WO2002104079A1 - Appareil de production permettant un affichage el organique et procede de production de cet affichage el organique - Google Patents

Appareil de production permettant un affichage el organique et procede de production de cet affichage el organique Download PDF

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Publication number
WO2002104079A1
WO2002104079A1 PCT/JP2002/005462 JP0205462W WO02104079A1 WO 2002104079 A1 WO2002104079 A1 WO 2002104079A1 JP 0205462 W JP0205462 W JP 0205462W WO 02104079 A1 WO02104079 A1 WO 02104079A1
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WO
WIPO (PCT)
Prior art keywords
organic
display
layer
sealing
glass substrate
Prior art date
Application number
PCT/JP2002/005462
Other languages
English (en)
Japanese (ja)
Inventor
Haruo Wakayama
Original Assignee
Mitsuboshi Diamond Industrial Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co., Ltd. filed Critical Mitsuboshi Diamond Industrial Co., Ltd.
Priority to KR1020037011172A priority Critical patent/KR100549100B1/ko
Priority to JP2003506247A priority patent/JP3602847B2/ja
Publication of WO2002104079A1 publication Critical patent/WO2002104079A1/fr

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/87—Passivation; Containers; Encapsulations
    • H10K59/871—Self-supporting sealing arrangements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources

Definitions

  • the present invention relates to an organic EL display manufacturing apparatus and an organic EL display manufacturing method for manufacturing an organic EL display having a structure in which an organic light emitting layer formed on a glass substrate is sealed by a sealing member.
  • FIG. 6 is a perspective view showing a schematic configuration of a general organic EL display.
  • the organic EL display 1 has a transparent glass substrate 2 on which a plurality of anode layers 3 are spaced apart from each other by a transparent conductive material such as IT ⁇ . It is provided in a stripe shape.
  • a hole transport layer 4 that supplies holes by applying a DC voltage, an organic light emitting layer 5 containing a trace amount of organic dye as a dopant, and electrons are applied by applying a DC voltage.
  • the electron transport layers 6 to be supplied are sequentially laminated on the glass substrate 2 in this order.
  • a plurality of cathode layers 7 made of a conductive material are provided on the electron transport layer 6 serving as the uppermost layer at a predetermined interval in a stripe shape extending in a direction orthogonal to the direction in which each anode layer 3 extends. Have been killed.
  • Each anode layer 3 on the glass substrate 2 is connected to an anode of a DC power supply 8, and each uppermost cathode layer 7 is connected to a cathode of the DC power supply 8.
  • DC power supply 8 between each anode layer 3 and cathode layer 7 of the organic EL display having the above configuration
  • holes are injected into the organic light emitting layer 5 from the hole transport layer 4 laminated on the anode layer 3 to which the DC voltage is applied, and the cathode layer to which the DC voltage is applied.
  • Electrons are injected into the organic light emitting layer 5 from the electron transport layer 6 below 7.
  • the holes and electrons recombine, and the energy generated by the recombination is generated.
  • One is absorbed by the organic dye contained in the organic light emitting layer 5 to emit light.
  • the light generated in the organic light emitting layer 5 sequentially passes through the hole transport layer 4, the anode layer 3, and the glass substrate 2, and is emitted from the back surface of the glass substrate 2 (the lower side in FIG. 6).
  • this organic EL display 1 a plurality of anode layers 3 formed on a glass substrate 2 and a plurality of cathode layers 7 provided on the uppermost layer intersect each other at right angles.
  • image light having each intersection as one unit of display can be formed outside the glass substrate 2.
  • FIG. 8 is a configuration diagram showing a schematic configuration of an organic EL manufacturing apparatus for manufacturing an organic EL display.
  • the organic EL manufacturing apparatus 10 includes a film forming chamber 11 for performing a film forming process of an organic light emitting layer 5 and the like on a glass substrate 2 and a sealing chamber for providing a sealing cap 9 on the glass substrate 2 after film formation.
  • the film forming chamber 11 and the sealing chamber 12 are connected to each other by a communication passage 13.
  • the film forming chamber 11 has a transfer chamber 110 provided with a transfer robot 110a at the center thereof. Radially from the transfer chamber 110, a substrate stock chamber 111 for stocking the glass substrate 2, a pretreatment chamber 111 for performing pretreatment such as cleaning on the glass substrate 2 before film formation, and an anode layer 3, a plurality of deposition chambers 11 to 3 for depositing each layer of the hole transport layer 4, the organic light emitting layer 5, the electron transport layer 6, and the cathode layer 7 on the glass substrate 2; They are arranged in a space.
  • gate valves 11 1 a to 11 a that can be opened and closed.
  • a transfer chamber 110 and a communication passage 13 are provided between the substrate stock chamber 111 and the outside. Between them, there are provided gate valves 13a for communicating the gas in each space when the glass substrate 2 after film formation is transferred to the sealing chamber 12 side.
