WO2005006083A1 - 感光性組成物用現像液とそれを用いたパターン化されたレジスト膜の形成方法 - Google Patents
感光性組成物用現像液とそれを用いたパターン化されたレジスト膜の形成方法 Download PDFInfo
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- WO2005006083A1 WO2005006083A1 PCT/JP2004/007706 JP2004007706W WO2005006083A1 WO 2005006083 A1 WO2005006083 A1 WO 2005006083A1 JP 2004007706 W JP2004007706 W JP 2004007706W WO 2005006083 A1 WO2005006083 A1 WO 2005006083A1
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- photosensitive composition
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
- G03F7/322—Aqueous alkaline compositions
Definitions
- the present invention relates to a developer for developing a photosensitive composition, and a pattern forming method using the same.
- a positive or negative photoresist is used for microfabrication or puttering in various fields including the manufacture of semiconductor devices and liquid crystal display devices.
- a positive photosensitive composition comprising a novolak resin and a quinonediazide sensitizer, a chemically amplified positive or negative photosensitive composition, a polybutylcinnamate-based photosensitive composition, a bisazido rubber
- Various types of negative resists such as a photosensitive photosensitive composition and a photopolymerizable photosensitive composition have been used.
- Such photoresists are required to have various characteristics depending on the purpose of use. For example, in processing semiconductor devices, characteristics such as high sensitivity, high resolution, and etching resistance are required.
- Such patterned silica-based ceramic films are formed by using the patterned photoresist as an etching mask and etching the ceramic film. It is common.
- a coating liquid containing polysilazane is applied on a substrate to form a coating film, and the coating film is irradiated with ultraviolet rays in a pattern in an oxidizing atmosphere to cure an ultraviolet-ray exposed portion.
- Patent Document 1 proposes a method of forming a ceramic film pattern by removing an unexposed portion of ultraviolet rays and thereafter converting the patterned polysilazane film to a ceramic film.
- the resist type is a positive type having a high resolution, and has a high etching resistance such as an oxygen plasma resistance. Materials are desired.
- the coating material has high heat resistance and low heat resistance required for the interlayer insulating film. It is desired that the material has excellent properties such as dielectric constant and transparency.
- the present inventors formed a patterned polysilazane film using a photosensitive polysilazane composition containing polysilazane and a photoacid generator, and further formed a patterned polysilazane film.
- a method has been proposed in which a silica-based ceramic film is converted by leaving or firing in an ambient atmosphere (Patent Documents 2 and 3).
- the acid generated in the exposed portion of the photosensitive polysilazane composition film cleaves the Si—N bond of the polysilazane, and a silanol (Si—OH) bond is formed by the reaction with the H ⁇ molecule.
- the present inventors further studied to solve these problems, and proposed a method of decomposing polysilazane by humidifying the exposed photosensitive polysilazane composition film (Patent Document 4) And 5). According to this method, polysilazane can be decomposed in a short time, and no development residue is generated in the pattern after development.
- Patent Document 1 JP-A-5-88373
- Patent Document 2 Japanese Patent Application Laid-Open No. 2000-181069
- Patent Document 3 Japanese Patent Application Laid-Open No. 2001-288270
- Patent Document 4 JP-A-2002-72502
- Patent Document 5 JP-A-2002-72504
- this method requires a process and an apparatus for humidifying the exposed film compared to the conventional method. In the actual manufacturing process, adding these processes and equipment has room for improvement from the viewpoint of yield.
- the developer used in the development of the photosensitive composition according to the present invention comprises at least one hydrophilic compound selected from the group consisting of an amine-N-oxide group, a sulfonate group, a sulfate group, a carboxylate group, and a phosphate group.
- the method of forming a patterned photosensitive resist film according to the present invention forms a patterned resist film by applying a photosensitive composition to a substrate, exposing it to light, and developing it.
- a developing method comprising a compound having at least one hydrophilic group selected from the group consisting of an amine-N-oxide group, a sulfonate group, a sulfate group, a carbonate group, and a phosphate group, and water. It is characterized by developing with a liquid.
