US20130142675A1 - Fluid control device - Google Patents

Fluid control device Download PDF

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Publication number
US20130142675A1
US20130142675A1 US13/756,361 US201313756361A US2013142675A1 US 20130142675 A1 US20130142675 A1 US 20130142675A1 US 201313756361 A US201313756361 A US 201313756361A US 2013142675 A1 US2013142675 A1 US 2013142675A1
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US
United States
Prior art keywords
engagement portion
engagement
valve seat
rod
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/756,361
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English (en)
Inventor
Tatsushi NABEI
Yukie Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
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Filing date
Publication date
Application filed by CKD Corp filed Critical CKD Corp
Assigned to CKD CORPORATION reassignment CKD CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: NABEI, TATSUSHI, NAKAMURA, YUKIE
Publication of US20130142675A1 publication Critical patent/US20130142675A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/046—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor with electric means, e.g. electric switches, to control the motor or to control a clutch between the valve and the motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/124—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston servo actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F16K31/508—Mechanical actuating means with screw-spindle or internally threaded actuating means the actuating element being rotatable, non-rising, and driving a non-rotatable axially-sliding element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K35/00—Means to prevent accidental or unauthorised actuation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/103—Spindle sealings with diaphragm, e.g. shaped as bellows or tube the diaphragm and the closure member being integrated in one member
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means

Definitions

  • the present invention relates to a fluid control device that controls a position of a valve body on the basis of rotation of a motor.
  • a position of the valve body in an open condition is determined by rotating a male screw member coupled to a drive shaft of the motor such that a female screw member meshed to the male screw member is fed in an axial direction of the male screw member (see Patent Documents 1 and 2, for example).
  • a stop position of the valve body in the open condition is determined when a piston coupled to the valve body impinges on the female screw member.
  • the female screw member may impinge on the piston or another member when an opening of the valve body in the open condition is reduced by feeding the female screw member in the axial direction of the male screw member.
  • the valve body may be pressed forcefully against a valve seat or the like, and an excessive load may be exerted on the motor when feeding of the female screw member is restricted.
  • the present invention has been designed in consideration of these circumstances, and a main object thereof is to prevent a valve body from being pressed forcefully against a valve seat or the like and an excessive load from being exerted on a motor in a fluid control device.
  • the present invention employs following means.
  • First means is a fluid control device including: a motor having a drive shaft; a first engagement portion provided on the drive shaft; a second engagement portion configured to move relative to the first engagement portion in an axial direction of the drive shaft and receive a rotary force from the first engagement portion.
  • a valve main body has a flow passage for a fluid and a valve seat portion; a valve body is provided to face the valve seat portion in order to adjust an opening of the flow passage.
  • a moving member is coupled to the valve body of which movement in the axial direction is permitted and of which rotation about the drive shaft is restricted.
  • An elastic member is configured to exert a force on the moving member in a direction for causing the valve body to approach the valve seat portion.
  • a first restricting portion is configured to restrict movement of the second engagement portion to the side of the valve seat portion beyond a first restriction position.
  • a second restricting portion is configured to restrict movement of the moving member to the side of the valve seat portion beyond a second restricting position.
  • the second engagement portion and the moving member are screwed together such that the second engagement portion and the moving member move relative to each other in the axial direction when rotated relative to each other.
  • the first engagement portion provided on the drive shaft of the motor is rotated by driving the motor.
  • Rotary force is transmitted from the first engagement portion to the second engagement portion, and as a result, the second engagement portion is rotated.
  • the flow passage for the fluid and the valve seat portion are provided in the valve main body, and the valve body for adjusting the opening of the flow passage is provided to face the valve seat portion.
  • the moving member is coupled to the valve body such that movement thereof in the axial direction of the drive shaft is permitted but rotation thereof about the axis is restricted.
  • the male screw portion and the female screw portion are provided on either the second engagement portion or the moving member, respectively.
  • the male screw portion and the female screw portion are meshed to each other so as to be fed relative to each other in the axial direction of the drive shaft when rotated relative to each other.
  • the moving member that is restricted to rotate and the second engagement portion rotate relative to each other.
