WO2005121757A1 - X線検査装置 - Google Patents
X線検査装置 Download PDFInfo
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- WO2005121757A1 WO2005121757A1 PCT/JP2005/005536 JP2005005536W WO2005121757A1 WO 2005121757 A1 WO2005121757 A1 WO 2005121757A1 JP 2005005536 W JP2005005536 W JP 2005005536W WO 2005121757 A1 WO2005121757 A1 WO 2005121757A1
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- WIPO (PCT)
- Prior art keywords
- ray
- conveyor
- rays
- unit
- inspection apparatus
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
- G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
- G01N23/18—Investigating the presence of flaws defects or foreign matter
Definitions
- the present invention relates to an X-ray inspection apparatus that inspects an article such as contamination by irradiating the article to be conveyed with X-rays.
- an X-ray inspection apparatus has been used to prevent the defective product from being shipped when foreign matter is mixed into the product or the product is cracked.
- a defective product inspection was performed.
- X-rays are irradiated to the inspection object continuously conveyed by the conveyor, the X-ray transmission state is detected by the X-ray light receiving unit, and foreign matter is detected in the inspection object. It is determined whether it is not mixed, or cracks are generated in the inspected object, or the quantity of unit contents in the inspected object is insufficient.
- the X-ray inspection equipment may inspect the number of unit contents in the inspection object.
- an X-ray inspection apparatus has been proposed that has a function for confirming whether or not a transport conveyor for transporting a product to be inspected is properly mounted (see Patent Document 1).
- an open detector is placed at the mounting position of the transfer conveyor inside the apparatus, and the open detector is in an unobstructed state when the transfer conveyor is not properly mounted. Is detected and X-ray irradiation is prohibited. This prevents X-rays from being leaked to the outside of the device when X-rays are irradiated when the transfer conveyor is not properly installed or when the transfer conveyor is forgotten to be installed.
- Patent Document 1 JP 2002-71588 A (published March 8, 2002) Disclosure of the invention
- the conventional X-ray inspection apparatus has the following problems.
- the X-ray inspection apparatus disclosed in the above publication is equipped with an open detector that detects the mounting state of the conveyor, it is easy to check whether the conveyor is properly installed, Although leakage can be prevented, there is a problem that an additional open detector is required, resulting in an increase in cost.
- An X-ray inspection apparatus is an X-ray inspection apparatus that inspects an article by irradiating the article to be conveyed with X-rays and detecting X-rays transmitted through the article.
- Unit a light receiving unit, a transport unit, an X-ray shielding unit, and a control unit.
- the irradiation unit emits X-rays to the object to be inspected.
- the light receiving unit detects the X-rays emitted from the irradiation unit.
- the transport unit is disposed between the irradiation unit and the light receiving unit, and transports an article to be inspected.
- the X-ray shielding unit is integrated with the transport unit and shields a part of the X-rays emitted from the irradiation unit and is formed in a region where the X-rays in the transport unit are irradiated.
- the control unit detects a position where the X-ray is shielded by the X-ray shielding unit based on the amount of X-ray detected by the light receiving unit. Then, based on this position, it is determined whether or not the conveying unit is properly mounted.
- the control unit should be detected when the position of the X-ray shielding unit is small and the amount of X-rays detected by the light receiving unit is small compared to other regions. If it matches the position
- the transport unit is normally mounted.
- the position of the region where the amount of X-ray detection in the light receiving unit is shielded by the X-ray shielding unit is normally If the position that should be detected when it is mounted is not correct or if an area with a small amount of X-ray detection cannot be detected, it is determined that the transport unit is not normally mounted.
- the transport unit for transporting the article to be inspected is normally mounted on the main body of the X-ray inspection apparatus. In this case, the scattered X-rays leak inside the apparatus and leak outside the apparatus. There is a risk.
- the normal mounting of the transport section is a means for detecting whether or not the transport section is normally mounted on the main body of the X-ray inspection apparatus before the inspection of the article is started.
- a switch that allows X-ray irradiation is provided.
- the method using a switch like this has the following problems: cost increase and production effort!
- an X-ray shielding unit integrated with the transport unit is formed in order to confirm normal mounting of the transport unit.
- the X-ray shielding part of the light-receiving part that is blocked by the X-ray shielding part that is, the part where the detected amount of X-rays is small, is detected and compared with the position to be detected when it is normally attached.
