GB1568053A - Contactsensing probe - Google Patents

Contactsensing probe Download PDF

Info

Publication number
GB1568053A
GB1568053A GB4071875A GB4071875A GB1568053A GB 1568053 A GB1568053 A GB 1568053A GB 4071875 A GB4071875 A GB 4071875A GB 4071875 A GB4071875 A GB 4071875A GB 1568053 A GB1568053 A GB 1568053A
Authority
GB
United Kingdom
Prior art keywords
surfaces
member
location
convergent
movable member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4071875A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rolls-Royce PLC
Renishaw Electrical Ltd
Original Assignee
Rolls-Royce PLC
Renishaw Electrical Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rolls-Royce PLC, Renishaw Electrical Ltd filed Critical Rolls-Royce PLC
Priority to GB4071875A priority Critical patent/GB1568053A/en
Publication of GB1568053A publication Critical patent/GB1568053A/en
Application status is Expired legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic means
    • G01B7/004Measuring arrangements characterised by the use of electric or magnetic means for measuring coordinates of points
    • G01B7/008Measuring arrangements characterised by the use of electric or magnetic means for measuring coordinates of points using coordinate measuring machines
    • G01B7/012Contact-making feeler heads therefor

Description

PATENT SPECIFICATION

( 21) Application No 40718/75 ( 22) Filed 4 Oct 1975 ( 61) Patent of Addition to No 1445977 dated 14 Sept 1973 ( 23) Complete Specification filed 1 Oct 1976 ( 44) Complete Specification published 21 May 1980 ( 51) INT CL 3 GOIB 5/02//7/02 ( 52) Index at acceptance GIM 2 A 2 2 F 2 H GIN ID 3 IF AGA ( 72) Inventor DAVID ROBERTS MCMURTRY ( 11) 1 568 053 ( 19),4 ( 54) CONTACT-SENSING PROBE ( 71) We, ROLLS-ROYCE LIMITED, a British Company of 65, Buckingham Gate, London, SWIE 6 AT (formerly known as Rolls-Royce ( 1971) Limited and of Norfolk House, St James's Square, London, SWIY 4 JR) and RENISHAW ELECTRICAL LIMITED, a British Company of Gloucester Street, Wotton-under-Edge, Gloucestershire, GL 12 7 DN, do hereby declare the invention, for which we pray that a patent may be granted to us, and the method by which it is to be performed, to be particularly described in and by the

following statement:-

This invention relates to a contact-sensing probe for use in machines, e g inspection machines, adapted to signal the co-ordinate position of the probe when it makes contact with the workpiece.

This invention is an improvement in or modification of the invention described in our Patent No 1,445,977 wherein is claimed a probe for use in measuring apparatus, comprising a fixed member, a movable member having a stylus, either two or three locating elements provided on one of the members at spaced apart locations thereon, each element being disposed between a respective pair of mutually convergent surfaces provided on the other member, a bias means arranged to act on the movable member into a position in which each element engages both surfaces of the respective said pair, the movable member being movable against the action of the bias means to break engagement at at least one of said surfaces, and means for detecting a said engagement-breaking movement of the movable member.

It is an object of this invention to provide an improvement in or modification of the organisation of the surfaces supporting said movable on said fixed member.

According to this invention there is provided a contact-sensing probe comprising a movable member including a stylus and supported on a fixed member at two locations spaced apart in a first direction, at one of said locations there being an element provided on one of the members and situated in a recess formed by a conical surface or by convergent surfaces provided on the other member and at the other said location there being an element provided on one of the members situated between convergent surfaces provided on the other member, the convergent surfaces at each said location being convergent in a second direction transverse to said first direction, the convergent surface or surfaces at said one location being arranged to constrain the movable member for universal pivotal motion, the convergent surfaces at the other one of said locations being arranged to constrain the movable member against movement in a third direction transverse to said first and second directions, bias means for urging the movable member into engagement with said fixed member so that at each said location the element slides on said surfaces into a positive engagement therewith and thereby to provide a positive rest position for the movable member, the movable member being displaceable from said rest position in opposition to the bias means when a force is applied to the stylus.

