WO1997005464A1 - Prüfbarer membransensor mit zwei vollbrücken - Google Patents
Prüfbarer membransensor mit zwei vollbrücken Download PDFInfo
- Publication number
- WO1997005464A1 WO1997005464A1 PCT/DE1996/001211 DE9601211W WO9705464A1 WO 1997005464 A1 WO1997005464 A1 WO 1997005464A1 DE 9601211 W DE9601211 W DE 9601211W WO 9705464 A1 WO9705464 A1 WO 9705464A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- bridge
- measuring
- sensor
- membrane
- resistance
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
- B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
- B60T8/17—Using electrical or electronic regulation means to control braking
- B60T8/171—Detecting parameters used in the regulation; Measuring values used in the regulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R17/00—Measuring arrangements involving comparison with a reference value, e.g. bridge
- G01R17/10—AC or DC measuring bridges
- G01R17/105—AC or DC measuring bridges for measuring impedance or resistance
Definitions
- the invention relates to a sensor, in particular a pressure sensor according to the preamble of the main claim.
- Pressure sensors are known, for example, in which thin-film resistance measuring bridges for measuring absolute pressures or pressure changes, in particular in hydraulic systems, are arranged on a measuring membrane. Movements of the measuring membrane due to pressure fluctuations lead here to changes in resistance in the respective thin-film resistors due to compression or stretching of the generally meandering resistance tracks.
- the thin-film resistors are connected in a known manner to form a Wheat ⁇ ton measuring bridge, the assignment of the thin-film resistors to the bridge branches or to the areas on the pressure sensor membrane being chosen such that the opposing resistances change in the same sense and a bridge diagonal voltage is al Sensor signal is measurable.
- an accurate output signal corresponding to the pressure of the brake hydraulics must be highly reliable and, if possible, also fail-safe.
- sensors are required, the proper functioning of which must also be continuously verifiable. Further applications are monitoring functions in pneumatic systems and in injection systems for the fuel supply in motor vehicles.
- the resistances of the measuring bridge which change in the same direction, are preferably located on the pressure measuring membrane at locations with the same mechanical properties with regard to tensile / compressive strain (either in the middle or on Edge of the pressure measuring membrane) and are therefore loaded equally; their deviations behave accordingly. Plastic deformations of the pressure measuring membrane also show the same, undetectable signal errors. Another known possibility of recognizing such errors is to compare the individual resistances, which are repeated at certain intervals, with a stable reference resistor.
- the reference resistor which is stable over the entire service life, can be connected in parallel to a bridge resistor and can therefore be used to monitor changes in the bridge output signal.
- the known sensors with the special monitoring mechanisms have the particular disadvantage that there must be a constant switch between the test / monitoring module and the pressure sensor, since the dynamics of the sensor are greatly reduced since the reference measurement takes time. Furthermore, demands for reliability and redundancy cannot be met in this way.
- the sensor according to the invention of the type specified at the outset is particularly advantageous with the characterizing features of claim 1 in that, by arranging two mutually independent resistance measuring bridges on each membrane half, a check of the functionality of the sensor during operation without particular reference measurements can be done. In addition, the availability of the sensor increases, since even if one of the resistance measuring bridges fails, an emergency operation of the system with the other measuring bridge is guaranteed.
- the thin-film resistors of at least one of the two resistance measuring bridges are arranged on the measuring membrane such that radial expansions / compressions of the measuring membrane lead to an increase or decrease in resistance.
- the thin-film resistances opposite each other in the bridge are arranged on the measuring membrane in such a way that a tangential strain is detected in the edge area of the membrane and this leads to an increase in resistance.
- the two measuring bridges behave differently over the service life with regard to the bridge diagonal signal according to the above-described embodiment, since the thin-film resistances for detecting the tangential expansion detect a different membrane movement than the radial expansion or compression, a simple comparison can be made by comparing the two bridge signals Functional check done. Plastic deformations of the pressure measuring membrane can also be clearly identified in the bridge offset, since the two bridge diagonal signals thereby drift clearly apart. Signs of aging as well as mechanical or physical-chemical effects influence the sensitivity of the two bridges differently, so that they can be identified by comparison.