- a resist having excellent performance when developing a photosensitive composition, particularly a photosensitive composition containing a silicon-containing copolymer, a resist having excellent performance can be obtained without using any special process or apparatus.
- a strike pattern can be formed.
- FIG. 1 is a conceptual diagram showing a developing process according to the present invention. Explanation of reference numerals
- the developer used for developing the photosensitive composition according to the present invention is at least one selected from the group consisting of an amine-N-hydroxy oxide group, a sulfonate group, a sulfate group, a carboxylate group, and a phosphate group. And a water having a hydrophilic group.
- a compound having at least one hydrophilic group selected from the group consisting of an amine-N-oxide group, a sulfonate group, a sulfate group, a carboxylate group, and a phosphate group impairs the effects of the present invention.
- the developer can be arbitrarily selected, but usually a water-soluble developer is generally used, and the developer itself is generally an aqueous solution.
- R 2 , and R 4 are each independently a substituted or unsubstituted alkyl group
- R 3 and R 5 are a substituted or unsubstituted alkyl group, alkenyl group, aryl group, polyoxyethylene alkyl group, or polyoxyethylene alkylphenyl group, and M and M ′ are basic groups
- the compound of the general formula (I) is a compound having an amine-N-amine oxide group. Such a dani
- the compound is generally water soluble due to the amine-N-oxide group.
- R u , R 12 and R 13 are preferably each independently a substituted or unsubstituted alkyl group, alkenyl group or aryl group, and at least one of them is lipophilic. More preferably, it is an organic group to be provided. More specifically, the organic group imparting lipophilicity is preferably an alkyl group having 226 carbon atoms, an alkenyl group having 2 to 26 carbon atoms, or an aryl group having 610 carbon atoms.
- alkylamine-N-oxide compounds in which at least one of R ′′, R 12 and R 13 is an alkyl group. Like an activator, it has a hydrophilic group and a lipophilic group, wherein R ", R 12 and R 13 are each independently selected and optionally substituted with various substituents. It may be substituted. Examples of such a substituent include an alkyl group, an aryl group, a hydroxyl group, a halogen atom, an amine-N-oxide group, a sulfonate group, a sulfate group, a carboxylate group, and a phosphate group. Specific examples of such conjugates include lauryl dimethylamine oxide, lauryl amide propylamine oxide, triethylamine oxide, and ⁇ N (CH) _ (CH) _ (CH)
- the concentration of the compound is preferably SO. 005-2 mono / liter, and the power S is preferably 0.01-1. More preferably, it is a mono / liter.
- R is an alkyl group, particularly preferably a straight-chain alkyl group having 622 carbon atoms. Particularly preferred is lauryl dimethylamine oxide.
- the compound of the general formula (II) is a compound having a sulfonate group.
- a compound is water-soluble by a sulfonate group, and can be used as a surfactant when the R 2 group has lipophilicity.
- R 2 groups are preferably alkyl Le group 2 26 carbon atoms, an alkenyl group having a carbon number of 2 26, Ariru group having a carbon number of 6-10, an amide group optionally an amino group, a hydroxyl group, Amin one N —Sulfate group, sulfonate group, sulfate group, strength It may be substituted by a rubonate group or a phosphate group.
- M is a basic group, preferably an alkali metal (eg, sodium and potassium), an alkaline earth metal (eg, calcium and magnesium), and an ammonium compound (eg, ammonium), but other metals or Organic basic compounds can also be used.
- an alkali metal eg, sodium and potassium
- an alkaline earth metal eg, calcium and magnesium
- an ammonium compound eg, ammonium
- M is a divalent or higher valent group, even if a carboxylic acid having multiple functionalities is bonded to one basic group, two or more monofunctional carboxylic acids are bonded to the basic group. Is also good.
- the basic group M does not include hydrogen.
- Such compounds include sodium salts, potassium salts, ammonium salts, and triethanolamine salts of alkylsulfonic acid, alkylarylsulfonic acid, and the like. More specifically, mention may be made of disodium lauryl sulfosuccinate, sodium dodecylbenzenesulfonate and sodium lauroylsarcosine. In the present invention, such a compound is preferably an alkylsulfonate compound.
