WO2002031975A1 - Dispositif produisant des vibrations de torsion - Google Patents

Dispositif produisant des vibrations de torsion Download PDF

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Publication number
WO2002031975A1
WO2002031975A1 PCT/JP2001/008588 JP0108588W WO0231975A1 WO 2002031975 A1 WO2002031975 A1 WO 2002031975A1 JP 0108588 W JP0108588 W JP 0108588W WO 0231975 A1 WO0231975 A1 WO 0231975A1
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WO
WIPO (PCT)
Prior art keywords
legs
leg
axis
torsional
electrodes
Prior art date
Application number
PCT/JP2001/008588
Other languages
English (en)
Japanese (ja)
Inventor
Izumi Yamamoto
Tohru Yanagisawa
Hiromi Ueda
Original Assignee
Citizen Watch Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co., Ltd. filed Critical Citizen Watch Co., Ltd.
Publication of WO2002031975A1 publication Critical patent/WO2002031975A1/fr

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz

Definitions

  • the present invention relates to a crystal oscillator used as a reference signal source for a timepiece or a mobile communication device. More specifically, the present invention relates to a torsional oscillator having a base and three legs extending therefrom, which is made of quartz. It concerns the shape of the child and the electrode structure on the surface of each leg. Background art
  • a so-called tuning-fork type crystal unit having two vibrating legs is widely used as a reference signal source for watches and mobile communication devices.
  • Such a two-leg tuning fork vibrator is used in a vibration mode (in-plane vibration) in which two legs bend and vibrate in directions opposite to each other in the plane, that is, in the plane.
  • FIG. 15 is a graph showing the temperature dependence of the resonance frequency of a conventional two-leg tuning fork resonator.
  • the second-order temperature coefficient (coefficient ⁇ in the figure) with respect to temperature is about 3.5 ⁇ 10 " 2 ppm / ° C 2 .
  • FIG. 16 is a diagram showing the orientation of a conventional two-legged tuning fork vibrator.
  • quartz is an anisotropic single crystal belonging to the trigonal system, and its properties differ depending on the angle at which the tuning fork is cut out.
  • the width direction of the base 1 is defined as the X axis (electric axis) of the crystal axis of the crystal as shown in the figure, and the length direction and the thickness direction of the leg 3 are defined as the X axis.
  • the temperature characteristics By setting the X axis as the axis of rotation from 0 to 5 ° from the state of being aligned with the Y axis (mechanical axis) and the Z axis (optical axis) of the crystal axis of the crystal, the temperature characteristics
  • the peak of the quadratic curve (see Fig. 15) is near room temperature (around 25 ° C), and the quadratic temperature coefficient is also an optimum value.
  • the change in the resonance frequency of the vibrator relates to, for example, the accuracy of the time display of a timepiece
  • various improvements in temperature characteristics have been conventionally proposed as described below.
  • One of them is the use of a torsional vibration mode.
  • the X-axis rotates 33 to 39 ° with the rotation axis as the rotation axis. It is shown that the torsional vibration of the quartz plate cut to the specified angle has little fluctuation due to the temperature change of the frequency and has good temperature characteristics.
  • the inventor of the present application conducted various experiments in consideration of applying such characteristics of the piezoelectric resonator to a two-leg tuning-fork type resonator. That is, in the structure of Fig. 16, the width direction of the base 1 is defined as the X axis of the crystal, and the longitudinal direction and the thickness direction of the leg 3 are defined as the Y axis (mechanical axis) and the Z axis (the crystal axis) of the crystal, respectively. (Optical axis), the direction was rotated by 30 ° to 35 ° with the X axis as the rotation axis. That is, the angle corresponding to “0 ° to 5 °” in FIG. 16 was set to “30 ° to 35 °”.
  • FIG. 17 is a diagram showing electrodes and wiring of a conventional two-leg tuning fork torsional vibrator, and is a diagram in which electrodes are arranged in the structure of FIG.
  • electrodes were arranged on each surface of the legs as shown in FIG. 17 for the structure shown in FIG. 16, and the opposing electrodes were wired so as to have the same potential.
  • torsional vibration with a resonance frequency near 260 kHz appears, and the secondary temperature coefficient is higher than that of a normal tuning fork. was about one-third, and good temperature characteristics could be obtained.
  • FIG. 18 is a diagram showing other electrodes and wirings of a conventional two-leg tuning fork vibrator.
  • the electrode 7 is not provided on the side of the leg as shown in the figure.
  • Attempts have been made to excite torsional vibrations by providing two in parallel on each of the front and back surfaces.
  • excitation cannot be performed because the piezoelectric constant e 16 used is zero.
  • Attempts to solve this problem have an angle at the base (spread at the base), but such a structure at the base of the leg is difficult to manufacture and is not practical.
  • Japanese Unexamined Patent Publication No. Hei Japanese Unexamined Patent Publication No. 2885
  • the width direction of the base 1 is set as the X axis of the crystal axis of the crystal, and the direction in which the legs extend and the thickness direction is matched with the Y axis and the Z axis, respectively, and the X axis is the rotation axis.
  • An object of the present invention is to solve the above-mentioned conventional problems, to simplify the circuit used for oscillation, to have a simple shape of the vibrator, to easily cut out a quartz plate, to manufacture easily and
