WO1995002143A1 - Soupape de regulation de courants fluidiques comportant un element de regulation realise dans un materiau a memoire de forme chauffable electriquement - Google Patents

Soupape de regulation de courants fluidiques comportant un element de regulation realise dans un materiau a memoire de forme chauffable electriquement

Info

Publication number
WO1995002143A1
WO1995002143A1 PCT/EP1994/001687 EP9401687W WO9502143A1 WO 1995002143 A1 WO1995002143 A1 WO 1995002143A1 EP 9401687 W EP9401687 W EP 9401687W WO 9502143 A1 WO9502143 A1 WO 9502143A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
thread
sma
flow
channel
Prior art date
Application number
PCT/EP1994/001687
Other languages
German (de)
English (en)
Inventor
Günter Voss
Original Assignee
Leybold Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Aktiengesellschaft filed Critical Leybold Aktiengesellschaft
Priority to EP94918786A priority Critical patent/EP0707693A1/fr
Priority to JP7503776A priority patent/JPH08512387A/ja
Publication of WO1995002143A1 publication Critical patent/WO1995002143A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/002—Actuating devices; Operating means; Releasing devices actuated by temperature variation

Definitions

  • Valve for regulating fluid flows with an actuator made of electrically heatable, completely clean material
  • the invention relates to valves for regulating fluid flows with an actuator made of electrically heatable, ge staltseri nne rndem material, which has a closure element against the back L l force of a spring according to a temperature-dependent change in length its position relative to the valve seat.
  • a compressed air valve L for robot controls is known from the German magazine Management Congress Congress 8/88, page 59 "Tech-Highlights". This valve is characterized by an extremely small size, simple construction and fast switching 11 mpu l s e. It replaces previously used electromagnetic valves which, on the contrary, are large and expensive, their magnets being often a source of interference for sensors and for sensitive microelectronic circuits.
  • the new, extremely small valves use memory metals as an active element.
  • the well-known compressed air valve has a memory metal lsti ft, which is connected to the valve tip, which is held in the closed position by a compression spring.
  • the memory metal pen is integrated in an electrical circuit. When there is no current flowing, the spring keeps the valve closed, the memory metal keeping its comparatively longer geometric shape in the state of low temperature. When heated with electricity, it converts to its second high pressure temperature form and becomes shorter. The spring force is overcome and the valve opened.
  • the known version of the valve is a pure control element with opening or
  • a sensor for measuring and analysis devices is known from EP-A1-0 391 018. It is a sensor element in which the size to be measured has a direct or indirect influence on the condition of the material of the sensor element.
  • the sensor element is made of a material called Gesta Itseri and is heatable in such a way that its operating temperature can be adjusted to a temperature in the range of the structural phase transition of its material.
  • Characteristic of the function of the known measuring and analysis device is that the temperature of the sensor is kept constant with the aid of a controllable heating current, the voltage applied to the wire, the heating current or the heating power, being used as a measured variable.
  • the size to be measured has an influence on the temperature of the transition in the area of the phase structure
  • the low temperature eme phature phase into the high temperature phase with the help of a material that keeps the heat from the air, i.e. the heating current is adjusted to a change in temperature of the material.
  • a direct control of fluid flows is not possible with the known measuring and analysis device, but would require the arrangement of an additional e rect to see romechani or electromagnetic control lung organ for the fluid flow, which would then have to be controlled by the known measuring and ana lysis device. Such an arrangement is complex, prone to failure and therefore unsatisfactory.
  • the invention is therefore based on the object of specifying a valve for regulating fluid flows with an actuator made of electrically heatable gesta Ltseri material of the type mentioned, which can be used for direct control, in particular in the sense of constant maintenance of a predetermined state of a fluid flow passed through and moreover uncomplicated in construction and extremely small.
