WO1994012309A1 - Laser marking apparatus - Google Patents
Laser marking apparatus Download PDFInfo
- Publication number
- WO1994012309A1 WO1994012309A1 PCT/JP1993/001717 JP9301717W WO9412309A1 WO 1994012309 A1 WO1994012309 A1 WO 1994012309A1 JP 9301717 W JP9301717 W JP 9301717W WO 9412309 A1 WO9412309 A1 WO 9412309A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- polarizing
- laser
- mirror
- laser light
- pair
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
Definitions
- the present invention relates to a raster scanning type laser marking apparatus, and more particularly to an improvement in a laser marking apparatus which splits a laser beam for scanning. Background technology
- the conventional laser scanning device of the laser scanning type scans the mask surface with laser light having a high peak power to print the shape of the light transmitting portion of the mask surface on the engraved surface. Since the laser beam is narrowed down, the unit irradiation area is small.
- the energy of the unit irradiation light is high, and it is effective for marking a material having a relatively high marking threshold, for example, a metal.
- a material having a relatively high marking threshold for example, a metal.
- this energy ratio is lowered and engraving is performed with the same irradiation area. For this reason, despite the material having a low stamping threshold, it requires the same stamping time as a material having a high stamping threshold, resulting in poor efficiency.
- the irradiation area can be widened while maintaining the same energy power.
- the optical system of the conventional laser marking device if the area of the irradiated surface is enlarged, the distribution of the energy density between the central portion and the peripheral portion is greatly different, so that good engraving can be performed. There is a problem that can not be. Disclosure of the invention
- the irradiation area of the surface to be irradiated with laser light is determined by the intensity distribution of laser light.
- a high-power laser marking device with sufficient laser power to engrave materials with high engraving thresholds it is an object of the present invention to provide a laser marking device capable of marking a material having a low marking threshold at a scanning speed twice or more as high as that of a conventional material, effectively utilizing laser power, and having a high marking accuracy.
- the first aspect of the present invention is a laser marking that irradiates a laser beam incident from a laser light source by raster-scanning an engraved surface via a raster scanning system such as an X-direction polarizing mirror, a Y-direction polarizing mirror, a field lens, and a mask.
- a double image polarization consisting of a pair of polarizing prisms that splits the incident laser light into twin laser light between the polarizing mirror located on the upstream side of the X-direction polarizing mirror and the Y-direction polarizing mirror and the laser light source.
- the prisms are arranged in series, and an adjusting means for changing the distance between the pair of polarizing prisms is provided.
- the adjusting means includes a rotating holder having a gear surface on the outer periphery and having one polarizing prism attached thereto, a slide holder slidingly fitted to the rotating holder and housing the other polarizing prism, and a motor for driving these.
- the rotary holder is rotated and the slide holder is moved along the direction of the incident laser beam.
- a second aspect of the present invention is provided with a rotation angle adjusting means for simultaneously rotating the pair of polarizing prisms.
- the means for adjusting the rotation angle includes a pulley on the outer periphery and a rotation holder containing a pair of polarizing prisms, a bearing for rotatably holding the rotation holder, and a motor for driving the pulley.
- the rotation angle is adjusted by rotating the holder. In this case, any one of the pair of polarizing prisms may be independently rotated. .
- the distance between the twin laser beams on the mask surface can be changed.
- one of the twin laser beams is rotated around the other laser beam, and the distance between the twin laser beams can be changed accordingly. it can. Therefore, the laser beam diameter (beam diameter) increases when the laser power is increased, but the twin spots do not overlap during scanning. The distance between the laser beams can be adjusted. As a result, the laser power can be used effectively, and the number of scans decreases even if the beam diameter increases, so that the scan time can be shortened.
- FIG. 1 is an overall configuration diagram of a laser marking device according to a first embodiment of the present invention
- FIGS. 2A to 2E are operation explanatory diagrams of a double-image polarizing prism that splits laser light into twin laser light
- FIG. FIG. 4 is a perspective view of an adjusting device according to the first embodiment of the image polarizing prism
- FIG. 4 is a perspective view of an adjusting device according to the second embodiment of the double image polarizing prism
- FIGS. 5A to 5C are the adjusting devices of FIG.