- the compound of the general formula (III) is a compound having a sulfate group.
- a compound is water-soluble by a sulfate group, and can be used as a surfactant when the R 3 group has lipophilicity.
- the R 3 group is a substituted or unsubstituted alkyl group, alkenyl group, aryl group, polyoxyethylene alkyl group, or polyoxyethylene phenol alkyl group, preferably an alkyl group having 2 to 26 carbon atoms, A polyoxyethylene alkyl group or a polyoxyethylene alkyl group having an alkenyl group having the number of 2 to 26, an aryl group having 6 to 10 carbon atoms, and a polymerization degree of the oxyethylene group being 1 to 130 and having 2 to 26 carbon atoms in the alkyl group; An enyl group, which may be replaced by an amide group, an amino group, a hydroxyl group, an amine_N_oxide group, a sul
- M is a basic group, and is defined in the same manner as in the case of the compound of the above general formula (II).
- Examples of such compounds include sodium salts, potassium salts, ammonium salts, and triethanolamine salts such as alkyl sulfate, polyoxyethylene alkyl ether sulfate, and polyoxyethylene alkyl phenyl ether sulfate. Examples include sodium lauryl sulfate, triethanolamine lauryl sulfate, ammonium lauryl sulfate, and sodium polyoxyethylene alkyl ether sulfate.
- the compound of the general formula (IV) is a compound having a carboxylate group. Such a compound is water-soluble by a carboxylic acid salt group, and can be used as a surfactant when the R 4 group has lipophilicity.
- the R 4 group is preferably an alkyl group having 2 to 26 carbon atoms, an alkenyl group having 2 to 26 carbon atoms, or an aryl group having 6 to 10 carbon atoms, and if necessary, an amide group, an amino group, a hydroxyl group, an amine group. It may be substituted by an N-hydroxyl group, a sulfonate group, a sulfate group, a sulfonate group, or a phosphate group.
- M is a basic group, and is defined in the same manner as in the case of the compound of the above general formula (II).
- Such compounds include alkali salts of higher fatty acids such as ammonium laurate, sodium laurate, sodium palmitate, potassium stearate, and ammonium oleate, and salts of acylated amino acids such as N- Sodium lauroyl glutamate, N-lauroyl-triethanolamine glutamate, N-cocoyl-N-methyltyl taurine sodium, lauroyl sarcosine sodium, lauroyl methyl taurine sodium, lauroyl methyl sodium alanine, and N-lauro Ammonium glutamic acid, and the like.
- alkali salts of higher fatty acids such as ammonium laurate, sodium laurate, sodium palmitate, potassium stearate, and ammonium oleate
- salts of acylated amino acids such as N- Sodium lauroyl glutamate, N-lauroyl-triethanolamine glutamate, N-cocoyl-N-methyltyl taurine sodium, la
- the compound of the general formula (V) is a compound having a phosphate group.
- Such compounds are those having water solubility by Li down bases, if R 5 groups with lipophilic are those that can be used as surfactants.
- R 5 is a substituted or unsubstituted alkyl group, alkenyl group, aryl group, polyoxyethylene alkyl group or polyoxyethylene phenol alkyl group, preferably an alkyl group having 2 to 26 carbon atoms, A polyoxyethylene alkyl or polyoxyalkylene alkyl group having an alkenyl group of 2 to 26, an aryl group of 6 to 10 carbon atoms, and a polymerization degree of 1 to 30 carbon atoms and an alkyl group of 2 to 26 carbon atoms.
- An enyl group which may be replaced by an amide group, an amino group, a hydroxyl group, an amine_N_oxide group, a sulfonate group, a sulfate group, a carboxylate group, or a phosphate group as needed.
- M ′ is a basic group, and is defined in the same manner as in the case of the compound of the above general formula (II).
- the basic group M ' includes hydrogen.
