US4177568A - Measurement head - Google Patents

Measurement head Download PDF

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Publication number
US4177568A
US4177568A US05/887,241 US88724178A US4177568A US 4177568 A US4177568 A US 4177568A US 88724178 A US88724178 A US 88724178A US 4177568 A US4177568 A US 4177568A
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US
United States
Prior art keywords
probe
measurement
work
measurement head
head according
Prior art date
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Expired - Lifetime
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US05/887,241
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English (en)
Inventor
Walter Werner
Klaus Herzog
Franz Szenger
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Carl Zeiss AG
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Carl Zeiss AG
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/02—Air
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/03—Photoelectric
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/13—Wire and strain gauges

Definitions

  • the present invention relates to a work-probing measurement head for use in a coordinate-measuring machine, for determining the coordinates in space of one or more points of probe contact with a workpiece moved relative to the measurement head. More particularly, the invention relates to such a head involving a machine-mountable housing and a probe movably suspended therefrom and equipped with one or more work-contacting probe pins.
  • Such measurement heads known also as multicoordinate probes, are known in which the probe pin is fastened to a torsionally rigid succession of linear guidance systems which are free of clearance and friction and are developed as spring parallelograms to implement a three-dimensional coordinate system.
  • the probe pin is fastened to a torsionally rigid succession of linear guidance systems which are free of clearance and friction and are developed as spring parallelograms to implement a three-dimensional coordinate system.
  • one of the spring parallelograms Upon contact with the workpiece, one of the spring parallelograms is deflected and produces a work-contact pulse via an associated signal generator.
  • Such probes are, to be sure, extremely precise but they require a high-precision construction and are therefore relatively expensive. Furthermore, a force sufficient to deflect the corresponding spring parallelogram is required for development of a work-contact pulse.
  • a measurement head is also known in which the part secured to the coordinate-measuring machine is provided with V-bearings in which extensions of circular cross section are connected to the movable probe and engage under spring action.
  • the probe carried by the movable measurement-head part moves out of its defined position of rest, whereby at least one of its extensions is lifted out of the corresponding V-bearing.
  • a circuit is interrupted or a separate switch element is actuated so that a work-contact pulse is produced.
  • a force sufficient to lift an extension out of the associated bearing is necessary to develop a work-contact pulse.
  • the object of the present invention is now to provide a low-price measurement head in which the force necessary for producing a touching pulse can be maintained practically as small as desired and in which, furthermore, in the event of accidental rapid contact of the workpiece, destruction of the measurement head and/or plastic deformation of the observed object can be avoided.
  • the moving part of the measurement head consists of two parts which are rigidly connected with each other and between which there are arranged one or more measurement elements which are highly sensitive to tension and compression, and that the connection between the fixed and moving measurement-head parts is effected via a coupling member which in its positions of rest very accurately establishes the position in space of the moving measurement-head part.
  • sensors which respond in a highly sensitive manner to mechanical and/or electrical stimuli, for instance strain gauges or piezoelectric elements.
  • the moving part of the measurement head itself consists of a first part serving to receive the probe pin and a second part which is connected with the coupling member. These two parts have flat surfaces adjoining each other and are firmly connected together, the measurement elements being arranged between the flat surfaces.
  • a slight, scarcely measurable force on the probe pin has the result that despite the firm connection of the two parts of the moving part of the measurement head the highly sensitive sensors respond.
  • the signal produced by them is fed to a trigger of adjustable level. As soon as the signal exceeds such level, a work-contact pulse is released to fixedly establish the positional data then present on the measurement systems of the coordinate measuring machine.
  • Electric-switch means for evaluating the signal produced by the measurement-probe elements are advisedly arranged in the measurement head itself.
  • the sensitivity of the probe pin depends on the adjustment of threshold-signal level. If this level is made very low, the resultant high sensitivity necessarily means that a "work-contact" signal will be developed, even in the circumstance of an unintended vibration of the measurement machine or of the measurement head.
  • the first "work-contact” pulse i.e., the very first such pulse, is forwarded for determination of the measurement value only if a second pulse, the so-called characterizing pulse, is produced within an adjustably selected period of time.
  • Coupling mechanism between the fixed part and the moving part of the measurement head can be variously developed. It must provide assurance that upon a lifting of the probe pin from the workpiece, the three-dimensional position of the probe pin which then stands free is restored again with a high degree of precision.
  • FIG. 1 is a side view of one embodiment of the measurement head, a portion of the housing portion being broken-away to reveal contents;
  • FIG. 2 is a fragmentary vertical sectional view of the movable part of the measurement head of FIG. 1;
  • FIG. 3 is a fragmentary sectional view through another embodiment of the measurement head