- FIG. 6 is an explanatory diagram of the operation of the double-image polarizing prism in FIG. 6, and FIG. BEST MODE FOR CARRYING OUT THE INVENTION
- reference numeral 1 denotes a laser beam from a YAG laser oscillator 2 serving as a light source
- the laser beam 1 includes an X-direction polarization mirror 3, a relay lens 4, a polygon mirror 5, a field lens 6, and a mask 7.
- the light is irradiated on the surface 11 to be engraved through the Y-direction polarizing mirror 8, the objective lens 9, and the relay lens 10.
- the mask 7 any of a liquid crystal mask, a metal mask, a glass mask, or the like is used as the mask 7.
- the reflected light of the laser light 1 is sequentially polarized by a predetermined angle in the X direction on the marking surface 11 by the scanning operation of the X-direction polarizing mirror 3.
- the reflected light of the X-direction polarized mirror 3 is irradiated on the polygon mirror 5 through the relay lens 4, and according to the rotation of the polygon mirror 5, the Y direction of one line in the Y direction on the marking surface 11 is provided.
- a scan is performed.
- the reflected light from the polygon mirror 5 is condensed to a desired size by the field lens 6, passes through the mask 7, and is imprinted on the engraved surface 11 in accordance with the setting pattern of the mask 7 of the polygon mirror 5.
- the present embodiment includes an X-direction polarization mirror 3 and a YAG laser oscillator 2. Between them, the beam expanders 1.2 and the double image polarizing prism 13 are interposed from the upstream side.
- the double-image polarizing prism 13 is an element for separating the incident laser light 1 into two linearly polarized light beams whose polarization planes are orthogonal to each other, and takes out the same.
- a location-type prism is used.
- the double-image polarizing prism 13 is composed of a pair of upstream polarizing prisms 13a and downstream polarizing prisms 13b arranged in series.
- the rotation prism is formed by joining the crystal axes (Z-axis) at right angles to each other. This is the surface orthogonal to the axis of the laser beam 1 between the upstream polarizing prism 13a and the downstream polarizing prism 13b. Are arranged symmetrically.
- Each of the polarizing prisms 13a and 13b is arranged at a distance d as shown in FIG. 2A, and the laser beam 1 incident from the YAG laser oscillator 2 is constantly reflected by the upstream polarizing prism 13a.
- the light beam is split into a laser beam 1a and an extraordinary beam 1b, and then enters the downstream polarizing prism 13b.
- the ordinary ray la is on a straight line with the incident laser light 1 and this is maintained even after passing through the lower-side polarizing prism 13b.
- the split extraordinary ray 1 b is polarized by the upstream polarization prism 13 a, is polarized in the opposite direction by the downstream polarization prism 13 b, exits, and enters the X-direction polarization mirror 3 .
- the upstream polarizing prism 13 a is attached to a rotary holder 14.
- the rotary holder 14 has a gear surface 15 engraved on the outer periphery of one end thereof, and the gear surface 15 meshes with the gear 16'a of the gear motor 16 mounted on the fixed frame.
- the rotating holder 14 is rotated by the driving of the gear motor 16 and the upstream polarizing prism 13a is rotated.
- a slide holder 17 slidingly fitted to the rotary holder 14 is provided, and the downstream side polarizing prism 13 b is accommodated in the slide holder 17.
- An arm 18 is provided on the outer surface of the slide holder 17, and a nut 19 is provided at the tip of the arm 18, and a screw shaft inserted through the nut 19 is provided.
- G 20 is butterfly-fitted.
- the screw shaft 20 is rotationally driven by the driving mode 21. This rotation causes the slide holder 17 to enter the incident laser. It is moved along the direction of the light 1, and as described later, the distance d between the prism 1.3a and the downstream side polarizing prism 13b is adjusted.