  • the sealing chamber 12 has a transfer chamber 120 provided with a transfer robot 120a at the center, and an organic light emitting layer formed on the glass substrate 2 radially from the transfer chamber 120.
  • Inspection room 1 2 1 for inspecting the state of each layer, such as 5
  • sealing cap fixing chamber 1 2 2 where sealing cap 9 is provided on each layer formed on glass substrate 2, and cap stock for sealing cap 9.
  • a transfer room 12 In the center, there is a transfer room 12 0, an inspection room 1 2 1, a sealing cap fixing room 1 2 2, a cap stock room 1 2 3, a spare room 1 2 5 and 1 2 6, and a discharge room 1 2 4. Between them, there are provided gate valves 121a to 126a, respectively, which can open and close the gas flow state. Further, the cap stocking chamber 123 has a gate valve 123 for making the inside equal to the atmospheric pressure when the sealing cap 9 is carried in for stocking in the cap stocking chamber 123. A gate valve 1 2 4 b is provided in the discharge chamber 124 to make the inside equal to the atmospheric pressure when the glass substrate 2 with the sealing cap 9 is carried out. Is provided.
  • each of the chambers 110 to 1 16 of the film forming chamber 11, the communication passage 13, and each of the chambers 120 to 1 26 of the sealing chamber 12 have a gas supply line and a gas discharge line (not shown).
  • the interior of each chamber can be adjusted to a desired pressure state filled with a desired gas.
  • the glass substrate 2 stocked in the substrate stock room 111 is transferred to the pretreatment chamber 1 110 by the transfer robot 110 a of the transfer chamber 110. After being transferred to 12 and subjected to a predetermined pretreatment, it is transferred to each of the vapor deposition chambers 11 13 to 16 under the condition that a predetermined gas is filled to a predetermined pressure, and the anode layer 3 and the positive Each of the hole transport layer 4, the organic light emitting layer 5, the electron transport layer 6, and the cathode layer 7 is sequentially laminated.
  • the respective gate valves 11 1 a to l 16 a provided between the transfer chamber 110 and each of the chambers 11 1 to 11 16 are opened and closed, and a gas supply line (not shown) and Although a predetermined gas is led in and out of the gas discharge line to adjust the gas pressure in each chamber, the glass substrate 2 is prevented from coming into contact with the atmosphere.
  • the glass substrate 2 on which each layer is laminated in the film forming chamber 11 is transferred to the sealing chamber 12 through the communication passage 13 while maintaining the airtight state.
  • the glass substrate 2 in which the sealing cap 9 is provided and each layer such as the organic light emitting layer 5 is in a sealed state is carried out from the discharge chamber 124 to the outside, and the organic EL display is manufactured.
  • the organic light-emitting layer 5 used in the organic EL display contains a trace amount of moisture, which may cause dark spots.
  • a sealing cap 9 is provided so as not to be taken out of the inside and to contain water as it is, and to cover each layer.
  • a UV curable adhesive is applied to the contact surface with the glass substrate 2, and UV light is irradiated from the glass substrate 2 side to be fixed on the glass substrate 2.
  • an organic EL display needs to be manufactured in a state where moisture is removed, and in order to improve the mass productivity of the manufacture, a large-area glass substrate is used to simultaneously prepare a plurality of organic EL displays. Perform a film forming process for EL displays, provide a sealing cap for each OLED display, and then replace the large-area glass substrate on which multiple OLED displays are formed with the portion where each OLED display is formed. Each time, it is necessary to manufacture a plurality of OLED displays at the same time by forming a scribe line and applying a bending moment to the scribe line to divide each OLED display.
  • the sealing cap 9 projecting from the glass substrate 2 to a predetermined height may be used. It is difficult to stably support the substrate 2, and it is not easy to stably form scribe lines.
  • a hardened adhesive is formed on the surface of the sealing cap 9 on the opposite side where the scribe line is formed, in contact with the glass substrate 2, and is separated from the scribe line by the influence of the adhesive. There is also a problem that the direction of (break) does not always proceed in a desired direction, and a desired sectional plane cannot be obtained.
  • the present invention has been made in view of the above problems, and in a glass substrate provided with a plurality of layers such as an organic light emitting layer, a sealing member corresponding to an alignment of a position of each layer formed on the glass substrate.
  • An object of the present invention is to provide an organic EL display manufacturing apparatus and an organic EL display manufacturing method capable of easily mounting the same. Disclosure of the invention
  • an organic EL display manufacturing apparatus of the present invention comprises an anode layer, a hole transport layer, an organic light emitting layer, an electron transport layer, and an anode layer in a vacuum or an inert gas atmosphere.