  • the first engagement portion and the second engagement portion are capable of relative movement in the axial direction of the drive shaft. Therefore, by rotating the second engagement portion when movement of the moving member is restricted, the second engagement portion is fed in a direction separating away from the moving member, or in other words a direction separating away from the first restricting portion. Hence, even when the motor is driven further in a condition in which movement of the moving member is restricted, situations in which the valve body is pressed forcefully against the valve seat portion or an excessive load is exerted on the motor can be suppressed. As a result, particle generation from the valve body and the valve seat portion, deformation of and damage to the valve body and the valve seat portion, damage to the motor, or the like can be suppressed.
  • first engagement portion and the second engagement portion are capable of transmitting rotary force to each other and capable of moving relative to each other in the axial direction of the drive shaft. Therefore, a reaction to the force for feeding the moving member in the axial direction and a reaction to the force for feeding the second engagement portion in the direction separating away from the first restricting portion can be prevented from acting on the drive shaft of the motor in the axial direction. As a result, an increase in a rotary load of the motor can be suppressed, whereby a reduction in a durability of the motor and an increase in a size of the motor can be suppressed.
  • the second restricting portion is provided with a spacer for adjusting the second restriction position, and in a condition where movement of the moving member is restricted by the second restricting portion, a gap is formed between the valve seat portion and the valve body.
  • the second restriction position is adjusted by the spacer in the second restricting portion for restricting movement of the moving member to the valve seat portion side beyond the second restriction position. Therefore, the gap between the valve seat portion and the valve body, or in other words a flow condition of the fluid, in a condition of maximum closeness between the valve body and the valve seat portion can be controlled precisely. Further, in the condition where movement of the moving member is restricted by the second restricting portion, the gap is formed between the valve seat portion and the valve body, and therefore the valve body can be prevented from impinging on the valve seat portion. As a result, a situation in which particles are generated from the valve body and the valve seat portion can be suppressed effectively.
  • the above configuration is particularly effective when applied to a flow rate adjustment device or a pressure adjustment device used in a condition where the valve body keeps the opening of the flow passage constant.
  • a cylinder configured to guide movement of the moving member in the axial direction is further provided, and an insertion port into which the spacer is inserted from outside is formed in the cylinder.
  • one of the first engagement portion and the second engagement portion includes a rectangular parallelepiped-shaped insertion portion
  • the other of the first engagement portion and the second engagement portion includes a recessed portion into which the insertion portion is inserted in the axial direction, and outside surfaces of the insertion portion and inside surfaces of the recessed portion are mutually parallel and fitted together with a gap between the surfaces.
  • the rectangular parallelepiped-shaped insertion portion provided on one of the first engagement portion and the second engagement portion can be inserted into the recessed portion provided in the other in the axial direction of the drive shaft. Further, the mutually parallel outside surfaces of the insertion portion and the inside surfaces of the recessed portion are fitted together with a gap therebetween.
  • the first engagement portion and the second engagement portion can be made capable of relative movement in the axial direction of the drive shaft, and rotary force can be transmitted between the first engagement portion and the second engagement portion.
  • the first engagement portion and the second engagement portion can therefore be realized by a simple configuration.
  • the position of the valve body can be adjusted manually.
  • a maintainability of the fluid control device can be improved.
  • the motor is constituted by a stepping motor that rotates in synchronization with pulse power, as in fifth means pertaining to any of the first to fourth aspects of the inventions, an excessive load can be prevented from acting on the motor, and as a result, the stepping motor can be prevented from losing steps.
  • a stepping motor that exhibits superior position adjustment precision and controllability can be employed while suppressing a reduction in the position adjustment precision due to loss of steps.
  • FIG. 1 is a partial sectional view showing a flow rate adjustment device
  • FIG. 2 is a partially enlarged view of FIG. 1 ;
  • FIGS. 3A and 3B are a view showing an insertion port and a shim
  • FIG. 4 is an exploded perspective view showing a first engagement portion and a second engagement portion
  • FIG. 5 is a partially enlarged view showing a valve body opening operation performed in the flow rate adjustment device.
  • FIG. 6 is a partially enlarged view showing a valve body closing operation performed in the flow rate adjustment device.
  • the present invention is realized as a flow rate adjustment device that adjusts a flow rate of a fluid in a semiconductor manufacturing apparatus or the like.
  • FIG. 1 is a partial sectional view showing a flow rate adjustment device 10 .