- the integration of the X-ray shielding part with the transport part means that the X-ray shielding part may be formed as a part of the transport part and integrated, and the X-ray shielding part is formed separately and independently. After being fixed, it is fixed to the transport section and integrated.
- the X-ray inspection apparatus is the X-ray inspection apparatus according to the first invention, and when the control unit determines that the transport unit is not normally attached, the X-ray irradiation of the irradiation unit force is performed. Is prohibited.
- control unit determines that the transfer unit has been properly mounted by X-ray irradiation before the inspection of the article, the X-ray irradiation with the irradiation unit power is prohibited. Do it.
- the X-ray inspection apparatus is the X-ray inspection apparatus according to the first or second invention. Therefore, the apparatus further includes a storage unit that stores the position of the light receiving unit where X-rays are shielded by the X-ray shielding unit when the transport unit is normally mounted.
- the transport unit when the transport unit is mounted at a normal position, the position of the light receiving unit where the X-ray is blocked by the X-ray blocking unit, that is, the amount of X-rays detected by the light receiving unit is compared with other regions.
- the position of the light receiving unit where the X-ray is blocked by the X-ray blocking unit that is, the amount of X-rays detected by the light receiving unit is compared with other regions.
- the amount of the X-rays detected by the light receiving unit by irradiating the X-rays before the inspection of the article is small! /, Whether the position of the part matches the position stored in the storage unit! It is possible to easily confirm whether or not the transfer unit is properly mounted according to whether or not it is properly installed. For example, if the position stored in the storage unit does not match the actual detection result, it is determined that the transport unit is not properly mounted. If the position stored in the storage unit matches the actual detection result, it can be determined that the transport unit is mounted normally. As a result, it is possible to easily determine whether or not the transport unit is properly mounted, and it is possible to reliably avoid inspecting the article by irradiating X-rays when the transport unit is not sufficiently mounted.
- An X-ray inspection apparatus is the X-ray inspection apparatus according to any one of the first to third inventions, wherein the X-ray shielding part is integrally formed with a frame constituting the transport part.
- the X-ray shielding part is integrally formed with a frame constituting the conveying part, such as a slit or an opening formed in the frame of the conveying part.
- An X-ray inspection apparatus is the X-ray inspection apparatus according to any one of the first to fourth inventions, wherein the transport unit includes an endless transport belt for transporting an article, and a transport A conveyor having a drive mechanism for rotating the belt and a frame disposed inside the conveyor belt.
- a conveyance conveyor including a conveyance belt, a drive mechanism, and a frame is used as the conveyance unit.
- the opening or slit formed in the frame is used to An X-ray shielding part can be formed using a part of
- An X-ray inspection apparatus is the X-ray inspection apparatus according to the fifth aspect of the invention, wherein the X-ray shielding part is a frame that forms a slit formed in a frame provided in the conveyor. Part.
- a slit is formed in the frame of the conveyor, and the portion of the frame that forms this slit is used as the X-ray shielding part.
- the X-rays are shielded by the part of the frame that forms the slits formed in the frame of the conveyor, so it is easy to check whether the conveyor is properly installed based on the position of the shielded light receiving unit. Can be confirmed.
- An X-ray inspection apparatus is the X-ray inspection apparatus according to the fifth aspect of the invention, wherein the X-ray shielding part is a frame that forms an opening formed in a frame provided in the conveyor. Part.
- the X-ray shielding part is formed as a part of the frame in consideration of the positional relationship between the opening and the light receiving part originally formed in the frame of the conveyor. .
- the part of the frame that forms the opening of the frame of the transfer conveyor that is also equipped with the conventional X-ray inspection device is used as the X-ray shielding part.
- a part of the light receiving part is arranged at a position where X-rays are shielded by the frame part forming the opening.
- the transport unit As described above, based on the presence or absence of detection in the light receiving unit arranged at a position where X-rays are shielded by the portion of the frame forming the opening, it is possible to easily recognize whether or not the transport unit is normally mounted. it can.
- An X-ray inspection apparatus is the X-ray inspection apparatus according to any one of the first to seventh inventions, wherein the light receiving unit is a line sensor.
- a line sensor is used as the light receiving unit. Then, for example, the line sensor is arranged in a direction perpendicular to the transport direction in the transport unit, and each pixel of the line sensor is X-ray detection is performed.