  • the valve is suitable for direct control of a fluid flow, which is regulated within a comparatively narrow equilibrium range of its state, for example in a constant pressure range, a constant flow range or a constant gas mixture range or also in a constant temperature range.
  • valve has channels or connections which receive the SMA thread, conduct the fluid streams to be regulated and serve to heat exchange between the SMA thread and the fluid streams.
  • valve and its systematic valve variants have in common is that the contraction or elongation of a material made of steel is used to actuate the closing mechanism.
  • Another common feature in the arrangement of the valve or its valve variants is that a change in the length of its actuator caused by a change in a fluid flow in the area of the phase transition results in an immediate change in the conductance or the flow rate of the fluid through the valve, so that this conductance is a monotonous function of the temperature-related length of the actuator. All parameters occurring during operation are responsible for the temperature of the wire, which can influence the heat balance of the system. For example: - temperature T of the fluid
  • the conductivity of the valve is a function of one or more of these quantities.
  • the process medium compensates for the effects of the above-mentioned variables directly through the process medium through the operating mode or constructive measures.
  • a special design of the valve can ensure that the pressure comes into contact with the wire, but not the flow flowing through the valve, and vice versa.
  • the design can vary so that ' the contracting thread causes either a closure or an opening of the valve.
  • valve design can be designed as a pressure control element and a body made of electrically non-conductive material with a bore receiving the SMA thread, the spring and the closure element and with a Have valve seat with a connecting channel and a side channel branching side receiving head and a closed bottom part l, the spring as a conductor for the current flow between the vent i lse iti gene end of the SMA wire and the other end thereof on the valve bottom are connected to a power source.
  • the gas pressure surrounding the thread when the valve is open is equal to the pressure of the fluid flowing from the secondary duct through the connecting duct L.
  • the gas flow can pass through the valve without significantly influencing the SMA wire.
  • the valve shows control valve 11. As the pressure drops, the thread temperature increases, the thread contracts and opens the valve. Conversely, if the pressure increases, the gas flow is throttled. It equates to a constant electrical heating output . increased pressure, which is kept constant within certain limits.
  • the valve is designed as a flow control member and has an inflow channel in the bottom part 1 and an outflow channel in the top part 1.
  • the gas flow flows along the SMA wire and transports heat away.
  • the heat dissipated is a function of the flow.
  • an impressed constant electrical power which keeps the wire temperature at a predetermined constant flow of the fluid at the phase transition limit
  • a function is realized in which increasing flow lowers the thread temperature, the thread lengthening and the conductance of the valve being reduced .
  • Decreasing river causes the opposite l.
  • the flow of the flowing fluid tends to a state of equilibrium, which is kept constant within narrow limits.
  • the resulting flow is approximately proportional to the voltage or heating power fed in. That is why this type of valve is suitable as an actuator in electronic control loops for the pruning of gases.
  • Proportion on Ivent i Le manufactured according to the prior art are problematic, extremely complex and prone to failure for the gas flow.
  • Venti l is formed as a Lorgan
  • Bodentei l an outlet channel for the constantly regulated
  • This type of valve uses the thermal conductivity of different types of gas as the physical basis. Moving in
  • the heating power of the SMA wire is at a predetermined constant flow with predetermined mixture concentrations
  • Another advantageous valve variant is designed as a protective valve for gas leak detectors, in particular for helium leak detectors. It has an inflow channel in the bottom part l, a connection channel to the leak detector in the head part l and a bypass opening in the bypass to the valve seat at the head end of the valve body.
  • the apparatus has already passed helium concentration.
  • the result is insensitivity and long recovery times.
  • the protection valve switches off the gas flow.
  • the heating power is set so that the valve is open at low concentrations. If a gas stream enriched with helium now enters through the inflow channel in the bottom part l, the SMA wire is cooled due to the higher concentration of helium in the gas stream, and cooled due to the increased thermal conductivity of the gas, lengthens and closes the valve l. The gas flow can then only escape through the bypass opening. As soon as the