  • the flow rate adjustment device 10 (fluid control device) includes a valve main body 20 , a first cylinder 30 , a second cylinder 50 , a motor 110 , and a housing 120 .
  • the first cylinder 30 is fixed to the valve main body 20 on the open surface (the upper surface) of the valve chamber 22 .
  • the first cylinder 30 is formed of a general purpose resin, for example PP (Poly Propylene).
  • a columnar first housing portion 31 is formed in an interior of the first cylinder 30 .
  • the first housing portion 31 penetrates the first cylinder 30 , and a central axis of the valve chamber 22 matches a central axis of the first cylinder 30 .
  • the first housing portion 31 communicates with the valve chamber 22 .
  • the second cylinder 50 is fixed to a surface (an upper surface) of the first cylinder 30 on an opposite side to the valve main body 20 .
  • the second cylinder 50 is formed of a general purpose resin, for example PP (Poly Propylene).
  • a columnar second housing portion 54 and a columnar third housing portion 55 are formed in an interior of the second cylinder 50 .
  • the second housing portion 54 and the third housing portion 55 communicate with each other, and respective central axes thereof match a central axis of the first housing portion 31 .
  • the second housing portion 54 opens onto a surface (a lower surface) of the second cylinder 50
  • the third housing portion 55 opens onto an opposite side surface (an upper surface) of the second cylinder 50 .
  • the second housing portion 54 communicates with the first housing portion 31 in the first cylinder 30 .
  • a diameter of the second housing portion 54 is larger than a diameter of the first housing portion 31 . Therefore, a step is formed between the first housing portion 31 and the second housing portion 54 .
  • Respective inner walls of the second housing portion 54 and the third housing portion 55 project inwardly such that an annular projecting portion 51 is formed between the second housing portion 54 and the third housing portion 55 .
  • the projecting portion 51 serves as a boundary between the second housing portion 54 and the third housing portion 55 .
  • the stepping motor 110 (the motor) is fixed to the second cylinder 50 on the open surface (the upper surface) of the third housing portion 55 with an attachment portion 113 .
  • the motor 110 includes a drive circuit 112 , and a signal line 132 from a controller (not shown) is connected to the drive circuit 112 .
  • a drive control signal (a pulse signal) is input into the drive circuit 112 from the controller, and a rotation position of a drive shaft 111 of the motor 110 is controlled by the drive control signal, which corresponds to a number of steps.
  • a photo sensor 74 is provided on an outer periphery of the second cylinder 50 , and a signal line 131 from the controller is connected to the photo sensor 74 .
  • the housing 120 is fixed to the surface (the upper surface) of the first cylinder 30 on the opposite side to the valve main body 20 .
  • the second cylinder 50 , the motor 110 , and the photo sensor 74 are covered by the housing 120 .
  • FIG. 2 is a partially enlarged view of FIG. 1 .
  • a columnar rod 60 is housed in the first housing portion 31 and the second housing portion 54 .
  • the rod 60 is formed from a chemical-resistant fluorine resin, for example PVDF (Poly Vinylidene Di Fluoride).
  • a columnar valve body 41 is coupled to an end portion of the rod 60 on the side of the valve main body 20 .
  • a diaphragm 42 is provided on an outer peripheral edge of the valve body 41 .
  • An annular support portion 43 is provided on an outer peripheral edge of the diaphragm 42 .
  • the support portion 43 is fixed to be sandwiched between the valve main body 20 and the first cylinder 30 .
  • the valve chamber 22 is separated from the first housing portion 31 by the diaphragm 42 so that fluid in the valve chamber 22 is prevented from flowing into the first housing portion 31 .
  • the valve body 41 includes an enlarged diameter portion 41 a having a larger diameter than other parts.
  • An annular valve seat portion 24 is formed in the valve main body 20 in a connecting portion that connects the flow passage 21 to the valve chamber 22 .
  • the enlarged diameter portion 41 a of the valve body 41 is disposed to face the valve seat portion 24 .
  • a wall surface of the valve seat portion 24 is parallel to a wall surface of the enlarged diameter portion 41 a such that a distance between the respective wall surfaces remains constant.
  • the rod 60 (a moving member) includes a first rod portion 61 housed in the first housing portion 31 and a second rod portion 62 housed in the second housing portion 54 .
  • a diameter of the second rod portion 62 is larger than a diameter of the first rod portion 61 .
