WO1991006397A1 - Procede d'usinage de coulisses pour tetes magnetiques - Google Patents

Procede d'usinage de coulisses pour tetes magnetiques Download PDF

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Publication number
WO1991006397A1
WO1991006397A1 PCT/JP1990/001390 JP9001390W WO9106397A1 WO 1991006397 A1 WO1991006397 A1 WO 1991006397A1 JP 9001390 W JP9001390 W JP 9001390W WO 9106397 A1 WO9106397 A1 WO 9106397A1
Authority
WO
WIPO (PCT)
Prior art keywords
slider
processing
magnetic head
nozzle
abrasive grains
Prior art date
Application number
PCT/JP1990/001390
Other languages
English (en)
Japanese (ja)
Inventor
Masayuki Kuroda
Akio Mishima
Naoto Kojima
Original Assignee
Sony Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corporation filed Critical Sony Corporation
Publication of WO1991006397A1 publication Critical patent/WO1991006397A1/fr

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/04—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00—Abrasive blasting machines or devices; Plants
    • B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
    • B24C3/322—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks for electrical components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C5/00—Devices or accessories for generating abrasive blasts
    • B24C5/02—Blast guns, e.g. for generating high velocity abrasive fluid jets for cutting materials
    • B24C5/04—Nozzles therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10—Structure or manufacture of housings or shields for heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion

