US3898413A - Induction heat coil arrangement - Google Patents

Induction heat coil arrangement Download PDF

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Publication number
US3898413A
US3898413A US460538A US46053874A US3898413A US 3898413 A US3898413 A US 3898413A US 460538 A US460538 A US 460538A US 46053874 A US46053874 A US 46053874A US 3898413 A US3898413 A US 3898413A
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US
United States
Prior art keywords
coil
induction heating
heating coil
heat
insulating material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US460538A
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English (en)
Inventor
Wolfgang Keller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of US3898413A publication Critical patent/US3898413A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/36—Coil arrangements
    • H05B6/362—Coil arrangements with flat coil conductors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Induction Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
US460538A 1973-06-18 1974-04-12 Induction heat coil arrangement Expired - Lifetime US3898413A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2331004A DE2331004C3 (de) 1973-06-18 1973-06-18 Induktionsheizspule zum tiegelfreien Zonenschmelzen

Publications (1)

Publication Number Publication Date
US3898413A true US3898413A (en) 1975-08-05

Family

ID=5884356

Family Applications (1)

Application Number Title Priority Date Filing Date
US460538A Expired - Lifetime US3898413A (en) 1973-06-18 1974-04-12 Induction heat coil arrangement

Country Status (5)

Country Link
US (1) US3898413A (de)
JP (2) JPS5037346A (de)
BE (1) BE816495A (de)
DE (1) DE2331004C3 (de)
IT (1) IT1014933B (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4184135A (en) * 1978-04-10 1980-01-15 Monsanto Company Breakapart single turn RF induction apparatus
US5792258A (en) * 1995-01-31 1998-08-11 Shin-Etsu Handotai Co., Ltd. High-frequency induction heater and method of producing semiconductor single crystal using the same
WO1998046990A1 (en) * 1997-04-15 1998-10-22 Varian Associates, Inc. Improved cooling device for cooling heatable gas chromatography analyte sample injector
US20100277004A1 (en) * 2007-12-25 2010-11-04 Masayuki Suzuki Planar coil and contactless electric power transmission device using the same
US20110073591A1 (en) * 2008-07-17 2011-03-31 Seiichi Sawatsubashi Guide Chip Structure for High-Frequency Induction Heating Coil

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2357688C2 (de) * 1973-11-19 1982-11-18 Siemens AG, 1000 Berlin und 8000 München Induktionsheizspule zum tiegelfreien Zonenschmelzen
DE3229461A1 (de) * 1982-08-06 1984-02-09 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum tiegelfreien zonenschmelzen eines, insbesondere aus silicium bestehenden halbleiterstabes
DE4142245A1 (de) * 1991-12-17 1993-06-24 Tro Transformatoren Und Schalt Isolierung fuer induktoren von induktiven erhitzungsanlagen und verfahren zu ihrer herstellung
JP4581977B2 (ja) * 2005-11-24 2010-11-17 信越半導体株式会社 シリコン単結晶の製造方法
EP1968355B1 (de) 2007-03-08 2013-02-27 HÜTTINGER Elektronik GmbH + Co. KG Induktionsspule und Vorrichtung zum induktiven Erwärmen von Werkstücken
JP5505362B2 (ja) * 2011-04-21 2014-05-28 信越半導体株式会社 複巻誘導加熱コイル及びこれを有する単結晶製造装置並びにこれを用いた単結晶製造方法
JP5505365B2 (ja) * 2011-04-28 2014-05-28 信越半導体株式会社 誘導加熱コイルにおける放電防止用絶縁部材及びこれを用いた単結晶製造装置並びに単結晶製造方法
JP7120464B2 (ja) 2019-07-05 2022-08-17 株式会社Sumco 誘導加熱コイル及びこれを用いた単結晶製造装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
US3017485A (en) * 1957-11-19 1962-01-16 Asea Ab Means for electric vacuum furnaces
US3601569A (en) * 1968-10-11 1971-08-24 Siemens Ag Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod
US3697716A (en) * 1971-11-19 1972-10-10 Gen Electric Induction cooking power converter with improved coil position
US3801769A (en) * 1971-11-24 1974-04-02 Siemens Ag Induction coil for zone melting of semiconductor rods
US3809846A (en) * 1972-04-11 1974-05-07 Siemens Ag Induction heating coil for a zone heating process

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1044768B (de) * 1954-03-02 1958-11-27 Siemens Ag Verfahren und Vorrichtung zum Ziehen eines stabfoermigen kristallinen Koerpers, vorzugsweise Halbleiterkoerpers
DE1205167C2 (de) * 1964-06-15 1973-05-03 Halbleiterwerk Frankfurt Oder Spulenkoerper zum induktiven Erhitzen eines elektrisch leitenden Koerpers im magnetischen Hochfrequenzfeld beim Zonenschmelzen
DE1615429C3 (de) * 1967-12-23 1974-08-22 Siemens Ag, 1000 Berlin Und 8000 Muenchen Induktionsheizspule zum tiegelfreien Zonenschmelzen von Stäben aus Halbleitermaterial

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
US3017485A (en) * 1957-11-19 1962-01-16 Asea Ab Means for electric vacuum furnaces
US3601569A (en) * 1968-10-11 1971-08-24 Siemens Ag Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod
US3697716A (en) * 1971-11-19 1972-10-10 Gen Electric Induction cooking power converter with improved coil position
US3801769A (en) * 1971-11-24 1974-04-02 Siemens Ag Induction coil for zone melting of semiconductor rods
US3809846A (en) * 1972-04-11 1974-05-07 Siemens Ag Induction heating coil for a zone heating process

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4184135A (en) * 1978-04-10 1980-01-15 Monsanto Company Breakapart single turn RF induction apparatus
US5792258A (en) * 1995-01-31 1998-08-11 Shin-Etsu Handotai Co., Ltd. High-frequency induction heater and method of producing semiconductor single crystal using the same
WO1998046990A1 (en) * 1997-04-15 1998-10-22 Varian Associates, Inc. Improved cooling device for cooling heatable gas chromatography analyte sample injector
US20100277004A1 (en) * 2007-12-25 2010-11-04 Masayuki Suzuki Planar coil and contactless electric power transmission device using the same
US20110073591A1 (en) * 2008-07-17 2011-03-31 Seiichi Sawatsubashi Guide Chip Structure for High-Frequency Induction Heating Coil

Also Published As

Publication number Publication date
IT1014933B (it) 1977-04-30
DE2331004A1 (de) 1975-01-09
JPS5755339Y2 (de) 1982-11-30
BE816495A (fr) 1974-10-16
DE2331004B2 (de) 1981-05-21
JPS5037346A (de) 1975-04-08
JPS5571170U (de) 1980-05-16
DE2331004C3 (de) 1982-02-04

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