  • Sealing means for providing a member, wherein a scribing line is formed before sealing in a predetermined partial region used for each portion of the brittle substrate to be an organic EL display, and the sealing member is In addition, a concave portion for accommodating each of the laminated layers is formed for each portion to be each organic EL display formed on the brittle substrate.
  • the brittle substrate is formed on each of the brittle substrates on which the respective layers are formed by the film forming means in a vacuum or an inert gas atmosphere. It is preferable to include a scribe unit for forming a scribe line for a predetermined partial region to be used.
  • the sealing member is formed in a single flat plate on which a scribing line is formed in advance corresponding to a position of a scribe line formed by the scribe means.
  • the method for producing an organic EL display of the present invention comprises the steps of: placing each of an anode layer, a hole transport layer, an organic light emitting layer, an electron transport layer, and a cathode layer on a brittle substrate in a vacuum or an inert gas atmosphere; A film forming process for forming a film for each part to be an organic EL display, Or a sealing member mounting step of mounting a sealing member for sealing each layer on the brittle substrate in an airtight state for each portion in an inert gas atmosphere, wherein each organic EL display of the brittle substrate is A scribe line is formed for a predetermined partial region used for each part before the sealing member attaching step, and the sealing member is provided for each organic EL display part formed on the brittle
  • the brittle substrate on which each layer is formed in the film-forming step is placed in a vacuum or an inert gas atmosphere for each portion of the brittle substrate that becomes an organic EL display. It is preferable to include a scribing step of forming a scribing line for a predetermined partial region used for the above.
  • the sealing member is formed in a single flat plate on which scribe lines are formed in advance corresponding to the positions of the scribe lines formed in the scribe step. It is preferred that The method for manufacturing an organic EL display of the present invention preferably further comprises a step of simultaneously cutting the brittle substrate and the sealing member by a single cutting operation.
  • FIG. 1 is a schematic plan view showing a schematic configuration of an organic EL display manufacturing apparatus of the present invention.
  • FIG. 2 is a side view showing a glass cutter provided in a scribe room.
  • FIGS. 3 (a) to 3 (e) are cross-sectional views for explaining a process of attaching sealing glass to a glass substrate on which each layer is formed and dividing each organic EL display for each process.
  • FIG. 4 is a schematic plan view showing a schematic configuration of another organic EL display manufacturing apparatus of the present invention.
  • FIG. 5 is a schematic plan view showing a schematic configuration of still another organic EL display manufacturing apparatus of the present invention.
  • FIG. 6 is a perspective view showing a schematic configuration of an organic EL display.
  • FIG. 7 is a cross-sectional view showing an organic EL display equipped with a sealing cap.
  • FIG. 8 is a schematic plan view showing a schematic configuration of a conventional organic EL display manufacturing apparatus. BEST MODE FOR CARRYING OUT THE INVENTION
  • FIG. 1 is a configuration diagram showing a schematic configuration of an organic EL display manufacturing apparatus 100 of the present invention.
  • the manufactured organic EL display device has the same structure as the structure shown in FIG.
  • the organic EL display manufacturing apparatus 100 includes a film forming chamber 11 for performing a film forming process of each layer such as an organic light emitting layer 5 on a glass substrate (brittle substrate) 2, and a sealing on a glass substrate 2 after film formation.
  • the film forming chamber 11 and the sealing chamber 20 are provided with a communication passage 13.
  • the film forming chamber 11 has a transfer chamber 110 having a transfer pot 110a at the center thereof, and a substrate stock chamber 111 for storing the glass substrate 2 radially from the transfer chamber 110.
  • a pretreatment chamber 112 for performing pretreatment such as cleaning on the glass substrate 2 before film formation, an anode layer 3, a hole transport layer 4, an organic light emitting layer 5, an electron transport layer 6, and a cathode layer 7.
  • a plurality of vapor deposition chambers 113 to 116 for vapor-depositing each layer on the glass substrate 2 are arranged at predetermined intervals. The gas flow state is set between the transfer chamber 110 located in the center, the substrate stock chamber 111, the pretreatment chamber 112, and each of the vapor deposition chambers 113-116.
  • a gate valve 1 11 a to l 16 a that can be opened and closed is provided.
  • the substrate stock chamber 111, the pretreatment chamber 112, and the vapor deposition chambers 113 to 116 are provided with A gas supply line and a gas discharge line (not shown) are provided, respectively, so that the inside of each chamber can be adjusted to a desired pressure state filled with a desired gas.