An example of a probe according to this invention will now be described with reference to the accompanying drawing wherein:Figure 1 is a partly sectioned elevation of the probe, Figure 2 is a section on the line II-II in Figure 1, Figure 3 is a section on the line III-III in Figure 1, and Figure 4 is a detail of a modification.

In the following description reference is made to directions X, Y, Z being the mutually perpendicular directions of the rectangular co-ordinate system as indicated in Figures 1 and 2.

Referring to Figures 1 to 3, a movable member 9 comprises a stylus 10 connected to a rod-shaped body 11 elongate along an axis 11 a normally extending in the direction Z being a first direction The stylus has at the free or sensing end thereof a disc 12 whereby to contact a work piece 13 The In 00 e D "-I 1,568,053 body 11 is supported on a fixed member or housing 14 provided with a spigot 15 for fixed attachment to the head of a measuring machine (not shown) supporting the probe for three-dimensional movement relative to the work piece.

The member 9 is supported in the housing 14 at two locations A, B spaced apart in the direction Z At location A the -member 9 embodies a spherical element 16 engaging a complementary recess 17 constituted by mutually convergent surfaces 20 of three equi-spaced balls 18 secured to the housing.

The recess 17 has an axis 17 a lying in the direction X being a second direction The directions Y, Z, the direction Y being a third direction It is clear that the balls 18 engage the element 16 at three points thereon.

At location B the member 9 has a cylindrical element 21 concentric with the axis 11 a and engaging a complementary recess 22 constituted by mutually convergent surfaces 23 of two balls 24 whose centres lie in the plane 19 on a line perpendicular to the axis 17 a It is clear that the balls 24 engage the element 21 at two points thereon The recesses 17, 22 are convergent in the second direction X, i e a direction transverse to the first direction Z.

The member 9 is biased into engagement with the balls 18, 24 by a spring 25 arranged between the housing 14 and the body 11 in a position intermediate between the locations A, B When engaged with all five balls, then, taking into account the bias of the spring 25, the member 9 is positively constrained by the balls 18 for universal pivotal motion about the centre of the element 16 and by the balls 24 against movement such as would enable the disc 12 to move in the third direction Y, i e transversely to the first and second directions Z, X When thus constrained the member is said to be in a rest position More specifically the bias created by the force of the spring and the convergence of the ball surfaces, causes the elements 16, 21, to slide into the lowest possible position in the recesses 17, 22 As will be explained, the member 9 is displaceable from the rest position in opposition to the force of the spring by a force applied to the disc 12 by engagement thereof with the work piece and the member 9 will be returned to the rest position by said bias on cessation of the latter force.

Any movement of the member 9 relative to the housing 14 is detectable by a metal proximity sensor 26 provided in a nonmetallic part of the housing For the purpose of detecting such movement use is made of the fact that movement of the disc 12 in any of the directions X, Y, Z must result in tilting of the member 9 such that axis 11 a thereof moves out of parallelism with the Y-Z plane Thus, movement in the Y direction causes the cylindrical part 21 to slide up one or other of the surfaces 23 and so pivot member 9 about the axis 17 a and out of the Y-Z plane Similarly, movement in the direction Z causes the ball 16 to slide up at least one of the three balls 18 and tilt the member 9 on the balls 24 Movement in the direction X causes the member 9 to rock on the balls 18 or the balls 24 Any of these movements is effectively detectable at a portion 27 of the body 11 substantially medially between the locations A, B and the sensor 26 is mounted accordingly in a position adjacent the portion 27 and such as to detect movement thereof perpendicular to the Y-Z plane.

It will be seen that movement in any of the directions X, Y, Z may take place in either sense of direction For example, movement of the disc 12 in the direction Z may take place towards or away from the housing The latter situation applies when the machine is used to raise the disc 12 against an undercut surface 13 a of the work piece.

When, after contact with work piece, the probe is moved so that contact with the work piece is disestablished and the force on the disc 12 ceases, the bias created by the spring and the convergent surfaces causes the elements 16, 21 to slide back into the lowest position in the recesses 17, 22 so that the member 9 is returned to the rest position.