- both ends of the line sensor are configured to shield X-rays by a portion of the frame that forms an opening formed in the frame as an X-ray shielding unit. Check whether X-rays are detected at multiple pixels at both ends of the line sensor.
- An X-ray inspection apparatus is the X-ray inspection apparatus according to the eighth aspect, wherein the X-ray shielding unit blocks X-rays detected at one end or both ends of the line sensor. It is placed at the position to cover.
- an X-ray shielding unit is provided at a position that prevents the irradiation unit force from being detected at the end of the irradiated X-ray force S-line sensor.
- the transport unit is a transport conveyor
- the length of the line sensor may be longer than the length in the direction orthogonal to the transport direction of the X-ray detection opening formed in the frame.
- X-rays are irradiated before inspecting the article, and the amount of detected X-rays is small compared to other pixels, and the pixel position is at one end of the line sensor. If it matches the pixel, it can be determined that the transport unit is normally attached. On the other hand, if the detected amount of X-rays is small! / If the position of the pixel is shifted by the end force of the line sensor, or if it is more than the specified number, less than the specified number, or if it cannot be detected, the transport unit is normal. It can be determined that it is attached to the
- FIG. 1 is an external perspective view of an X-ray inspection apparatus according to an embodiment of the present invention.
- FIG. 2 is a diagram showing the configuration before and after the X-ray inspection apparatus.
- FIG. 3 Simplified configuration diagram inside the shield box of the X-ray inspection device.
- FIG. 4 is a plan view showing a conveyor frame inside the shield box of the X-ray inspection apparatus.
- FIG. 5 (a) is a diagram showing an X-ray irradiation state when the conveyor is mounted and a graph showing the X-ray detection amount in the line sensor at that time. (b) is a diagram showing an X-ray irradiation state when the conveyor is not installed and a graph showing the X-ray detection amount in the line sensor at that time.
- FIG. 6 is a block diagram of the control computer. 7] A schematic diagram showing the principle of X-ray inspection.
- FIG. 8 is a plan view showing a comparison frame mounted inside an X-ray inspection apparatus according to another embodiment of the present invention.
- FIG. 9 (a) is a diagram showing an X-ray irradiation state on the conveyor frame shown in Fig. 8 and a graph showing an X-ray detection amount in the line sensor at that time. (B) is a graph created by binarizing the amount of X-rays detected in (a).
- Control computer control unit
- USB external connection terminal
- CF Compact Flash (registered trademark), storage unit)
- the X-ray inspection apparatus 10 is one of the apparatuses that perform quality inspection in a production line for products such as food.
- the X-ray inspection device 10 irradiates products that are continuously conveyed with X-rays, and inspects whether foreign matters are mixed in the products based on the X-ray dose that has passed through the products! Do.
- the product G that is the inspection object of the X-ray inspection apparatus 10 is conveyed to the X-ray inspection apparatus 10 by the front conveyor 60. Commodity G is judged by the X-ray inspection apparatus 10 for the presence of foreign matter.
- the determination result of the X-ray inspection apparatus 10 is transmitted to a distribution mechanism 70 disposed on the downstream side of the X-ray inspection apparatus 10.
- the distribution mechanism 70 sends the product G as it is to the regular line conveyor 80 when the product G is determined to be a non-defective product in the X-ray inspection apparatus 10.
- the arm 70a having the downstream end as a rotation shaft rotates so as to block the conveyance path.
- the product G determined to be a defective product can be collected by the defective product collection box 90 arranged at a position off the conveyance path.
- the X-ray inspection apparatus 10 mainly includes a shield box 11, a conveyor 12, a shielding panel 16, and a monitor (display device) 26 with a touch panel function.
- a shield box 11 As shown in FIG. 3, an X-ray irradiator (irradiation unit) 13, an X-ray line sensor 14, and a control computer (control unit) 20 (see FIG. 6) are provided inside.
- the shield box 11 has an opening 11a for carrying in and out the product on both the entrance side and the exit side of the product G.
- a conveyor 12 an X-ray irradiator 13, an X-ray line sensor 14, a control computer 20 and the like are accommodated.
- the opening 11a is blocked by a shielding nolen 16 in order to prevent leakage of X-rays to the outside of the shielding box 11.