  • the sealing chamber 20 has a transfer chamber 210 provided with a transfer robot 210 a at the center thereof, and the organic light emitting layer 5 formed on the glass substrate 2 radially from the transfer chamber 210.
  • Inspection room 2 16 for inspecting the state of each layer such as, a scribing room 30 for forming a scribe line on the surface of the glass substrate 2 to divide the glass substrate 2 for each OLED display, and a glass substrate
  • a sealing glass stock chamber 2 13 for stocking the sealing glass 300 covering each layer such as the organic light emitting layer 5 formed on 2 and a sealing glass 300 on the glass substrate 2
  • UV irradiation chamber 2 1 for irradiating UV light to cure the UV-curable adhesive attached to the sealing glass fixing chamber 2 1 2 and the contact surface of the sealing glass 3 with glass substrate 2 4
  • a discharge chamber 2 15 for discharging the glass substrate 2 to which the sealing glass 300 is attached to the outside, They are arranged at intervals.
  • the scribe chamber 30 is provided with a cutter 21 (see FIG. 2) for forming a scribe line at a predetermined position on the glass substrate 2.
  • FIG. 2 shows the cutter 21 provided in the scribe room 30.
  • the cutter 21 has a cutting edge 22 made of a material having a high hardness such as a carbide or sintered diamond.
  • the cutting blade 22 is formed in a bi-cone shape having a maximum diameter at the center, and both ends of the cutting blade 22 are centered on the conical axis by a holder 23 having an open lower surface. It is rotatably supported and mounted so that it can be rotated.
  • the central portion of the cutting blade 22 protruding from the lower surface of the holder 23 is pressed against a desired position on the glass substrate 2 to form the cutting blade 22. It is performed by running in a predetermined direction while rotating.
  • the sealing glass 300 stored in the sealing glass stock chamber 2 13 has a position corresponding to a position where each layer such as the organic light emitting layer 5 formed on the glass substrate 2 is formed in advance.
  • a concave portion covering each layer is formed, and a scribe line for dividing each organic EL display is formed.
  • the glass substrate 2 stocked in the substrate stock chamber 111 of the film forming chamber 111 is transferred to the transfer robot 110 of the transfer chamber 110.
  • the pre-processing chamber 112 by 10a and performing predetermined pre-processing it is transported to each of the evaporation chambers 113 to 116, where the predetermined gas is charged to a predetermined pressure.
  • Each layer of the anode layer 3, the hole transport layer 4, the organic light emitting layer 5, the electron transport layer 6, and the cathode layer 7 is sequentially laminated on the glass substrate 2 to form a film.
  • the gate valves 11 a to l 16 a provided between the transfer chamber 110 and each of the chambers 11 1 to 11 16 are opened and closed, respectively, and a gas supply line and a gas discharge line (not shown) A predetermined gas is led in and out of the system, but is not connected to the atmosphere.
  • the glass substrate 2 on which the respective layers are stacked in the film forming chamber 11 passes through the communication passage 13 and is conveyed to the sealing chamber 20 while keeping the airtight state.
  • the glass substrate 2 conveyed to the sealing chamber 20 through the communication passage 13 is in a state where the layers such as the anode layer 3 are laminated at predetermined intervals as shown in FIG. 3 (a). I have.
  • the transfer port pot 210 Oa of the transfer chamber 210 transfers the glass substrate 2 to the inspection chamber 210, where a predetermined inspection is performed. After that, carry it into the scribe room 30.
  • the loaded glass substrate 2 is subjected to optical alignment and position shift correction, and then X and Y cross scribe is performed in accordance with preset scribe pitch data.
  • a scribe line S is formed for each part of the glass substrate 2 that will become an organic EL display by running while rotating the cutting blade 22 shown in FIG. 2 as shown in FIG. 3 (b). I do.
  • the glass substrate 2 on which the scribe line S is formed is carried into the sealing glass fixing chamber 2 12 by the transfer robot 210 a of the transfer chamber 210, and the sealing glass stock chamber 2 1 3
  • the sealing glass 300 stocked on the glass substrate 2 is aligned and placed so that the alignment mark formed on the glass substrate 2 and the alignment mark formed on the sealing glass 300 match. Place.
  • the sealing cap 300 is placed on the contact surface with the glass substrate 2 with a UV-curable adhesive interposed therebetween.
  • the glass substrate 2 on which the sealing glass 300 is placed is carried into the UV irradiation chamber 214 by the transfer pot 210a of the transfer chamber 210, and as shown in FIG. 3 (d). Then, UV light is irradiated from the back side of the glass substrate 2 to cure the UV curable adhesive applied to the contact surface of the sealing glass 300 that is in contact with the glass substrate 2, and the sealing is performed. The glass 300 is fixed to the glass substrate 2.
  • the glass substrate 2 on which the sealing glass 300 is fixed is transferred to the discharge chamber 215 by the transfer pot 210a of the transfer chamber 210, and the reduced pressure state of the discharge chamber 215 is gated.
