WO2002061396A1 - Oscillateur et detecteur de masse - Google Patents
Oscillateur et detecteur de masse Download PDFInfo
- Publication number
- WO2002061396A1 WO2002061396A1 PCT/JP2001/010545 JP0110545W WO02061396A1 WO 2002061396 A1 WO2002061396 A1 WO 2002061396A1 JP 0110545 W JP0110545 W JP 0110545W WO 02061396 A1 WO02061396 A1 WO 02061396A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- liquid
- diaphragm
- oscillator
- electrode
- covering material
- Prior art date
Links
- 239000007788 liquid Substances 0.000 claims abstract description 68
- 239000000463 material Substances 0.000 claims abstract description 43
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 10
- 239000003566 sealing material Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 4
- 239000013076 target substance Substances 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 239000007900 aqueous suspension Substances 0.000 claims description 2
- 239000013013 elastic material Substances 0.000 claims description 2
- 230000010355 oscillation Effects 0.000 abstract description 36
- 239000013078 crystal Substances 0.000 description 17
- 239000010453 quartz Substances 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 238000002474 experimental method Methods 0.000 description 15
- 238000007789 sealing Methods 0.000 description 8
- 238000000105 evaporative light scattering detection Methods 0.000 description 7
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 6
- 239000000243 solution Substances 0.000 description 5
- 210000004027 cell Anatomy 0.000 description 4
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 150000002894 organic compounds Chemical class 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VOXZDWNPVJITMN-UHFFFAOYSA-N 13-methyl-6,7,8,9,11,12,14,15,16,17-decahydrocyclopenta[a]phenanthrene-3,17-diol Chemical compound OC1=CC=C2C3CCC(C)(C(CC4)O)C4C3CCC2=C1 VOXZDWNPVJITMN-UHFFFAOYSA-N 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- 241000588724 Escherichia coli Species 0.000 description 2
- 241000589248 Legionella Species 0.000 description 2
- 208000007764 Legionnaires' Disease Diseases 0.000 description 2
- 239000000427 antigen Substances 0.000 description 2
- 102000036639 antigens Human genes 0.000 description 2
- 108091007433 antigens Proteins 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- 210000000601 blood cell Anatomy 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 0 C*[N+]([O-])O*** Chemical compound C*[N+]([O-])O*** 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- OBTSLRFPKIKXSZ-UHFFFAOYSA-N lithium potassium Chemical compound [Li].[K] OBTSLRFPKIKXSZ-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000813 microbial effect Effects 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000008363 phosphate buffer Substances 0.000 description 1
- -1 phthalate ester Chemical class 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
- G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/13—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing having piezoelectric or piezoresistive properties
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01273567A EP1365227A1 (en) | 2001-01-30 | 2001-12-03 | Oscillator and mass detector |
US10/470,161 US20040095043A1 (en) | 2001-01-30 | 2001-12-03 | Oscillator and mass detector |
CA002434632A CA2434632A1 (en) | 2001-01-30 | 2001-12-03 | Oscillator and mass detector |
JP2002561917A JPWO2002061396A1 (ja) | 2001-01-30 | 2001-12-03 | 発振子および質量検出装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001021254 | 2001-01-30 | ||
JP2001-21254 | 2001-01-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002061396A1 true WO2002061396A1 (fr) | 2002-08-08 |
Family
ID=18886846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2001/010545 WO2002061396A1 (fr) | 2001-01-30 | 2001-12-03 | Oscillateur et detecteur de masse |