  • the valve moves back to the initial state, i.e. it opens.
  • valve is designed, for example, as a visual filter, with a central valve body, one Gas inlet channel in the bottom part l and a first, the closure element guiding, with a valve seat in an intermediate wall closable hole, which is followed by a second hole in the valve body, which receives the SMA thread firmly connected to the tip of the valve , which is fastened on the outlet side to the head part 1 having an outlet channel.
  • This is a Wegventi l, which remains in its state after tripping and must be reset from the outside. If a gas flow passes the valve from the bottom part to the head part, the gas flow is completely switched off when the flow falls below a certain threshold, as a result of which the wire temperature rises further and the valve remains in the closed position.
  • a comparatively narrow ceramic tube surrounding the SMA wire and extending between the inlet channel in the base part and the valve seat is arranged.
  • Fig. 1 is a diagram of a Vent i barrel structure for constant active lung pressure of the gaseous Media
  • FIG. 3 is a schematic of the venti structure for constant flow regulation of a gas flow
  • Fig. 7 is a diagram of Vent i L admittedes in the function of a Schutzventi ls for Heliumlec 'ksücher,
  • FIGS. 3 and 4 show in section a valve for constant flow control according to FIGS. 3 and 4 with a ceramic tube surrounding the SMA wire
  • Vent i L superstructure variants shown purely schematically in the figures have, as matching or similar features in construction, a valve body (20) made of electrically non-conductive material with a head part (25) having the valve seat (22) and one Soil part (26).
  • the valve body (20) takes in a bore (24) the Versch Luße element (21) with the actuator (1) made of electrically heatable sta Lt se ri nne rende material in the form of the SMA thread and the return spring (23).
  • valve variants described below have in common that the contraction or elongation of the wire (1) made of material resemble of the shape is used to actuate the closure element (21), where in principle instead of the wire (1) other geometric shapes with changes in shape due to bending or torsion can also be used. Because of the simplicity of the construction and the clarity of the function, the wire principle is preferred and shown as an example.
  • the use of a cone or needle valve body as a locking element (21) is also to be understood as a pure embodiment example and not as a limitation. Basically, other types of valves can also be used here.
  • the arrangement of the drive is fundamentally chosen so that a change in length of the SMA wire (1) used as an actuator in the area of the phase transition results in a change in the conductance and thus the fluid passage in the valve seat (22), so that the master value is a monotonous function of the length of the actuator.
  • the respective length of the wire (1) as a function of the thread temperature with a constant heating power of different physical parameters of the fluid flow is therefore responsible for the temperature of the wire (1) all parameters that occur during operation, which have an influence on the thermal balance of the system such as temperature, Thermal conductivity, flow rate, pressure and mixture type of the gases.
  • Figure 1 shows an arrangement for a pressure constant.
  • the gas pressure surrounding the SMA thread is equal to that at connection A of the secondary duct (28), since it is connected to the bore (24) of the valve body (20).
  • Ver rsch Luße element (21) in the high temperature state of the SMA thread (1), a gas flow can flow between the secondary duct (28) and the connecting duct (B, 27) in the head part (25) of the valve.
  • the valve shows regu lation.
  • the pressure drops, the temperature of the thread (1) increases, the thread (1) contracts and opens the valve (21, 22). Conversely, if the pressure increases, the gas flow is throttled.
  • FIG. 2 shows the circuit diagram of the valve assembly according to FIG. 1.
  • the circuit diagram shows the arrangement of a fine vacuum apparatus with a gas flow from B to A and to the vacuum pump (10) via the vacuum container (11) and the valve body (20) with the actuator arranged in the bypass to the fluid flow in the form of the SMA thread ( 1 ) .
  • This is via the power connections (3,4) connected to the power source (2).
  • This is shown as a controllable current source (2), but is constantly regulated for a pressure to be kept constant.