Definitions

  • the present invention relates to a magnetic head river slider processing method, and more particularly to a method input for processing a surface of a magnetic head slider that is in contact with a recording medium into a predetermined shape or property. .. Background technology
  • the slider On the surface of the slider that holds the magnetic head that writes or reads signals in contact with the magnetic recording medium such as a hard disk or a disc, contact the above recording medium. Grooves and protrusions are formed for the purpose of training, and in the past, such processing was performed by machining. And hard disk drive and floppy disk drive Along with the miniaturization, the slider is also miniaturized, and the machining accuracy is gradually required to be high.
  • the edge portion of the surface is not rounded, the hard disk or ⁇ ubi disk may be damaged. Therefore, conventionally, blending was performed as shown in Fig. 1. That is, the head slider (1) is held by the holding part (3) of the rotating disk, and is rotated about the rotating shaft (4). On the other hand, the urging force of the spring (5) presses the lapping sheet (7) from below through the pad (6) against the surface of the head slider (1). ..
  • the method in which the surface of the slider for the magnetic head is subjected to the lapping sheet (7) as shown in Fig. 1 is inferior in the dimensional accuracy of the pellet and the lapping sheet or It has the shortcomings of short tape life and unevenness. Furthermore, the maintenance is difficult, and if the sheet is adjusted by the pad pressure, there is a drawback that the variation becomes large ( and it is very difficult to obtain a blended curved surface.
  • the present invention has been made in view of the above problems, and is a method for processing a surface of a slider for a magnetic head with high precision and efficiency to give a predetermined shape or property.
  • the purpose is to provide
  • a first invention is a method of processing a surface of a magnetic head slider, which is in contact with a recording medium, to have a predetermined shape or property, in which a solid-gas two-phase flow of loose abrasive grains and a gas is injected by an injection nozzle. The spray is applied to the surface of the slider.
  • the average particle size of the free particles is as follows.
  • a third aspect of the present invention is the injection of the loose abrasive grains to provide the slider. Which has been subjected to a blending process that rounds the edges of the slider.
  • a solid-gas two-phase flow of loose abrasive grains and gas is jetted by a jet nozzle having a horizontally long rectangular cross section.
  • a fifth aspect of the present invention is that the nozzle nozzle has a rectangular cross section that is narrowed on both sides and rounded.
  • the loose abrasive grains are carried by the gas and jetted onto the work piece, and the exposed portion of the slider is exposed by the loose abrasive grains.
  • the exposed portion of the slider is exposed by the loose abrasive grains.
  • free abrasive grains having an average grain size of 10 m or less are jetted together with gas onto the surface of the slider for magnetic heads with high precision machining. Become.
  • the blending is performed by spraying loose abrasive grains, the blending is performed together with the groove machining or the surface machining.
  • the nozzle nozzle have a rectangular cross section as in the fourth invention, or by squeezing both sides to make it round as in the fifth invention, the machining speed distribution in the long side direction of the port Can be made uniform, and by performing machining while moving the workpiece in such a direction in the direction orthogonal to the long side of the injection port, the slider for the magnetic head can be made highly efficient. Can be processed into.
  • FIG. 1 is a vertical cross-sectional view of a main part showing a conventional blending process
  • FIG. 2 is an external perspective view of a substrate forming a slider according to the first embodiment of the present invention
  • FIG. 3 is the same vertical cross-section.
  • Fig. 4 is a schematic perspective view showing the processing of this substrate
  • Fig. 5 is a plan view of the machined slider
  • Fig. 6 is a sectional view taken along line V-V in Fig. 5
  • Fig. 7 is an enlarged sectional view of the rail portion
  • Fig. 8 is a plan view of another slider.
  • Fig. 9 and Fig. 9 are ⁇ i ones in Fig. 8! ! Line sectional view
  • Fig. 9 and Fig. 9 are ⁇ i ones in Fig. 8! ! Line sectional view
  • Fig. 9 and Fig. 9 are ⁇ i ones in Fig. 8! ! Line sectional view
  • Fig. 9 and Fig. 9 are
  • Fig. 10 is an enlarged sectional view of the rail part
  • Fig. 11 is a plan view of the H-type negative pressure slider
  • Figs. 12 and 13 are plan views of a slide with a notch
  • Fig. 14 is a plan view of a slider with slanted grooves
  • Fig. 15 is a front view of the same
  • Fig. 16 is a plan view of a slider in which the edge portion of the groove is curved
  • the same front view Fig. 18 is a plan view of a slider with varying groove depth
  • Fig. 19 is a sectional view taken along the line ⁇ ⁇ 1 to ⁇ ⁇ in Fig. 18, and
  • Fig. 20 is the lateral machining speed of the nozzle.
  • Fig. 20 is the lateral machining speed of the nozzle.
  • Fig. 21 is a graph showing the machining depth distribution by this nozzle
  • Fig. 22 is a graph showing the machining speed distribution of the nozzle with narrowed edges on both sides of the nozzle.
  • Fig. 23 is a graph of the same pressure distribution
  • Fig. 24 is an external perspective view of a flying head that has been added by the method according to the second embodiment
  • Fig. 25 is a mask.
  • Fig. 26 is an external perspective view of the flying head
  • Fig. 26 is a vertical cross-sectional view of the main part showing the blending process
  • Fig. 27 is a plan view of my cross rider
  • Fig. 28 is XX VI! ⁇ XXW line sectional view
  • Figure 29 is a perspective view of the outside of the micro rider.