To ensure good sliding action and high repeatability in attaining the rest position the elements 16, 22 and the balls 18, 24 are made of hardened and polished steel.

Commercial ball bearing finishes are sufficient for this purpose.

The sensor 26 is known per se as comprising for example a pair of electromagnetic induction coils 28, 29 connected in a bridge circuit 30 such that a change in the reactance of one of the coils, as may be produced by a change of position of the stylus, varies the bridge output, e g, away from zero The bridge output is taken through an amplifier 31 to a suitable indicating means, e g a volt meter.

The measuring machine referred to is known per se and generally comprises a said head supported by carriages movable respectively in the directions X, Y and Z respectively The carriages are provided with means for measuring the co-ordinate position of the head and thus of the probe attached thereto A work piece is measured by measuring the position of the head at the instant when, on contact between the disc 12 and the work piece 13, the output of the sensor 26 changes.

It will be clear that in the absence of provision to the contrary the member 9 is rotatable about the axis l la This is no 1,568,053 disadvantage because if the sensing end of the stylus is rotationally symmetrical about the axis 1 a, e g as in the case of the disc 12, the angular position of the member 9 about latter axis is immaterial However if the sensing end of the stylus is laterally off-set from the axis 1 la, as shown by a lateral arm 32 and spherical end 33, (Figure 4) the need arises for inhibiting rotation of the member 9 about the axis l la To this end Figures 1, 3, the member 9 has secured thereto a lateral arm 34 the free end 35 of which is provided with a convex surface resting at a single point location C, on a flat surface 36 on the housing 14 The location C lies with the locations A and B at three corners of a triangle extending in a plane including the directions Y, Z The spring 25 is connected between the arm 34 and the housing in a position relatively closer to the end 35 than the axis I la because the bias pressure required at the locations A, B is smaller than at the location C However, two springs may be provided, one at the location C and one directly intermediate between the locations A, B. A conical recess which may be used instead of the recess formed by the balls 18.

At each location A or B the recess 17 or 23 may be provided on either one of the members 9, 14, the element being provided on the corresponding other one of the members 9, 14 Instead of the one sensor 26 shown, two such sensors may be provided respectively adjacent the locations A, B. A divisional of this application has been made in Application No 22369/1979 Serial No 1568054.

Claims (4)

WHAT WE CLAIM IS:-
1 A contact-sensing probe comprising a movable member including a stylus and supported on a fixed member at two locations spaced apart in a first direction, at one of said locations there being an element provided on one of the members and situated in a recess formed by a conical surface or by convergent surfaces provided on the other member and at the other said location there being an element provided on one of the members situated between convergent surfaces provided on the other member, the convergent surfaces at each said location being convergent in a second direction trasnverse to said first direction, the convergent surface or surfaces at said one location defining being arranged to constrain the movable member for universal pivotal motion, the convergent surfaces at the other one of said locations being arranged to constrain the movable member against movement in a third direction transverse to said first and second directions, bias means for urging the movable member into engagement with said fixed member so that at each said location the element slides on said surfaces into a positive engagement therewith thereby to provide a rest position for the movable member, the movable member being displaceable from said rest position in opposition to the bias means when a force is applied to the stylus.
2 A probe according to Claim I wherein the surfaces at said one location are constituted by three mutually convergent spherical surfaces and the element has a spherical surface thereby to be engageable with said three convergent surfaces at three points.
3 A probe according to Claim 1 or Claim 2 wherein the surfaces at said other location are constituted by two convergent surfaces and said element has a surface which is convex relative to said two surfaces thereby to be engageable with the latter surfaces at two points.
4 A probe according to any one of Claims 1, 2 or 3, wherein the movable member is also supported on the fixed member at a third location lying with said two locations at the three corners of a triangle extending in a plane including said first and third directions, one of said members having at said third location a flat surface engageable by a convex surface of the other member at one point, said bias means being arranged to urge the movable member into engagement with the fixed member at all said locations.
A probe according to any one of Claims 1 to 4 wherein a single proximity sensor is situated in a position intermediate between said two locations.
For the Applicants, J WAITE, Chartered Patent Agent.
Printed for Her Majesty's Stationery Office, by the Courier Press, Leamington Spa 1980 Published by The Patent Office, 25 Southampton Buildings London, WC 2 A l AY, from which copies may be obtained.
GB4071875A 1975-10-04 1975-10-04 Contactsensing probe Expired GB1568053A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB4071875A GB1568053A (en) 1975-10-04 1975-10-04 Contactsensing probe

