WO2004108566A2 - Transporteur d'elements en forme de plaque - Google Patents

Transporteur d'elements en forme de plaque Download PDF

Info

Publication number
WO2004108566A2
WO2004108566A2 PCT/KR2004/001338 KR2004001338W WO2004108566A2 WO 2004108566 A2 WO2004108566 A2 WO 2004108566A2 KR 2004001338 W KR2004001338 W KR 2004001338W WO 2004108566 A2 WO2004108566 A2 WO 2004108566A2
Authority
WO
WIPO (PCT)
Prior art keywords
plate
shaped member
conveying system
conveyor
pressurized fluid
Prior art date
Application number
PCT/KR2004/001338
Other languages
English (en)
Other versions
WO2004108566A3 (fr
Inventor
Dong-Heon Lee
Original Assignee
Dong-Heon Lee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dong-Heon Lee filed Critical Dong-Heon Lee
Publication of WO2004108566A2 publication Critical patent/WO2004108566A2/fr
Publication of WO2004108566A3 publication Critical patent/WO2004108566A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically

Definitions

  • This invention pertains to the use of conveying systems for plate-shaped members such as semiconductor wafers, LCD's, PDP's, and glass panels like organic EL, etc.
  • FIG. 1 is a section view of example 1 of the conveying system for the plate-shaped members of this invention.
  • FIG. 2 is an isometric view of example 1 of the conveying system for the plate-shaped members of this invention.
  • FIG. 3 is a section view of example 2 of the conveying system for the plate-shaped members of this invention.
  • FIG. 4 is a section view of example 3 of the conveying system for the plate-shaped members of this invention.
  • the purpose of this invention is to solve the above-mentioned problem, and to provide a highly productive conveying system for plate-shaped members that won't allow damage to the members or generation of dust particles.
  • the conveying system for plate-shaped members of this invention consists of a conveyer frame (5) that can fix the floating device (7); a conveyor that is mounted under the above conveyor frame (5) in the vertical longitudinal direction and conveys a plate-shaped member (1) in the longitudinal direction of the conveyor frame; several individual units (8) on the flat part of the conveyor frame (5) on which the above conveyor (2) is installed; and a horizontal sealing plate (14) as a floating device (7), which is arranged for sealing the spaces between several individual units (8) causing the above plate-shaped member (1) to stand by the pressurized fluid ejecting from the floating device (7) toward the side of the plate-shaped member (1), conveyed with only its bottom being contact-supported while it is not in contact with the floating device (7).
  • the invention indicated in claim 1 installs a porous material having at least one flat part, attaches the porous material onto the main body supplying the pressurized fluid with the flat part facing upward, attaches the horizontal sealing plate a little higher than the upper flat part of the porous materials, and ejects pressurized fluid through the porous material while simultaneously making the porous material and the flat part of the horizontal plate become vertical so that the plate- shaped member that is supported by the pressurized fluid ejecting from the porous material can be conveyed with only its bottom being contact-supported while it is not in contact with the floating device.
  • the film of the pressurized fluid formed between the flat part of the floating device and the plate-shaped member allows the plate-shaped member to be float-supported without falling off and conveyed with only its bottom contacting the conveyor.
  • This invention floats and conveys the plate-shaped members being supported on the conveyor with a volume of pressurized fluid less than 1/10 of the fluid volume required by the patent of the applicant of this invention, 'Plate-shaped Member Conveying and Washing System' (Korea Patent No. 0339716).
  • the shape of porous materials is shown to be rectangular only; however, various shapes such as circular, oval, triangle, etc. are applicable in accordance with the various circumstances.
  • belt conveyors are used for conveying plate-shaped members in this invention, other conveying methods such as a roller conveyor or magnet roller conveyor that can convey the plate-shaped member can be used.
  • the plate-shaped member conveying system of this invention can convey plate-shaped members of different sizes even up to extra large through smaller areas compared to the horizontal conveying system, resulting in cost reduction of the highly expensive clean room type factory.
  • FIG. 1 is a plan view of the conveying system for the plate-shaped member in this invention.
  • Part No. 1 in Figure 1 is a plate-shaped member, an object of transportation.
  • Part No. 2 is a conveyor (2), on which the conveyor belt (3) is installed. Only the bottom of the plate-shaped member (1) contacts the conveyor belt (3).
  • Part No. 7 is a floating device consisting of individual units (8) and a horizontal sealing plate (14). On the above conveyor frame (5), there are individual units (8) arranged like plovers and the horizontal sealing plate (14), which seals the space among the individual units, (8) installed horizontally a little higher up than the upper surface of the individual units (8).
  • Each individual unit consists of a cup-shaped main body (9), a pipe (11) supplying the pressurized fluid to the interior of the main body (9), and porous material (10) through which the pressurized fluid supphed through the pipes installed at the opening of the main body (9) is ejected to the main body (9).
  • Porous materials (10) are flat shaped and installed so that the upper surface is horizontally parallel with the plate-shaped member.
  • the horizontal sealing plate (14) is designed not to cause damage even when in contact with the glass by using plastic or acryl plates with a lesser degree of hardness than the glass, which is the main material of the plate-shaped members.
  • Air, water or special cleansing fluid can be used as the afore-mentioned pressurized fluid.
  • the fluid is transferred to the pressurized fluid supply pipe (11) by a pump (not shown in the figure).
  • the number of floating devices (7) used in this invention varies from one to several depending on the size and use of the plate-shaped member (1) to be conveyed. Its width can also be adjusted as deemed appropriate.
  • Figure 2 presents example 1, which is an isometric view of the conveying system for the plate- shaped member in this invention
  • FIG. 3 is a section view of example 2 of the conveying system for the plate-shaped members of this invention.
  • the plate-shaped member (1) is conveyed vertically as shown in Fig. 1, since the plate-shaped member (1) may fall off to the opposite side of the floating device (7), it is conveyed with the floating device (7) being inclined at an angle of ⁇ for the stable transportation of the plate-shaped member (1).
  • the inclination angle ⁇ can be adjusted from 0 degrees to 90 degrees.
  • the angle ⁇ is within the range of 2 to 90 degrees.
  • a roller conveyer (6) is used instead of a belt conveyor for the transportation conveyor.
  • rotation guide rollers (15) are mounted on the upper side of the conveyer for the stable transportation of the plate-shaped member.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