  • the magnetic head for the hard disk is formed on the part that is known as a slider. It is intended to stabilize the floating characteristics of the slider, and grooves, recesses and protrusions of any shape are formed on the surface of the slider.
  • a special mask material is used. By doing so, grooves, recesses, and protrusions with arbitrary shapes are formed.
  • high hardness abrasive grains such as SiC, IC, CBN, and diamond powder with an average grain size of 10 / m or less were dried. It is carried by a carrier (gas pressure of 1 to 10ks Z cnf) and jetted onto the base material (10) of the slider. At this time, only the portion to be processed is exposed on the slider (10) in advance by using the mask material (14). Abrasive grains on the exposed surface strike at a high speed, that is, at an ultra-high speed of l O OmZ s ec or more, and the metabolite of the base material (10) is rapidly abraded.
  • the speed and surface roughness of the machined surface are controlled by the grain size of the abrasive grains and the dynamic pressure of the carrier gas.
  • the processing speed increases regardless of whether the abrasive grain size or the gas dynamic pressure increases.
  • the surface property is improved as the particle size becomes smaller and the dynamic pressure decreases. Therefore, by using this phenomenon, the abrasive grain size is first increased, roughing is performed at a high gas pressure, and then the finishing process is performed at a low gas pressure by using abrasive grains with a small grain size. A processed surface having a good surface property can be obtained.
  • the groove (11) is pre-machined on the base material (10) and the rails (12) on both sides are left.
  • the stepped portion between the groove (11) and the rail (12) is made an inclined surface (13) if necessary.
  • a mask (14) is formed on the rail (12) to expose only the portion to be micromachined.
  • the nozzle (15) is used to perform the spraying process as shown in FIG.
  • the workpiece (10) is made to scan in a predetermined direction.
  • the slider is obtained by dividing the substrate (10) at predetermined positions.
  • FIGS. 5 to 7 show a slider (16) for a magnetic head processed by such a method, and this slider (16) is Rails (12) are provided on both sides of the surface, and the shoulders of each rail (12) have a TPC (Tr ansver se Pr es re contour) groove
  • the groove (17) is a groove for equalizing the flying height of the slider (16) on the inner peripheral side and the outer peripheral side of the recording medium.
  • 6 and 7 show a mask (14) for forming these grooves (17).
  • FIGs 8 to 10 show another example of the head slider (16).
  • This head slider (16) is attached to the TPC groove (17) on both shoulders of the rails (12) on both sides. ) Is provided. That is, as shown in Figs. 8 and 9, on the rail (12), masks (14) are left on both sides of the rail (12), and the machining shown in Fig. 4 is performed. Therefore, a slider (16) having TPC grooves (17) on both shoulders can be obtained. By thus forming the TPC grooves (17) on both shoulders, it is possible to further reduce the difference in the flying height between the inner circumference side and the outer circumference side of the recording medium.
  • the slider (16) shown in FIG. 11 forms a connecting part (18) having a surface continuous with the rail (12) so as to cross the groove (11) formed on the rails (l Ra 1 !) On both sides.
  • a connecting part having a surface continuous with the rail (12) so as to cross the groove (11) formed on the rails (l Ra 1 !) On both sides.
  • the H-type negative pressure slider (16) is formed.
  • the slider (16) shown in Fig. 12 is a modification of the slider shown in Fig. 11 and has a notch (19) formed on the air inflow side.
  • the position of the connecting part (18) is located slightly downstream, and notches (19) are formed on the inflow side and the outflow side of the atmosphere, respectively.
  • the slider (16) shown in Fig. 14 and Fig. 15 has a trapezoidal shape for the middle atmospheric groove (11) formed between the rails (12) on both sides. It has a vertically elongated shape so that the width gradually increases from the side toward the outflow end.
  • Figures 16 and 17 show atmospheric ditch (11) is further deformed, and the shape on both sides of the groove (11) that widens from the inflow end to the outflow end is curved.
  • the width of the atmospheric groove (11) formed between the rails (12) it is possible to make the width constant and change the depth. That is, as shown in FIGS. 18 and 19, the groove (11) is made shallow on the inflow side and gradually changed so that it becomes deeper on the outflow end side.
  • Such processing is obtained by changing the moving rate of the base material (10) with respect to the nozzle (15) shown in Fig. 4 to change the processing rate by the abrasive grains.
  • the method of processing the slider (16) according to the present embodiment is such that the fine abrasive grains are conveyed by the dry carrier gas and sprayed onto the base material (10) that constitutes the slider. Therefore, the mask (14) is used to expose only the part to be processed, and the mask (14) is used to form grooves, recesses, and protrusions of any shape.
  • the processing speed and the surface property of the processed surface can be controlled by the particle size of loose abrasive grains and the dynamic pressure of carrier gas.
  • ⁇ — By controlling the grain size of the abrasive grains and the operation of the carrier gas by ⁇ —, it is possible to perform roughing and finishing, and thereby obtain a machined surface with good surface properties at high speed. It will be possible.
  • the injection nozzle (15) suitable for such processing will be described.
  • the abrasive is uniformly applied in the width direction of the nozzle (15). It is desirable that the particles be sprayed.
  • High-hardness fine abrasive grains (having an average grain size of 10 m or less) are conveyed by high-pressure carrier gas and sprayed onto the workpiece, which is called Bauta'beam etching.
  • U-beam etching is very similar to sandblasting, but the abrasive grain size used in sandblasting is 100 m or more, whereas that in powder-beam etching is 10 m or less.