  • the Venti L admitted according to Figure 3 shows a system for constant flow control.
  • the gas flow passes the SMA wire (1) and transports heat away.
  • the heat dissipated is a function of the flow.
  • the valve has on the bottom part (26) an inflow channel (30) with the designation B and in the head part (25) an outlet channel (29) with the designation A.
  • the electrical connections and designations are otherwise the same as those in Fig. 1.
  • FIG. 4 The circuit diagram of the flow control valve according to FIG. 3 is shown in FIG. 4, the same elements also being identified with the same reference numbers.
  • a fluid flow from B along the heated SMA thread (1) is conveyed from the fan (9) via the valve to the outlet duct A.
  • the temperature of the SMA thread (1) changes as described above when it is constantly heated by the current source (2), the closure element (21) reacting accordingly.
  • FIG. 5 shows a valve designed as a lively mixture. It has the valve (20) with the closure element (21), the actuator of the SMA wire (1) and the return spring (23).
  • the mixture to be controlled consisting of at least two components, enters the valve through the inlet channel (A) in the head part (25), flows along the SMA thread (1) and leaves the valve through the outlet channel at the bottom (34) with the designation C.
  • a gas component with a higher thermal conductivity, initially blocked by the Vent i Lve rsch Luß body (21), is present at the inflow channel (32) with the designation B.
  • the gas capacity is gas dependent. If the concentrations of the components shift in the gas mixture, this leads to a change in the thermal conductivity with a constant flow. The one shown uses this effect
  • a binary gas mixture for example, constantly flows through the connection A to the output C. If the component with the higher thermal conductivity in the mixture is depleted, the conductivity decreases, the SMA wire (1) increases its temperature and shortens, the closure element (21) stands out from the valve seat (22), whereby a flow cross-section of the inflow channel (32) is opened for the component with the higher thermal conductivity and the mixture is adjusted again to constant mixture concentrations.
  • Figure 6 shows a Heidelbergbi ld.
  • a z. B. binary fluid mixture via the inlet channel (33) labeled A through the Venti l Sciences (30) through to the outlet channel (34) with the label C.
  • the blower (7) promotes the component with the higher thermal conductivity through the inlet channel (32) with the designation B in the manner described above for enriching the mixture of the fluid mixture when it opens the valve. Further elements are identified by the same reference symbols.
  • FIG. 7 shows a valve designed as a protective valve for gas leak detectors, in particular for He li um Lee ksuche r.
  • the inflow channel (30) which is connected by a line to a sniffer tip, is located on the bottom part (26).
  • the A 'l supportivekanal (30) is called D.
  • On Kopftei l (25) the outlet channel (29) is located with a connection to a leak detector.
  • the outlet channel (29) bears the designation E.
  • the valve is open. If a fluid stream enriched with helium occurs at D, more heat is removed from the SMA wire (1) and
  • the valve can alternatively also be configured as a visual switch for pressure or flow.
  • FIG. 8 shows such a switch, which has to remain in its state after tripping and must be reset from the outside.
  • the valve is designed with a valve body (20) divided in the middle, with a gas inlet channel (30) in the bottom part ( 26) and with an outlet channel (29) on the head part l (25).
  • a gas inlet channel (30) in the bottom part ( 26) and with an outlet channel (29) on the head part l (25).
  • F At the gas inlet duct (30) with the designation F closes a first, the gas closure element (21) guiding, with a valve seat (22) in an intermediate wall (19) closable bore (24).
  • valve l has a second bore (18) in the flow direction, which receives the SMA thread (1), which is firmly connected to the tip (17) of the closure element (21), as the actuator of the valve. This is fixed on the outlet side in the head part l (25).
  • the SMA wire is heated via the power connections (3, 4) by the power source (2).
  • a fluid flow passes through the schematically illustrated valve from F to G. If the flow falls below a certain threshold value, the gas flow is switched off and the heat removal by the gas flow is thus interrupted. As a result, the wire temperature continues to rise and the valve remains in this position.
  • a particularly intensive heat exchange between the fluid flow and the SMA thread (1) can be achieved by designing the valve
  • valve types described above have a number of advantages over conventional valve types. It are this