  • the valve 215b By opening the valve 215b to make it equal to the atmospheric pressure, the glass substrate 2 with the sealing glass 300 attached to the outside of the discharge chamber 215 is carried out.
  • the scribe line S formed in a predetermined pattern is broken on each of the glass substrate 2 and the sealing glass 300, and divided for each organic EL display. I do.
  • the scribe line S is formed at a predetermined position in advance.
  • the stop glass 300 is placed and fixed on the glass substrate 2. In this way, the sealing glass 300 is adhered to the single glass substrate 2 to seal the organic light emitting layer 5 and the like on the glass substrate 2. Alignment for pasting of 300 is easy.
  • each layer is multi-layered such as 150 to 200 planes.
  • the sealing glass 300 that has not been scribed in advance is directly used as a chamber. After attaching to the glass substrate 2 which has been scribed inside, the sealing glass 300 may be scribed outside the chamber 1 so as to be divided for each organic EL display.
  • FIG. 4 is a configuration diagram showing a schematic configuration of another organic EL display manufacturing apparatus 100 of the present invention.
  • the manufactured organic EL display device has a structure similar to the structure shown in FIG.
  • a scribe line 30 for forming a scribe line S for dividing the glass substrate 2 for each organic EL display on the surface of the glass substrate 2 is formed by a film forming process. It is provided outside the chamber 11 and the sealing chamber 20. Further, the sealing chamber 20 is provided with a spare chamber 211 provided for spare. The other points are the same as those of the organic EL display manufacturing apparatus shown in FIG. 1, and a detailed description thereof will be omitted.
  • a scribing line S is formed at a desired position on the glass substrate 2 in the scribe room 30, and then the scribe line S is formed.
  • the deposited glass substrate 2 is carried into the substrate stock chamber 111 of the film forming chamber 111. After that, it is transported to each of the chambers 11 2 to 1 16 of the film forming chamber 11 by the transport pot 110 a of the transport chamber 110 to form each layer such as the anode layer 3 of the organic EL display.
  • FIG. 5 is a configuration diagram showing a schematic configuration of still another organic EL display manufacturing apparatus 100 of the present invention.
  • the manufactured organic EL display device has a structure similar to the structure shown in FIG.
  • a scribe room 30 for forming a scribe line S on the surface of the glass substrate 2 for dividing the glass substrate 2 for each organic EL display is formed as a film forming chamber.
  • the sealing chamber 20 is provided with a spare chamber 211 provided as a spare.
  • the glass substrate 2 stocked in the substrate stock room 111 is transferred by the transfer robot 110a in the transfer room 110. Then, the glass substrate 2 is sequentially transported to each of the chambers 112 to 116 for forming a film, and each layer of the organic EL display is formed. Then, the glass substrate 2 on which each layer of the organic EL display is formed is transferred to the scribe room 30 by the transfer robot 110a, and the scribe room 30 is moved to a desired position on the surface of the glass substrate 2. Scribe line S is formed.
  • the film forming process and the scribe line forming process on the glass substrate 2 in the film forming chamber 11 are performed by forming the scribe line S after performing the film forming process as described above.
  • the scribe line S may be formed thereon before the film formation process is performed.
  • the glass substrate 2 on which each layer has been formed and the scribe line has been formed is transferred to the sealing chamber 20 via the communication path 13, and the transfer robot of the transfer chamber 210 of the sealing chamber 20 is transferred.
  • the glass is conveyed to each of the chambers 212 to 216 in the sealing chamber 20 and the sealing glass 300 is mounted on the region of the glass substrate 2 which will become each organic EL display.
  • a process is performed.
  • the glass substrate 2 on which the sealing glass 300 is mounted is discharged to the outside through the discharge chamber 215.
  • the apparatus for manufacturing an organic EL display according to the present invention includes a scribe line on the glass substrate 2 before the sealing glass 300 is mounted on the glass substrate 2.
  • Form S In this case, as shown in FIGS. 1 and 5, after forming each layer to be an organic EL display on the glass substrate 2, a step of forming a scribe line S in a vacuum or an inert gas atmosphere is performed. Alternatively, as shown in FIG. 4, a scribe line S may be externally formed on the glass substrate 2 before performing the film forming step.
  • An organic EL display manufacturing apparatus and an organic EL display manufacturing method according to the present invention include the steps of: forming a layer such as an anode layer on a glass substrate; and adhering a single-plate sealing member to a single glass substrate. wear. This facilitates alignment between the glass substrate and the sealing member.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