  • the controllability of processing also differs significantly. That is, in sandblasting, the abrasive grain flow and the carrier gas flow are essentially independent of each other, and the abrasive grain cannot follow the carrier gas flow. In grinding, the abrasive grains follow the flow of the carrier gas fairly well. Therefore, as shown in Fig. 20, by optimizing the tip shape of the nozzle (15) and controlling the pressure velocity distribution at the nozzle tip of the carrier gas, the machining speed is maximized. The distribution of processing depth can be made uniform.
  • the disfiguring shape of its nozzle (22) is a perfect rectangle. From the experimental results, the pressure distribution of the carrier gas and the processing distribution when the abrasive particles are actually conveyed and processed are uniform as shown in the figure.
  • Figure 21 shows the distribution of machining depth when the surface of the slider (16) is machined using such a nozzle (15).
  • the shape of the opening (22) at the tip of the nozzle (15) is made rectangular, or by narrowing with both edges as shown in Fig. 22, the nozzle (15) is stopped.
  • a uniform processing depth distribution can be obtained. Therefore, by using such a nozzle (15) and moving the workpiece (10) relative to the nozzle (15) as shown in Fig. 4, it becomes possible to perform surface machining. The surface roughness, parallelism, uniformity and waviness of the machined surface have been greatly improved.
  • Fig. 24 shows a slider for magnetic head (16), which has a sliding surface consisting of rails (12) on both sides, and both ends of the rail (12) are inclined.
  • the faces are (26) and (27).
  • the inclination angle of one inclined surface (26) is about 1 °
  • the inclination angle of the other inclined surface is about 20 °.
  • a head (28) is attached to the slider (16) so that winding can be performed through the winding groove (29).
  • the lead wire (30) is pulled out from the head tip (27). Then, in such a slider (16), the edge portions on both sides of the rail (12) are processed to form a blend processing surface (31).
  • a resist mask (14) with a rubber hardness of about 60 ° is formed, which is a photosensitive polyurethane resin.
  • the size of the mask (14) is the same as or slightly smaller than the surface of the rail (12).
  • the material of the slider (16) is made of difficult-to-machine material, but ordinary ceramic or ferrite material may be used.
  • FIG. Figure 26 shows the jetting direction perpendicular to the surface of the mask (14).
  • the nozzle (15) has a rectangular spigot (22) on the tip side, and the mouth width is about 0.05 to 1 mm.
  • the length of the nozzle (22) of the nozzle (15) can be set to the optimum length depending on the size of the slider (16), and here the maximum is about 200 mm.
  • a loose abrasive grain supply pipe is connected to the nozzle (15), and loose abrasive grains made of SiC with a grain size of about 1 um are passed through this supply pipe at a high pressure of, for example, 2 to lOkgZ crf (16).
  • the edges of the rails (12) are blended in this way to form a blended surface (31) composed of curved surfaces. By such a blending process, the groove (11) between the rails (12) can be simultaneously machined. Rails that make up the sliding surface
  • the step between the surface of (12) and the groove (11) can be processed in a short time up to about 1 to 100 « ⁇ , and in the case of AlTiC material, the grain size of S i C is about 1 jum. , It is possible to obtain a surface roughness of about 0. Ol ⁇ m. Wear. Moreover, such fine processing can be performed in a short time. In other words, when finely processing the head slider (16), the shape accuracy of the blade processing and groove processing can be finished in the jum order.
  • the slider (16) processed by the modified method will be described with reference to FIGS. 27 to 29.
  • This slider (16) relates to a slider with a low flying height, and the slider size is about 2 mm in width and length in outline dimensions, and the thickness is 0.
  • the rail (12) of this slider has the shape of a wing, as shown in Fig. 27, and one side is curved.
  • the small stepped groove (34) formed on the side of the rail (12) by making it curved is shallower than the central atmospheric groove (11) and forms a groove that controls the fluid boundary layer region. I am configuring.
  • the above-described blending can be performed even for the microfabrication of the microslider which is levitated by about 0. from the hard disk. That is, the edge portion of the rail (12) is blended to form a blended curved surface (31).
  • the surface other than the groove (11) should be resist-processed in advance and the grain size of, for example, 5 mm or more should be used. Spray processing with grains and then rail
  • the surface of the rail (12) will be pre-coated with a wing-shaped mask (14).
  • the depth of the central groove (11) is about 50 Atm
  • the groove (34) at the edge of the rail (12) is finished to 1 zm to several / s.
  • the surface roughness of the blending and grooving can be finished to about O. O lxm.
  • the slider (16) described above is applicable to composite type and monolithic type heads, but it can also be applied to thin film type sliders. It can also be applied to magneto-optical heads and other pickup heads. That is, the range of application of this processing method is not limited to the above, but can be applied to other wide ranges.
  • the method of processing the slider according to the present embodiment is, for example, applying a photosensitive mask (14) of a photosensitive resin having the same shape as or slightly smaller than that of the rail, and approximately 1 m from the work surface perpendicularly or from an arbitrary angle
  • a photosensitive mask (14) of a photosensitive resin having the same shape as or slightly smaller than that of the rail, and approximately 1 m from the work surface perpendicularly or from an arbitrary angle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