  • An object of the present invention is to provide a torsional vibrator having temperature characteristics.
  • the torsional vibrator of the present invention has one base and three legs extending in the same direction from the base, and each of the three legs is in a torsional vibration mode. It is characterized by being used in.
  • the torsional vibrator of the present invention is preferably made of quartz.
  • the torsional vibration of the two legs located at both ends of the three legs is in phase with each other, and the torsional vibration of one leg located at the center is provided. Is characterized by being in opposite phase to the torsional vibration of the two legs located at both ends.
  • the torsional vibrator of the present invention has electrodes on each surface of the three legs, The electrodes are wired so that the electrodes on the opposing surfaces of the legs have the same potential. Specifically, the electrode on the side surface of one leg located at the center and the electrodes on the front and back surfaces of the two legs located at both ends have the same potential, and one electrode located at the center It is characterized in that the electrodes on the front and back surfaces of the legs and the electrodes on the side surfaces of the two legs located at both ends are wired so as to have the same potential.
  • the torsional vibrator of the present invention is characterized in that the length of the electrode in the longitudinal direction is 0.5 times or less of the total length L of the three legs from the root to the tip. I do.
  • the torsional vibrator of the present invention uses the width direction of the base as the X axis (electrical axis) of the crystal axis of the crystal, and the longitudinal direction and the thickness direction of the legs, respectively. From the state that the Y axis (mechanical axis) and the Z axis (optical axis) of the crystal axis are aligned, the direction rotated by angle ⁇ ⁇ ⁇ with the X axis as the rotation axis, and angle 0 is the following inequality,
  • FIG. 1 is a view showing one embodiment of a torsional vibrator according to the present invention.
  • FIG. 3 is a diagram showing the orientation of quartz.
  • FIG. 2 is a graph showing the temperature dependence of the resonance frequency at the angle ⁇ of the torsional vibrator according to the present invention.
  • FIG. 3 is a graph showing how the angle 0 at which the apex temperature becomes room temperature changes depending on the side ratio in the torsional vibrator according to the present invention.
  • FIG. 4 is a diagram showing the electrode structure of the torsional vibrator according to the present invention.
  • FIG. 5 is a diagram showing electrodes and wirings of the torsional vibrator according to the present invention.
  • FIG. 6 is an explanatory diagram illustrating an applied electric field of the torsional vibrator according to the present invention. You.
  • Figure 7 is a graph showing the variation of the piezoelectric constant of quartz with angle ⁇ .
  • Figure 8 is a graph showing the angle ⁇ dependence of the etching rate of quartz.
  • Fig. 9 illustrates the movement of the legs of the torsional vibrator according to the present invention.
  • FIG. 10 is an explanatory diagram for explaining the movement of the leg due to the in-plane secondary vibration in the three-leg tuning fork.
  • FIG. 11 is a diagram showing an equivalent circuit of a crystal resonator.
  • FIG. 12 is a graph showing the relationship between the electrode length and the equivalent series resistance of the torsional vibrator according to the present invention.
  • Fig. 13 is an explanatory diagram for explaining the movement of the leg due to in-plane primary vibration in a three-leg tuning fork.
  • FIG. 14 is a circuit diagram showing an oscillation circuit for causing a torsional vibrator to self-oscillate according to the present invention.
  • Figure 15 is a graph showing the temperature dependence of the resonance frequency of a conventional two-leg tuning fork resonator.
  • FIG. 16 is a diagram showing the orientation of a conventional two-legged tuning fork vibrator.
  • FIG. 17 is a diagram showing electrodes and wiring of a conventional two-leg tuning fork torsional vibrator.
  • FIG. 18 is a diagram showing other electrodes and wiring of a conventional two-leg tuning fork torsional vibrator.
  • the mode in which each leg performs a primary bending vibration in the plane is caused by an imbalance of the vibration energy as compared with the primary vibration in the plane of the two-leg tuning fork.
  • the three legs can have a simple structure that extends straight from the base. Furthermore, as described above, after rotating the X axis as the rotation axis, there is no need to perform double rotation such as further rotating the Z ′ axis as the rotation axis.
  • FIG. 1 is a view showing one embodiment of a torsional vibrator according to the present invention, and is an explanatory view for explaining the orientation of quartz.
  • the torsional vibrator according to the present embodiment includes one base 1 and three legs 3 extending from the base 1 in the same direction.
  • the width direction of the torsional vibrator according to the present embodiment matches the X-axis direction of the crystal axis of quartz.
  • the direction in which the legs extend and the thickness direction is 0 degrees with the X axis (electric axis) as the rotation axis from the state in which the Y axis (mechanical axis) and the Z axis (optical axis) of the crystal axis of the crystal are matched. Take in the direction just rotated.
  • the longitudinal direction of the leg after rotation is the Y axis
  • the thickness direction is the Z 'axis.
  • Angle 0 is preferably in the range of 25 ° to 45 °. The range of this angle 0 was obtained as follows.
