WO2004089792A1 - Convoyeur pour pieces plates - Google Patents

Convoyeur pour pieces plates Download PDF

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Publication number
WO2004089792A1
WO2004089792A1 PCT/KR2004/000736 KR2004000736W WO2004089792A1 WO 2004089792 A1 WO2004089792 A1 WO 2004089792A1 KR 2004000736 W KR2004000736 W KR 2004000736W WO 2004089792 A1 WO2004089792 A1 WO 2004089792A1
Authority
WO
WIPO (PCT)
Prior art keywords
plate
shaped member
pressurized fluid
conveying
shaped members
Prior art date
Application number
PCT/KR2004/000736
Other languages
English (en)
Inventor
Dong-Heon Lee
Original Assignee
Dong-Heon Lee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dong-Heon Lee filed Critical Dong-Heon Lee
Publication of WO2004089792A1 publication Critical patent/WO2004089792A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Definitions

  • This invention pertains to the use of conveying systems for plate-shaped members such as semiconductor wafers, LCD's, PDP's, and glass panels like organic EL, etc.
  • FIG. 1 is a plan view of example 1 of the conveying system for the plate-shaped members of this invention.
  • FIG. 2 is a front view of example 1 of the conveying system for the plate-shaped members of this invention.
  • FIG. 3 is a plan view of example 2 of the conveying system for the plate-shaped members of this invention.
  • FIG. 4 is a front view of example 2 of the conveying system for the plate-shaped members of this invention.
  • FIG. 5 is a plan view of example 3 of the conveying system for the plate-shaped members of this invention.
  • Fig. 6 is a front view of example 3 of the conveying system for the plate-shaped members of this invention.
  • Fig. 7 is a plan view of example 4 of the conveying system for the plate-shaped members of this invention.
  • Fig. 8 is a front view of example 4 of the conveying system for the plate-shaped members of this invention.
  • the purpose of this invention is to solve the above-mentioned problem, and to provide a highly productive conveying system for plate-shaped members that won't allow damage to the members or generation of dust particles.
  • the conveying system for plate-shaped members consists of a pair of conveyor frames (2, 3); rollers (4, 5) rotating in horizontal axis and conveying the plate-shaped members (1) supporting both edges from below; individual units (8) between a pair of conveyor frames (2, 3), and a floating device (7), which is a horizontal plate arranged for sealing the spaces between several individual units (8) that allows the plate-shaped member (1) to float except both edges by ejecting the pressurized fluid from below the plate-shaped member (1).
  • the invention indicated in claim 1 installs a porous material having at least one flat part, attaches the porous material onto the main body supplying the pressurized fluid with the flat part facing upward, attaches the horizontal sealing plate a little higher than the upper flat part of the porous materials, and ejects pressurized fluid through the porous material and installed rollers thereby driving both edges of the plate-shaped members being conveyed.
  • This invention floats and conveys the plate-shaped members using rollers with a volume of pressurized fluid less than 1/10 of the fluid volume required by the patent of the applicant of this invention, 'Plate-shaped Member Conveying System' (Korean Patent No. 0422392).
  • porous materials In the figures, the shape of porous materials is shown to be rectangular only; however, various shapes such as circular, oval, triangle, etc. are applicable in accordance with the necessities. Also, although roller conveyors are used for conveying plate-shaped members in this invention, other conveying methods such as a shuttle device that conveys plate-shaped members using pushers moving vertically and horizontally forward and backward with the aid of an air cylinder and electric motor can be used.
  • Figure 1 is a plan view of the conveyer for the plate-shaped member in this invention. Part No.
  • FIG. 1 in Figure 1 is a plate-shaped member, an object of transportation.
  • Part Nos. 2 and 3 are a pair of conveyor frames where many conveying rollers (4, 5) are installed. And the conveying rollers (4, 5) are installed only to contact with both edges (6) of the plate-shaped member.
  • Part No. 7 is a floating device consisting of units (8) and a horizontal sealing plate (14).
  • Each unit consists of a cup-shaped main body (9), a pipe (11) supplying the pressurized fluid to the interior of the main body (9), and porous material (10) through which the pressurized fluid supplied through the pipes installed at the opening of the main body (9) is ejected to the main body (9).
  • Porous materials (10) are flat shaped and installed so that the upper surface is horizontal.
  • the horizontal sealing plate (14) is designed not to cause damage even when in contact with the glass by using plastic or acryl plates with a lesser degree of hardness than the glass, which is the main material of the plate-shaped members.
  • Air, water or special cleansing fluid can be used as the afore-mentioned pressurized fluid.
  • the fluid is sent to the pressurized fluid supply pipe (11) by a pump (not shown in the figure).
  • Figure 3 is a plan view of the conveying system conveying extra large plate-shaped members as an application of this invention.
  • Figure 5 shows the plan view of the conveying system that can convey the plate-shaped members of various sizes.
  • Roller conveyors (2, 3, 15, 16) are used as a conveying method as in Figures 1, 2, 3 and 4, but more than 2 rows of shuttle conveying systems (17), which can convey the plate-shaped members, are horizontally installed in the direction of transportation below or above the plate-shaped member
  • the conveying system for the plate-shaped member in this invention is composed as described above. The operation method is explained hereafter. [47] First, by supplying pressurized fluid through the pipe (11), the interior of the main body (9) is filled with pressurized fluid. The pressurized fluid then passes through the porous material (10) and is ejected to the bottom of the plate-shaped member (1) from the top of the porous material (10). [48] If a plate-shaped member (1) is located on the porous material at this time, a layer of pressurized fluid (12) is formed between the porous material (10) and horizontal sealing plate (14), and the plate-shaped member (1). That is, the plate-shaped member (1) is floating on the pressurized fluid layer.
  • the plate-shaped member (1) acquires a frictionless state, floating above the porous ceramic material (10) and horizontal sealing plate (14) without contact. Moreover, at this state if the conveying rollers (4, 5) are made to contact both edges (6) of the plate-shaped member (1), it moves horizontally by the rotating force of the conveying rollers (4, 5). The movement of the plate-shaped member stops when the conveying roller (4, 5) stops rolling.
  • the plate-shaped member (1) As the friction of the plate-shaped member (1) is very low during floatation, the plate-shaped member (1) is able to receive sufficient conveying force by slightly contacting with the rollers (4, 5). And, as the plate-shaped member (1) is faintly in contact with the conveying rollers (4, 5), the possibility of generating dust is extremely low compared with the conventional roller conveyors, which are not equipped with any floating device.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)