- the arrangement orientation of the double image polarizing prism 13 is such that the split twin laser beams 1a and 1b are split in the X direction on the engraved surface 11.
- a Q switch is provided in the YAG laser oscillator 2 so that a pulse laser having a high peak power can be oscillated.
- the beam light 1 that has passed through the beam expander 12 is converted into two mutually orthogonal linearly polarized twin laser beams 1a and 1b by the upstream polarizing prism 13a and the downstream polarizing prism 13b. Branches to b.
- the twin laser beams 1a and 1b are incident on the X-direction polarization mirror 3, where they are polarized in a direction corresponding to the angle of attack of the mask 7.
- the light spread at this angle of attack is collected by the relay lens 4 at one point of the polygon mirror 5. Scanning is performed by the polygon mirror 5, and a portion of the mask 7 having image information is raster-scanned. At this time, this image information is condensed to a desired size by the field lens 6, and then branches in the X direction on the marking surface 11 through the Y-direction polarizing mirror 8, objective lens 9, and relay lens 10. Irradiated to
- the angles of the twin laser beams 1a and 1b viewed from the Z direction from the horizontal axis as shown in FIG. ⁇ can be determined by the rotation angle 0.
- the distance 1 between the twin laser beams 1a and 1b is determined by the distance d between the upstream polarizing prism 13a and the downstream polarizing prism 13b, and the screw shaft is driven by the drive motor 21.
- the slide holder 17 can be moved and adjusted by rotating the slide 20.
- Such adjustment of the angle ⁇ and the distance 1 means changing the distance D when the twin laser beams 1 a and 1 b are irradiated on the mask 7, whereby the engraved surface 1 1 This makes it possible to optimally adjust the marking accuracy at the.
- Fig. 2C shows a case where a rectangular area is raster-scanned at the time of marking, but four scans are required when the beam diameter is and the distance between beam spots is D ,.
- the laser power is increased, the beam diameter increases to S, but if the distance D, between the beam spots is unchanged, the beam spots overlap as shown in FIG. 2D.
- the distance between the beam spots is increased and changed from D, to D to prevent overlap of the beam spots.
- the laser power can be used effectively, and the number of scans can be reduced from 4 'to 2 to double the marking speed.
- the upstream-side polarizing prism 13a and the downstream-side polarizing prism 13b are housed and fixed in one rotating holder 22.
- the rotating holder 22 is rotatably held by a bearing 23.
- the distance D when the twin laser beams l a and l b irradiate the mask 7 is the maximum value as shown in FIG. 5A and FIG.
- the distance D can be adjusted in the same manner even when the upstream polarizing prism 13a and the downstream polarizing prism 13b rotate independently with the distance d between them fixed.
- FIG. 6 shows an example in which a Wollaston prism is used as the double image polarization prism 26.
- the Wollaston prism is obtained by changing the incident direction of the Rossion prism by 90 degrees, and can perform the same operation as the Rossion prism. That is, the double-image polarizing prism 26 is composed of a pair of upstream polarizing prisms 26 a and a downstream polarizing prism 26 b arranged in series, and the pair of polarizing prisms 26 a and 26 b are They are arranged at a distance d so as to be symmetrical with respect to a plane orthogonal to the incident laser light 1.
- the incident laser beam 1 is converted to the upstream polarizing prism 26 At a, it is split into twin laser beams 1 a and lb, and then enters the downstream polarizing prism 13 b.
- the twin laser beams la and 1 b are polarized and emitted in opposite directions, and are incident on the X-direction polarizing mirror 3.
- the pair of polarizing prisms 26a and 26b are mounted on a rotating device shown in FIG. 4 and rotationally scanned, so that the twin laser beams 1a and 1b are Adjust the distance D when irradiating
- a high-power laser marking device to mark materials with low marking thresholds at twice or more the scanning speed.It is also useful as a laser marking device that can use laser power effectively and has high marking accuracy. .