- FIG. 1 shows a plan view of a measuring membrane of a pressure sensor
- FIG. 2 shows an electrical circuit diagram of the right measuring bridge
- FIG. 3 shows an electrical circuit diagram of the left measuring bridge
- FIG. 4 shows a detailed image of a thin-film resistor
- Figure 5 is a diagram of the mechanical stresses / strains on the measuring membrane.
- FIG. 1 shows a sensor 1 which serves as a pressure sensor for detecting the pressure conditions in the brake hydraulics of a motor vehicle.
- the sensor 1 contains a measuring membrane 2 (for example made of metal) on which thin-film resistors R1, R2, R3 and R4 (for example made of polycrystalline silicon) are applied to each of two sensor halves 3 and 4.
- the thin-film resistors R1 to R4 are contacted on the measuring membrane 2 at points 5 and for the external connection, the points 5 are each brought into contact pads 6. This is shown in FIG. 1 for the sake of a better overview only because of the resistance R1 of the right sensor half 4, for example.
- FIG. 2 and FIG. 3 show the electrical equivalent circuit diagrams of the resistors R1 to R4 on the sensor half 3 (FIG. 2) and the sensor half 4 (FIG. 3), which each form a Wheatstone measuring bridge 7 and 8, respectively.
- the sensor diagonal voltages Um1 (FIG. 2) by Umr (FIG. 3) are available for the sensor output signal.
- FIG. 4 shows an exemplary embodiment of one of the thin-film resistors R1 to R4, in which the meandering structure of resistance paths 9 between points 5 can be seen.
- the resistors R1 to R4 experience a change in their resistance value (+ ⁇ R) with an elongation (+ ⁇ l) in the direction shown.
- a different geometrical structure can also be selected to achieve the same measurement effect.
- FIG. 5 shows a diagram of the courses of the mechanical stresses ⁇ caused by pressure changes and the resulting strains or compressions ⁇ in radially different areas of the measuring membrane 2. An explanation of this diagram is given using the description of the exemplary embodiment, in particular with reference to FIGS. 1 to 3.
- the bridge resistors R1 and R4 of the right sensor half 4 are located in the edge area of the measuring membrane 2 near the mechanical fastening and the bridge resistors R2 and R3 are located in the center of the measuring membrane 2.
- the bridge resistances R2 and R3 in the center of the measuring membrane 2 to expand in the same direction due to the radial mechanical stress, which leads to an increase in their resistance values (+ ⁇ R).
- the bridge resistors R2 and R4 in the edge area compression occurs due to the opposite curvature in the fastening area of the measuring membrane 2. Also due to the radial mechanical stress, this leads to a reduction in the resistance values (- ⁇ R) the bridge resistors Rl and R4.
- the resulting detuning of the measuring bridge 8 can be evaluated via the changed bridge diagonal voltage Umr.
- the bridge resistances R1 and R4 are arranged identically to the corresponding bridge resistances R1 and R4 in the right half of the sensor 4 and therefore also experience the same changes in resistance.
- the bridge resistances R2 and R3 of the measuring bridge 7 are also arranged in the edge region of the pressure measuring membrane 2 in such a way that a tangential expansion effect of the membrane surface due to the mechanical tension is evaluated here.
- the meandering resistance tracks 9 of the resistors R2 and R3 also experience an increase in resistance (+ ⁇ R) due to expansion, but the mechanical interactions between a pressure change (+ ⁇ p) and the detuning of the bridge diagonal voltage Uml are lower different from the interactions on the right sensor half 4.
- the bridge resistances R2 and R3 of the left-hand measuring bridge 7 also lie in a region of the measuring membrane 2 that is relatively free from mechanical stress, so that the reliability of the left-hand measuring bridge 7 is very high and the emergency running properties of the sensor 1 are also improved.