Country Status (5)
Country | Link |
---|---|
US (1) | US20040095043A1 (ja) |
EP (1) | EP1365227A1 (ja) |
JP (1) | JPWO2002061396A1 (ja) |
CA (1) | CA2434632A1 (ja) |
WO (1) | WO2002061396A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007093549A (ja) * | 2005-09-30 | 2007-04-12 | Ulvac Japan Ltd | センサ及びこれを使用した装置 |
JP2010078334A (ja) * | 2008-09-24 | 2010-04-08 | National Institute Of Advanced Industrial Science & Technology | 検出センサ、振動子 |
US7802466B2 (en) | 2007-11-28 | 2010-09-28 | Sierra Sensors Gmbh | Oscillating sensor and fluid sample analysis using an oscillating sensor |
JP2015197330A (ja) * | 2014-03-31 | 2015-11-09 | 日本電波工業株式会社 | 感知センサー及び感知装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI242639B (en) * | 2003-10-21 | 2005-11-01 | Ind Tech Res Inst | Humidity sensor element, device and method for manufacturing thereof |
TWI669496B (zh) * | 2016-09-26 | 2019-08-21 | 美商羅門哈斯電子材料有限公司 | 氣體感測器及其製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04190138A (ja) * | 1990-11-26 | 1992-07-08 | Yasuro Ito | 粉粒材の相対吸着液率測定方法およびその装置 |
JPH05296903A (ja) * | 1992-04-16 | 1993-11-12 | Seiko Instr Inc | 水晶振動子セル |
JPH08338798A (ja) * | 1995-06-13 | 1996-12-24 | Nippon Oil & Fats Co Ltd | 糖濃度測定センサー |
JPH1114525A (ja) * | 1997-06-19 | 1999-01-22 | Showa Crystal:Kk | 圧電素子保持構造 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2468538A (en) * | 1946-01-10 | 1949-04-26 | Submarine Signal Co | Ultra high frequency vibrator |
US3187300A (en) * | 1963-01-29 | 1965-06-01 | Chesapeake Instr Corp | Pressure-compensated transducer |
US4533907A (en) * | 1983-05-09 | 1985-08-06 | Thatcher John B | Swimming pool alarm |
JP3812917B2 (ja) * | 1997-05-14 | 2006-08-23 | 本田技研工業株式会社 | 圧電型アクチュエーター |
JP3917746B2 (ja) * | 1998-03-02 | 2007-05-23 | 北陸電気工業株式会社 | 圧電発音器 |
US6250140B1 (en) * | 1999-06-22 | 2001-06-26 | Nalco Chemical Company | Method for measuring the rate of a fouling reaction induced by heat transfer using a piezoelectric microbalance |
JP3700559B2 (ja) * | 1999-12-16 | 2005-09-28 | 株式会社村田製作所 | 圧電音響部品およびその製造方法 |
US6653762B2 (en) * | 2000-04-19 | 2003-11-25 | Murata Manufacturing Co., Ltd. | Piezoelectric type electric acoustic converter |
-
2001
- 2001-12-03 WO PCT/JP2001/010545 patent/WO2002061396A1/ja not_active Application Discontinuation
- 2001-12-03 JP JP2002561917A patent/JPWO2002061396A1/ja active Pending
- 2001-12-03 EP EP01273567A patent/EP1365227A1/en not_active Withdrawn
- 2001-12-03 CA CA002434632A patent/CA2434632A1/en not_active Abandoned
- 2001-12-03 US US10/470,161 patent/US20040095043A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04190138A (ja) * | 1990-11-26 | 1992-07-08 | Yasuro Ito | 粉粒材の相対吸着液率測定方法およびその装置 |
JPH05296903A (ja) * | 1992-04-16 | 1993-11-12 | Seiko Instr Inc | 水晶振動子セル |
JPH08338798A (ja) * | 1995-06-13 | 1996-12-24 | Nippon Oil & Fats Co Ltd | 糖濃度測定センサー |
JPH1114525A (ja) * | 1997-06-19 | 1999-01-22 | Showa Crystal:Kk | 圧電素子保持構造 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007093549A (ja) * | 2005-09-30 | 2007-04-12 | Ulvac Japan Ltd | センサ及びこれを使用した装置 |
JP4669767B2 (ja) * | 2005-09-30 | 2011-04-13 | 株式会社アルバック | センサ及びこれを使用した装置 |
US7802466B2 (en) | 2007-11-28 | 2010-09-28 | Sierra Sensors Gmbh | Oscillating sensor and fluid sample analysis using an oscillating sensor |
US7975530B2 (en) * | 2007-11-28 | 2011-07-12 | Sierra Sensors Gmbh | Oscillating sensor and fluid sample analysis using an oscillating sensor |
JP2010078334A (ja) * | 2008-09-24 | 2010-04-08 | National Institute Of Advanced Industrial Science & Technology | 検出センサ、振動子 |
JP2015197330A (ja) * | 2014-03-31 | 2015-11-09 | 日本電波工業株式会社 | 感知センサー及び感知装置 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2002061396A1 (ja) | 2004-06-03 |
EP1365227A1 (en) | 2003-11-26 |
US20040095043A1 (en) | 2004-05-20 |
CA2434632A1 (en) | 2002-08-08 |
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