  • the first rod portion 61 and the second rod portion 62 have dimensions that correspond to the first housing portion 31 and the second housing portion 54 , respectively.
  • a central axis of the rod 60 matches the central axis of the valve body 41 .
  • An annular groove portion 65 is formed in an outer peripheral surface of the first rod portion 61 .
  • An annular seal member 77 is fitted into the groove portion 65 such that an inner peripheral surface of the first cylinder 30 is sealed from the outer peripheral surface of the first rod portion 61 by the seal member 77 .
  • the first rod portion 61 slides in an axial direction thereof while being guided by an inner peripheral surface of the first housing portion 31 .
  • the second rod portion 62 moves in an axial direction thereof in the second housing portion 54 .
  • a groove 52 that extends in the axial direction of the second housing portion 54 is formed in a part of an inner wall of the second housing portion 54 .
  • the groove 52 extends from the vicinity of the projecting portion 51 to a first cylinder 30 side.
  • a pin 72 that extends in an outer diameter direction is provided in an outer peripheral edge of the second rod portion 62 of the rod 60 .
  • a tip end of the pin 72 is inserted into the groove 52 to enable the second rod portion 62 to move in the axial direction thereof while restricting rotation of the second rod portion 62 about the axis thereof.
  • a sensor insertion port 53 that penetrates the second cylinder 50 in a radial direction is formed in a part of the second cylinder 50 that opposes the groove 52 .
  • a detection portion 74 a provided on a tip end of the photo sensor 74 is inserted into the interior of the second cylinder 50 through the sensor insertion port 53 .
  • a pin 73 that extends in the outer diameter direction is provided in the outer peripheral edge of the second rod portion 62 of the rod 60 .
  • a tip end of the pin 73 is inserted between a light emitting portion and a light receiving portion of the detection portion 74 a such that light emitted from the light emitting portion is blocked by the pin 73 , and as a result, a fully open position of the valve body 41 is detected.
  • FIGS. 1 and 2 show a condition in which the valve body 41 has been moved to a maximally closed side.
  • a cylindrical groove 63 is formed in an end surface of the second rod portion 62 on the side of the motor 110 .
  • a central axis of the groove 63 matches the central axis of the second rod portion 62 (the first rod portion 61 ).
  • a spring 71 (an elastic member) having a substantially identical diameter to a diameter of the groove 63 is inserted into an interior of the groove 63 .
  • One end of the spring 71 contacts a bottom portion of the groove 63 , and the other end contacts the projecting portion 51 .
  • the spring 71 exerts an elastic force on the rod 60 and the projecting portion 51 in order to move the rod 60 in a direction separating away from the projecting portion 51 , or in other words a direction for causing the valve body 41 to approach the valve seat portion 24 .
  • a part of the second rod portion 62 that projects further toward the outer diameter side than the first rod portion 61 faces the upper surface of the first cylinder 30 . Therefore, when the rod 60 is moved in the direction separating away from the projecting portion 51 , the second rod portion 62 impinges on the first cylinder 30 (a second restricting portion) such that movement of the rod 60 to the valve seat portion 24 side is restricted. At this time, the valve body 41 is in a condition of maximum closeness to the valve seat portion 24 , and therefore an opening of the flow passage 21 , or in other words a flow rate of the fluid flowing out through the outflow port 26 , is at a minimum.
  • a shim 75 for adjusting a position (a second restriction position) in which movement of the rod 60 to the valve seat portion 24 side is restricted is provided between the second rod portion 62 and the first cylinder 30 .
  • FIG. 3A is a side view of the second cylinder 50
  • FIG. 3B is a plan view of the shim 75 .
  • an insertion port 56 enabling insertion of the shim 75 (a spacer) from the outside is formed in the second cylinder 50 .
  • the insertion port 56 penetrates the second cylinder 50 , and is formed in a part where the first cylinder 30 and the second cylinder 50 face each other.
  • the shim 75 is formed in a “U” shape, and includes a two-pronged portion 75 a that is inserted between the first cylinder 30 and the second rod portion 62 , and an arc-shaped arc portion 75 b .
  • the shim 75 is inserted through the insertion port 56 until the arc portion 75 b impinges on the first rod portion 61 of the rod 60 . Accordingly, the shim 75 can be inserted through the insertion port 56 after assembling the flow rate adjustment device 10 .