- the diagram according to FIG. 5 shows schematically some typical courses of the mechanical stress ⁇ over the radius of the measuring membrane 2 and the resulting expansions / compressions ⁇ on the bridge resistances R1 to R4.
- Curve 10 shows the course of the radially acting tension ⁇ r and curve 11 shows the course of the tangentially acting tension ⁇ t.
- Curve 12 represents the course of radial expansion ⁇ r and curve 13 represents the course of tangential expansion ⁇ t with reference to the right vertical coordinate axis.
- the tangential stress ⁇ t (curve 11) and the resulting elongation ⁇ t are essentially flatter and therefore have another dependency on the pressure change ⁇ p.
- the bridge resistances R2 and R3 of the left sensor half 3 can be placed in an area of the measuring membrane 2 in which a strain comparable to that of the bridge resistances R2 and R3 right sensor half 4 is detected.
- the cheapest arrangement possibilities of the bridge branches are indicated in the diagram according to FIG. 5 by small circles, which are approximately symmetrical (+ ⁇ l; - ⁇ l) to the zero point of the expansion-compression axis ⁇ .
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transportation (AREA)
- Mechanical Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/806,256 US6289738B1 (en) | 1995-07-28 | 1996-07-06 | Testable membrane sensor with two full bridges |
EP96922746A EP0783677A1 (de) | 1995-07-28 | 1996-07-06 | Prüfbarer membransensor mit zwei vollbrücken |
JP9507077A JPH10506718A (ja) | 1995-07-28 | 1996-07-06 | センサ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19527687A DE19527687A1 (de) | 1995-07-28 | 1995-07-28 | Sensor |
DE19527687.6 | 1995-07-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1997005464A1 true WO1997005464A1 (de) | 1997-02-13 |
Family
ID=7768066
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE1996/001211 WO1997005464A1 (de) | 1995-07-28 | 1996-07-06 | Prüfbarer membransensor mit zwei vollbrücken |
Country Status (5)
Country | Link |
---|---|
US (1) | US6289738B1 (de) |
EP (1) | EP0783677A1 (de) |
JP (1) | JPH10506718A (de) |
DE (1) | DE19527687A1 (de) |
WO (1) | WO1997005464A1 (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1087219A2 (de) * | 1999-09-24 | 2001-03-28 | Denso Corporation | System zum Bestimmen von Fehlern oder Abnormalitäten eines Messfühlers, eingebaut in ein Gerät zur Messung einer physikalischen oder dynamischen Grösse |
EP1110067A2 (de) * | 1998-08-21 | 2001-06-27 | Motorola, Inc. | Sensor mit Membran und einer Vielzahl von anschaltbaren Wandlern, um den Rand zu treffen |
US6658948B2 (en) | 2001-01-31 | 2003-12-09 | Denso Corporation | Semiconductor dynamic quantity sensor |
DE10131229B4 (de) * | 2000-06-28 | 2009-05-14 | Denso Corp., Kariya-shi | Eine physikalische Größe erfassender Sensor |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT405524B (de) * | 1996-03-05 | 1999-09-27 | Voest Alpine Ind Anlagen | Verfahren zur herstellung von flüssigem roheisen oder flüssigen stahlvorprodukten und metallschwamm |
JP4438193B2 (ja) * | 1999-09-24 | 2010-03-24 | 株式会社デンソー | 圧力センサ |
JP4062858B2 (ja) * | 2000-04-27 | 2008-03-19 | 株式会社デンソー | 圧力センサ |
JP2002298279A (ja) * | 2001-01-26 | 2002-10-11 | Texas Instruments Inc | 状態応答検出システムおよび方法 |
