USD893441S1 - Base plate for a processing chamber substrate support - Google Patents

Base plate for a processing chamber substrate support Download PDF

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Publication number
USD893441S1
USD893441S1 US29/696,587 US201929696587F USD893441S US D893441 S1 USD893441 S1 US D893441S1 US 201929696587 F US201929696587 F US 201929696587F US D893441 S USD893441 S US D893441S
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United States
Prior art keywords
base plate
processing chamber
substrate support
chamber substrate
view
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Active
Application number
US29/696,587
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English (en)
Inventor
Shreesha Yogish Rao
Mukund Sundararajan
Cheng-Hsiung Tsai
Manjunatha P. Koppa
Steven Sansoni
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Applied Materials Inc
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Applied Materials Inc
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Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/696,587 priority Critical patent/USD893441S1/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TSAI, CHENG-HSIUNG, KOPPA, MANJUNATHA P., RAO, SHREESHA YOGISH, SANSONI, STEVEN, SUNDARARAJAN, MUKUND
Priority to TW108308059D01F priority patent/TWD214516S/zh
Priority to TW108308059F priority patent/TWD212933S/zh
Priority to JPD2020-20290F priority patent/JP1679911S/ja
Priority to JPD2020-45F priority patent/JP1679836S/ja
Application granted granted Critical
Publication of USD893441S1 publication Critical patent/USD893441S1/en
Active legal-status Critical Current
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US29/696,587 2019-06-28 2019-06-28 Base plate for a processing chamber substrate support Active USD893441S1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US29/696,587 USD893441S1 (en) 2019-06-28 2019-06-28 Base plate for a processing chamber substrate support
TW108308059D01F TWD214516S (zh) 2019-06-28 2019-12-27 用於處理腔室基板支撐件的基底板
TW108308059F TWD212933S (zh) 2019-06-28 2019-12-27 用於處理腔室基板支撐件的基底板
JPD2020-20290F JP1679911S (zh) 2019-06-28 2020-01-06
JPD2020-45F JP1679836S (zh) 2019-06-28 2020-01-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/696,587 USD893441S1 (en) 2019-06-28 2019-06-28 Base plate for a processing chamber substrate support

Publications (1)

Publication Number Publication Date
USD893441S1 true USD893441S1 (en) 2020-08-18

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Family Applications (1)

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US29/696,587 Active USD893441S1 (en) 2019-06-28 2019-06-28 Base plate for a processing chamber substrate support

Country Status (3)

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US (1) USD893441S1 (zh)
JP (2) JP1679836S (zh)
TW (2) TWD212933S (zh)