  • the position in which movement of the rod 60 to the valve seat portion 24 side is restricted is adjusted by adjusting a thickness of the shim 75 inserted between the second rod portion 62 and the first cylinder 30 .
  • a shim having a thickness of 0.2 mm or 0.1 mm is used either singly or in combinations of a plurality as the shim 75 .
  • a distance (a gap) between the valve seat portion 24 and the valve body 41 in the axial direction of the valve body 41 is adjusted to 0.2 mm. Note that the distance between the valve seat portion 24 and the valve body 41 may be adjusted appropriately in accordance with an application of the flow rate adjustment device 10 .
  • a part of the second rod portion 62 surrounded by the groove 63 serves as a female screw portion 64 having a female screw thread cut into an interior thereof.
  • the female screw portion 64 is formed in a cylindrical shape to extend in the axial direction of the second rod portion 62 .
  • the female screw portion 64 and the spring 71 are provided coaxially, and therefore a space for disposing the female screw portion 64 and the spring 71 in the axial direction of the rod 60 can be reduced.
  • the drive shaft 111 of the motor 110 is inserted into the third housing portion 55 .
  • the drive shaft 111 is provided with a first engagement portion 90 .
  • a second engagement portion 80 that engages with the first engagement portion 90 is housed in the third housing portion 55 and the second housing portion 54 .
  • the first engagement portion 90 and the second engagement portion 80 are formed of a material capable of transmitting driving force from the motor 110 , for example stainless steel.
  • FIG. 4 is an exploded perspective view showing the first engagement portion 90 and the second engagement portion 80 .
  • the second engagement portion 80 includes a male screw portion 82 into which a male screw thread is cut, and a head portion 81 having a larger diameter than the male screw portion 82 .
  • the second engagement portion 80 has an overall shape that resembles a slotted screw, and the male screw portion 82 extends in an axial direction thereof.
  • a groove portion 83 (a recessed portion) that extends in a radial direction is formed in the head portion 81 .
  • a width and a depth of the groove portion 83 are constant, and the depth of the groove portion 83 is substantially equal to a thickness of the head portion 81 .
  • Two inside surfaces 80 a of the groove portion 83 are parallel to each other and equidistant from a central axis of the head portion 81 .
  • the central axis of the head portion 81 matches a central axis of the male screw portion 82 .
  • the first engagement portion 90 (an insertion portion), which is inserted into the groove portion 83 of the second engagement portion 80 , is provided on the drive shaft 111 of the motor 110 .
  • the first engagement portion 90 is formed in a rectangular parallelepiped shape, and a central portion of the first engagement portion 90 in a lengthwise direction thereof is fixed to the drive shaft 111 .
  • the first engagement portion 90 includes mutually parallel outside surfaces 90 a .
  • a thickness of the outside surface 90 a in an axial direction of the drive shaft 111 is set to be thinner than the thickness of the head portion 81 of the second engagement portion 80 .
  • a lengthwise direction length of the first engagement portion 90 is substantially equal to a diameter of the head portion 81 of the second engagement portion 80 .
  • a width of the first engagement portion 90 is slightly narrower than the width of the groove portion 83 in the second engagement portion 80 .
  • the first engagement portion 90 is inserted into the groove portion 83 in the central axis direction while the central axis of the drive shaft 111 of the motor 110 is aligned with the central axis of the second engagement portion 80 .
  • the outside surfaces 90 a of the first engagement portion 90 and the inside surfaces 80 a of the groove portion 83 are fitted together with a gap therebetween.
  • the first engagement portion 90 and the second engagement portion 80 are capable of moving relative to each other in the axial direction of the drive shaft 111 and capable of transmitting rotary force to each other.
  • the male screw portion 82 of the second engagement portion 80 meshes with the female screw portion 64 of the second rod portion 62 (the rod 60 ).
  • the rod 60 is pushed toward the valve seat portion 24 by the spring 71 .
  • the second engagement portion 80 is coupled to the rod 60 via the male screw portion 82 and the female screw portion 64 . Accordingly, the second engagement portion 80 is pulled toward the valve seat portion 24 by the rod 60 .
  • the head portion 81 of the second engagement portion 80 impinges on the projecting portion 51 (the first restricting portion) such that movement of the second engagement portion 80 to the valve seat portion 24 side is restricted.