DE102004013073A1 (de) * | 2004-03-11 | 2005-09-29 | Ab Elektronik Sachsen Gmbh | Verfahren zur Herstellung von Druckmesselementen und Druckmesselemente |
FR2883372B1 (fr) * | 2005-03-17 | 2007-06-29 | Commissariat Energie Atomique | Dispositif de mesure de force par detection resistive a double pont de wheastone |
JP2008039760A (ja) * | 2006-07-14 | 2008-02-21 | Denso Corp | 圧力センサ |
DE102008041772A1 (de) | 2008-09-02 | 2010-03-04 | Tecsis Gmbh | DFS 1 - Messvorrichtung mit Erfassung von Deformationen |
DE102008041771B4 (de) | 2008-09-02 | 2018-05-03 | Tecsis Gmbh | Messvorrichtung mit verstimmbarem Widerstand |
CN202158916U (zh) * | 2009-09-30 | 2012-03-07 | 泰科思有限责任公司 | 用于检测形变的测量装置 |
DE102010042536B4 (de) * | 2010-10-15 | 2020-07-16 | Ifm Electronic Gmbh | Diagnosefähige resistive Druckmesszelle |
DE102010035862B4 (de) * | 2010-08-30 | 2013-01-03 | Ifm Electronic Gmbh | Diagnosefähige resistive Druckmesszelle |
US20130118264A1 (en) | 2010-08-30 | 2013-05-16 | Ifm Electronic Gmbh | Resistive pressure measuring cell having diagnostic capabilities |
DE102011084972B4 (de) * | 2010-11-04 | 2015-07-16 | Ifm Electronic Gmbh | Verfahren zur Korrektur von Messwerten einer Druckmesszelle, deren Membran durch eine erhöhte Druckbelastung eine plastische Verformung erfahren hat |
DE102011080229B4 (de) | 2011-08-01 | 2017-07-27 | Ifm Electronic Gmbh | Verfahren zur Überprüfung der Funktion eines Drucksensors |
US9714876B2 (en) * | 2015-03-26 | 2017-07-25 | Sensata Technologies, Inc. | Semiconductor strain gauge |
JP7114032B2 (ja) * | 2018-09-26 | 2022-08-08 | ユニパルス株式会社 | 荷重変換器 |
US11092504B2 (en) | 2019-05-21 | 2021-08-17 | Rosemount Aerospace Inc. | Micromechanical redundant piezoresistive array pressure sensor |
FR3098298B1 (fr) * | 2019-07-03 | 2021-07-16 | Arianegroup Sas | Capteur de pression double |
JP7294009B2 (ja) * | 2019-09-09 | 2023-06-20 | Tdk株式会社 | 圧力センサ |
US11885704B2 (en) | 2020-07-27 | 2024-01-30 | Precision Biomems Corporation | Flexible two-dimensional sheet array of electronic sensor devices |
US11650110B2 (en) * | 2020-11-04 | 2023-05-16 | Honeywell International Inc. | Rosette piezo-resistive gauge circuit for thermally compensated measurement of full stress tensor |
CN114323354B (zh) * | 2021-12-08 | 2023-11-03 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | 压力变送器的补偿方法、装置和计算机设备 |
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US4528855A (en) * | 1984-07-02 | 1985-07-16 | Itt Corporation | Integral differential and static pressure transducer |
US4565097A (en) * | 1984-05-09 | 1986-01-21 | Mark Telephone Products, Inc. | Method and apparatus for transducer error cancellation |
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EP0650033A1 (de) * | 1993-10-20 | 1995-04-26 | Robert Bosch Gmbh | Verfahren und Vorrichtung zur Funktionsüberwachung eines Sensors |
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US3358511A (en) * | 1965-10-05 | 1967-12-19 | Electro Optical Systems Inc | Computing transducer system |
JPS59217375A (ja) * | 1983-05-26 | 1984-12-07 | Toyota Central Res & Dev Lab Inc | 半導体機械−電気変換装置 |
DE3538091A1 (de) * | 1985-10-25 | 1987-04-30 | Npsk Poluprovodnikova Technika | Einrichtung fuer die koordinatenpositionierung |
DE4000326C2 (de) * | 1990-01-08 | 1995-12-14 | Mannesmann Ag | Drucksensor |