L'invention concerne la formation d'une couche (3) d'anode ultérieure, d'une couche (4) de transport d'orifice, d'une couche (5) de lumière organique et d'une couche (6) de cathode d'un affichage EL organique respectivement sur un substrat (2) de verre, un verre (300) étanche de plaque plate permettant de sceller respectivement, des couches comme la couche (5) de lumière organique constituant l'affichage EL organique sont réglées et fixées au substrat (2) de verre. Ainsi, une feuille de verre (300) de scellement collée à la feuille de substrat (2) de verre peut faciliter l'alignement requis, lorsque le verre de scellement (300) est collé au substrat (2) de verre.
PCT/JP2002/005462 2001-06-14 2002-06-03 Appareil de production permettant un affichage el organique et procede de production de cet affichage el organique WO2002104079A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020037011172A KR100549100B1 (ko) 2001-06-14 2002-06-03 유기이엘 디스플레이 제조장치 및 유기이엘 디스플레이의제조방법
JP2003506247A JP3602847B2 (ja) 2001-06-14 2002-06-03 有機ｅｌディスプレイ製造装置及び有機ｅｌディスプレイの製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001180900 2001-06-14
JP2001-180900 2001-06-14

Publications (1)

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WO2002104079A1 true WO2002104079A1 (fr) 2002-12-27

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JP (1) JP3602847B2 (fr)
KR (1) KR100549100B1 (fr)
CN (1) CN100350645C (fr)
TW (1) TWI272033B (fr)
WO (1) WO2002104079A1 (fr)