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD908645S1 (en) * 2019-08-26 2021-01-26 Applied Materials, Inc. Sputtering target for a physical vapor deposition chamber
USD913979S1 (en) * 2019-08-28 2021-03-23 Applied Materials, Inc. Inner shield for a substrate processing chamber
USD931241S1 (en) * 2019-08-28 2021-09-21 Applied Materials, Inc. Lower shield for a substrate processing chamber
US11177074B1 (en) 2005-04-07 2021-11-16 Amrad Manufacturing, Llc Capacitor for multiple replacement applications
US11183337B1 (en) 2005-04-07 2021-11-23 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
US11183330B2 (en) 2018-12-28 2021-11-23 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
US11183335B2 (en) 2013-05-21 2021-11-23 Amrad Manufacturing, Llc Power factor correction capacitors
US11183336B2 (en) 2005-04-07 2021-11-23 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
US11183338B2 (en) 2005-04-07 2021-11-23 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
US11183341B1 (en) 2006-12-29 2021-11-23 Amrad Manufacturing, Llc Electrolytic capacitive device
USD937329S1 (en) 2020-03-23 2021-11-30 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
US11189426B1 (en) 2005-04-07 2021-11-30 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
US11195663B2 (en) 2017-05-12 2021-12-07 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
USD940765S1 (en) 2020-12-02 2022-01-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD946638S1 (en) 2017-12-11 2022-03-22 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD947914S1 (en) * 2020-11-23 2022-04-05 Applied Materials, Inc. Base plate for a processing chamber substrate support
US11424077B1 (en) 2017-12-13 2022-08-23 Amrad Manufacturing, Llc Hard start kit for multiple replacement applications
US11551960B2 (en) 2020-01-30 2023-01-10 Applied Materials, Inc. Helical plug for reduction or prevention of arcing in a substrate support
USD975010S1 (en) * 2020-12-28 2023-01-10 Philip Morris Products S.A. Charger for an aerosol generating device
US11575298B2 (en) 2021-04-30 2023-02-07 Amrad Manufacturing, Llc Hard start kit for multiple replacement applications
USD985362S1 (en) * 2021-04-12 2023-05-09 Youjun HU Base bracket
USD986830S1 (en) * 2019-03-29 2023-05-23 Weidmüller Interface GmbH & Co. KG Standalone plug with socket cover
USD1007449S1 (en) 2021-05-07 2023-12-12 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
US11887878B2 (en) 2019-06-28 2024-01-30 Applied Materials, Inc. Detachable biasable electrostatic chuck for high temperature applications
US12100577B2 (en) 2019-08-28 2024-09-24 Applied Materials, Inc. High conductance inner shield for process chamber
USD1045798S1 (en) 2005-12-23 2024-10-08 Amrad Manufacturing, Llc Capacitor
US12125645B1 (en) 2020-06-05 2024-10-22 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD375961S (en) * 1995-08-03 1996-11-26 American Standard Inc. Base plate for a refrigeration compressor
US6046885A (en) * 1998-04-03 2000-04-04 Intri-Plex Technologies, Inc. Base plate suspension assembly in a hard disk drive with step in flange
US6324743B1 (en) * 1998-11-30 2001-12-04 Societe De Prospection Et D'inventions Techniques Spit Method for setting a piece fastening base plate
US6673651B2 (en) * 1999-07-01 2004-01-06 Oki Electric Industry Co., Ltd. Method of manufacturing semiconductor device including semiconductor elements mounted on base plate
US6853533B2 (en) 2000-06-09 2005-02-08 Applied Materials, Inc. Full area temperature controlled electrostatic chuck and method of fabricating same
US7324307B2 (en) * 2002-02-20 2008-01-29 Intri-Plex Technologies, Inc. Plated base plate for suspension assembly in hard disk drive
US7589950B2 (en) 2006-10-13 2009-09-15 Applied Materials, Inc. Detachable electrostatic chuck having sealing assembly
US7697260B2 (en) 2004-03-31 2010-04-13 Applied Materials, Inc. Detachable electrostatic chuck
USD623500S1 (en) * 2009-04-20 2010-09-14 Armorworks Enterprises, Llc Tie-down base plate
US8476793B2 (en) * 2008-05-03 2013-07-02 Anthony J. Aiello Stiffener tab for a spindle motor base plate
USD707257S1 (en) * 2012-04-30 2014-06-17 Samhongsa Co., Ltd. Base plate for spindle motor
US9666467B2 (en) 2014-11-21 2017-05-30 Varian Semiconductor Equipment Associates, Inc. Detachable high-temperature electrostatic chuck assembly
US9668873B2 (en) * 2013-03-08 2017-06-06 Biomet Manufacturing, Llc Modular glenoid base plate with augments
USD793816S1 (en) * 2014-08-19 2017-08-08 Frank J Alteslaben Saucer base plate
US9853579B2 (en) 2013-12-18 2017-12-26 Applied Materials, Inc. Rotatable heated electrostatic chuck
USD847982S1 (en) * 2016-02-04 2019-05-07 Atos Medical Ab Heat exchanger base plate
US10559327B2 (en) * 2018-02-28 2020-02-11 Nidec Corporation Base plate with electrodeposition coating film and method for producing base plate

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1605838S (zh) 2017-11-10 2018-06-04

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD375961S (en) * 1995-08-03 1996-11-26 American Standard Inc. Base plate for a refrigeration compressor
US6046885A (en) * 1998-04-03 2000-04-04 Intri-Plex Technologies, Inc. Base plate suspension assembly in a hard disk drive with step in flange
US6324743B1 (en) * 1998-11-30 2001-12-04 Societe De Prospection Et D'inventions Techniques Spit Method for setting a piece fastening base plate
US6673651B2 (en) * 1999-07-01 2004-01-06 Oki Electric Industry Co., Ltd. Method of manufacturing semiconductor device including semiconductor elements mounted on base plate
US6853533B2 (en) 2000-06-09 2005-02-08 Applied Materials, Inc. Full area temperature controlled electrostatic chuck and method of fabricating same
US7324307B2 (en) * 2002-02-20 2008-01-29 Intri-Plex Technologies, Inc. Plated base plate for suspension assembly in hard disk drive
US7697260B2 (en) 2004-03-31 2010-04-13 Applied Materials, Inc. Detachable electrostatic chuck
US7589950B2 (en) 2006-10-13 2009-09-15 Applied Materials, Inc. Detachable electrostatic chuck having sealing assembly
US8476793B2 (en) * 2008-05-03 2013-07-02 Anthony J. Aiello Stiffener tab for a spindle motor base plate
USD623500S1 (en) * 2009-04-20 2010-09-14 Armorworks Enterprises, Llc Tie-down base plate
USD707257S1 (en) * 2012-04-30 2014-06-17 Samhongsa Co., Ltd. Base plate for spindle motor
US9668873B2 (en) * 2013-03-08 2017-06-06 Biomet Manufacturing, Llc Modular glenoid base plate with augments
US9853579B2 (en) 2013-12-18 2017-12-26 Applied Materials, Inc. Rotatable heated electrostatic chuck
USD793816S1 (en) * 2014-08-19 2017-08-08 Frank J Alteslaben Saucer base plate
US9666467B2 (en) 2014-11-21 2017-05-30 Varian Semiconductor Equipment Associates, Inc. Detachable high-temperature electrostatic chuck assembly
USD847982S1 (en) * 2016-02-04 2019-05-07 Atos Medical Ab Heat exchanger base plate
US10559327B2 (en) * 2018-02-28 2020-02-11 Nidec Corporation Base plate with electrodeposition coating film and method for producing base plate