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP94900998A EP0671238B1 (en) | 1992-11-25 | 1993-11-24 | Laser marking apparatus |
US08/433,416 US5587094A (en) | 1992-11-25 | 1993-11-24 | Laser marking apparatus |
KR1019950701881A KR950704081A (ko) | 1992-11-25 | 1993-11-24 | 레이저마아킹장치(laser marking apparatus) |
DE69323762T DE69323762T2 (de) | 1992-11-25 | 1993-11-24 | Lasermarkierungsgerät |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4/86578U | 1992-11-25 | ||
JP1992086578U JP2588281Y2 (ja) | 1992-11-25 | 1992-11-25 | レーザマーキング装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1994012309A1 true WO1994012309A1 (en) | 1994-06-09 |
Family
ID=13890895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1993/001717 WO1994012309A1 (en) | 1992-11-25 | 1993-11-24 | Laser marking apparatus |
Country Status (6)
Country | Link |
---|---|
US (1) | US5587094A (ja) |
EP (1) | EP0671238B1 (ja) |
JP (1) | JP2588281Y2 (ja) |
KR (1) | KR950704081A (ja) |
DE (1) | DE69323762T2 (ja) |
WO (1) | WO1994012309A1 (ja) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0656241B1 (en) * | 1993-06-04 | 1998-12-23 | Seiko Epson Corporation | Apparatus and method for laser machining |
JP3265553B2 (ja) * | 1994-08-19 | 2002-03-11 | 株式会社小松製作所 | レーザマーキング方法 |
JP2860765B2 (ja) * | 1995-03-07 | 1999-02-24 | 株式会社小松製作所 | レーザ刻印装置の制御装置 |
US5937270A (en) * | 1996-01-24 | 1999-08-10 | Micron Electronics, Inc. | Method of efficiently laser marking singulated semiconductor devices |
JPH10166167A (ja) * | 1996-12-03 | 1998-06-23 | Komatsu Ltd | レーザマーキング方法及び装置 |
US6057871A (en) * | 1998-07-10 | 2000-05-02 | Litton Systems, Inc. | Laser marking system and associated microlaser apparatus |
US6262388B1 (en) | 1998-12-21 | 2001-07-17 | Micron Electronics, Inc. | Laser marking station with enclosure and method of operation |
US6417484B1 (en) | 1998-12-21 | 2002-07-09 | Micron Electronics, Inc. | Laser marking system for dice carried in trays and method of operation |
KR100477146B1 (ko) * | 1999-09-28 | 2005-03-17 | 스미도모쥬기가이고교 가부시키가이샤 | 레이저천공 가공방법 및 가공장치 |
JP2001105164A (ja) * | 1999-10-07 | 2001-04-17 | Sumitomo Heavy Ind Ltd | レーザ穴あけ加工方法及び加工装置 |
DE19955647C1 (de) * | 1999-11-19 | 2001-06-13 | Audi Ag | Verfahren zum messtechnischen Erfassen einer Formänderung eines Werkstückes |
JP2001166237A (ja) * | 1999-12-10 | 2001-06-22 | Canon Inc | 光走査光学装置 |
GB0000632D0 (en) * | 2000-01-13 | 2000-03-01 | Hastings Stephen A | Apparatus for and method of targeting |
US6528760B1 (en) | 2000-07-14 | 2003-03-04 | Micron Technology, Inc. | Apparatus and method using rotational indexing for laser marking IC packages carried in trays |
DE10119456C1 (de) * | 2001-04-20 | 2003-05-08 | Siemens Ag | Beschriftungsverfahren für ein elektrisches Gerät |
US6804269B2 (en) * | 2001-06-19 | 2004-10-12 | Hitachi Via Mechanics, Ltd. | Laser beam delivery system with trepanning module |
