USD926715S1 - Support for a wafer for fabricating a semiconductor - Google Patents

Support for a wafer for fabricating a semiconductor Download PDF

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Publication number
USD926715S1
USD926715S1 US29/712,911 US201929712911F USD926715S US D926715 S1 USD926715 S1 US D926715S1 US 201929712911 F US201929712911 F US 201929712911F US D926715 S USD926715 S US D926715S
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United States
Prior art keywords
fabricating
wafer
support
semiconductor
view
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US29/712,911
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English (en)
Inventor
Akira Okabe
Yukio Takenaga
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Epicrew Corp
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Epicrew Corp
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Assigned to EPICREW CORPORATION reassignment EPICREW CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OKABE, AKIRA, TAKENAGA, Yukio
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US29/712,911 2019-07-29 2019-11-12 Support for a wafer for fabricating a semiconductor Active USD926715S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2019-16842F JP1651258S (enrdf_load_stackoverflow) 2019-07-29 2019-07-29
JP2019-016842 2019-07-29

Publications (1)

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USD926715S1 true USD926715S1 (en) 2021-08-03

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US29/712,911 Active USD926715S1 (en) 2019-07-29 2019-11-12 Support for a wafer for fabricating a semiconductor

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US (1) USD926715S1 (enrdf_load_stackoverflow)
JP (1) JP1651258S (enrdf_load_stackoverflow)
TW (1) TWD207362S (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD947913S1 (en) * 2019-05-17 2022-04-05 Asm Ip Holding B.V. Susceptor shaft
USD953309S1 (en) * 2020-03-11 2022-05-31 Zhicheng Zhou TV antenna
USD965044S1 (en) * 2019-08-19 2022-09-27 Asm Ip Holding B.V. Susceptor shaft
USD975665S1 (en) * 2019-05-17 2023-01-17 Asm Ip Holding B.V. Susceptor shaft
USD1022933S1 (en) * 2021-08-27 2024-04-16 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1052547S1 (en) * 2022-10-20 2024-11-26 Nuflare Technology, Inc. Semiconductor wafer and susceptor heating

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030029570A1 (en) * 2000-10-16 2003-02-13 Keisuke Kawamura Wafer holder, wafer support member, wafer holding device, and heat treating furnance
US6572814B2 (en) * 1998-09-08 2003-06-03 Applied Materials Inc. Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas
US20040124413A1 (en) * 2002-12-26 2004-07-01 Kazuhisa Arai Wafer support plate
USD552565S1 (en) * 2005-09-08 2007-10-09 Tokyo Ohka Kogyo Co., Ltd. Supporting plate
USD606952S1 (en) * 2009-01-16 2009-12-29 Asm Genitech Korea Ltd. Plasma inducing plate for semiconductor deposition apparatus
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD784276S1 (en) * 2013-08-06 2017-04-18 Applied Materials, Inc. Susceptor assembly
USD819580S1 (en) * 2016-04-01 2018-06-05 Veeco Instruments, Inc. Self-centering wafer carrier for chemical vapor deposition
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD864134S1 (en) * 2018-10-24 2019-10-22 Asm Ip Holding B.V. Susceptor
US10854498B2 (en) * 2011-07-15 2020-12-01 Asm Ip Holding B.V. Wafer-supporting device and method for producing same

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6572814B2 (en) * 1998-09-08 2003-06-03 Applied Materials Inc. Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas
US20030029570A1 (en) * 2000-10-16 2003-02-13 Keisuke Kawamura Wafer holder, wafer support member, wafer holding device, and heat treating furnance
US20040124413A1 (en) * 2002-12-26 2004-07-01 Kazuhisa Arai Wafer support plate
USD552565S1 (en) * 2005-09-08 2007-10-09 Tokyo Ohka Kogyo Co., Ltd. Supporting plate
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
USD606952S1 (en) * 2009-01-16 2009-12-29 Asm Genitech Korea Ltd. Plasma inducing plate for semiconductor deposition apparatus
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
US10854498B2 (en) * 2011-07-15 2020-12-01 Asm Ip Holding B.V. Wafer-supporting device and method for producing same
USD784276S1 (en) * 2013-08-06 2017-04-18 Applied Materials, Inc. Susceptor assembly
USD819580S1 (en) * 2016-04-01 2018-06-05 Veeco Instruments, Inc. Self-centering wafer carrier for chemical vapor deposition
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD864134S1 (en) * 2018-10-24 2019-10-22 Asm Ip Holding B.V. Susceptor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD947913S1 (en) * 2019-05-17 2022-04-05 Asm Ip Holding B.V. Susceptor shaft
USD975665S1 (en) * 2019-05-17 2023-01-17 Asm Ip Holding B.V. Susceptor shaft
USD965044S1 (en) * 2019-08-19 2022-09-27 Asm Ip Holding B.V. Susceptor shaft
USD953309S1 (en) * 2020-03-11 2022-05-31 Zhicheng Zhou TV antenna
USD1022933S1 (en) * 2021-08-27 2024-04-16 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1052547S1 (en) * 2022-10-20 2024-11-26 Nuflare Technology, Inc. Semiconductor wafer and susceptor heating

Also Published As

Publication number Publication date
JP1651258S (enrdf_load_stackoverflow) 2020-01-27
TWD207362S (zh) 2020-09-21

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