- This shielding nolen 16 has a rubber nolene portion containing lead and is pushed away by the product when the product is carried in and out.
- a key plugging power switch is arranged on the upper front of the shield box 11.
- the conveyor 12 conveys commodities within the shield box 11, and is driven by a conveyor motor (drive mechanism) 12f included in the control block of FIG.
- the conveying speed by the competitor 12 is controlled by the control computer 20 by inverter control of the conveyor motor 12f so as to be the set speed input by the operator.
- the conveyor 12 has a conveyor belt 12a and a conveyor frame 12b, and is attached to the shield box 11 in a removable state. Thereby, in order to keep the inside of the shield box 11 clean when inspecting food or the like, the conveyor can be removed and frequently cleaned.
- the conveyor belt 12a is an endless belt, and is supported by the conveyor frame 12b from the inside of the belt. Then, by receiving the driving force of the conveyor motor 12f and rotating, the object placed on the belt is conveyed in a predetermined direction.
- the conveyor frame 12b supports the conveyor belt 12a from the inside of the endless belt, and is perpendicular to the conveying direction at a position facing the inner surface of the conveyor belt 12a as shown in FIGS. 3 and 4. It has an opening 12c that is long in the direction.
- the opening 12c is formed on a line connecting the X-ray irradiator 13 and the X-ray line sensor 14 in the conveyor frame 12b.
- the opening 12c is formed in the X-ray irradiation region from the X-ray irradiator 13 in the conveyor frame 12b, and X-rays that have passed through the product G are shielded by the conveyor frame 12b. It is formed so that it will not be lost!
- the opening 12c since the opening 12c is formed, a part of the X-ray irradiated from the X-ray irradiator 13 is shielded as a part of the conveyor frame 12b on both sides in the longitudinal direction of the opening 12c.
- the shielding part (X-ray shielding part) 12d is formed. As shown in FIG. 3 and FIG. 5 (a), the shielding part 12d is a part extending to both ends of the conveyor frame 12b in both ends of the opening 12c in the direction orthogonal to the conveying direction. For this reason, as shown in FIG.
- the X-ray irradiator 13 is disposed above the conveyor 12 and is disposed below the conveyor 12 through an opening 12c formed in the conveyor frame 12b. (Light receiving part, line sensor) X-rays are radiated in a fan shape toward 14 (see shaded area in Fig. 3).
- X-rays radiated from the X-ray irradiator 13 slightly extend from the center of the conveyor frame 12b to both ends of the opening 12c (the number of X-ray line sensors 14). Irradiation is performed over the region where the pixel component) protrudes, and over the region including the pixels 14a at both ends of the X-ray line sensor 14, as shown in FIG. 5 (b).
- the X-ray line sensor 14 is arranged below the conveyor 12 (opening 12c, shielding part 12d), and detects X-rays transmitted through the product G conveyor belt 12a. As shown in FIGS. 5 (a), 5 (b), etc., this X-ray line sensor 14 is composed of a plurality of pixels 14a arranged horizontally in a straight line in a direction perpendicular to the conveying direction by the conveyor 12. .
- FIG. 5 (a) and 5 (b) show the X-ray irradiation state in the X-ray inspection apparatus 10 and the X-ray dose detected in each pixel 14a constituting the line sensor 14 at that time. Daraf and each are shown.
- the dotted line in the graph shown at the bottom of each figure corresponds to the position of the pixel 14a where the X-ray is blocked by the shielding part 12d in the X-ray irradiation state shown at the top (Fig. 9 (a The same applies to Fig. 9 (b)).
- the X-ray line sensor 14 detects the X-ray by the shielding portions 12d at both ends of the opening 12c as shown in the graph of FIG. As a result, the amount of X-ray detection is reduced at several pixels (4-15 pixels) at both ends compared to the other pixels 14a.
- the conveyor 12 is forgotten to be mounted, X-rays of a predetermined amount or more are detected in all the pixels 14a as shown in the graph of FIG. 5 (b). For this reason, as shown in the lower graph of FIG. 5 (a), by detecting whether or not the detection amount at a predetermined pixel 14a (a plurality of pixels at both ends) is smaller than that of the other pixels 14a, Presence / absence of mounting, mounting failure, etc. can be detected.
- the monitor 26 is a full-dot liquid crystal display.
- the monitor 26 has a touch panel function, and displays a screen that prompts input of parameters relating to initial setting and defect determination.