Procédé d'usinage d'une coulisse (16) pour une tête magnétique utilisée dans une unité de disque dur ou de disquette, dans laquelle on peut former une rainure (11) et un évidement de forme quelconque en utilisant un matériau de masque (14) et en projetant contre la coulisse (16) un abrasif finement granulé véhiculé par un gaz de transport. Les bords de la surface de la coulisse (16) sont arrondis lorsque cela est nécessaire par mélange-usinage à l'aide de l'abrasif finement granulé.
PCT/JP1990/001390 1989-10-30 1990-10-30 Procede d'usinage de coulisses pour tetes magnetiques WO1991006397A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1/283640 1989-10-30
JP1283640A JP2940023B2 (ja) 1989-10-30 1989-10-30 遊離砥粒を用いた加工方法

Publications (1)

Publication Number Publication Date
WO1991006397A1 true WO1991006397A1 (fr) 1991-05-16

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Application Number Title Priority Date Filing Date
PCT/JP1990/001390 WO1991006397A1 (fr) 1989-10-30 1990-10-30 Procede d'usinage de coulisses pour tetes magnetiques

Country Status (4)

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JP (1) JP2940023B2 (fr)
KR (1) KR100275055B1 (fr)
GB (1) GB2245203B (fr)
WO (1) WO1991006397A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5625513A (en) * 1994-11-14 1997-04-29 Nec Corporation Floating head slider having uniform spacing from recording medium surface
US5774304A (en) * 1996-01-16 1998-06-30 Seagate Technology, Inc. Disc head slider having center rail with asymmetric edge steps

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0773425A (ja) * 1993-08-31 1995-03-17 Sony Corp 浮上型磁気ヘッド装置の製造方法
US5442850A (en) * 1993-11-01 1995-08-22 International Business Machines Corporation Magnetic head slider process
JP2790048B2 (ja) * 1994-08-30 1998-08-27 日本電気株式会社 磁気ヘッドスライダの浮上面加工方法
JP3086784B2 (ja) * 1996-08-19 2000-09-11 株式会社不二製作所 ブラスト加工方法及び装置
US6405426B1 (en) 1998-01-05 2002-06-18 Alps Electric Co., Ltd. Method of manufacturing a stepped magnetic head slider
KR100798904B1 (ko) * 2006-10-23 2008-01-29 백우인 일회용 주사기
KR100926457B1 (ko) * 2009-07-07 2009-11-13 (주)레프코리아 방열기능을 향상시킨 가로등

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS542110A (en) * 1977-06-08 1979-01-09 Hitachi Ltd Production of floating type magnetic head
JPS59132416A (ja) * 1982-11-26 1984-07-30 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 磁気ヘツド・スライダ・アセンブリ
JPS6076961A (ja) * 1983-09-30 1985-05-01 Sony Corp 固体材料の加工方法
JPS61240427A (ja) * 1985-04-17 1986-10-25 Seiko Epson Corp 磁気ヘツド
JPS6222066U (fr) * 1985-07-25 1987-02-10
JPS6229253U (fr) * 1985-07-31 1987-02-21

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56132416A (en) * 1980-03-19 1981-10-16 Toyota Motor Corp Device for disposing of exhaust gas of diesel engine
JPS6274572A (ja) * 1985-09-27 1987-04-06 Hitachi Metals Ltd 磁気ヘツドの面取加工方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS542110A (en) * 1977-06-08 1979-01-09 Hitachi Ltd Production of floating type magnetic head
JPS59132416A (ja) * 1982-11-26 1984-07-30 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 磁気ヘツド・スライダ・アセンブリ
JPS6076961A (ja) * 1983-09-30 1985-05-01 Sony Corp 固体材料の加工方法
JPS61240427A (ja) * 1985-04-17 1986-10-25 Seiko Epson Corp 磁気ヘツド
JPS6222066U (fr) * 1985-07-25 1987-02-10
JPS6229253U (fr) * 1985-07-31 1987-02-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5625513A (en) * 1994-11-14 1997-04-29 Nec Corporation Floating head slider having uniform spacing from recording medium surface
US5774304A (en) * 1996-01-16 1998-06-30 Seagate Technology, Inc. Disc head slider having center rail with asymmetric edge steps

Also Published As

Publication number Publication date
JP2940023B2 (ja) 1999-08-25
GB2245203B (en) 1993-08-18
JPH03149184A (ja) 1991-06-25
GB2245203A (en) 1992-01-02
KR910008655A (ko) 1991-05-31
GB9112704D0 (en) 1991-07-31
KR100275055B1 (ko) 2000-12-15

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