  • a thrust washer 76 that receives a force acting in the axial direction of the second engagement portion 80 is provided between the second engagement portion 80 and the projecting portion 51 .
  • the head portion 81 and the thrust washer 76 slide smoothly. Further, a force for pulling the second engagement portion 80 toward the valve seat portion 24 is received by the projecting portion 51 and the thrust washer 76 .
  • the position in which movement of the second engagement portion 80 is restricted corresponds to a first restriction position.
  • FIG. 2 shows a condition in which a rotation position (a step number) of the drive shaft 111 of the motor 110 corresponds to a reference position (a reference step number).
  • the second rod portion 62 of the rod 60 impinges on the shim 75 and the head portion 81 of the second engagement portion 80 impinges on the thrust washer 76 . Meanwhile, a gap (a space) is formed between a bottom portion of the first engagement portion 90 and a bottom portion of the groove portion 83 in the second engagement portion 80 .
  • the female screw portion 64 is fed in a direction approaching the drive shaft 111 such that the head portion 81 of the second engagement portion 80 and the second rod portion 62 of the rod 60 approach each other. Accordingly, the rod 60 is moved in the direction of an arrow in the drawing, and in accompaniment therewith, the valve body 41 moves in a direction separating away from the valve seat portion 24 . As a result, the distance between the valve seat portion 24 and the valve body 41 , or in other words the opening of the flow passage 21 , is adjusted such that the flow rate of the fluid flowing out into the flow passage 23 is adjusted.
  • the first engagement portion 90 and the second engagement portion 80 are capable of relative movement in the axial direction of the drive shaft 111 . Therefore, when the rod 60 is fed in the axial direction, a reaction to a force thereof can be prevented from acting on the drive shaft 111 in the axial direction. Further, the rotation position of the drive shaft 111 is controlled precisely on the basis of the step number of the motor 110 , and therefore the opening of the flow passage 21 can be controlled precisely.
  • the valve seat 41 is in the condition of maximum closeness to the valve seat portion 24 .
  • the drive shaft 111 is rotated further from this condition, the head portion 81 of the second engagement portion 80 and the second rod portion 62 of the rod 60 are fed relative to each other in a direction separating away from each other.
  • the first engagement portion 90 and the second engagement portion 80 are capable of relative movement in the axial direction of the drive shaft 111 , while movement of the rod 60 in the direction toward the valve seat portion 24 is restricted.
  • the second engagement portion 80 is moved in a direction that causes the head portion 81 to head away from the thrust washer 76 and the projecting portion 51 , or in other words the direction of an arrow in the drawing.
  • the second engagement portion 80 can be exposed by detaching the housing 120 and the motor 110 from the flow rate adjustment device 10 . In so doing, the second engagement portion 80 can be rotated easily by hand, whereby the position of the valve body 41 can be adjusted manually. As a result, a maintainability of the flow rate adjustment device 10 can be improved.
  • the first engagement portion 90 and the second engagement portion 80 are capable of relative movement in the axial direction of the drive shaft 111 . Therefore, by rotating the second engagement portion 80 when movement of the rod 60 is restricted, the head portion 81 of the second engagement portion 80 is fed in the direction separating away from the second rod portion 62 of the rod 60 , or in other words a direction separating away from the projecting portion 51 . Hence, an excessive load can be prevented from acting on the motor 110 even when the motor 110 is driven further from a condition in which movement of the rod 60 is restricted. As a result, the motor 110 can be prevented from losing steps, and the precision with which the position of the valve body 41 is adjusted can be prevented from decreasing. Further, damage to the motor 110 or the like can be suppressed.
  • the first engagement portion 90 and the second engagement portion 80 are capable of transmitting rotary force to each other and capable of moving relative to each other in the axial direction of the drive shaft 111 . Therefore, a reaction to the force for feeding the rod 60 in the axial direction and a reaction to the force for feeding the head portion 81 of the second engagement portion 80 in the direction separating away from the projecting portion 51 can be prevented from acting on the drive shaft 111 of the motor 110 in the axial direction. As a result, an increase in a rotary load of the motor 110 can be suppressed, whereby a reduction in a durability of the motor 110 and an increase in a size of the motor 110 can be suppressed.