  • the crystal is a single crystal belonging to the trigonal system consisting of a S i O 2 different Has anisotropy.
  • the elastic constant depends on the direction and is expressed as a tensor.
  • the temperature dependence differs for each component of the tensor. For this reason, the resonance frequency of a vibrator made of quartz varies depending on the direction with respect to the crystal axis, and the temperature dependence also changes with the direction.
  • FIG. 2 is a graph showing the temperature dependence of the resonance frequency at the angle 0 of the torsional vibrator according to the present invention.
  • the resonance frequency f changes with temperature (horizontal axis), and reaches the maximum frequency f.
  • the ratio of the frequency change with respect to (f 1 f) / f Q (vertical axis) is a quadratic curve that is convex upward.
  • the secondary temperature coefficient of the torsional vibrator of the present invention is about 1.1 X 10 ⁇ a 2 ppm / ° C 2, the secondary temperature coefficient of a conventional 2 Ashionsa type flexural resonator explained in FIG. 5 (about -.
  • the temperature indicating the maximum frequency f Q is called the peak temperature. If the peak temperature 5 is near the middle of the operating temperature range, the width of the change in the resonance frequency becomes smaller, so it is necessary to select such an angle 0.
  • the peak temperature 5 varies not only with the angle ⁇ but also with the ratio of the leg width W to the thickness D.
  • Figure 3 is a graph showing how the angle 0 at which the vertex temperature reaches 25 ° C changes depending on the side ratio WZD.
  • a practical range in consideration of the balance of the strength and size of the oscillator is a side ratio W / D of 1 to 3.
  • the angle 0 at which the peak temperature 5 becomes near room temperature is 25 ° to 45 °, and it is preferable that the side ratio WZD is 1 to 3.
  • Figure 8 is a graph showing the dependence of the etching rate of quartz on angle 0.
  • the preferred value of the angle 0 according to the present invention is obtained for the following reasons. That is, the torsional vibrator of the present embodiment is manufactured by etching with a mixed solution of hydrofluoric acid and ammonium fluoride. Etching is water The etching rate varies as shown in the figure, depending on the crystal orientation, and also at an angle of 0. That is, the smaller the angle 0, the better the etching performance (etching rate).
  • the angle 0 is larger than that of the two-leg tuning fork vibrator used in the conventional bending vibration mode shown in FIG. 16, so that the etching time needs to be 3 to 4 times. Become.
  • the side ratio WZD is large, it is necessary to increase the angle 0 at which the vertex temperature is near room temperature, but if the angle 0 is increased as shown in Fig. 8, the etching rate decreases. .
  • the frequency in this case was 262 kHz.
  • FIG. 4 is a diagram showing an electrode structure of a torsional vibrator according to one embodiment of the present invention. Electrodes 7 (hatched portions) are provided on each surface of each leg 3. A frequency adjusting electrode 9 is provided at the tip of each leg 3. The resonance frequency is adjusted by changing the mass of the leg by trimming the frequency adjusting electrode 9 with a laser or the like.
  • FIG. 5 is a diagram showing electrodes and wirings of the torsional vibrator according to the present invention.
  • electrodes 7 are arranged on the front and back surfaces and both side surfaces of three legs 3 shown in cross section, and each electrode is wired as shown.
  • the electrode 7 is wired on each surface of the leg 3 so that the opposing electrodes have the same potential.
  • the electrodes (a, b) on the sides of the center leg are at the same potential as the electrodes (g, h and k, 1) on the front and back surfaces of the legs located at both ends.
  • the electrodes (c, d) on the back side are wired so as to have the same potential as the electrodes (e, f and i, j) on the side surfaces of the legs located at both ends.
  • FIG. 6 is an explanatory diagram showing an applied electric field of the torsional vibrator according to the present invention.
  • the figure schematically shows an electric field 11 applied by the electrode 7 of the present embodiment.
  • an electric field 11 is generated inside the leg 3 in the X and Z directions.
  • the electric field 11 is point-symmetric with respect to the center of the cross section of the leg 3.
  • the directions of the electric field 11 are opposite to each other with respect to the center in the X component and the Z ′ component.When the electric field component in the X direction is toward the center, the electric field component in the Z ′ direction is opposite to the center. Acts on
  • FIG. 7 is a graph showing the change in the piezoelectric constant of quartz with an angle of 0.
  • the piezoelectric constant (vertical axis) utilized in torsional vibrator according to the present embodiment, e '1 is 4 and e, 3 6.
  • the piezoelectric constants e and 14 are constants that relate the electric field in the X direction to the shear strain (shear strain) in the Y, 100 'plane.
  • the number e '36 is a constant that relates Z, the direction of the electric field and X- Y, and shear strain in the plane.
  • an electric field that is point-symmetric with respect to the center of the leg cross section is generated in the X direction and the Z ′ direction, so that the piezoelectric transfer constants e, 14 and e ′ 36 It can oscillate torsional vibration.
  • the values of the piezoelectric constants e ′ 14 and e ′ 36 change as shown in FIG. 7 depending on the angle 0, but within the preferable range of the angle 0 (that is, the range of 25 ° to 45 °). It can be seen that they have the same sign, can oscillate without contradiction, and are large enough to drive.
