WO2003016976A3 - Vorrichtung zur justage eines optischen elements - Google Patents
Vorrichtung zur justage eines optischen elements Download PDFInfo
- Publication number
- WO2003016976A3 WO2003016976A3 PCT/EP2002/008758 EP0208758W WO03016976A3 WO 2003016976 A3 WO2003016976 A3 WO 2003016976A3 EP 0208758 W EP0208758 W EP 0208758W WO 03016976 A3 WO03016976 A3 WO 03016976A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- optical element
- adjusting
- bearing
- adjustment devices
- optical
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Optics & Photonics (AREA)
- Lens Barrels (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/779,392 US7193794B2 (en) | 2001-08-18 | 2004-02-13 | Adjustment arrangement of an optical element |
US11/533,660 US7457059B2 (en) | 2001-08-18 | 2006-09-20 | Adjustment arrangement of an optical element |
US12/211,978 US7656595B2 (en) | 2001-08-18 | 2008-09-17 | Adjustment arrangement of an optical element |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10140608.8 | 2001-08-18 | ||
DE10140608A DE10140608A1 (de) | 2001-08-18 | 2001-08-18 | Vorrichtung zur Justage eines optischen Elements |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/779,392 Continuation-In-Part US7193794B2 (en) | 2001-08-18 | 2004-02-13 | Adjustment arrangement of an optical element |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003016976A2 WO2003016976A2 (de) | 2003-02-27 |
WO2003016976A3 true WO2003016976A3 (de) | 2003-11-20 |
Family
ID=7695906
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2002/008758 WO2003016976A2 (de) | 2001-08-18 | 2002-08-06 | Vorrichtung zur justage eines optischen elements |
Country Status (3)
Country | Link |
---|---|
US (3) | US7193794B2 (de) |
DE (1) | DE10140608A1 (de) |
WO (1) | WO2003016976A2 (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10140608A1 (de) | 2001-08-18 | 2003-03-06 | Zeiss Carl | Vorrichtung zur Justage eines optischen Elements |
EP1576403A1 (de) | 2002-12-23 | 2005-09-21 | BAE Systems PLC | Halterung für verformbaren spiegel |
AU2003288566A1 (en) | 2002-12-23 | 2004-07-14 | Bae Systems Plc | Deformable-mirror cooling |
WO2004057407A1 (en) | 2002-12-23 | 2004-07-08 | Bae Systems Plc | Deformable mirror |
US20040190164A1 (en) * | 2003-03-28 | 2004-09-30 | Bentley Joseph R. | Lens mount |
US8854602B2 (en) * | 2003-11-24 | 2014-10-07 | Asml Netherlands B.V. | Holding device for an optical element in an objective |
US7369332B2 (en) | 2004-04-13 | 2008-05-06 | Carl Zeiss Smt Gmbh | Closing module for an optical arrangement |
DE102004018659A1 (de) * | 2004-04-13 | 2005-11-03 | Carl Zeiss Smt Ag | Abschlussmodul für eine optische Anordnung |
US7633691B2 (en) * | 2004-06-07 | 2009-12-15 | Raytheon Company | Optical mounting for high-g environment |
JP4532545B2 (ja) | 2004-06-29 | 2010-08-25 | カール・ツァイス・エスエムティー・アーゲー | 光学素子のための位置決めユニット及び調節デバイス |
US7952639B2 (en) * | 2005-02-15 | 2011-05-31 | Nokia Corporation | Piezoelectric actuator element for micromovement |
US20090207511A1 (en) * | 2005-05-09 | 2009-08-20 | Carl Zeiss Smt Ag | Assembly for adjusting an optical element |
DE102005031084A1 (de) * | 2005-06-28 | 2007-01-04 | Carl Zeiss Smt Ag | Mikrolithografisches Belichtungsverfahren sowie Projektionsbelichtungsanlage zur Durchführung des Verfahrens |
JP5069232B2 (ja) | 2005-07-25 | 2012-11-07 | カール・ツァイス・エスエムティー・ゲーエムベーハー | マイクロリソグラフィ投影露光装置の投影対物レンズ |
TWI372271B (en) * | 2005-09-13 | 2012-09-11 | Zeiss Carl Smt Gmbh | Optical element unit, optical element holder, method of manufacturing an optical element holder, optical element module, optical exposure apparatus, and method of manufacturing a semiconductor device |