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11183336B2 (en) 2005-04-07 2021-11-23 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
US11651903B1 (en) 2005-04-07 2023-05-16 Amrad Manufacturing, Llc Capacitor for multiple replacement applications
US11177074B1 (en) 2005-04-07 2021-11-16 Amrad Manufacturing, Llc Capacitor for multiple replacement applications
US11183337B1 (en) 2005-04-07 2021-11-23 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
US11189426B1 (en) 2005-04-07 2021-11-30 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
US11183338B2 (en) 2005-04-07 2021-11-23 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
USD1045798S1 (en) 2005-12-23 2024-10-08 Amrad Manufacturing, Llc Capacitor
US11631550B2 (en) 2006-12-29 2023-04-18 Amrad Manufacturing, Llc Electrolytic capacitor with multiple sections
US11183341B1 (en) 2006-12-29 2021-11-23 Amrad Manufacturing, Llc Electrolytic capacitive device
US11183335B2 (en) 2013-05-21 2021-11-23 Amrad Manufacturing, Llc Power factor correction capacitors
US11189425B1 (en) 2013-05-21 2021-11-30 Amrad Manufacturing, Llc Power factor correction capacitors
US11195663B2 (en) 2017-05-12 2021-12-07 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
USD946638S1 (en) 2017-12-11 2022-03-22 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
US11424077B1 (en) 2017-12-13 2022-08-23 Amrad Manufacturing, Llc Hard start kit for multiple replacement applications
US11183330B2 (en) 2018-12-28 2021-11-23 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
USD986818S1 (en) * 2019-03-29 2023-05-23 Weidmüller Interface GmbH & Co. KG Wallbox and power outlet
USD986830S1 (en) * 2019-03-29 2023-05-23 Weidmüller Interface GmbH & Co. KG Standalone plug with socket cover
US11887878B2 (en) 2019-06-28 2024-01-30 Applied Materials, Inc. Detachable biasable electrostatic chuck for high temperature applications
USD908645S1 (en) * 2019-08-26 2021-01-26 Applied Materials, Inc. Sputtering target for a physical vapor deposition chamber
US12100577B2 (en) 2019-08-28 2024-09-24 Applied Materials, Inc. High conductance inner shield for process chamber
USD913979S1 (en) * 2019-08-28 2021-03-23 Applied Materials, Inc. Inner shield for a substrate processing chamber
USD931241S1 (en) * 2019-08-28 2021-09-21 Applied Materials, Inc. Lower shield for a substrate processing chamber
US11551960B2 (en) 2020-01-30 2023-01-10 Applied Materials, Inc. Helical plug for reduction or prevention of arcing in a substrate support
USD970566S1 (en) 2020-03-23 2022-11-22 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD937329S1 (en) 2020-03-23 2021-11-30 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
US12125645B1 (en) 2020-06-05 2024-10-22 Amrad Manufacturing, Llc Capacitor with multiple elements for multiple replacement applications
USD960216S1 (en) * 2020-11-23 2022-08-09 Applied Materials, Inc. Base plate for a processing chamber substrate support
USD947914S1 (en) * 2020-11-23 2022-04-05 Applied Materials, Inc. Base plate for a processing chamber substrate support
USD966357S1 (en) 2020-12-02 2022-10-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD940765S1 (en) 2020-12-02 2022-01-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD975010S1 (en) * 2020-12-28 2023-01-10 Philip Morris Products S.A. Charger for an aerosol generating device
USD985362S1 (en) * 2021-04-12 2023-05-09 Youjun HU Base bracket
US11575298B2 (en) 2021-04-30 2023-02-07 Amrad Manufacturing, Llc Hard start kit for multiple replacement applications
USD1007449S1 (en) 2021-05-07 2023-12-12 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target

Also Published As

Publication number Publication date
TWD214516S (zh) 2021-10-11
JP1679911S (zh) 2021-02-22
JP1679836S (zh) 2021-02-22
TWD212933S (zh) 2021-08-01

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