- the monitor 26 displays an X-ray image after image processing described later is performed. As a result, the presence / absence, location, size, etc. of foreign matter contained in the product G can be visually recognized by the user.
- the monitor 26 displays a detection result of a mounting failure of the conveyor 12 described later.
- the control computer (control unit) 20 executes an image processing routine, an inspection determination processing routine, and the like included in the control program in the CPU 21.
- the control computer 20 stores the images and inspection results used for inspection of defective products in the storage unit such as CF (Compact Flash (registered trademark)) 25 and the X-ray detection amount to other pixels when the conveyor 12 is installed. Saves and accumulates pixel information, etc., which is less than that of the previous one.
- the control computer 20 includes a CPU 21 and ROM 22, RAM 23, and CF 25 as main storage units controlled by the CPU 21.
- the CF 25 stores a threshold file 25a for storing a threshold value of density, which will be described later, and an inspection result log file 25b for storing inspection images and inspection results.
- control computer 20 includes a display control circuit for controlling data display on the monitor 26, a key input circuit for fetching key input data from the touch panel of the monitor 26, and an IZO port for controlling data printing in a printer not shown. External connection end With USB24 etc. as a child!
- the CPU 21, ROM 22, RAM 23, CF 25, etc. are connected to each other via bus lines such as an address bus and a data bus.
- the control computer 20 is connected to a conveyor motor 12f, a rotary encoder 12g, an X-ray irradiator 13, an X-ray line sensor 14, a photoelectric sensor 15, and the like.
- the rotary encoder 12g is attached to the conveyor motor 12f, detects the conveying speed of the conveyor 12, and transmits it to the control computer 20.
- the photoelectric sensor 15 is a synchronous sensor for detecting the timing when the product G to be inspected comes to the position of the X-ray line sensor 14, and is also configured with a pair of projector and receiver power arranged with the conveyor interposed therebetween.
- the control computer 20 When the control computer 20 receives a signal from the photoelectric sensor 15 and the product G passes through the fan-shaped X-ray irradiation unit (see the hatched portion in FIGS. 3 and 5A), the X-ray line sensor 14 X-ray fluoroscopic image signals (see Fig. 7) are acquired at small time intervals, and an X-ray image of product G is created based on these X-ray fluoroscopic image signals. That is, data at each time is obtained from each pixel 14a of the X-ray line sensor 14 at fine time intervals, and a two-dimensional image is created from these data.
- the foreign substance inspection routine executed by the CPU 21 of the control computer 20 performs image processing on the X-ray image obtained as described above, and determines whether the product is good or bad (no foreign matter is mixed) by multiple judgment methods. ).
- Examples of the determination method include a trace detection method, a binarization detection method, and a mask binary key detection method. As a result of judging by these judgment methods, if there is even one that is judged to be defective (the foreign object image shown in Fig. 7), the product G is determined to be defective.
- the trace detection method and binarization detection method make judgments on unmasked areas of the image.
- the mask binary key method makes a judgment on the masked area of the image.
- the mask is set for the container portion of the product G.
- a reference level is set along the maximum thickness of the object to be detected, and it is judged that foreign matter is mixed in the product G when the image becomes darker than that. It is a method. In this method, a product defect can be detected by detecting a relatively small foreign object.
- the conveyor 12 before starting the contamination inspection of the product, the conveyor 12 is installed to prevent leakage of X-rays to the outside due to forgetting to install the conveyor 12, etc. If you forget, check the conveyor 12 for misalignment.
- the control computer 20 controls the X-ray irradiator 13 to prohibit X-ray irradiation.
- Fig. 5 (b) if you forget to attach the conveyor 12 that has been removed from the shield box 11 for cleaning, etc., X-rays are detected in all the pixels 14a of the X-ray line sensor 14. Is detected. For this reason, the control computer 20 compares the reference state stored in the storage unit such as the RAM 23 with a level equivalent to that of the other pixels 14a in the predetermined pixel 14a (several pixels at both ends of the X-ray line sensor 14). Since X-rays are detected, it is determined that the conveyor 12 is worn abnormally. Then, the X-ray irradiation from the X-ray irradiator 13 is prohibited, and a message indicating that the conveyor 12 is not installed is displayed on the monitor 26!
