US3601569A - Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod - Google Patents
Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rodInfo
- Publication number
- US3601569A US3601569A US864360A US3601569DA US3601569A US 3601569 A US3601569 A US 3601569A US 864360 A US864360 A US 864360A US 3601569D A US3601569D A US 3601569DA US 3601569 A US3601569 A US 3601569A
- Authority
- US
- United States
- Prior art keywords
- flat
- hollow member
- coil
- wound
- wound coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004857 zone melting Methods 0.000 title claims abstract 6
- 239000004065 semiconductor Substances 0.000 title 1
- 238000010438 heat treatment Methods 0.000 claims abstract 7
- 230000004323 axial length Effects 0.000 claims abstract 5
- 239000004020 conductor Substances 0.000 claims abstract 5
- 230000006698 induction Effects 0.000 claims abstract 5
- 230000008878 coupling Effects 0.000 claims abstract 4
- 238000010168 coupling process Methods 0.000 claims abstract 4
- 238000005859 coupling reaction Methods 0.000 claims abstract 4
- 238000004804 winding Methods 0.000 claims 5
- 239000011796 hollow space material Substances 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 239000002826 coolant Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- General Induction Heating (AREA)
- Furnace Details (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19681802524 DE1802524B1 (de) | 1968-10-11 | 1968-10-11 | Vorrichtung zum tiegelfreien Zonenschmelzen eines kristallinen Stabes,insbesondere Halbleiterstabes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US3601569A true US3601569A (en) | 1971-08-24 |
Family
ID=5710285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US864360A Expired - Lifetime US3601569A (en) | 1968-10-11 | 1969-10-07 | Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3601569A (enExample) |
| JP (1) | JPS4817561B1 (enExample) |
| AT (1) | AT299129B (enExample) |
| CH (1) | CH520524A (enExample) |
| DE (1) | DE1802524B1 (enExample) |
| FR (1) | FR2020390A1 (enExample) |
| GB (1) | GB1240074A (enExample) |
| NL (1) | NL6913795A (enExample) |
| SE (1) | SE360277B (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3898413A (en) * | 1973-06-18 | 1975-08-05 | Siemens Ag | Induction heat coil arrangement |
| US4761528A (en) * | 1986-06-03 | 1988-08-02 | Commissariat A L'energie Atomique | High frequency induction melting furnace |
| US4851628A (en) * | 1988-02-18 | 1989-07-25 | Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh | Method for the crucible-free floating zone pulling of semiconductor rods and an induction heating coil therefor |
| US4942279A (en) * | 1987-05-25 | 1990-07-17 | Shin-Etsu Handotai Co., Ltd. | RF induction heating apparatus for floating-zone melting |
| EP1968355A1 (de) * | 2007-03-08 | 2008-09-10 | HÜTTINGER Elektronik GmbH + Co. KG | Induktionsspule und Vorrichtung zum induktiven Erwärmen von Werkstücken |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3625669A1 (de) * | 1986-07-29 | 1988-02-04 | Siemens Ag | Induktionsheizer zum tiegelfreien zonenschmelzen |
| GB2478275A (en) * | 2010-02-24 | 2011-09-07 | Tubefuse Applic V O F | Induction heating apparatus and method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2408229A (en) * | 1943-04-30 | 1946-09-24 | Rca Corp | Electrical heating apparatus |
| US2459971A (en) * | 1945-08-30 | 1949-01-25 | Induction Heating Corp | Inductor for high-frequency induction heating apparatus |
| US2814707A (en) * | 1954-11-12 | 1957-11-26 | Rca Corp | Induction heating device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1152269B (de) * | 1959-04-28 | 1963-08-01 | Siemens Ag | Einrichtung zum tiegelfreien Zonenschmelzen eines Halbleiterstabes in einer Vakuumkammer |
| NL302045A (enExample) * | 1963-01-08 | |||
| DE1188043B (de) * | 1962-12-24 | 1965-03-04 | Siemens Ag | Vorrichtung zum tiegelfreien Zonenschmelzen von Halbleitermaterial |
-
1968
- 1968-10-11 DE DE19681802524 patent/DE1802524B1/de not_active Withdrawn
-
1969
- 1969-09-10 NL NL6913795A patent/NL6913795A/xx unknown
- 1969-09-18 JP JP44074331A patent/JPS4817561B1/ja active Pending
- 1969-10-06 SE SE13720/69A patent/SE360277B/xx unknown
- 1969-10-07 US US864360A patent/US3601569A/en not_active Expired - Lifetime
- 1969-10-08 FR FR6934448A patent/FR2020390A1/fr not_active Withdrawn
- 1969-10-09 CH CH1514969A patent/CH520524A/de not_active IP Right Cessation
- 1969-10-09 AT AT951569A patent/AT299129B/de not_active IP Right Cessation
- 1969-10-10 GB GB49860/69A patent/GB1240074A/en not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2408229A (en) * | 1943-04-30 | 1946-09-24 | Rca Corp | Electrical heating apparatus |
| US2459971A (en) * | 1945-08-30 | 1949-01-25 | Induction Heating Corp | Inductor for high-frequency induction heating apparatus |
| US2814707A (en) * | 1954-11-12 | 1957-11-26 | Rca Corp | Induction heating device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3898413A (en) * | 1973-06-18 | 1975-08-05 | Siemens Ag | Induction heat coil arrangement |
| US4761528A (en) * | 1986-06-03 | 1988-08-02 | Commissariat A L'energie Atomique | High frequency induction melting furnace |
| US4942279A (en) * | 1987-05-25 | 1990-07-17 | Shin-Etsu Handotai Co., Ltd. | RF induction heating apparatus for floating-zone melting |
| US4851628A (en) * | 1988-02-18 | 1989-07-25 | Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh | Method for the crucible-free floating zone pulling of semiconductor rods and an induction heating coil therefor |
| EP1968355A1 (de) * | 2007-03-08 | 2008-09-10 | HÜTTINGER Elektronik GmbH + Co. KG | Induktionsspule und Vorrichtung zum induktiven Erwärmen von Werkstücken |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4817561B1 (enExample) | 1973-05-30 |
| FR2020390A1 (enExample) | 1970-07-10 |
| AT299129B (de) | 1972-06-12 |
| DE1802524B1 (de) | 1970-06-04 |
| CH520524A (de) | 1972-03-31 |
| GB1240074A (en) | 1971-07-21 |
| NL6913795A (enExample) | 1970-04-14 |
| SE360277B (enExample) | 1973-09-24 |
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