DE102005057860A1 (de) * | 2005-12-03 | 2007-06-06 | Carl Zeiss Smt Ag | Objektiv, insbesondere Projektionsobjektiv für die Halbleiterlithographie |
JPWO2007132862A1 (ja) * | 2006-05-16 | 2009-09-24 | 株式会社ニコン | 投影光学系、露光方法、露光装置、及びデバイス製造方法 |
US7372633B2 (en) * | 2006-07-18 | 2008-05-13 | Asml Netherlands B.V. | Lithographic apparatus, aberration correction device and device manufacturing method |
DE102007026753B4 (de) * | 2006-10-16 | 2009-11-26 | Christof Burkart | Fassung für ein optisches Element bei Halbleiterobjektiven |
US8027096B2 (en) | 2006-12-15 | 2011-09-27 | Hand Held Products, Inc. | Focus module and components with actuator polymer control |
US7813047B2 (en) | 2006-12-15 | 2010-10-12 | Hand Held Products, Inc. | Apparatus and method comprising deformable lens element |
DE102007027200A1 (de) * | 2007-06-13 | 2008-12-18 | Carl Zeiss Smt Ag | Projektionsbelichtungsanlage für die Mikrolithographie |
DE102008041287A1 (de) | 2007-08-24 | 2009-02-26 | Carl Zeiss Smt Ag | Kraftaktuator |
DE102007045975A1 (de) * | 2007-09-25 | 2009-04-09 | Carl Zeiss Smt Ag | Optische Einrichtung mit einstellbarer Kraftwirkung auf ein optisches Modul |
DE102009015295A1 (de) | 2008-05-29 | 2009-12-03 | Carl Zeiss Smt Ag | Optische Baugruppe |
DE102008032853A1 (de) | 2008-07-14 | 2010-01-21 | Carl Zeiss Smt Ag | Optische Einrichtung mit einem deformierbaren optischen Element |
DE102009054549A1 (de) | 2008-12-11 | 2010-06-17 | Carl Zeiss Smt Ag | Gravitationskompensation für optische Elemente in Projektionsbelichtungsanlagen |
US8917963B2 (en) | 2010-05-21 | 2014-12-23 | Kaiam Corp. | MEMS-based levers and their use for alignment of optical elements |
US8139289B2 (en) * | 2010-07-27 | 2012-03-20 | Corning Incorporated | Precision optical mount |
KR20130024301A (ko) * | 2011-08-31 | 2013-03-08 | 엘지이노텍 주식회사 | 카메라 모듈 |
DE102012218220A1 (de) * | 2012-10-05 | 2013-11-14 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage mit Untersetzungskinematik |
US9784939B2 (en) * | 2014-02-03 | 2017-10-10 | Robert S. Hodge | Optical retaining device |
CN106547069B (zh) * | 2015-09-17 | 2019-07-23 | 上海微电子装备(集团)股份有限公司 | 一种可动镜片轴向调整机构及调整方法 |
CN105739248B (zh) * | 2016-04-01 | 2018-01-09 | 中国科学院长春光学精密机械与物理研究所 | 光学元件支撑结构、单元镜组、曝光光学系统及光刻机 |
US10095089B2 (en) * | 2016-05-17 | 2018-10-09 | Raytheon Company | Lens mount assembly |
DE102017200635A1 (de) | 2017-01-17 | 2018-07-19 | Carl Zeiss Smt Gmbh | Optische Anordnung, insbesondere Lithographiesystem |
US10895711B2 (en) | 2017-06-28 | 2021-01-19 | Corning Incorporated | Polymer-free compliant optical member support |
KR102678312B1 (ko) | 2018-10-18 | 2024-06-25 | 삼성전자주식회사 | Euv 노광 장치와 노광 방법, 및 그 노광 방법을 포함한 반도체 소자 제조 방법 |
WO2023241813A1 (de) * | 2022-06-17 | 2023-12-21 | Trumpf Lasersystems For Semiconductor Manufacturing Gmbh | Vorrichtung zum korrigieren eines astigmatismus eines laserstrahls |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4993823A (en) * | 1989-06-29 | 1991-02-19 | Eastman Kodak Company | Method for correction of distortions of an imaging device |
WO1999067683A2 (de) * | 1998-06-20 | 1999-12-29 | Carl Zeiss | Optisches system, insbesondere projektions-belichtungsanlage der mikrolithographie |
EP1014139A2 (de) * | 1998-12-23 | 2000-06-28 | Carl Zeiss | Optisches System, insbesondere Projektionsbelichtungsanlage der Mikrolithographie, mit einer optischen Halterung mit Aktuatoren |