- the amount of X-rays emitted from the X-ray irradiator 13 may be reduced compared to that during normal inspection during inspection of defective mounting of the conveyor 12 performed before the start of contamination inspection (for example, 30kv—about 1mA). As a result, even when the conveyor 12 is not properly mounted, the amount of X-rays leaked to the outside when the conveyor 12 is mounted incorrectly can be suppressed to about 1 ⁇ SvZh or less.
- the X-ray irradiation amount from the X-ray irradiator 13 is increased to a normal inspection amount, and the product G is conveyed by the conveyor 12, Start contamination inspection.
- the conveyor 12 (conveyor frame 12b) includes a shielding portion 12d that shields a part of the X-rays emitted from the X-ray irradiator 13.
- the shielding portion 12d is configured such that X-rays detected by a part of the pixels 14a constituting the X-ray line sensor 14 are smaller than those of the other pixels 14a.
- Pixel 14a position, number, etc.
- the X-rays are irradiated to detect whether or not the X-rays are detected in the stored pixel 14a, and whether or not the conveyor 12 is not properly mounted is determined.
- the X-ray inspection apparatus 10 is a RAM 23 as a storage unit that stores a reference state (position and number of pixels where the amount of X-ray detection is reduced) for performing a defective mounting inspection of the conveyor 12. It is equipped with storage means such as.
- a shielding part 12d as an X-ray shielding part is integrally formed as a part of the conveyor frame 12b.
- the initial force is also integrated with the conveyor 12, so that the configuration can be further simplified.
- a conveyor 12 having an endless conveyor belt 12a, a conveyor frame 12b, a conveyor motor 12f, and the like is used as a conveyance unit that conveys products.
- an X-ray shielding unit integrated with the conveyor 12 can be easily formed in the conveyor frame 12b.
- a part of the conveyor frame 12b around the opening 12c formed in the conveyor frame 12b is used as an X-ray shielding part (shielding part 12d).
- an X-ray line sensor 14 including a plurality of pixels 14a is used as a light receiving unit that detects X-rays emitted from the X-ray irradiator 13.
- the X-ray line sensor 14 so as to be long in the direction orthogonal to the transport direction, the X-rays can be shielded at both ends by the shielding part 12d. Therefore, it is possible to easily determine whether or not the conveyor 12 is defective depending on whether or not the detected amount of X-rays at the predetermined pixels 14a at both ends is reduced.
- the shielding portion 12d is detected by some pixels 14a at both ends of the X-ray line sensor 14 disposed below the opening 12c formed in the conveyor frame 12b. Shield X-rays.
- an opening 12c is formed in the conveyor frame 12b, and a part of the conveyor frame 12b at both ends thereof is used as an X-ray shielding part (shielding part 12d).
- shielding part 12d X-ray shielding part
- slits 12e are formed in the vicinity of both ends of the conveyor frame 12b in the direction orthogonal to the conveying direction, and the portion of the conveyor frame 12b that forms the slit 12e is formed.
- the same effects as in the above embodiment can be obtained, and the presence or absence of the conveyor 12 can be determined at the portion of the compare frame 12b that forms the slit 12e. It is possible to inspect the installation failure of the conveyor 12 in a state where it is clear that it is a part (shielding part) of the conveyor frame 12b.
- the threshold value of the X-ray detection amount in the X-ray line sensor 14 is set, and the detection result shown in FIG. ) May be created to determine whether or not the conveyor 12 is poorly mounted.
- the pixel 14a of the X-ray line sensor 14 shielded by a part (shielding part) of the conveyor frame 12b is confirmed. It is possible to inspect the conveyor 12 for poor mounting.
- a member that shields a part of X-rays may be formed separately, and this may be fixed to the conveyor 12 and integrated. Even in this case, since the member as the X-ray shielding part moves as the conveyor 12 moves, it is possible to detect whether or not the conveyor 12 is abnormally attached.
- the shielding portion 12d is formed so as to shield the X-rays detected in the four-to-five pixels 14a by the both-end forces of the X-ray line sensor 14 has been described.
- the present invention is not limited to this.
- X-ray line sensor 14 For example, only a few pixels 14a at one end of the X-ray line sensor 14 may be configured to block the X-rays by the shielding part 12d, or different numbers of X-ray line sensor 14 at both ends may be used. A configuration may be adopted in which the pixels are shielded from the X-rays by the shielding portion 12d.