US7169685B2 (en) | 2002-02-25 | 2007-01-30 | Micron Technology, Inc. | Wafer back side coating to balance stress from passivation layer on front of wafer and be used as die attach adhesive |
US7011880B2 (en) * | 2002-07-03 | 2006-03-14 | The Gates Corporation | Belt and method of marking |
US6705727B1 (en) | 2002-12-30 | 2004-03-16 | Bausch & Lomb Incorporated | Mechanism for rotationally moving a mirror |
JP4662411B2 (ja) * | 2003-03-14 | 2011-03-30 | 日立ビアメカニクス株式会社 | レーザ加工装置 |
WO2006000549A1 (de) * | 2004-06-29 | 2006-01-05 | Hitachi Via Mechanics, Ltd. | Laserbearbeitungsmaschine zum bohren von löchern in ein werkstück mit einer optischen auslenkvorrichtung und einer ablenkeinheit |
CN102294906B (zh) * | 2010-06-22 | 2013-04-17 | 翁希明 | 一种陶瓷材料表面标记制作工艺 |
CN107922989B (zh) * | 2015-05-08 | 2020-11-10 | 爱科古恩A.I.E. | 利用能量束热处理含铁材料的方法和设备 |
KR102075731B1 (ko) * | 2018-09-27 | 2020-02-10 | 한국기계연구원 | 레이저 제염 시스템 |
WO2021117850A1 (ja) * | 2019-12-13 | 2021-06-17 | パナソニックIpマネジメント株式会社 | レーザ装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0461141A (ja) * | 1990-06-22 | 1992-02-27 | Hitachi Ltd | 画像縮小拡大投影装置 |
JPH0494881A (ja) * | 1990-08-08 | 1992-03-26 | Nippon Denki Laser Kiki Eng Kk | レーザマーキング装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS5368499A (en) * | 1976-11-30 | 1978-06-17 | Komatsu Ltd | Method of shaping laser beam used for machining |
JPS6011325B2 (ja) * | 1977-01-21 | 1985-03-25 | キヤノン株式会社 | 走査装置 |
DD207347A1 (de) * | 1982-05-03 | 1984-02-29 | Joerg Neumann | Anordnung zur materialabtragung mittels laserstrahlung |
JPH0825044B2 (ja) * | 1989-06-15 | 1996-03-13 | 株式会社小松製作所 | レーザ印字装置 |
JPH04251683A (ja) * | 1991-01-24 | 1992-09-08 | Komatsu Ltd | レーザマーキング装置 |
JP2701183B2 (ja) * | 1991-08-09 | 1998-01-21 | 株式会社小松製作所 | 液晶マスク式レーザマーカ |
-
1992
- 1992-11-25 JP JP1992086578U patent/JP2588281Y2/ja not_active Expired - Fee Related
-
1993
- 1993-11-24 KR KR1019950701881A patent/KR950704081A/ko active IP Right Grant
- 1993-11-24 DE DE69323762T patent/DE69323762T2/de not_active Expired - Fee Related
- 1993-11-24 WO PCT/JP1993/001717 patent/WO1994012309A1/ja active IP Right Grant
- 1993-11-24 EP EP94900998A patent/EP0671238B1/en not_active Expired - Lifetime
- 1993-11-24 US US08/433,416 patent/US5587094A/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0461141A (ja) * | 1990-06-22 | 1992-02-27 | Hitachi Ltd | 画像縮小拡大投影装置 |
JPH0494881A (ja) * | 1990-08-08 | 1992-03-26 | Nippon Denki Laser Kiki Eng Kk | レーザマーキング装置 |
Non-Patent Citations (1)
Title |
---|
See also references of EP0671238A4 * |
Also Published As
Publication number | Publication date |
---|---|
US5587094A (en) | 1996-12-24 |
EP0671238A4 (en) | 1996-08-28 |
DE69323762D1 (de) | 1999-04-08 |
EP0671238A1 (en) | 1995-09-13 |
EP0671238B1 (en) | 1999-03-03 |
JP2588281Y2 (ja) | 1999-01-06 |
KR950704081A (ko) | 1995-11-17 |
JPH0641982U (ja) | 1994-06-03 |
DE69323762T2 (de) | 1999-07-01 |
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