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
GB4071875A GB1568053A (en) 1975-10-04 1975-10-04 Contactsensing probe
IT2785576A IT1074001B (en) 1975-10-04 1976-09-30 of contact detection probe
DE19762644027 DE2644027C3 (en) 1975-10-04 1976-09-30
FR7629610A FR2326681B1 (en) 1975-10-04 1976-10-01
JP11925376A JPS575281B2 (en) 1975-10-04 1976-10-04
US06/031,150 US4301338A (en) 1975-10-04 1979-04-18 Contact-sensing probe
US06/276,540 US4375723A (en) 1975-10-04 1981-06-23 Contact-sensing probe

Publications (1)

Publication Number Publication Date
GB1568053A true GB1568053A (en) 1980-05-21

Family

ID=10416278

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4071875A Expired GB1568053A (en) 1975-10-04 1975-10-04 Contactsensing probe

Country Status (6)

Country Link
US (2) US4301338A (en)
JP (1) JPS575281B2 (en)
DE (1) DE2644027C3 (en)
FR (1) FR2326681B1 (en)
GB (1) GB1568053A (en)
IT (1) IT1074001B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2302588B (en) * 1995-06-21 1998-05-20 Zeiss Stiftung Probe changing system

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4136458B1 (en) * 1976-10-01 1989-07-04 Renishaw Plc
IT1088539B (en) * 1976-12-24 1985-06-10 Rolls Royce Probe for use in apparatus for measuring
DE2712181C3 (en) * 1977-03-19 1981-01-22 Fa. Carl Zeiss, 7920 Heidenheim
DE2947394C2 (en) * 1979-11-24 1987-06-11 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar, De
IT1145540B (en) * 1981-11-20 1986-11-05 Finike Italiana Marposs Head for checking linear dimensions
JPH0239205Y2 (en) * 1982-03-16 1990-10-22
US4461936A (en) * 1982-03-18 1984-07-24 Yaskawa Electric Mfg. Co., Ltd. Contact sensing device
JPH0210881B2 (en) * 1982-05-11 1990-03-12 Mitutoyo Corp
JPH0342947Y2 (en) * 1982-10-15 1991-09-09
JPS59131002U (en) * 1983-02-21 1984-09-03
US4509265A (en) * 1983-03-21 1985-04-09 General Electric Company Turbine blade measurement
US4523063A (en) * 1983-12-05 1985-06-11 Gte Valeron Corporation Touch probe having nonconductive contact carriers
US4553001A (en) * 1983-12-05 1985-11-12 Gte Valeron Corporation Touch probe having nonconductive contact carriers
CH663841A5 (en) * 1984-05-28 1988-01-15 Maag Zahnraeder & Maschinen Ag Dental probe.
US4786769A (en) * 1985-03-06 1988-11-22 Process Equipment Company Safety coupling device for robotic tooling
US4683354A (en) * 1985-06-28 1987-07-28 Litton Systems, Inc. Apparatus for supporting and aligning equipment
US4734549A (en) * 1985-11-25 1988-03-29 Rin Ei Seiki Kabushiki Kaisha Touch sensor