- Examples of such a compound include sodium salts such as anolequinoleic acid, polyoxyethylene alkyl ether phosphoric acid, and polyoxyethylene alkyl phenyl ether phosphoric acid. And sodium salts of ammonium, ammonium, and triethanolamine, and more specifically, sodium polyoxyethylene alkyl ether phosphate and sodium polyoxyethylene alkylphenyl ether phosphate.
- the compound having a hydrophilic group further has at least one selected from the group consisting of an amine-N-oxide group, a sulfonate group, a sulfate group, a carboxylate group, and a phosphate group. Is preferred.
- a hydrophilic compound having these groups it is possible to use a developer according to the present invention, particularly when developing a photosensitive composition containing a silicon-containing copolymer, without using a humidifying step. Developability can be achieved. In other words, if the developer according to the present invention is used, the number of steps can be reduced by omitting the humidification step in developing the photosensitive composition containing the silicon-containing polymer.
- the compound having at least one hydrophilic group selected from the group consisting of an amine-N-oxide group, a sulfonate group, a sulfate group, a carboxylate group, and a phosphate group is a compound of the present invention. It is preferred that the developer be contained in the developer at a content of 0.005 mol / l in order to achieve the effect of the above, but to maintain the viscosity of the developer low, the content should be less than 2 mol / l. It is preferably contained in the liquid.
- these conjugates are contained in the developing solution preferably in the range of 0.005 to 2 moles / liter, more preferably in the range of 0.01 to 1.5 moles / liter.
- a compound having two or more hydrophilic groups selected from the group consisting of an amine-N-oxide group, a sulfonate group, a sulfate group, a carboxylate group, and a phosphate group is used, It is preferable to use a compound having a functional group within the range.
- the compound having a hydrophilic group used in the developer according to the present invention is particularly preferably an alkylamine-N-oxide compound or an alkylsulfonate compound.
- the developer according to the present invention is a solution which is capable of forming water with the aforementioned compound having at least one hydrophilic group and water.
- the developer of the present invention comprises the above compound dissolved in water.
- the dispersion may be in the form of a dispersion.
- the developer according to the present invention can reduce the residual scum of the photosensitive composition on the developed substrate by removing acid.
- the photosensitive composition contains a copolymer containing silicon, particularly a polysilazane compound. This is presumably because the silicon-containing copolymer elutes in the acidic aqueous solution due to the formation of water-soluble sites in the copolymer.
- An example in which the photosensitive composition contains polysilazane will be described below with reference to FIG.
- the photosensitive material having the photosensitive composition 2 applied on the substrate 1 is exposed using a mask 3.
- the photosensitive composition contains a polysilazane conjugate
- lowering the pH of the developing solution increases the solubility of the resist composition.
- hydrochloric acid is added to a developing solution, it is considered that the following reaction occurs to increase the solubility.
- the developer of the present invention can be used in the pH range from acidic to alkaline, but in the pH range from neutral to acidic, particularly acidic, the present invention can achieve even more excellent developability. it can.
- the acid that can be added may be an organic acid or an inorganic acid.
- Specific examples include citric acid, hydrochloric acid, vivalic acid, acetic acid, phosphoric acid, phthalic acid and others.
- a buffer may be further added to keep the pH constant.
- the buffer can be arbitrarily selected depending on the acid used and other components contained in the developer. Specific examples include ammonium acetate, ammonium citrate, potassium phthalate, potassium hydrochloride, sodium phosphate, dibasic sodium phosphate and others.
- the developer according to the present invention may contain other additives as necessary. Examples of such additives include an antifoaming agent.
- some of the compounds having a hydrophilic group in the present invention have properties similar to those of surfactants. At this time, it is preferable to add an antifoaming agent because foaming properties may be high depending on these compounds.
- the antifoaming agent perfluoroalkylphosphoric amide, glycerin fatty acid ester, silicone resin antifoaming agent and the like are preferable.
- the developer according to the present invention can be used for developing any photosensitive composition.
- a photosensitive composition examples include those containing a novolak resin, a polyimide resin, a polyhydroxystyrene resin, an acrylic resin, and the like.
- the developer according to the present invention contains a polymer containing silicon. It is preferably used for developing a photosensitive resist resin.
