatty acids It is good.
- the reduction reaction of silver carbonate or silver oxide in the alcohol or polyol is preferably carried out using an apparatus equipped with a reflux device while returning the evaporated alcohol or polyol to the liquid phase.
- the feed concentration of silver is preferably 50 mm o 1 / L or more, and if it is less than this, it is not preferred because it costs more.
- the resulting slurry is subjected to solid-liquid separation using a centrifuge, and a dispersion medium such as etarule is added to the residue and dispersed using an ultrasonic disperser.
- a dispersion medium such as etarule is added to the residue and dispersed using an ultrasonic disperser.
- the obtained dispersion is centrifuged again, ethanol is added again, and the mixture is dispersed with an ultrasonic disperser.
- Such a solid-liquid separation ⁇ dispersion operation is repeated three times in total, and then the supernatant liquid is discarded and the precipitate is dried to obtain the silver particle powder of the present invention.
- the purity of the obtained silver particle powder was dried with a vacuum dryer (for example, dried at 200 ° C for 12 hours, and the dried product was gravimetrically (dissolved with nitric acid, added with HC 1 and precipitated with silver chloride)
- the purity of the silver particle powder according to the present invention is 0% or more, and as described above, the silver particle powder is I—, CI.
- the content of —, S04 2 —, N 0 3 _, CN— is 100 ppm or less
- a dispersion medium for dispersing the silver particle powder of the present invention hexane, toluene, kerosene, Common non-polar solvents such as decane, dodecane, tetradecane, etc.
- the resulting dispersion is then centrifuged for the purpose of removing coarse and agglomerated particles. After that, only the supernatant is collected, and this supernatant is used as a sample. Various measurements such as X-ray, particle size distribution, etc. are carried out.
- Isobutanol as solvent and reducing agent (special grade, manufactured by Wako Pure Chemical Industries, Ltd.) 20 O mL, oleic acid (manufactured by Wako Pure Chemical Industries, Ltd.) 0.1 3 2 9 mL and silver carbonate powder (high purity chemistry) 5.
- This solution is transferred to a container equipped with a refluxer and placed in an oil bath, and nitrogen gas is blown into the container as an inert gas at a flow rate of 40 O mL / min.
- the mixture was heated with stirring at a rotational speed of rpm and refluxed at a temperature of 100 ° C. for 3 hours to complete the reaction.
- the rate of temperature rise up to 100 ° C is l ° C / min.
- the slurry after the reaction is solid-liquid separated for 60 minutes at 50 00 rpm using a centrifugal separator C F 7 D 2 manufactured by Hitachi, Ltd., and the supernatant is discarded.
- the paste-like precipitate obtained in 4 above was subjected to measurement as follows.
- the precipitate obtained in 4 above is dried in a vacuum dryer at 200 ° C. for 12 hours, and the weight of the dried product is measured. It was. More specifically, Ag purity was measured by a gravimetric method (a method in which HC 1 was added after dissolving nitric acid to prepare a silver chloride precipitate, and purity was measured by its weight). The yield was calculated as XI 00 (%) (the weight of the dry product / theoretical yield calculated from the raw materials charged).
- Fig. 1 and Fig. 2 are TEM photographs of the silver nanoparticle powders in this example (photos obtained when TEM average particle size, etc. are determined). As can be seen in these photographs, it is observed that spherical silver nanoparticles are well dispersed at a predetermined interval. Particles partially overlapped are observed, but when measuring average particle size (DTEM), aspect ratio, and CV value, measurements were made on completely dispersed particles.
- Figure 5 shows the X-ray diffraction chart of the silver nanoparticle powder of this example. As can be seen in Fig. 5, there are only peaks derived from silver.
- Example 1 was repeated except that 5.571 g of silver carbonate powder was replaced with 6.863 g of silver nitrate crystals.
- the silver nitrate was dissolved in oleic acid and added to isobutanol. Stirring was continued, but it did not dissolve. Almost no peak was observed. Probably the silver oleate was produced.
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Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007501679A JP5108502B2 (ja) | 2005-02-02 | 2006-02-01 | 銀粒子粉末およびその製造法 |
CN200680003884XA CN101111334B (zh) | 2005-02-02 | 2006-02-01 | 银粒子粉末及其制造方法 |
EP06713252A EP1844883B1 (en) | 2005-02-02 | 2006-02-01 | Silver particle powder and process for producing the same |
KR1020077016402A KR101244201B1 (ko) | 2005-02-02 | 2006-02-01 | 은 입자 분말 및 이의 제조방법 |
Applications Claiming Priority (2)
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JP2005-026866 | 2005-02-02 | ||
JP2005026866 | 2005-02-02 |
Publications (1)
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WO2006082996A1 true WO2006082996A1 (ja) | 2006-08-10 |
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PCT/JP2006/302109 WO2006082996A1 (ja) | 2005-02-02 | 2006-02-01 | 銀粒子粉末およびその製造法 |
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US (1) | US20080146680A1 (ja) |
EP (1) | EP1844883B1 (ja) |
JP (1) | JP5108502B2 (ja) |
KR (1) | KR101244201B1 (ja) |
CN (1) | CN101111334B (ja) |
TW (1) | TWI285568B (ja) |
WO (1) | WO2006082996A1 (ja) |
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WO2008062548A1 (en) * | 2006-11-24 | 2008-05-29 | Nihon Handa Co., Ltd. | Pasty metal particle composition and method of joining |
WO2008084558A1 (ja) * | 2007-01-09 | 2008-07-17 | Dowa Electronics Materials Co., Ltd. | 銀粒子分散液およびその製造法 |
JP2008169453A (ja) * | 2007-01-15 | 2008-07-24 | Dowa Electronics Materials Co Ltd | 銀粒子分散液およびその製造方法 |
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US7981326B2 (en) * | 2007-01-09 | 2011-07-19 | Dowa Electronics Materials Co., Ltd. | Silver fine powder, process for producing the same, and ink |
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WO2013118860A1 (ja) * | 2012-02-09 | 2013-08-15 | 田中貴金属工業株式会社 | 金属コロイド溶液及びその製造方法 |
JP2013167002A (ja) * | 2012-02-16 | 2013-08-29 | Noritake Co Ltd | 金属微粒子分散液およびその製造方法 |
JP2014001455A (ja) * | 2013-06-28 | 2014-01-09 | Sumitomo Metal Mining Co Ltd | 銀粉 |
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JP2006328532A (ja) * | 2005-05-10 | 2006-12-07 | Samsung Electro-Mechanics Co Ltd | 金属ナノ粒子、これを製造する方法及び導電性インク |
KR100790457B1 (ko) * | 2006-07-10 | 2008-01-02 | 삼성전기주식회사 | 금속 나노입자의 제조방법 |
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Also Published As
Publication number | Publication date |
---|---|
TWI285568B (en) | 2007-08-21 |
US20080146680A1 (en) | 2008-06-19 |
KR20070101863A (ko) | 2007-10-17 |
CN101111334A (zh) | 2008-01-23 |
EP1844883B1 (en) | 2012-04-11 |
TW200631697A (en) | 2006-09-16 |
JPWO2006082996A1 (ja) | 2008-06-26 |
JP5108502B2 (ja) | 2012-12-26 |
EP1844883A4 (en) | 2009-08-05 |
EP1844883A1 (en) | 2007-10-17 |
KR101244201B1 (ko) | 2013-03-18 |
CN101111334B (zh) | 2011-10-19 |
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