  • FIG. 9 is an explanatory diagram illustrating the movement of the legs of the torsional vibrator according to the present invention.
  • the torsional vibrator of the present embodiment oscillates in another vibration mode ifi in which the center leg 3 and the legs 3 at both ends twist in opposite phases as shown in Fig. 9. I found that there was. The results of the experiment, the oscillation was found to be due to in-plane secondary vibration by the action of the piezoelectric constant e 12.
  • FIG. 10 is an explanatory diagram for explaining a leg motion due to in-plane secondary vibration in a three-leg tuning fork.
  • the in-plane secondary vibration is a vibration in which the center of each leg expands (becomes a belly) as shown in the figure, and the center leg and the legs at both ends vibrate in opposite phases.
  • FIG. 11 is a diagram showing an equivalent circuit of a crystal resonator.
  • the equivalent circuit of a crystal unit has an equivalent series inductance of 1 ⁇ and an equivalent series capacitance as shown in the figure. It can be represented by a circuit in which the equivalent parallel capacitance C Q is added to the series circuit composed of the equivalent series resistance Ri.
  • C Q the equivalent parallel capacitance
  • Ri the equivalent series resistance
  • the inventor of the present application states that since the required distortion of torsional vibration is the maximum at the root of each leg, using the difference in distortion of in-plane secondary vibration depending on the location increases only the equivalent series resistance of in-plane secondary vibration. By doing so, we focused on the fact that oscillation can be made difficult. .
  • FIG. 12 is a graph showing the relationship between the electrode length and the equivalent series resistance of the torsional vibrator according to the present invention. This graph was obtained as a result of various experiments. As shown in the figure, while the equivalent series resistance of torsional vibration hardly changes with the electrode length and the Z-leg length (see the solid line), the in-plane secondary vibration Has a large change in equivalent series resistance (see dotted line). For example, when the electrode length and the total length of the z-leg are 0.5 times or less, the equivalent series resistance of the in-plane secondary vibration is preferably 10 times or more the equivalent series resistance of the torsional vibration.
  • the equivalent series resistance of the in-plane secondary vibration will be 20 times or more the equivalent series resistance of torsional vibration. Even if the equivalent series resistance of the vibration changes about twice, the equivalent series resistance of the in-plane secondary vibration becomes 10 times or more, and a sufficient margin can be obtained, which is more preferable.
  • Fig. 13 is an explanatory diagram for explaining the movement of the leg due to in-plane primary vibration in a three-leg tuning fork.
  • the torsional vibrator of the present embodiment self-excited oscillation of in-plane primary vibration, which was a problem in the two-leg tuning fork, was not observed.
  • the equivalent series resistance of the primary vibration in the plane where each leg performs bending primary vibration in the plane was 100 k ⁇ or more, and there was no danger of self-excited oscillation. This is because the in-plane primary vibration of the tripod tuning fork is accompanied by leakage vibration of the base 1.
  • the left and right legs 3 move in opposite directions, so that symmetry is good and the center line becomes a node, so that supporting the center of the base almost does not cause leakage vibration.
  • the in-plane primary vibration of a three-leg tuning fork has poor symmetry because the legs 3 at both ends and the center leg 3 bend and vibrate in opposite phases. For this reason, unless the widths of the legs 3 at both ends and the center leg 3 are changed, leakage vibration to the base 1 occurs.
  • the resonance frequency is determined by the cross-sectional shape and length of the leg. Therefore, in a three-legged tuning fork torsional vibrator, each leg must have approximately the same cross-sectional shape, so that in-plane primary vibration involves leakage vibration.
  • FIG. 14 is a diagram showing an oscillation circuit for causing the torsional vibrator according to the present invention to self-oscillate.
  • the torsional vibrator according to the present embodiment is based on the idea that unnecessary sub-vibrations are generated by modifying the characteristics of the vibrator itself (three-leg structure) and the electrode structure (electrode and t electrode length and potential on each surface).
  • the oscillation circuit can be easily realized by a simple circuit configuration in which the resistor 13 and the inverter 17 are connected in parallel to the oscillator 13 as shown in the figure.
  • the equivalent series resistance of the torsional vibrator of this embodiment is about 1 to 5.
  • the equivalent series resistance of a conventional torsional vibrator using parallel electrodes is about 30 to 50, which is about 1/10.
  • the reason for this is that the provision of the electrodes on each side of the leg as in the present embodiment allows an electric field to be more effectively applied to the inside of the leg than to arrange the electrodes in parallel on a plane.
  • the torsional vibrator of the present invention has good temperature characteristics, is simple in shape, is easy to cut out a quartz plate by a single rotation, is easy to manufacture, and has a simple oscillation circuit. This has the effect that the equivalent series resistance can be reduced, and a low power consumption torsional vibrator can be obtained. Therefore, it has extremely high industrial applicability as a reference signal source for clocks and mobile communication devices.