  • FIG. 4 is a sectional view along the line IV--IV of FIG. 3;
  • FIG. 5 is a top view of an embodiment of an intermediate ring which may be used with either of the measurement heads of FIG. 3;
  • FIG. 6 is a fragmentary sectional view through an intermediate ring equipped with air-bearing means which provides suspension via a spherical cushion of air;
  • FIG. 7 graphically shows typical time-variation of the signal generated when one of the measurement-probe elements contacts a workpiece
  • FIG. 8 is a fragmentary sectional view through another embodiment of the movable part of the measurement head.
  • FIG. 9 is a sectional view along the line IX--IX of FIG. 8.
  • FIGS. 10 and 11 are fragmentary sectional views through further embodiments of the measurement head.
  • 1 is the part of the measurement head which is firmly attached to the housing and is suitably connected via a mounting flange 2 to a coordinate measuring machine, not shown in the drawing.
  • the part of the measurement head which is movable with respect to the part 1 is designated 3 and carries probe-pin means 4.
  • the fixed part 1 is provided with angularly spaced axial extensions 1a, 1b and 1c, to each of which one of three bearing balls is firmly connected; two of these balls are visible in FIG. 1 and are identified 5a, 5b.
  • the movable part 3 of the measurement head consists, as shown in FIG. 2, of two parts 3a and 3b, the flat surfaces of which adjoin each other along the upper edge of the part 3a.
  • the parts 3a and 3b are firmly connected to each other, via three piezoelectric elements uniformly distributed over the periphery; said piezoelectric elements are highly sensitive to tension and compression, and they are bonded to both parts 3a and 3b to establish the connection therebetween.
  • One of these elements can be noted in FIG. 2 and is designated 6.
  • part 3b The underside of part 3b is firmly connected to three bearing balls distributed uniformly over its circumference, the ball 7a being visible in FIG. 2, and balls 7a, 7b being visible in FIG. 1.
  • FIG. 8 is an intermediate ring which in the embodiment shown has three bearings uniformly distributed over its circumference; it is later explained (in connection with FIG. 5) that the bearings are preferably different at locations, radially directed V-groove bearings being shown at 8a and 8c.
  • a tension spring 9 which is connected via chains or wires with the intermediate ring 8, spring-loading the latter against part 1.
  • the balls (5a, 5b, etc.) are spring-loaded in their engagement with bearings (8a, 8b, etc.) of the intermediate ring 8.
  • the moving part 3 engages, by means of its balls (7a, 7b, etc.) into the correspondingly spaced bearings (8a, 8b, etc.) of the intermediate ring 8 and is held in position of rest by means of an angularly spaced plurality of magnets, one pair of which is designated 10, it being understood that the ring 8 and part 3b are of non-magnetic material.
  • Electric signal-processing switch elements 11 are arranged in part 3a and serve to transform the signals supplied by the measurement element 6 into the actual measurement signal.
  • the measurement head of FIGS. 1 and 2 is moved, by a slide or other movable part of the measurement machine, towards the portion of the workpiece to be contacted for measurement.
  • the measurement elements 6 respond and produce a signal, the envelope profile of which is shown by way of example in FIG. 7.
  • the switch elements 11 contain a trigger of adjustable threshold level. As soon as the measurement signal exceeds the threshold level of the trigger, a pulse is generated to establish, for the measurement systems of the measuring machine, a fix of the then-applicable positional data for the measurement probe; the time of this fix is designated t 1 in FIG. 7.
  • the trigger threshold level is set low, i.e, with high sensitivity of the measurement head, another inquiry is made by the circuitry at switch elements 11, after an adjustable period of time (e.g., at the time designated t 2 in FIG. 7) as to whether an output-signal voltage is still being developed at measurement elements 6. Since the time interval t 2 -t 1 is short (e.g., in the order of magnitude of 100 ms), such a voltage is in all cases present, and a second pulse, the so-called characterizing pulse, is produced. This second pulse is operative to forward to an evaluation circuit (not shown, but forming part of the measuring machine) the pulse derived from first probe contact with the workpiece.
  • an evaluation circuit not shown, but forming part of the measuring machine
  • the measurement head is used to probe an internal surface, for instance, a horizontal bore hole of a workpiece
  • one of the horizontal pin extensions of the probe means 4 of FIG. 1 is employed to contact such inner surface of the workpiece.
  • the intermediate ring 8 (together with the moving part 3) is displaced with respect to the fixed part 1, the bearing balls 5a, 5b, etc. being axially moved out of their corresponding bearings (8a, 8c, etc.) on the intermediate ring 8.
  • the fixed measurement-head part is designated 12; and the moving measurement-head part consists of the two parts 13a and 13b which are firmly connected with each other and carry the probe pin 14.
  • the parts 13a and 13b adjoin each other along flat surfaces and fine displacement-sensitive measurement elements 16a, 16b . . . 16e (which may, for instance, be piezoelectric elements) are arranged between them.
  • the elements 16a and 16b respond, for instance, to work-contact force in the x-direction, while a second such pair of elements (not shown) will be understood to similarly respond in the y-direction, and the element 16e provides similar response to contact force in the z-direction.
  • the moving part 13b carries three bearing balls (17a, 17b and etc.) at uniform angularly spaced peripheral locations, the balls 17a and 17b being visible in the sectional view of FIG. 3.
  • the relatively fixed or mounted measurement-head part 12 is firmly connected with three angularly spaced bearing balls 15a, 15b, etc.
  • An intermediate ring 18 which, in the examples shown, has three V-bearings 18a, 18b, etc. distributed uniformly around its circumference, is shown engaging the bearing balls 17a and 15a at V-bearing 18a; ring 18 is also shown engaging balls 15b and 17b at V-bearing 18b, but the locations of the three V-bearings 18a-18b-etc. will be understood to be 120° apart.