  • the second restriction position is adjusted by the shim 75 in an upper surface portion of the first cylinder 30 , where movement of the rod 60 to the valve seat portion 24 side beyond the second restriction position is restricted. Therefore, the gap between the valve seat portion 24 and the valve body 41 , or in other words a flow condition of the fluid, in the condition of maximum closeness between the valve body 41 and the valve seat portion 24 , can be controlled precisely. Further, in a condition where movement of the rod 60 is restricted by the upper surface portion of the first cylinder 30 , a gap is formed between the valve seat portion 24 and the valve body 41 , and therefore the valve body 41 can be prevented from impinging on the valve seat portion 24 .
  • Movement of the rod 60 in the axial direction is guided by the first cylinder 30 and the second cylinder 50 . Further, the shim 75 can be inserted through the insertion port 56 from the outside of the first cylinder 30 . Therefore, the gap between the valve seat portion 24 and the valve body 41 can be adjusted finely by the shim 75 after assembling the flow rate adjustment device 10 . Hence, a high degree of dimensional precision is not required in the valve main body 20 , the first cylinder 30 , the rod 60 or the like, and as a result, fluid control precision can be maintained while suppressing costs.
  • the rectangular parallelepiped-shaped insertion portion of the first engagement portion 90 can be inserted into the groove portion 83 of the second engagement portion 80 in the axial direction of the drive shaft 111 . Further, the mutually parallel outside surfaces 90 a of the first engagement portion 90 and the inside surfaces 80 a of the groove portion 83 are fitted together with a gap therebetween. Hence, functions of the first engagement portion 90 and the second engagement portion 80 can be realized by a simple configuration.
  • the present invention is not limited to the above embodiment, and may be embodied as follows, for example.
  • the insertion portion is provided in the first engagement portion 90 and the groove portion 83 (the recessed portion) is formed in the second engagement portion 80 .
  • a groove portion (a recess portion) may be formed in the first engagement portion 90 and an insertion portion may be provided in the second engagement portion 80 .
  • first engagement portion 90 and the second engagement portion 80 are capable of moving relative to each other in the axial direction of the drive shaft 111 of the motor 110 and transmitting rotary force to each other, their shapes may be modified as desired.
  • the male screw portion 82 is provided on the second engagement portion 80 and the female screw portion 64 is provided in the rod 60 .
  • a female screw portion may be provided in the second engagement portion 80 and a male screw portion may be provided on the rod 60 .
  • a configuration in which the valve body 41 contacts the valve seat portion 24 when the valve body 41 is in the condition of maximum closeness to the valve seat portion 24 may be employed.
  • this configuration by allowing the second engagement portion 80 to move away in the direction toward the motor 110 , situations in which the valve body 41 is pressed forcefully against the valve seat portion 24 and an excessive load is exerted on the motor 110 can be suppressed.
  • an elastic member made of a rubber material or the like instead of the spring 71 , an elastic member made of a rubber material or the like, a configuration using repulsive force generated by a magnet, or the like may be employed.
  • a motor other than the stepping motor 110 for example a servo motor or a DC motor, may be employed.
  • the present invention is not limited to the flow rate adjustment device 10 , and may be realized as a pressure adjustment device that adjusts a fluid pressure. Further, the fluid is not limited to a liquid, and a gas may be used instead.