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Temperature-Responsive Valves (AREA)

Abstract

L'invention concerne une soupape de régulation de courants fluidiques comportant un élément de régulation réalisé dans un matériau à mémoire de forme chauffable électriquement, qui place, dans sa position par rapport au siège de soupape, un élément de blocage à l'encontre de la force de rappel d'un ressort en fonction d'une modification de la longueur due à la température. Afin de maintenir l'état d'un fluide constant (par exemple la pression, le débit, la composition du mélange, etc.), l'élément de régulation est un fil (1) porté par courant continu à une température du matériau à mémoire de forme (SMA) comprise dans la plage de transition de phase. Le siège de soupape (20) qui entoure le fil (1) se présente sous forme d'un échangeur de chaleur sensible d'une manière particulière, en coopération avec ledit fil, aux changements de l'état d'un courant fluidique passant. A cet effet, il est prévu que la soupape comprenne un alésage (24) destiné à recevoir le fil SMA (1) et servant à guider les courants fluidiques à réguler, et à opérer l'échange de chaleur entre le fil SMA (1) et les courants fluidiques, ainsi que des canaux (27) ou des raccords (28).
PCT/EP1994/001687 1993-07-08 1994-05-26 Soupape de regulation de courants fluidiques comportant un element de regulation realise dans un materiau a memoire de forme chauffable electriquement WO1995002143A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP94918786A EP0707693A1 (fr) 1993-07-08 1994-05-26 Soupape de regulation de courants fluidiques comportant un element de regulation realise dans un materiau a memoire de forme chauffable electriquement
JP7503776A JPH08512387A (ja) 1993-07-08 1994-05-26 電気的に加熱可能な、形状記憶材料から成る調節機構で流体の流れを調整するための弁

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP4322731.7 1993-07-08
DE19934322731 DE4322731A1 (de) 1993-07-08 1993-07-08 Ventil zur Regelung von Fluidströmen mit einem Stellorgan aus elektrisch heizbarem, gestaltserinnerndem Werkstoff

Publications (1)

Publication Number Publication Date
WO1995002143A1 true WO1995002143A1 (fr) 1995-01-19

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ID=6492243

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1994/001687 WO1995002143A1 (fr) 1993-07-08 1994-05-26 Soupape de regulation de courants fluidiques comportant un element de regulation realise dans un materiau a memoire de forme chauffable electriquement

Country Status (4)

Country Link
EP (1) EP0707693A1 (fr)
JP (1) JPH08512387A (fr)
DE (1) DE4322731A1 (fr)
WO (1) WO1995002143A1 (fr)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0801371A1 (fr) * 1996-04-02 1997-10-15 Itsuro Yonenaga Dispositif d'affichage publicitaire
US5822899A (en) * 1995-07-03 1998-10-20 Yonenaga; Itsuro Advertisement display device
US6464200B2 (en) 1999-11-01 2002-10-15 Swangelok Company Shape memory alloy actuated fluid control valve
US8056618B2 (en) 2007-07-18 2011-11-15 Baker Hughes Incorporated Flapper mounted equalizer valve for subsurface safety valves
US9212754B2 (en) 2013-03-12 2015-12-15 A. Raymond Et Cie Shape memory alloy valve
US9267617B2 (en) 2010-07-28 2016-02-23 Buerkert Werke Gmbh Drive unit for a micro valve comprising a shape memory alloy, and micro valve
EP3156746A1 (fr) 2015-10-14 2017-04-19 Danfoss A/S Soupape d'expansion et système de compression de vapeur
US10443753B2 (en) 2013-01-17 2019-10-15 Danfoss A/S Shape memory alloy actuator for valve for a vapour compression system
CN113459134A (zh) * 2021-07-05 2021-10-01 吉林大学 一种电阻自感知力和位移的sma丝驱动夹持器