  • Coil-spring means designated 19 presses the intermediate ring 18 against the fixed part 12, and a tension spring 20 resiliently loads the movable part 13b against the intermediate ring 18.
  • Operation of the measurement head shown in FIGS. 3 and 4 corresponds essentially to that of the measurement head of FIGS. 1 and 2.
  • the movable measurement-head parts 13a and 13b (together with the probe pin 14) move relative to the intermediate ring 18, at least one of the balls 17a, 17b, etc. or 15a, 15b, etc. leaving the associated V-bearing in ring 18.
  • the intermediate ring 18 of FIG. 3 is provided with V-bearings in the examples shown. However, it is also possible to replace these V-bearings with other bearings, as shown in the example of FIG. 5.
  • the intermediate ring designated 28 therein bears two V-bearings 21 and 22, as well as two flat bearing plates 23 and 24.
  • Another bearing 25 is developed as a concave or negative form of a pyramid apex. The effect obtainable with this bearing, namely the precise locating of the bearing ball, can also be obtained by means of a bearing 26 which consists of three balls in whose center the bearing ball then engages.
  • a bearing 26 which consists of three balls in whose center the bearing ball then engages.
  • it is preferred that bearings corresponding to the bearings 21, 23, and 25 of FIG. 5 are used at locations 8a, 8b, etc.
  • each of these bearings 21, 23, 25 is such as to receive bearing balls 5a, 5b, etc. and 7a, 7b, etc. and to position parts 1 and 3 in axial alignment, in absence of work contact.
  • FIG. 6 is a fragmentary sectional view through a movable measurement-head disc part 33 carrying a plurality of angularly spaced bearing balls 35.
  • an intermediate ring 38 which has bearing places developed in the shape of spherical concavities, which may, for instance, be produced by using corresponding bearing balls in the part 33 to mold inserts 39, shown in the intermediate ring 38.
  • Air is advisedly blown into the bearing region through a bore hole 34, so that the ball 35 rests on a thin cushion of air.
  • pneumatic pressure-responsive means 31 is mounted to respond to very slight changes in the cushion or gap width between the parts 35 and 39.
  • pneumatic measurement means can be used as trigger means to release the second pulse of the described work-contacting process, for example, at detected achievement of the same pressure level at the pneumatic means 31 associated with each of the plural angularly spaced air-cushion bearings involved in suspending part 33 with respect to ring 38.
  • FIGS. 8 and 9 show a probe pin which consists of the two parts 44 and 45. These two parts are firmly axially connected with each other via radially compliant extensions 45a, 45b, and 45c. Between them a tripartite piezoelectric element 46 is arranged. By means of this element all three coordinate directions can be covered.
  • the probe pin of FIGS. 8 and 9 has the advantage that the contact-sensitive measurement element 46 is arranged in the direct vicinity of the work-contact ball. Thus, upon contact with a workpiece, a work-contact pulse is immediately produced, without transmitting this pulse by sound conduction to the above-described measurement elements.
  • the probe-pin part 44 can therefore be and is preferably long and narrow, while also providing very exact and accurately reproducible work-contacting measurement signals.
  • FIG. 10 shows another embodiment of a measurement head, wherein the fixed measurement-head part is designated 52, while the movable measurement-head part (which carries the probe pin 54) is designated 55. Between the parts 52 and 55 there is arranged a spring bellows 56 which is filled with oil in order to avoid oscillations.
  • piezoelectric measurement elements may be arranged in the movable measurement head part 55, as in the other embodiments already discussed, FIG.
  • the spring bellows may be provided with one or more strain gages 57 (e.g., in a Wheatstone bridge) which upon a relieving movement of the probe pin 54 will deliver a signal which can be processed to form the second pulse.
  • a coil spring may also be provided. And in all cases, it will be understood to be necessary for the coupling system to exactly define and restore the three-dimensional position of the probe pin, in its free-standing (i.e., non work-contacting) orientation.
  • the embodiment of the measurement head shown in FIG. 11 will be recognized as corresponding essentially in its construction to that of FIG. 3.
  • the housing part 62 which is firmly connected with the measuring machine is articulately connected via an intermediate ring 68 with the deflectable part 63, and the part 63 bears a probe pin 64.
  • a concave mirror 65 is firmly arranged on the intermediate ring or plate 68. Said mirror focuses light from a source 66 (which is secured to and within the housing) onto a receiver 67 which is also secured to and within the housing.
  • This receiver may, for instance, be a four-quadrant photodiode. In condition of rest, all four quadrants of the receiver are uniformly acted on, so that subsequent switch elements do not supply a signal. But as soon as the part 63 is deflected, the receiver 67 supplies an output signal, which can be used to produce a characterizing pulse.
  • the maintaining of the precise zero position of the deflectable part 63 when the feeler pin 64 is standing free can be automatically monitored, for the condition of equal outputs for all four quadrants.
  • all embodiments of the measurement head are of simple and economical construction. Only very small masses need be moved so that small dynamic forces, and little strain is improsed on the measuring machine.
  • the new measurement head makes possible a rapid work-contacting procedure and therefore permits of different contacts in rapid sequence, whereby the measurement time can be decreased as compared with known systems.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
US05/887,241 1977-03-19 1978-03-16 Measurement head Expired - Lifetime US4177568A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2712181 1977-03-19
DE2712181A DE2712181C3 (de) 1977-03-19 1977-03-19 Tastsystem