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JP2004355943A (ja) * 2003-05-29 2004-12-16 Nippon Seiki Co Ltd 封止用基板の製造方法及び有機ｅｌパネルの製造方法
WO2006134863A1 (fr) * 2005-06-15 2006-12-21 Ulvac, Inc. Dispositif d’étanchéification et procédé d’étanchéification
JP2007258005A (ja) * 2006-03-23 2007-10-04 Pioneer Electronic Corp 光デバイス用の封止部材の製造方法、光デバイスの製造方法、光デバイス、および光デバイス用の封止部材
CN100452480C (zh) * 2004-04-08 2009-01-14 日本东北先锋公司 有机el元件的制造方法及制造装置
JP2011061200A (ja) * 2009-09-07 2011-03-24 Samsung Electro-Mechanics Co Ltd 透明有機電極形成方法
JP5282786B2 (ja) * 2008-11-13 2013-09-04 コニカミノルタ株式会社 有機エレクトロルミネッセンス素子の製造方法、有機エレクトロルミネッセンス素子
JP2014041712A (ja) * 2012-08-21 2014-03-06 National Institute For Materials Science 有機ｅｌ素子の製造装置及び方法、ｃｖｄ薄膜の製造装置及び方法
CN104733646A (zh) * 2015-02-10 2015-06-24 四川虹视显示技术有限公司 一种oled真空老化系统

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KR100674679B1 (ko) * 2005-12-29 2007-01-25 주식회사 아바코 유기발광소자의 봉지 시스템
KR101642985B1 (ko) * 2009-06-29 2016-07-27 엘지디스플레이 주식회사 유기전계발광소자의 제조방법
CN101882669A (zh) * 2010-03-23 2010-11-10 东莞宏威数码机械有限公司 有机发光显示器后段工艺封装组件及封装方法
CN101988190A (zh) * 2010-05-25 2011-03-23 东莞宏威数码机械有限公司 镀膜基片前置处理装置及前置处理方法
CN103022379A (zh) * 2011-09-22 2013-04-03 北儒精密股份有限公司 挠性有机发光二极管的封装设备

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JPH11312580A (ja) * 1998-04-28 1999-11-09 Toyota Central Res & Dev Lab Inc 有機電界発光素子
JP2000003782A (ja) * 1998-06-12 2000-01-07 Casio Comput Co Ltd 電界発光素子
JP2001068265A (ja) * 1999-08-24 2001-03-16 Toyota Motor Corp 有機ｅｌ素子及びその製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004355943A (ja) * 2003-05-29 2004-12-16 Nippon Seiki Co Ltd 封止用基板の製造方法及び有機ｅｌパネルの製造方法
CN100452480C (zh) * 2004-04-08 2009-01-14 日本东北先锋公司 有机el元件的制造方法及制造装置
WO2006134863A1 (fr) * 2005-06-15 2006-12-21 Ulvac, Inc. Dispositif d’étanchéification et procédé d’étanchéification
JP4827842B2 (ja) * 2005-06-15 2011-11-30 株式会社アルバック 封止装置及び封止方法
JP2007258005A (ja) * 2006-03-23 2007-10-04 Pioneer Electronic Corp 光デバイス用の封止部材の製造方法、光デバイスの製造方法、光デバイス、および光デバイス用の封止部材
JP5282786B2 (ja) * 2008-11-13 2013-09-04 コニカミノルタ株式会社 有機エレクトロルミネッセンス素子の製造方法、有機エレクトロルミネッセンス素子
JP2011061200A (ja) * 2009-09-07 2011-03-24 Samsung Electro-Mechanics Co Ltd 透明有機電極形成方法
JP2014041712A (ja) * 2012-08-21 2014-03-06 National Institute For Materials Science 有機ｅｌ素子の製造装置及び方法、ｃｖｄ薄膜の製造装置及び方法
CN104733646A (zh) * 2015-02-10 2015-06-24 四川虹视显示技术有限公司 一种oled真空老化系统

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CN100350645C (zh) 2007-11-21
JP3602847B2 (ja) 2004-12-15
JPWO2002104079A1 (ja) 2004-10-07

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