- a configuration in which 5 pixels from one end of the X-ray line sensor 14 are shielded from X-rays by the shielding part 12d, or 8 pixels from one end and 3 pixels from the other end are shielding parts. It can be configured to block X-rays by 12d!
- the pixel 14a (reference state) in which X-rays are blocked by the shielding portion 12d when the conveyor 12 is mounted at a normal position can be stored in the storage portion such as the RAM 23. The same effects as described above can be obtained.
- the opening 12c forming the shielding part 12d is formed as a square opening.
- the present invention is not limited to the configuration shown in the above embodiment with respect to the shape and size of the opening 12c.
- inspection can be performed by irradiating other radiation such as j8 rays other than X-rays, ⁇ rays, and electromagnetic waves.
- the X-ray inspection apparatus of the present invention has an effect that it is possible to check whether or not the transport unit is properly mounted with a simple configuration, and thus includes a transport unit that transports an article to be inspected. Widely applicable to radiation inspection equipment using radiation such as X-rays
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- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Toxicology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/570,237 US7477726B2 (en) | 2004-06-11 | 2005-03-25 | X-ray inspection apparatus |
GB0624432A GB2430131B (en) | 2004-06-11 | 2005-03-25 | X-ray inspection apparatus |
CN2005800023407A CN1910448B (zh) | 2004-06-11 | 2005-03-25 | X射线检查装置 |
US12/188,413 US7593504B2 (en) | 2004-06-11 | 2008-08-08 | X-ray inspection apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004-173829 | 2004-06-11 | ||
JP2004173829A JP4565896B2 (ja) | 2004-06-11 | 2004-06-11 | X線検査装置 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/570,237 A-371-Of-International US7477726B2 (en) | 2004-06-11 | 2005-03-25 | X-ray inspection apparatus |
US12/188,413 Continuation US7593504B2 (en) | 2004-06-11 | 2008-08-08 | X-ray inspection apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005121757A1 true WO2005121757A1 (ja) | 2005-12-22 |
Family
ID=35503192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/005536 WO2005121757A1 (ja) | 2004-06-11 | 2005-03-25 | X線検査装置 |
Country Status (5)
Country | Link |
---|---|
US (2) | US7477726B2 (ja) |
JP (1) | JP4565896B2 (ja) |
CN (1) | CN1910448B (ja) |
GB (1) | GB2430131B (ja) |
WO (1) | WO2005121757A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5559471B2 (ja) * | 2008-11-11 | 2014-07-23 | 浜松ホトニクス株式会社 | 放射線検出装置、放射線画像取得システム、放射線検査システム、及び放射線検出方法 |
DE102010016502A1 (de) * | 2010-04-19 | 2011-10-20 | Phoenix Conveyor Belt Systems Gmbh | Einrichtung zur zerstörungsfreien Inspektion eines Fördergurtes mittels energiereicher Strahlen, insbesondere Röntgenstrahlen |
CN102551774B (zh) * | 2010-12-20 | 2016-05-11 | Ge医疗系统环球技术有限公司 | 皮带式床和ct设备及用于ct设备校准数据的获取方法 |
CN102519990B (zh) * | 2011-12-05 | 2014-03-26 | 天津工业大学 | 基于纹理规则性分析的钢丝绳芯输送带故障在线检测方法 |
US10598613B2 (en) | 2015-06-16 | 2020-03-24 | Dylog Itlalia S.P.A. | Non-destructive X-ray inspection machine, devices provided for such machine and method for operating the same |
PL234550B1 (pl) | 2016-06-03 | 2020-03-31 | Int Tobacco Machinery Poland Spolka Z Ograniczona Odpowiedzialnoscia | Urządzenie do identyfikacji parametrów fizycznych artykułów prętopodobnych przemysłu tytoniowego |