Abstract

La présente invention concerne un système de convoyeur pour de grandes pièces plates telles que des écrans à cristaux liquides, des écrans plats à plasma, et des écrans électroluminescents organiques, sans risque de dégager de la poussière ni d'endommager des pièces plates, et à améliorer le rendement et à étendre l'utilisation de la licence du déposant de cette invention, le système de convoyeur pour pièces plates (brevet d'invention coréen N° 0422392). Grâce à cette invention, il est possible de transporter de façon efficace des pièces plates avec une quantité extrêmement petite de fluide pressurisé. On utilise plusieurs dispositifs. On commence par placer du matériau poreux présentant une partie plate sur le dessus du corps principal à l'intérieur duquel on fait arriver un fluide pressurisé. On ferme hermétiquement le volume se définissant parmi les différents matériaux poreux au moyen d'une plaque horizontale de façon à former une couche de fluide pressurisé venant suinter au travers des matériaux poreux, et une autre couche de fluide pressurisé entre la plaque d'obturation horizontale et la pièce plate, de façon que la masse de la pièce plate puisse être supportée par le fluide pressurisé, uniformément sur une grande étendue. Dès lors, la pièce plate peut facilement se transporter avec une très petite quantité de fluide pressurisé, le faisant rouler sur des galets installés de façon à soutenir le centre ou les deux bords de la pièce flottante.
PCT/KR2004/000736 2003-04-12 2004-03-30 Convoyeur pour pieces plates WO2004089792A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2003-0023250 2003-04-12
KR1020030023250A KR100548944B1 (ko) 2003-04-12 2003-04-12 판상부재의 반송장치

Publications (1)

Publication Number Publication Date
WO2004089792A1 true WO2004089792A1 (fr) 2004-10-21

Family

ID=33157295

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2004/000736 WO2004089792A1 (fr) 2003-04-12 2004-03-30 Convoyeur pour pieces plates

Country Status (2)

Country Link
KR (1) KR100548944B1 (fr)
WO (1) WO2004089792A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007016689A1 (fr) * 2005-08-02 2007-02-08 New Way Machine Components, Inc. Procede et appareil de traitement en ligne et de traitement immediatement sequentiel ou simultane de substrats plats et souples par cisaillement visqueux dans des entrefers de section transversale mince pour la fabrication de circuits ou d'ecrans microelectroniques
JP2010173829A (ja) * 2009-01-30 2010-08-12 Ihi Corp 浮上搬送装置及び浮上ユニット
US8260028B2 (en) 2009-10-28 2012-09-04 Corning Incorporated Off-axis sheet-handling apparatus and technique for transmission-mode measurements

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102883978B (zh) * 2010-05-03 2015-05-06 爱诺华李赛克技术中心有限公司 用于输送板形元件的装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990061704A (ko) * 1997-12-31 1999-07-26 최명숙 에어콘베이어
JP2001085496A (ja) * 1999-09-10 2001-03-30 Daiichi Shisetsu Kogyo Kk 板状部材の搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990061704A (ko) * 1997-12-31 1999-07-26 최명숙 에어콘베이어
JP2001085496A (ja) * 1999-09-10 2001-03-30 Daiichi Shisetsu Kogyo Kk 板状部材の搬送装置
KR20010050424A (ko) * 1999-09-10 2001-06-15 이동헌 판상부재의 반송장치

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007016689A1 (fr) * 2005-08-02 2007-02-08 New Way Machine Components, Inc. Procede et appareil de traitement en ligne et de traitement immediatement sequentiel ou simultane de substrats plats et souples par cisaillement visqueux dans des entrefers de section transversale mince pour la fabrication de circuits ou d'ecrans microelectroniques
US8123868B2 (en) 2005-08-02 2012-02-28 New Way Machine Components, Inc. Method and apparatus for in-line processing and immediately sequential or simultaneous processing of flat and flexible substrates through viscous shear in thin cross section gaps for the manufacture of micro-electronic circuits or displays
US8795769B2 (en) 2005-08-02 2014-08-05 New Way Machine Components, Inc. Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped groves and sealing lands in a non-contact manner
US10501850B2 (en) 2005-08-02 2019-12-10 New Way Machine Components, Inc. Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped grooves and sealing lands in a non-contact manner
JP2010173829A (ja) * 2009-01-30 2010-08-12 Ihi Corp 浮上搬送装置及び浮上ユニット
US8260028B2 (en) 2009-10-28 2012-09-04 Corning Incorporated Off-axis sheet-handling apparatus and technique for transmission-mode measurements

Also Published As

Publication number Publication date
KR20040088851A (ko) 2004-10-20
KR100548944B1 (ko) 2006-02-02

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