- the polymer containing silicon examples include polysilazane, polysilane, and the polymer described in JP-A-2002-311591. Particularly, a polymer containing a polysilazane compound is preferable. Sufficient sensitivity and resolution can be achieved by using the developer of the present invention to develop a photosensitive composition containing a polysilazane compound.
- the developing method is not particularly limited, and a generally used method can be used.
- a method such as a dip method, a spray method, and a paddle method can be used.
- a temperature at which the developer can be developed unless the developer is frozen is generally performed at a temperature of 20 to 70 ° C.
- the temperature of the developer can be changed according to the type of the photosensitive composition to be developed and the application. In general, when the temperature of the developer is low, the surface of the unexposed portion after development tends to be kept smooth and the occurrence of scratches tends to occur. When the temperature of the developer is high, the sensitivity tends to increase. From such a viewpoint, the temperature of the developer is preferably from 20 ° C to 60 ° C, more preferably from 20 to 50 ° C.
- the reason why the sensitivity is increased by raising the temperature of the developer is that by raising the temperature of the developer, the chemical reaction rate between the resist exposed part and the developer is improved, and the reaction product generated by the reaction is increased. It is presumed that the dissolution in the developer was accelerated.
- By increasing the temperature of the developer and raising the sensitivity development is possible even if the thickness of the resist film is increased. For example, a resist film having a thickness of 3 xm or more can be developed.
- a method of providing a heating or cooling mechanism in the liquid sending line can be used.
- a PGMEA solution of photosensitive polysilazane (solid content 20%) was applied to a silicon wafer by spin coating (rotation speed: 2000 rpm), and then 110. The film was heated on a C hot plate for 1 minute to form a film having a thickness of 0.
- the film was exposed using a stepper (LD_5015iCW, manufactured by Hitachi, Ltd.) in 5 mJ steps, changing the position up to 50 mJ.
- LD_5015iCW manufactured by Hitachi, Ltd.
- the exposed substrate thus obtained was developed with a developing solution at room temperature (about 23 ° C.).
- the developer used was a solution prepared by dissolving the compounds shown in Table 1 in water.
- development was performed using a TMAH 2.38% aqueous solution (MIF-300, manufactured by Clariant Japan KK), which is a common developer (Comparative Examples 11 to 11).
- TMAH 2.38% aqueous solution
- Patent Document 4 the case where a step of humidifying at 25 ° C. and 80% RH for 5 minutes was added before development with a 2.38% aqueous solution of TMAH was also examined (Comparative Examples 11 to 12). ).
- Example 11 1 Lauryl dimethyl 5 ⁇ ⁇
- the evaluation conditions in the table are as follows. ⁇ : Excellent sensitivity or resolution.
- Example 11 To the developing solution of Example 11, 6 mol% of citric acid and 6 mol% of ammonium acetate as a buffer were added. The pH of the resulting developer was 5.0. When the exposed substrate was developed at room temperature (about 23 ° C.) using this developer, the scum was reduced and the resolution was further improved.
- Example 11 To the developing solution of Example 11, 2 mol% of citrate and 2% by weight of a modified silicone (trade name: Antihome E-20 (manufactured by Kao Corporation)) as an antifoaming agent were added. When the exposed substrate was developed at room temperature (about 23 ° C.) using this developer, the scum was reduced and the resolution was further improved.
- a modified silicone trade name: Antihome E-20 (manufactured by Kao Corporation)
- This solution was applied onto a silicon wafer by spin coating at 1500 rpm.
- the obtained film thickness was about 0. Subsequently, pre-beta was performed on a hot plate at 70 ° C for 60 seconds. The obtained coating film on the wafer was exposed to ultraviolet light using a KrF excimer stepper, and then heated at 90 ° C. for 60 seconds after exposure.
- a PGMEA solution of photosensitive polysilazane (solid content: 50%) is applied to a silicon wafer by spin coating (rotation speed: 1500 rpm), and then heated on a hot plate at 100 ° C for 2 minutes to form a film. A film of 5 ⁇ was formed.
- the exposed substrate thus obtained was developed with a developer.