EP1209501A2 (de) * | 2000-10-18 | 2002-05-29 | Carl Zeiss | Vorrichtung zur Lagerung eines optischen Elementes |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4733945A (en) * | 1986-01-15 | 1988-03-29 | The Perkin-Elmer Corporation | Precision lens mounting |
US4778252A (en) * | 1987-02-27 | 1988-10-18 | Newport Corporation | Self-centering holder for objects of various sizes |
US5592251A (en) * | 1993-06-08 | 1997-01-07 | Nikon Corporation | Method and apparatus for preventing image deflection in an optical system |
JP3894509B2 (ja) * | 1995-08-07 | 2007-03-22 | キヤノン株式会社 | 光学装置、露光装置およびデバイス製造方法 |
DE19825716A1 (de) | 1998-06-09 | 1999-12-16 | Zeiss Carl Fa | Baugruppe aus optischem Element und Fassung |
DE19901295A1 (de) | 1999-01-15 | 2000-07-20 | Zeiss Carl Fa | Optische Abbildungsvorrichtung, insbesondere Objektiv, mit wenigstens einem optischen Element |
DE19904152A1 (de) | 1999-02-03 | 2000-08-10 | Zeiss Carl Fa | Baugruppe aus einem optischen Element und einer Fassung |
DE19908554A1 (de) | 1999-02-27 | 2000-08-31 | Zeiss Carl Fa | Verstellbare Baugruppe |
JP4809987B2 (ja) | 2000-03-30 | 2011-11-09 | キヤノン株式会社 | 光学要素の支持構造、それを用いた露光装置及び半導体デバイスの製造方法 |
US6556364B2 (en) * | 2000-04-25 | 2003-04-29 | Michael F. Meehan | Apparatus, system, and method for precision positioning and alignment of a lens in an optical system |
DE10030005A1 (de) | 2000-06-17 | 2001-12-20 | Zeiss Carl | Objektiv, insbesondere Projektionsobjektiv in der Halbleiter-Lithographie |
DE10042844C1 (de) * | 2000-08-17 | 2002-04-04 | Jenoptik Jena Gmbh | Radial justierbare Linsenfassung |
DE10053899A1 (de) | 2000-10-31 | 2002-05-08 | Zeiss Carl | Vorrichtung zur Lagerung eines optischen Elementes |
DE10140608A1 (de) | 2001-08-18 | 2003-03-06 | Zeiss Carl | Vorrichtung zur Justage eines optischen Elements |
JP4174262B2 (ja) | 2002-08-09 | 2008-10-29 | キヤノン株式会社 | 光学要素の支持構造、光学系、光学系の調整方法、露光装置、露光方法、半導体デバイス製造方法 |
JP3805323B2 (ja) | 2003-05-21 | 2006-08-02 | キヤノン株式会社 | 露光装置、収差低減方法及び光学部材調整機構 |
US6816325B1 (en) | 2003-09-11 | 2004-11-09 | Carl Zeiss Smt Ag | Mounting apparatus for an optical element |
-
2001
- 2001-08-18 DE DE10140608A patent/DE10140608A1/de not_active Withdrawn
-
2002
- 2002-08-06 WO PCT/EP2002/008758 patent/WO2003016976A2/de not_active Application Discontinuation
-
2004
- 2004-02-13 US US10/779,392 patent/US7193794B2/en not_active Expired - Fee Related
-
2006
- 2006-09-20 US US11/533,660 patent/US7457059B2/en not_active Expired - Fee Related
-
2008
- 2008-09-17 US US12/211,978 patent/US7656595B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4993823A (en) * | 1989-06-29 | 1991-02-19 | Eastman Kodak Company | Method for correction of distortions of an imaging device |
WO1999067683A2 (de) * | 1998-06-20 | 1999-12-29 | Carl Zeiss | Optisches system, insbesondere projektions-belichtungsanlage der mikrolithographie |
EP1014139A2 (de) * | 1998-12-23 | 2000-06-28 | Carl Zeiss | Optisches System, insbesondere Projektionsbelichtungsanlage der Mikrolithographie, mit einer optischen Halterung mit Aktuatoren |
EP1209501A2 (de) * | 2000-10-18 | 2002-05-29 | Carl Zeiss | Vorrichtung zur Lagerung eines optischen Elementes |
Also Published As
Publication number | Publication date |
---|---|
WO2003016976A2 (de) | 2003-02-27 |
US20040174619A1 (en) | 2004-09-09 |
US7193794B2 (en) | 2007-03-20 |
US20070014038A1 (en) | 2007-01-18 |
US7656595B2 (en) | 2010-02-02 |
DE10140608A1 (de) | 2003-03-06 |
US7457059B2 (en) | 2008-11-25 |
US20090009892A1 (en) | 2009-01-08 |
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