WO2003016833A1 - Debitmetre de type thermique - Google Patents

Debitmetre de type thermique Download PDF

Info

Publication number
WO2003016833A1
WO2003016833A1 PCT/JP2001/007018 JP0107018W WO03016833A1 WO 2003016833 A1 WO2003016833 A1 WO 2003016833A1 JP 0107018 W JP0107018 W JP 0107018W WO 03016833 A1 WO03016833 A1 WO 03016833A1
Authority
WO
WIPO (PCT)
Prior art keywords
resistor
temperature measuring
heating resistor
bridge circuit
downstream
Prior art date
Application number
PCT/JP2001/007018
Other languages
English (en)
French (fr)
Inventor
Junichi Horie
Izumi Watanabe
Shinya Igarashi
Keiichi Nakada
Kei Ueyama
Original Assignee
Hitachi, Ltd.
Hitachi Car Engineering Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi, Ltd., Hitachi Car Engineering Co., Ltd. filed Critical Hitachi, Ltd.
Priority to PCT/JP2001/007018 priority Critical patent/WO2003016833A1/ja
Priority to US10/486,563 priority patent/US6935172B2/en
Priority to JP2003521295A priority patent/JP4157034B2/ja
Priority to EP01956885.6A priority patent/EP1418408B1/en
Publication of WO2003016833A1 publication Critical patent/WO2003016833A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
PCT/JP2001/007018 2001-08-14 2001-08-14 Debitmetre de type thermique WO2003016833A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
PCT/JP2001/007018 WO2003016833A1 (fr) 2001-08-14 2001-08-14 Debitmetre de type thermique
US10/486,563 US6935172B2 (en) 2001-08-14 2001-08-14 Thermal type flow measuring device
JP2003521295A JP4157034B2 (ja) 2001-08-14 2001-08-14 熱式流量計測装置
EP01956885.6A EP1418408B1 (en) 2001-08-14 2001-08-14 Thermal flow sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2001/007018 WO2003016833A1 (fr) 2001-08-14 2001-08-14 Debitmetre de type thermique

Publications (1)

Publication Number Publication Date
WO2003016833A1 true WO2003016833A1 (fr) 2003-02-27

Family

ID=11737644

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/007018 WO2003016833A1 (fr) 2001-08-14 2001-08-14 Debitmetre de type thermique

Country Status (4)

Country Link
US (1) US6935172B2 (ja)
EP (1) EP1418408B1 (ja)
JP (1) JP4157034B2 (ja)
WO (1) WO2003016833A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7954373B2 (en) 2008-04-30 2011-06-07 Hitachi, Ltd. Thermal type flow meter

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100408981C (zh) * 2003-11-20 2008-08-06 株式会社日立制作所 热式流体流量计
US7536908B2 (en) * 2004-03-11 2009-05-26 Siargo, Ltd. Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods
JP4470743B2 (ja) * 2005-01-19 2010-06-02 株式会社デンソー 流量センサ
JP2006258678A (ja) * 2005-03-18 2006-09-28 Hitachi Ltd 熱式流量計測装置
JP2007024589A (ja) * 2005-07-13 2007-02-01 Hitachi Ltd 気体流量計測装置
US20080236273A1 (en) * 2007-03-27 2008-10-02 Honeywell International Inc. Mass airflow sensing system including resistive temperature sensors and a heating element
US7908096B2 (en) * 2007-09-28 2011-03-15 Siargo Ltd. Integrated micromachined thermal mass flow sensor and methods of making the same
US7878056B2 (en) * 2007-12-19 2011-02-01 Siargo Ltd. Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same
US8337082B2 (en) * 2009-05-08 2012-12-25 Canon U.S. Life Sciences, Inc. Systems and methods for auto-calibration of resistive temperature sensors
JP5981397B2 (ja) * 2013-07-11 2016-08-31 日立オートモティブシステムズ株式会社 熱式流量計
CN103424153B (zh) * 2013-08-05 2016-01-20 中国计量学院 天然气气体流量的测量装置及测量方法
US10444048B2 (en) * 2014-12-19 2019-10-15 Deere & Company Fluid flow monitoring system
US10786826B2 (en) 2014-12-19 2020-09-29 Deere & Company Equalization of nozzle performance for sprayers
US10330510B2 (en) * 2015-05-07 2019-06-25 Natural Gas Solutions North America, Llc Temperature sensing system and flow metering apparatus comprised thereof
US20160370809A1 (en) * 2015-06-19 2016-12-22 Hni Technologies Inc. Fluid flow system
US20170284846A1 (en) * 2016-04-01 2017-10-05 Honeywell International Inc. Low cost heating regulation circuit for self-heating flow mems
DE102016108625A1 (de) * 2016-05-10 2017-11-16 Innovative Sensor Technology Ist Ag Thermischer Durchflusssensor
KR101820050B1 (ko) * 2016-08-19 2018-01-19 주식회사 유엔지니어링 온도차를 이용한 하수관 유량 측정 장치
US11051505B2 (en) * 2018-10-12 2021-07-06 Deere & Company Multi-fluid spray system and method for agricultural product application
US10842143B2 (en) * 2018-10-12 2020-11-24 Deere & Company Multi-fluid spray system and method for agricultural product application

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11148944A (ja) * 1997-11-18 1999-06-02 Yamatake Corp 流速センサ及び流速測定装置
JP2001304934A (ja) * 2000-03-30 2001-10-31 Berkin Bv 質量流量計

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US4825693A (en) * 1982-09-30 1989-05-02 Honeywell Inc. Slotted diaphragm semiconductor device
JPS60142268A (ja) 1983-12-27 1985-07-27 株式会社山武 流速センサ
JPH0663801B2 (ja) 1988-10-31 1994-08-22 山武ハネウエル株式会社 流量測定回路
JP3342926B2 (ja) 1992-07-21 2002-11-11 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 流量センサ
JP3133608B2 (ja) * 1994-02-28 2001-02-13 株式会社ユニシアジェックス 熱式空気流量検出装置
JPH0989619A (ja) * 1995-07-19 1997-04-04 Ricoh Co Ltd 感熱式流量計
JP3366818B2 (ja) * 1997-01-16 2003-01-14 株式会社日立製作所 熱式空気流量計
US6494090B1 (en) * 1998-05-05 2002-12-17 Pierburg Ag Air-mass sensor
JP3981907B2 (ja) 1998-10-21 2007-09-26 株式会社デンソー 流量測定装置
DE19944177A1 (de) * 1999-09-15 2001-04-12 Daimler Chrysler Ag Fahrzeugdatenbussystem mit Ortungsmitteln
JP2001256598A (ja) * 2000-03-08 2001-09-21 Honda Motor Co Ltd 危険箇所報知システム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11148944A (ja) * 1997-11-18 1999-06-02 Yamatake Corp 流速センサ及び流速測定装置
JP2001304934A (ja) * 2000-03-30 2001-10-31 Berkin Bv 質量流量計

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1418408A4 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7954373B2 (en) 2008-04-30 2011-06-07 Hitachi, Ltd. Thermal type flow meter

Also Published As

Publication number Publication date
EP1418408A1 (en) 2004-05-12
JPWO2003016833A1 (ja) 2004-12-02
US20040211253A1 (en) 2004-10-28
EP1418408B1 (en) 2014-07-09
JP4157034B2 (ja) 2008-09-24
US6935172B2 (en) 2005-08-30
EP1418408A4 (en) 2006-11-08

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