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

Dispositif produisant des vibrations de torsion et comprenant une base et trois montants s'étendant depuis cette base, les vibrations de torsion de deux montants sur trois présentant des extrémités opposées étant réciproquement en phase, la vibration de torsion d'un montant central et celles des deux montants à extrémités opposés étant réciproquement en phase contraire. Chacun de ces trois montants possède des électrodes sur ses surfaces respectives et les électrodes des surfaces opposées de chaque montant sont câblées de manière à conserver le même potentiel. Plus particulièrement, les électrodes des surfaces latérales du montant central et les électrodes des surfaces avant et arrière des deux montants présentant des extrémités opposées, sont câblées afin de conserver le même potentiel et les électrodes des surfaces avant et arrière du montant central et les électrodes des surfaces latérales des deux montants présentant des extrémités opposées sont câblées afin de conserver le même potentiel. La longueur d'une électrode représente 0,5 fois maximum la longueur totale L d'un montant s'étendant depuis sa base jusqu'à son extrémité. L'orientation d'un quartz coïncide avec son sens de réglage après la mise en rotation de ce quartz sur son axe X sur un angle de rotation Υ, 25° ≤ Υ ≤ 45°, tandis que le sens de la largeur de la base coïncide avec l'axe X des axes des cristaux du quartz et que le sens de la longueur et de la largeur d'un montant coïncide respectivement avec l'axe Y et l'axe Z des axes des cristaux du quartz.
PCT/JP2001/008588 2000-10-10 2001-09-28 Dispositif produisant des vibrations de torsion WO2002031975A1 (fr)