JP6934241B2 (ja) * | 2017-03-16 | 2021-09-15 | 株式会社イシダ | X線検査装置 |
JP6830243B2 (ja) * | 2017-03-16 | 2021-02-17 | 株式会社イシダ | X線検査装置 |
JP6717784B2 (ja) * | 2017-06-30 | 2020-07-08 | アンリツインフィビス株式会社 | 物品検査装置およびその校正方法 |
CN107694963A (zh) * | 2017-11-14 | 2018-02-16 | 安徽中科光电色选机械有限公司 | 一种x光机喷阀像元划分装置及方法 |
JP7153525B2 (ja) * | 2018-10-12 | 2022-10-14 | アンリツ株式会社 | X線検査装置 |
JP7382773B2 (ja) * | 2019-09-24 | 2023-11-17 | 東芝Itコントロールシステム株式会社 | 放射線検査装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002071588A (ja) * | 2000-09-04 | 2002-03-08 | Ishida Co Ltd | X線異物検査装置 |
JP2003050216A (ja) * | 2001-08-06 | 2003-02-21 | Shimadzu Corp | X線検査装置 |
JP2003279500A (ja) * | 2002-03-25 | 2003-10-02 | Anritsu Sanki System Co Ltd | X線異物検出装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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DE2438708A1 (de) * | 1974-08-12 | 1976-03-04 | Siemens Ag | Patienten-lagerungsvorrichtung fuer ein roentgen-transversal-schichtgeraet |
EP0367856B1 (de) * | 1988-11-09 | 1993-02-03 | Siemens Aktiengesellschaft | Computer-Tomograph |
JP2530384Y2 (ja) * | 1992-11-06 | 1997-03-26 | 日新電子工業株式会社 | 金属検出機用カセット式簡易着脱型ベルトコンベヤ |
JP2001039520A (ja) * | 1999-07-30 | 2001-02-13 | Shimadzu Corp | X線異物検査装置 |
JP3676962B2 (ja) * | 2000-04-28 | 2005-07-27 | アンリツ産機システム株式会社 | X線検出ユニット及びx線異物検出装置 |
US6512812B2 (en) * | 2000-04-28 | 2003-01-28 | Anritsu Corporation | X-ray foreign-body detector |
JP3916843B2 (ja) * | 2000-04-28 | 2007-05-23 | アンリツ産機システム株式会社 | コンベアを用いたx線異物検出装置 |
DE60109806T2 (de) * | 2000-10-25 | 2006-03-16 | Koninklijke Philips Electronics N.V. | Kalibrierungstisch mit kegelförmiger Durchstrahlung eines computertomographischen Gerätes |
JP2003225236A (ja) * | 2002-02-04 | 2003-08-12 | Shimadzu Corp | 緊急停止回路 |
JP2004028961A (ja) * | 2002-06-28 | 2004-01-29 | Shimadzu Corp | X線異物検査装置 |
US7120223B2 (en) * | 2002-09-25 | 2006-10-10 | Pencilbeam Technologies | Body-supporting couch |
DE102005032288B4 (de) * | 2005-07-11 | 2008-10-16 | Siemens Ag | Röntgenaufnahmeeinrichtung |
-
2004
- 2004-06-11 JP JP2004173829A patent/JP4565896B2/ja not_active Expired - Lifetime
-
2005
- 2005-03-25 WO PCT/JP2005/005536 patent/WO2005121757A1/ja active Application Filing
- 2005-03-25 GB GB0624432A patent/GB2430131B/en not_active Expired - Fee Related
- 2005-03-25 CN CN2005800023407A patent/CN1910448B/zh active Active
- 2005-03-25 US US11/570,237 patent/US7477726B2/en not_active Expired - Fee Related
-
2008
- 2008-08-08 US US12/188,413 patent/US7593504B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002071588A (ja) * | 2000-09-04 | 2002-03-08 | Ishida Co Ltd | X線異物検査装置 |
JP2003050216A (ja) * | 2001-08-06 | 2003-02-21 | Shimadzu Corp | X線検査装置 |
JP2003279500A (ja) * | 2002-03-25 | 2003-10-02 | Anritsu Sanki System Co Ltd | X線異物検出装置 |
Also Published As
Publication number | Publication date |
---|---|
US20080063148A1 (en) | 2008-03-13 |
US20080298547A1 (en) | 2008-12-04 |
CN1910448A (zh) | 2007-02-07 |
GB2430131A (en) | 2007-03-14 |
GB2430131B (en) | 2009-09-09 |
US7477726B2 (en) | 2009-01-13 |
JP4565896B2 (ja) | 2010-10-20 |
GB0624432D0 (en) | 2007-01-17 |
CN1910448B (zh) | 2010-04-07 |
US7593504B2 (en) | 2009-09-22 |
JP2005351795A (ja) | 2005-12-22 |
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