DE3763885D1 (en) * 1986-04-17 1990-08-30 Renishaw Plc Sample for contact sensor.
JPS633881U (en) * 1986-06-27 1988-01-12
DE3788360D1 (en) * 1986-09-03 1994-01-13 Renishaw Plc Signal processing for touch probe.
JPS63188709A (en) * 1987-01-30 1988-08-04 Nobuo Fukuhisa Position detector
JPS63140348U (en) * 1987-03-05 1988-09-14
CH672370A5 (en) * 1987-09-15 1989-11-15 Tesa Sa
CH674485A5 (en) * 1988-03-11 1990-06-15 Saphirwerk Ind Prod
US5410334A (en) * 1990-09-19 1995-04-25 International Business Machines Corporation Switch for pen-down sensing in electronic styli
EP0572800A1 (en) * 1992-05-06 1993-12-08 Baumer Electric Ag Sensing probe
JP3267116B2 (en) * 1995-09-19 2002-03-18 ミノルタ株式会社 Contact sensor and mobile
DE29612475U1 (en) * 1996-07-18 1996-09-19 Zeiss Carl Fa probe
DE10101925B4 (en) * 2001-01-16 2006-08-24 Dr. Johannes Heidenhain Gmbh feeler
DE60318396T2 (en) * 2002-02-14 2008-05-21 Faro Technologies, Inc., Lake Mary Portable coordinate measuring machine with articulated arm
US6957496B2 (en) 2002-02-14 2005-10-25 Faro Technologies, Inc. Method for improving measurement accuracy of a portable coordinate measurement machine
US7519493B2 (en) 2002-02-14 2009-04-14 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
US6973734B2 (en) * 2002-02-14 2005-12-13 Faro Technologies, Inc. Method for providing sensory feedback to the operator of a portable measurement machine
US7881896B2 (en) 2002-02-14 2011-02-01 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
US7246030B2 (en) 2002-02-14 2007-07-17 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
US7073271B2 (en) * 2002-02-14 2006-07-11 Faro Technologies Inc. Portable coordinate measurement machine
USRE42082E1 (en) 2002-02-14 2011-02-01 Faro Technologies, Inc. Method and apparatus for improving measurement accuracy of a portable coordinate measurement machine
US6952882B2 (en) * 2002-02-14 2005-10-11 Faro Technologies, Inc. Portable coordinate measurement machine
US6593536B1 (en) * 2002-05-21 2003-07-15 Daimlerchrysler Corporation Multi-axis switch with redundant contacts
US7268567B2 (en) * 2005-02-04 2007-09-11 Research In Motion Limited Probe assembly with multi-directional freedom of motion and mounting assembly therefor
KR100868635B1 (en) * 2007-05-16 2008-11-12 주식회사 동부하이텍 Test apparatus of semiconductor device
US20090299687A1 (en) * 2007-08-07 2009-12-03 United Technologies Corporation Reverse engineering disk inspection
CN104115621B (en) * 2014-05-06 2016-04-06 杭州菲沃机器人科技有限公司 360 ゜ full range obstacle detection agencies and intelligence agencies with the mower