Publications (1)

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US4177568A true US4177568A (en) 1979-12-11

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US05/887,241 Expired - Lifetime US4177568A (en) 1977-03-19 1978-03-16 Measurement head

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US (1) US4177568A (enrdf_load_stackoverflow)
JP (1) JPS6048681B2 (enrdf_load_stackoverflow)
CH (1) CH625045A5 (enrdf_load_stackoverflow)
DE (1) DE2712181C3 (enrdf_load_stackoverflow)
FR (1) FR2384230A1 (enrdf_load_stackoverflow)
GB (1) GB1586052A (enrdf_load_stackoverflow)
IT (1) IT1102107B (enrdf_load_stackoverflow)

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IT201900006536A1 (it) 2019-05-06 2020-11-06 Marposs Spa Sonda per il controllo della posizione o di dimensioni lineari di una parte meccanica
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Also Published As

Publication number Publication date
DE2712181C3 (de) 1981-01-22
JPS6048681B2 (ja) 1985-10-29
DE2712181B2 (enrdf_load_stackoverflow) 1980-04-30
IT1102107B (it) 1985-10-07
FR2384230B1 (enrdf_load_stackoverflow) 1984-12-28
DE2712181A1 (de) 1978-09-21
GB1586052A (en) 1981-03-18
JPS53117464A (en) 1978-10-13
IT7848491A0 (it) 1978-03-17
CH625045A5 (enrdf_load_stackoverflow) 1981-08-31
FR2384230A1 (fr) 1978-10-13

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