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DE10108715A1 (de) * 2001-02-23 2002-09-05 Xcellsis Gmbh Behältnis für ein strömendes Fluid
EP1386103B1 (fr) * 2001-05-08 2005-08-03 Alberto Arena Valve proportionnelle dotee d'un actionneur en alliage a memoire de forme (sma)
DE10233601A1 (de) 2002-07-24 2004-02-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ventil mit kompaktem Betätigungsmechanismus
DE10257549B3 (de) * 2002-11-30 2004-08-05 Alfmeier Präzision AG Baugruppen und Systemlösungen Steuerbares Ventil
IL170271A (en) * 2005-08-14 2010-11-30 Josef Flomenblit Temperature responsive valve
DE102008054900B4 (de) * 2008-12-18 2011-12-15 Faurecia Innenraum Systeme Gmbh Aktuatorvorrichtung
US8585776B2 (en) 2011-02-03 2013-11-19 Ut-Battelle, Llc Mesofluidic controlled robotic or prosthetic finger
US8616237B2 (en) 2011-02-03 2013-12-31 Ut-Battelle, Llc Mesofluidic two stage digital valve
US20120199763A1 (en) * 2011-02-03 2012-08-09 Lind Randall F Mesofluidic shape memory alloy valve
DE102013010027A1 (de) * 2013-06-17 2014-12-18 Otto Egelhof Gmbh & Co. Kg Antriebseinrichtung sowie Verfahren zur Ansteuerung der Antriebseinrichtung zur Erzeugung einer Stellbewegung
DE102017220145B4 (de) * 2017-11-13 2019-06-13 Festo Ag & Co. Kg Ventileinrichtung
DE102018108069A1 (de) * 2018-04-05 2019-10-10 Alfmeier Präzision SE Ventil und Ventilanordnung
DE102020129430B4 (de) 2020-11-09 2023-06-01 Otto Egelhof Gmbh & Co. Kg Ventil zur Steuerung eines Strömungskanals
CN112431950B (zh) * 2020-12-03 2023-01-20 睿恩光电有限责任公司 自动控制阀及流量控制设备

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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5822899A (en) * 1995-07-03 1998-10-20 Yonenaga; Itsuro Advertisement display device
EP0801371A1 (fr) * 1996-04-02 1997-10-15 Itsuro Yonenaga Dispositif d'affichage publicitaire
US6464200B2 (en) 1999-11-01 2002-10-15 Swangelok Company Shape memory alloy actuated fluid control valve
US8056618B2 (en) 2007-07-18 2011-11-15 Baker Hughes Incorporated Flapper mounted equalizer valve for subsurface safety valves
US9267617B2 (en) 2010-07-28 2016-02-23 Buerkert Werke Gmbh Drive unit for a micro valve comprising a shape memory alloy, and micro valve
US10443753B2 (en) 2013-01-17 2019-10-15 Danfoss A/S Shape memory alloy actuator for valve for a vapour compression system
US9212754B2 (en) 2013-03-12 2015-12-15 A. Raymond Et Cie Shape memory alloy valve
US9651158B2 (en) 2013-03-12 2017-05-16 A. Raymond Et Cie Shape memory alloy valve
US9752686B2 (en) 2013-03-12 2017-09-05 A. Raymond Et Cie Shape memory alloy valve
EP3156746A1 (fr) 2015-10-14 2017-04-19 Danfoss A/S Soupape d'expansion et système de compression de vapeur
US10989454B2 (en) 2015-10-14 2021-04-27 Danfoss A/S Expansion valve and vapour compression system
CN113459134A (zh) * 2021-07-05 2021-10-01 吉林大学 一种电阻自感知力和位移的sma丝驱动夹持器

Also Published As

Publication number Publication date
DE4322731A1 (de) 1995-01-12
JPH08512387A (ja) 1996-12-24
EP0707693A1 (fr) 1996-04-24

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