- An aqueous solution of laurinole dimethylamine oxide (1.5% by weight) was used as a developing solution, and development was performed while changing the temperature of the developing solution between 10 ° C and 75 ° C.
- the results obtained are shown in Table 2.
- a film-coated substrate was prepared in the same manner as in Example 6, and was developed at 35 ° C. using myristyl dimethylamine oxide aqueous solution (10% by weight). Further, glycerin fatty acid ester was added as a defoaming agent to this developer at 2 mol%, and development was carried out in the same manner. Obtained results
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Application Number | Priority Date | Filing Date | Title |
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EP04745562A EP1650605A1 (en) | 2003-07-14 | 2004-06-03 | Developing solution for photosensitive composition and method for forming patterned resist film |
US10/564,997 US20070059650A1 (en) | 2003-07-14 | 2004-06-03 | Developing solution for photosensitive composition and method for forming patterned resist film |
JP2005511483A JPWO2005006083A1 (ja) | 2003-07-14 | 2004-06-03 | 感光性組成物用現像液とそれを用いたパターン化されたレジスト膜の形成方法 |
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JP2003196451 | 2003-07-14 | ||
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US (1) | US20070059650A1 (ja) |
EP (1) | EP1650605A1 (ja) |
JP (1) | JPWO2005006083A1 (ja) |
KR (1) | KR20060055515A (ja) |
CN (1) | CN1823303A (ja) |
TW (1) | TW200504832A (ja) |
WO (1) | WO2005006083A1 (ja) |
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JP2009244910A (ja) * | 2003-12-26 | 2009-10-22 | Asahi Kasei E-Materials Corp | 凸版印刷用水現像感光性樹脂版 |
WO2016140057A1 (ja) * | 2015-03-05 | 2016-09-09 | Jsr株式会社 | 感放射線性組成物及びパターン形成方法 |
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US20100129756A1 (en) * | 2007-05-15 | 2010-05-27 | Willi-Kurt Gries | Gum solution for developing and gumming a photopolymer printing plate |
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2004
- 2004-06-03 US US10/564,997 patent/US20070059650A1/en not_active Abandoned
- 2004-06-03 KR KR1020067000913A patent/KR20060055515A/ko not_active Application Discontinuation
- 2004-06-03 JP JP2005511483A patent/JPWO2005006083A1/ja not_active Withdrawn
- 2004-06-03 EP EP04745562A patent/EP1650605A1/en not_active Withdrawn
- 2004-06-03 CN CNA2004800200144A patent/CN1823303A/zh active Pending
- 2004-06-03 WO PCT/JP2004/007706 patent/WO2005006083A1/ja not_active Application Discontinuation
- 2004-06-28 TW TW093118716A patent/TW200504832A/zh unknown
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JP2009244910A (ja) * | 2003-12-26 | 2009-10-22 | Asahi Kasei E-Materials Corp | 凸版印刷用水現像感光性樹脂版 |
JP4548859B2 (ja) * | 2003-12-26 | 2010-09-22 | 旭化成イーマテリアルズ株式会社 | 凸版印刷用水現像感光性樹脂版を製造するための現像液 |
WO2008069014A1 (ja) * | 2006-12-08 | 2008-06-12 | Tokyo Ohka Kogyo Co., Ltd. | レジスト表面改質剤及びそれを用いたレジストパターン形成方法 |
WO2016140057A1 (ja) * | 2015-03-05 | 2016-09-09 | Jsr株式会社 | 感放射線性組成物及びパターン形成方法 |
JPWO2016140057A1 (ja) * | 2015-03-05 | 2017-12-14 | Jsr株式会社 | 感放射線性組成物及びパターン形成方法 |
Also Published As
Publication number | Publication date |
---|---|
US20070059650A1 (en) | 2007-03-15 |
EP1650605A1 (en) | 2006-04-26 |
JPWO2005006083A1 (ja) | 2007-09-20 |
TW200504832A (en) | 2005-02-01 |
KR20060055515A (ko) | 2006-05-23 |
CN1823303A (zh) | 2006-08-23 |
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