Applications Claiming Priority (2)

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JP2000-308717 2000-10-10
JP2000308717A JP2002118441A (ja) 2000-10-10 2000-10-10 捩り振動子

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4525061B2 (ja) * 2003-12-08 2010-08-18 セイコーエプソン株式会社 水晶ランバード原石及び水晶板の製造方法、並びに水晶ランバード原石
JP5864189B2 (ja) * 2011-09-30 2016-02-17 シチズンファインデバイス株式会社 圧電振動子およびその製造方法
JP2013078046A (ja) * 2011-09-30 2013-04-25 Citizen Finetech Miyota Co Ltd 圧電振動子の製造方法、および圧電振動子
JP5785470B2 (ja) * 2011-09-30 2015-09-30 シチズンファインデバイス株式会社 圧電振動子の製造方法
JP2013078045A (ja) * 2011-09-30 2013-04-25 Citizen Finetech Miyota Co Ltd 圧電振動子およびその製造方法
JP2013192013A (ja) * 2012-03-13 2013-09-26 Seiko Epson Corp 振動素子、振動デバイスおよび電子機器
JP6100582B2 (ja) * 2013-03-29 2017-03-22 シチズンファインデバイス株式会社 捩り振動子

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JPS538590A (en) * 1976-07-12 1978-01-26 Seiko Instr & Electronics Ltd Crystal resonator
JPS5630312A (en) * 1979-08-21 1981-03-26 Citizen Watch Co Ltd Length longitudinal oscillator
JPS56158520A (en) * 1980-05-12 1981-12-07 Seiko Instr & Electronics Ltd Oscillator
JPS62231506A (ja) * 1986-03-31 1987-10-12 Miyota Seimitsu Kk １ＭＨｚ帯の長さたて振動子の支持構造
JPS6364925B2 (fr) * 1980-01-22 1988-12-14
JPS6365243B2 (fr) * 1982-03-02 1988-12-15
JPH0150133B2 (fr) * 1981-05-07 1989-10-27 Citizen Watch Co Ltd
JPH0150135B2 (fr) * 1981-12-25 1989-10-27 Citizen Watch Co Ltd
JPH0150134B2 (fr) * 1981-05-26 1989-10-27 Citizen Watch Co Ltd
JPH0150132B2 (fr) * 1981-04-17 1989-10-27 Citizen Watch Co Ltd
JPH0338770B2 (fr) * 1982-01-08 1991-06-11 Citizen Watch Co Ltd
JPH0538483B2 (fr) * 1984-05-17 1993-06-10
JP6066631B2 (ja) * 2012-08-31 2017-01-25 三菱重工業株式会社 伝熱管の隙間拡張治具及び振動抑制部材の配設方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS538590A (en) * 1976-07-12 1978-01-26 Seiko Instr & Electronics Ltd Crystal resonator
JPS5630312A (en) * 1979-08-21 1981-03-26 Citizen Watch Co Ltd Length longitudinal oscillator
JPS6364925B2 (fr) * 1980-01-22 1988-12-14
JPS56158520A (en) * 1980-05-12 1981-12-07 Seiko Instr & Electronics Ltd Oscillator
JPH0150132B2 (fr) * 1981-04-17 1989-10-27 Citizen Watch Co Ltd
JPH0150133B2 (fr) * 1981-05-07 1989-10-27 Citizen Watch Co Ltd
JPH0150134B2 (fr) * 1981-05-26 1989-10-27 Citizen Watch Co Ltd
JPH0150135B2 (fr) * 1981-12-25 1989-10-27 Citizen Watch Co Ltd
JPH0338770B2 (fr) * 1982-01-08 1991-06-11 Citizen Watch Co Ltd
JPS6365243B2 (fr) * 1982-03-02 1988-12-15
JPH0538483B2 (fr) * 1984-05-17 1993-06-10
JPS62231506A (ja) * 1986-03-31 1987-10-12 Miyota Seimitsu Kk １ＭＨｚ帯の長さたて振動子の支持構造
JP6066631B2 (ja) * 2012-08-31 2017-01-25 三菱重工業株式会社 伝熱管の隙間拡張治具及び振動抑制部材の配設方法

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