US13/756,361 2010-08-20 2013-01-31 Fluid control device Abandoned US20130142675A1 (en)

Applications Claiming Priority (3)

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JP2010-184850 2010-08-20
JP2010184850 2010-08-20
PCT/JP2011/064309 WO2012023342A1 (ja) 2010-08-20 2011-06-22 流体制御装置

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US (1) US20130142675A1 (ja)
JP (1) JP5150009B2 (ja)
KR (1) KR101250654B1 (ja)
CN (1) CN103097789A (ja)
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WO (1) WO2012023342A1 (ja)

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US20160146159A1 (en) * 2013-07-02 2016-05-26 Aisan Kogyo Kabushiki Kaisha Flow rate control valve and fuel vapor processing apparatus including the same
EP3179144A1 (en) * 2015-12-08 2017-06-14 Danfoss A/S A linear actuator with a coupling
WO2017097770A1 (en) * 2015-12-08 2017-06-15 Danfoss A/S A linear actuator with a coupling
US20170234439A1 (en) * 2014-12-25 2017-08-17 Fujikin Incorporated Fluid controller
US20170234438A1 (en) * 2014-12-25 2017-08-17 Fujikin Incorporated Fluid controller
US10024457B2 (en) 2014-03-31 2018-07-17 Koganei Corporation Throttle valve
US20180231138A1 (en) * 2016-10-27 2018-08-16 National Environmental Products, Ltd. Force Limited Valve Actuator and Method Therefor
EP3686466A1 (en) * 2019-01-28 2020-07-29 MAC Valves, Inc. Proportional flow control valve poppet with flow control needle
US11536385B2 (en) 2018-07-09 2022-12-27 Fujikin Incorporated Fluid control device
TWI839455B (zh) 2019-01-28 2024-04-21 美商麥克閥公司 具有流動控制針之比例流動控制提動閥

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CN102635583B (zh) * 2012-03-27 2014-12-24 西安交通大学 一种高压大流量交流伺服直驱机液复合式流量阀
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JP6594099B2 (ja) * 2015-08-19 2019-10-23 アドバンス電気工業株式会社 小型電動モータ弁
CN106090388A (zh) * 2016-08-26 2016-11-09 湖北益健堂科技股份有限公司 电子调节流量阀
CN107441618A (zh) * 2017-09-15 2017-12-08 佛山市康宇达医疗器械有限公司 控制液体流量的比例阀及应用该比例阀的结肠途径治疗机
JP2021099145A (ja) * 2019-12-23 2021-07-01 アドバンス電気工業株式会社 電動流量調節弁
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Publication number Priority date Publication date Assignee Title
US9803593B2 (en) * 2013-07-02 2017-10-31 Aisan Kogyo Kabushiki Kaisha Flow rate control valve and fuel vapor processing apparatus including the same
US20160146159A1 (en) * 2013-07-02 2016-05-26 Aisan Kogyo Kabushiki Kaisha Flow rate control valve and fuel vapor processing apparatus including the same
US10024457B2 (en) 2014-03-31 2018-07-17 Koganei Corporation Throttle valve
US10060537B2 (en) * 2014-12-25 2018-08-28 Fujikin Incorporated Fluid controller
US10132415B2 (en) * 2014-12-25 2018-11-20 Fujikin Incorporated Fluid controller
US20170234439A1 (en) * 2014-12-25 2017-08-17 Fujikin Incorporated Fluid controller
US20170234438A1 (en) * 2014-12-25 2017-08-17 Fujikin Incorporated Fluid controller
EP3387304B1 (en) * 2015-12-08 2020-08-26 Danfoss A/S A linear actuator with a coupling
EP3179144A1 (en) * 2015-12-08 2017-06-14 Danfoss A/S A linear actuator with a coupling
US20180363797A1 (en) * 2015-12-08 2018-12-20 Danfoss A/S A linear actuator with a coupling
WO2017097770A1 (en) * 2015-12-08 2017-06-15 Danfoss A/S A linear actuator with a coupling
US11680658B2 (en) * 2015-12-08 2023-06-20 Danfoss A/S Linear actuator with a coupling
US20180231138A1 (en) * 2016-10-27 2018-08-16 National Environmental Products, Ltd. Force Limited Valve Actuator and Method Therefor
US11536385B2 (en) 2018-07-09 2022-12-27 Fujikin Incorporated Fluid control device
EP3686466A1 (en) * 2019-01-28 2020-07-29 MAC Valves, Inc. Proportional flow control valve poppet with flow control needle
CN111486261A (zh) * 2019-01-28 2020-08-04 马克阀门公司 具有流量控制针的比例流量控制阀提升阀芯
US10935153B2 (en) 2019-01-28 2021-03-02 Mac Valves, Inc. Proportional flow control valve poppet with flow control needle
TWI839455B (zh) 2019-01-28 2024-04-21 美商麥克閥公司 具有流動控制針之比例流動控制提動閥

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CN103097789A (zh) 2013-05-08
JPWO2012023342A1 (ja) 2013-10-28
WO2012023342A1 (ja) 2012-02-23
KR101250654B1 (ko) 2013-04-03
KR20130021404A (ko) 2013-03-05
JP5150009B2 (ja) 2013-02-20
TWI427230B (zh) 2014-02-21

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