JPH0582805A (ja) * | 1991-09-19 | 1993-04-02 | Mitsubishi Electric Corp | 半導体圧力検出装置の圧力検出用チツプ |
US5291788A (en) * | 1991-09-24 | 1994-03-08 | Kabushiki Kaisha Toshiba | Semiconductor pressure sensor |
JP2816635B2 (ja) * | 1993-01-14 | 1998-10-27 | 株式会社山武 | 半導体圧力センサ |
-
1995
- 1995-07-28 DE DE19527687A patent/DE19527687A1/de not_active Ceased
-
1996
- 1996-07-06 WO PCT/DE1996/001211 patent/WO1997005464A1/de not_active Application Discontinuation
- 1996-07-06 JP JP9507077A patent/JPH10506718A/ja active Pending
- 1996-07-06 US US08/806,256 patent/US6289738B1/en not_active Expired - Fee Related
- 1996-07-06 EP EP96922746A patent/EP0783677A1/de not_active Ceased
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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US4565097A (en) * | 1984-05-09 | 1986-01-21 | Mark Telephone Products, Inc. | Method and apparatus for transducer error cancellation |
US4528855A (en) * | 1984-07-02 | 1985-07-16 | Itt Corporation | Integral differential and static pressure transducer |
DE3705901A1 (de) * | 1987-02-24 | 1988-09-01 | Siemens Ag | Druckmesswandler |
JPH0337503A (ja) * | 1989-07-03 | 1991-02-18 | Kayaba Ind Co Ltd | 歪ゲージ |
JPH0337537A (ja) * | 1989-07-04 | 1991-02-18 | Kayaba Ind Co Ltd | 圧力センサ |
JPH0342539A (ja) * | 1989-07-11 | 1991-02-22 | Kayaba Ind Co Ltd | 圧力センサ |
JPH0472772A (ja) * | 1990-07-13 | 1992-03-06 | Mitsubishi Electric Corp | 半導体圧力センサ |
WO1994029685A1 (en) * | 1993-06-03 | 1994-12-22 | Kavlico Corporation | Sensitive resistive pressure transducer |
EP0650033A1 (de) * | 1993-10-20 | 1995-04-26 | Robert Bosch Gmbh | Verfahren und Vorrichtung zur Funktionsüberwachung eines Sensors |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1110067A2 (de) * | 1998-08-21 | 2001-06-27 | Motorola, Inc. | Sensor mit Membran und einer Vielzahl von anschaltbaren Wandlern, um den Rand zu treffen |
EP1110067A4 (de) * | 1998-08-21 | 2001-10-24 | Motorola Inc | Drucksensor und herstellungsverfahren desselben |
EP1087219A2 (de) * | 1999-09-24 | 2001-03-28 | Denso Corporation | System zum Bestimmen von Fehlern oder Abnormalitäten eines Messfühlers, eingebaut in ein Gerät zur Messung einer physikalischen oder dynamischen Grösse |
EP1087219A3 (de) * | 1999-09-24 | 2002-03-13 | Denso Corporation | System zum Bestimmen von Fehlern oder Abnormalitäten eines Messfühlers, eingebaut in ein Gerät zur Messung einer physikalischen oder dynamischen Grösse |
US6422088B1 (en) | 1999-09-24 | 2002-07-23 | Denso Corporation | Sensor failure or abnormality detecting system incorporated in a physical or dynamic quantity detecting apparatus |
EP2275792A1 (de) | 1999-09-24 | 2011-01-19 | Denso Corporation | System zum Bestimmen von Fehlern oder Abnormalitäten eines Messfühlers, eingebaut in ein Gerät zur Messung einer physikalischen oder dynamischen Grösse |
DE10131229B4 (de) * | 2000-06-28 | 2009-05-14 | Denso Corp., Kariya-shi | Eine physikalische Größe erfassender Sensor |
US6658948B2 (en) | 2001-01-31 | 2003-12-09 | Denso Corporation | Semiconductor dynamic quantity sensor |
Also Published As
Publication number | Publication date |
---|---|
US6289738B1 (en) | 2001-09-18 |
EP0783677A1 (de) | 1997-07-16 |
DE19527687A1 (de) | 1997-01-30 |
JPH10506718A (ja) | 1998-06-30 |
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