L'invention concerne un système de transport pouvant transporter des éléments en forme de plaque minces et larges tels que les LCP, PDP, et El organiques, sans générer de poussière ou sans détériorer les éléments en forme de plaque, et destiné à améliorer la performance du système de transport de la demande internationale du déposant de la présente invention (Demande internationale coréenne No. 0339716 'Système de transport d'éléments en forme de plaques et dispositif de lavage') par application de la technologie du 'Système de transport d'éléments en forme de plaques et dispositif de lavage' pour laquelle le déposant de cette invention a déposé une demande internationale le 30 mars 2004 (Demande internationale No. 6-1-2004-0005158-13), et à étendre l'utilisation du système. L'utilisation du système de transport d'éléments en forme de plaques de l'invention, permettant de transporter un élément en forme de plaque, consiste à installer un matériau poreux comprenant une partie plate sur le corps principal dans lequel est injecté un fluide pressurisé, et à obturer l'espace entre plusieurs matériaux poreux à l'aide d'une plaque horizontale pour former une couche de fluide pressurisé à travers les matériaux poreux et une autre couche de fluide sous pression entre la plaque d'étanchéité horizontale et l'élément en forme de plaque, de manière que le poids de l'élément en forme de plaque puisse être supporté de façon uniforme par le fluide pressurisé dans une zone de grande dimension. L'élément en forme de plaque peut ensuite être transporté verticalement, ou incliné sans contact avec le dispositif flottant, sa partie inférieure étant appuyée sur le transporteur.
PCT/KR2004/001338 2003-06-05 2004-06-04 Transporteur d'elements en forme de plaque WO2004108566A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020030036538A KR20040105325A (ko) 2003-06-05 2003-06-05 판상부재의 반송장치
KR10-2003-0036538 2003-06-05

Publications (2)

Publication Number Publication Date
WO2004108566A2 true WO2004108566A2 (fr) 2004-12-16
WO2004108566A3 WO2004108566A3 (fr) 2005-03-10

Family

ID=33509618

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2004/001338 WO2004108566A2 (fr) 2003-06-05 2004-06-04 Transporteur d'elements en forme de plaque

Country Status (2)

Country Link
KR (1) KR20040105325A (fr)
WO (1) WO2004108566A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103648934A (zh) * 2011-08-12 2014-03-19 川崎重工业株式会社 板材的搬运装置及板材的搬运方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100833881B1 (ko) * 2007-02-20 2008-06-02 세메스 주식회사 기판 이송 장치
KR100847093B1 (ko) * 2007-03-19 2008-07-18 에프엔에스테크 주식회사 기판 이송장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010050424A (ko) * 1999-09-10 2001-06-15 이동헌 판상부재의 반송장치
JP2001213517A (ja) * 1999-11-24 2001-08-07 Daiichi Shisetsu Kogyo Kk 板状部材の搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010050424A (ko) * 1999-09-10 2001-06-15 이동헌 판상부재의 반송장치
JP2001213517A (ja) * 1999-11-24 2001-08-07 Daiichi Shisetsu Kogyo Kk 板状部材の搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103648934A (zh) * 2011-08-12 2014-03-19 川崎重工业株式会社 板材的搬运装置及板材的搬运方法
CN103648934B (zh) * 2011-08-12 2015-08-12 川崎重工业株式会社 板材的搬运装置及板材的搬运方法

Also Published As

Publication number Publication date
WO2004108566A3 (fr) 2005-03-10
KR20040105325A (ko) 2004-12-16

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