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1840853A (en) * 1928-09-06 1932-01-12 Pratt & Whitney Co Contouring tracer
US2758195A (en) * 1954-03-23 1956-08-07 Ludwig Louis Lamp with tiltable light switch
US3016619A (en) * 1957-12-19 1962-01-16 Kurt H Mueller Depth and groove locating gage
US2994502A (en) * 1957-12-23 1961-08-01 Mach Works Inc Hydraulic tracer valve
US3024334A (en) * 1958-09-12 1962-03-06 Hurletron Inc Ball contacting device
US3056867A (en) * 1959-05-08 1962-10-02 Jay M Eitel Insulated control mechanism and system
US3216118A (en) * 1963-06-14 1965-11-09 Pistoles Lambert Robert Dial indicator
US3212325A (en) * 1963-07-30 1965-10-19 Katz Lester Force measuring instrument
US3269685A (en) * 1965-05-28 1966-08-30 Frank Hamachek Machine Company Leveling control for electrically operating hydraulic leveling means
US3277248A (en) * 1965-07-19 1966-10-04 Western Electric Co Switch control unit with improved pivot arm actuator structure
US3307006A (en) * 1965-10-22 1967-02-28 Richard H Lawrence Circuit controlling means
JPS424720Y1 (en) * 1966-08-15 1967-03-13
FR1543450A (en) * 1967-09-14 1968-10-25 Gambin S A A feeler device for a machine tool to be copied
US3520063A (en) * 1968-08-30 1970-07-14 Rohr Corp Multiaxis inspection probe
US3557462A (en) * 1968-10-30 1971-01-26 Inspection Engineering And Equ Gaging device and system
US3673695A (en) * 1970-05-22 1972-07-04 Rohr Corp Non-tilting probe
US3670420A (en) * 1971-01-04 1972-06-20 Inspection Eng And Equipment I Gaging head construction
US3727119A (en) * 1971-02-01 1973-04-10 Information Dev Corp Servo controlled automatic inspection apparatus
US3766653A (en) * 1971-10-04 1973-10-23 Lockheed Missiles Space Three axis inspection probe
DE2242355C2 (en) * 1972-08-29 1974-10-17 Fa. Carl Zeiss, 7920 Heidenheim
GB1445977A (en) * 1972-09-21 1976-08-11 Rolls Royce Probes
US4153998A (en) * 1972-09-21 1979-05-15 Rolls-Royce (1971) Limited Probes
US3855708A (en) * 1972-10-16 1974-12-24 Candid Logic Inc Self-actuated digital location sensor
DE2356030C3 (en) * 1973-11-09 1978-05-11 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar
US3885708A (en) * 1974-06-06 1975-05-27 David W Parry Flexible tube winding and emptying device
US4130941A (en) * 1975-03-20 1978-12-26 Rolls-Royce Limited Displacement gauge
SU649942A1 (en) * 1976-07-05 1979-02-28 Предприятие П/Я А-7555 Measuring contact unit
GB1593050A (en) * 1976-09-30 1981-07-15 Renishaw Electrical Ltd Contact sensing probe
US4136458B1 (en) * 1976-10-01 1989-07-04 Renishaw Plc
IT1088539B (en) * 1976-12-24 1985-06-10 Rolls Royce Probe for use in apparatus for measuring
DE2712181C3 (en) * 1977-03-19 1981-01-22 Fa. Carl Zeiss, 7920 Heidenheim
IT1107310B (en) * 1978-03-23 1985-11-25 Dea Spa The attachment assembly for mounting a precision and safety of a tool on a machine particularly a measuring machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2302588B (en) * 1995-06-21 1998-05-20 Zeiss Stiftung Probe changing system

Also Published As

Publication number Publication date
US4301338A (en) 1981-11-17
FR2326681A1 (en) 1977-04-29
IT1074001B (en) 1985-04-17
JPS5263358A (en) 1977-05-25
DE2644027B2 (en) 1978-03-23
US4375723A (en) 1983-03-08
DE2644027C3 (en) 1979-04-19
FR2326681B1 (en) 1982-05-07
JPS575281B2 (en) 1982-01-29
DE2644027A1 (en) 1977-04-14

Similar Documents

Publication Publication Date Title
US3520063A (en) Multiaxis inspection probe
US7055367B2 (en) Calibration of a probe
JP2521167B2 (en) Surface detection equipment
EP0243766B1 (en) Probe for measuring workpieces
US4530159A (en) Multicoordinate sensing head
US5832416A (en) Calibration system for coordinate measuring machine
US4663852A (en) Active error compensation in a coordinated measuring machine
US4177568A (en) Measurement head
US4587622A (en) Method and apparatus for determining and correcting guidance errors
US4574625A (en) Surface finish, displacement and contour scanner
US4084323A (en) Measuring apparatus
US5088055A (en) Coordinate measuring apparatus having a stylus friction compensating means
EP0489715A2 (en) Position sensing probe
EP0423209B1 (en) Probes
EP0598709B1 (en) Touch probe
US4882848A (en) Probe head for a coordinate-measuring instrument
EP1760422A1 (en) Surface profile measuring instrument
JP2988588B2 (en) Position measuring device
US5118956A (en) Touch probe including a waveguide
US6633051B1 (en) Surface sensing device with optical sensor
CN100533053C (en) Measurement probe for use in coordinate measuring machines
US3869799A (en) Universal multi-coordinate sensor
EP0373644B1 (en) Three-dimensional displacement gauge
US4443946A (en) Probe for measuring workpieces
US4080741A (en) Measuring apparatus

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee
732 Registration of transactions, instruments or events in the register (sect. 32/1977)