US20050118052A1 - Stabilized grain size refractory metal powder metallurgy mill products - Google Patents

Stabilized grain size refractory metal powder metallurgy mill products Download PDF

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Publication number
US20050118052A1
US20050118052A1 US10/502,281 US50228104A US2005118052A1 US 20050118052 A1 US20050118052 A1 US 20050118052A1 US 50228104 A US50228104 A US 50228104A US 2005118052 A1 US2005118052 A1 US 2005118052A1
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Prior art keywords
powder
niobium
mill product
ppm
refractory metal
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Abandoned
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US10/502,281
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English (en)
Inventor
Paul Aimone
Howard Goldberg
Richard Malen
Thomas Morse
Prabhat Kumar
Henning Uhlenhut
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Glas Trust Corp Ltd
HD STARCK Inc
Materion Newton Inc
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Individual
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Priority to US10/502,281 priority Critical patent/US20050118052A1/en
Assigned to H.C. STARCK INC. reassignment H.C. STARCK INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AIMONE, PAUL R., GOLDBERG, HOWARD V., KUMAR, PRABHAT, MALEN, RICHARD MALEN, MORSE, THOMAS A., UHLENHUT, HENNING
Publication of US20050118052A1 publication Critical patent/US20050118052A1/en
Assigned to H.D. STARCK INC. reassignment H.D. STARCK INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AIMONE, PAUL R., GOLDBERG, HOWARD V., KUMAR, PRABHAT, MALEN, RICHARD, MORSE, THOMAS A., UHLENHUT, HENNING
Assigned to GLAS TRUST CORPORATION LIMITED reassignment GLAS TRUST CORPORATION LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: COMMERZBANK AKTIENGESELLSCHAFT, FILIALE LUXEMBOURG, AS SECURITY AGENT FOR THE BENEFIT OF SECOND LIEN SECURED PARTIES
Assigned to GLAS TRUST CORPORATION LIMITED reassignment GLAS TRUST CORPORATION LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: COMMERZBANK AKTIENGESELLSCHAFT, FILIALE LUXEMBOURG, AS SECURITY AGENT FOR THE BENEFIT OF SENIOR SECURED PARTIES
Assigned to GLAS TRUST CORPORATION LIMITED reassignment GLAS TRUST CORPORATION LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: COMMERZBANK AKTIENGESELLSCHAFT, FILIALE LUXEMBOURG, AS SECURITY AGENT FOR THE BENEFIT OF MEZZANINE SECURED PARTIES
Assigned to H.C. STARCK INC. reassignment H.C. STARCK INC. RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: GLAS TRUST CORPORATION LIMITED
Assigned to H.C. STARCK INC. reassignment H.C. STARCK INC. RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: GLAS TRUST CORPORATION LIMITED
Assigned to H.C. STARCK INC. reassignment H.C. STARCK INC. RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: GLAS TRUST CORPORATION LIMITED
Abandoned legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B22F3/1003—Use of special medium during sintering, e.g. sintering aid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14—Treatment of metallic powder
    • B22F1/145—Chemical treatment, e.g. passivation or decarburisation
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
    • C22C32/001—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
    • C22C32/0015—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides with only single oxides as main non-metallic constituents
    • C22C32/0031—Matrix based on refractory metals, W, Mo, Nb, Hf, Ta, Zr, Ti, V or alloys thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B22F2003/1032—Sintering only comprising a grain growth inhibitor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F2005/002—Tools other than cutting tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps

Definitions

  • the invention relates generally to metal mill products (and fabricated parts) made from powders of refractory metals including the elemental metals and their alloys and, more particularly to the use of oxide dopants for grain size stabilization in mill products and fabricated parts to be subjected to high temperature application usage and/or high temperature fabrication processes.
  • furnace parts As used for manufacturing synthetic diamonds. These products require material with small grain size. Furnace parts particularly require the material to have slow grain growth during service in order to prevent premature deterioration of the mechanical properties.
  • tantalum material with stabilized grain size due to alloying additions or other artifacts, is used for wire or sheet.
  • SiO 2 is used as a grain stabilizer.
  • the disadvantage of such a manufacturing method (resistance-sintering) for grain size stabilized tantalum powder metallurgy (P/M) material is that it is limited to a lot size of 30 pounds for tantalum and approximately 15 pounds for niobium. It is desirable to make lot sizes of up to 1000 pounds of tantalum and 500 pounds of niobium respectively.
  • P/M powder metallurgy
  • the invention relates to a process for making a metal mill product from a refractory metal powder comprising (a) providing a low oxygen refractory metal powder; (b) adding to the powder a grain growth inhibitor to the low oxygen refractory metal powder before consolidating the powder, (c) consolidating the powder by either hot isostatic pressing, extrusion or another thermomechanical working process; and (d) subjecting the consolidated powder to subsequent thermomechanical processing, and thereby forming the mill product.
  • the invention also relates to products made from such a process.
  • Grain growth inhibitors are added to niobium powder by blending inhibitors such as SiO 2 and Y 2 O 3 prior to consolidation or as a residue of a de-oxidation process where magnesium is added to capture the oxygen from the niobium powder and form magnesium oxide during the de-oxidation process.
  • the powder is consolidated either by hot isostatic pressing (HIPing), extrusion or other thermomechanical working.
  • HIPing hot isostatic pressing
  • Such methods of consolidation are capable of providing suitable P/M sheet bars with a weight of up to several hundred pounds, e.g., five hundred pounds, one thousand pounds or more.
  • Subsequent thermomechanical processing of the P/M sheet bar is applied similarly to then P/M derived refractory metals as to metals from ingot sources.
  • the present invention inhibits grain growth in niobium P/M sheets during high temperature exposure.
  • a low oxygen niobium powder ( ⁇ about 400 ppm, preferably ⁇ about 200 ppm) is needed as a starting material. Powders with a higher content in oxygen cannot be consolidated to full density and/or will not yield good mechanical properties.
  • FIG. 1 is a flow chart showing a process of the present invention to create stabilized grain size powder
  • FIGS. 2-4 are flow charts showing examples of consolidating steps to create products made of stabilized grain size powder.
  • the invention relates to a process for making a metal mill product from a refractory metal powder comprising (a) providing a low oxygen refractory metal powder; (b) adding to the powder a grain growth inhibitor to the low oxygen refractory metal powder before consolidating the powder, (c) consolidating the powder by either hot isostatic pressing, extrusion or another thermomechanical working process; and (d) subjecting the consolidated powder to subsequent thermomechanical processing, and thereby forming the mill product.
  • the invention also relates to products made from such a process.
  • the low oxygen niobium powder can be any powder, which when used in accordance to the invention, enables user to meet an object of the invention.
  • the metal powders with stabilized grain size of the present invention are preferably produced via the following procedure as discussed in U.S. Pat. No. 6,261,337, incorporated herein in its entirety.
  • Niobium alloys can also be used.
  • niobium powders instead of using niobium powders, powders made from a refractory metal selected from hafnium, molybdenum, niobium, rhenium, tantalum, tungsten, vanadium, and zirconium metals can be used. Also, alloys of these metals can also be used.
  • low oxygen niobium and grain growth inhibitor powders for example SiO 2 or Y 2 O 3
  • FIGS. 2-4 illustrate the consolidation steps with the master blend. The physical processes of blending and consolidating achieve a uniform distribution of grain growth inhibiting particles in the powder metal sheet bars. The powders are made by the process described in U.S. Pat. No. 6,261,337 and as described herein.
  • the powders are blended to produce the desired alloy composition.
  • the powders are then sealed in an evacuated can, heated to a desired temperature, and extruded such that the extrusion ratio is at least 8:1. This is done to completely consolidate the niobium powders and the included inhibitors.
  • the can may be removed either just before or just after the rolling operation.
  • the above process can afford advantages of more stable grain size in the final material, more uniform material properties (such as ultimate tensile strength and hardness), lower manufacturing costs, better control of fiber size, and greater flexibility for alloy modifications and control of properties.
  • P/M sheet with grain growth inhibitors, preferably silicon, of 0, 150, and 300 ppm were thermomechanical processed to a thickness of 0.015 inches and annealed at 1065° C. for 90 minutes to produce grain sizes of approximately ASTM 9.5.
  • Niobium sheet produced from ingot metallurgy (I/M) a grain size of approximately ASTM 5.5 under the same anneal heat treat conditions.
  • the P/M and I/M test samples were subjected to additional annealing heat treatments at 1150° C. for 180 minutes and 1300° C. for 180 minutes.
  • the P/M test samples yielded grain sizes greater than ASTM 7.0 compared to I/M test samples that yielded grain sizes coarser than ASTM 1.
  • the higher P/M Ultimate Tensile Strength of 49.3 KSI, 50.3 KSI, and 49.5 KSI and hardness of 114 VHN, 117 VHN, and 125 VHN are significant improvements over typical I/M material of Ultimate Tensile Strength of 32 KSI and hardness of 72 VHN.
  • the fine grain sizes and improved tensile strength and hardness after heat treatment of the P/M material is a significant advantage, compared to I/M material, in applications where large amounts of deformation are required during fabrication, such as deep drawn diamond cups, or capacitor cans.
  • the blended powders may be isostatically pressed into a bar prior to canning and extrusion, as illustrated in FIG. 2 .
  • the advantage of this method would be to put a higher weight into the compact prior to extrusion to aid in consolidation and increase yield per extrusion.
  • niobium hydride powder is placed into a vacuum chamber, which also contains a metal having a higher affinity for oxygen, such as calcium or magnesium, preferably the latter.
  • the starting hydride powder has oxygen content less than about 1000 ppm.
  • the chamber is heated to the dehydration temperature to remove the hydrogen, then heated to the deoxidation temperature to produce a powder of niobium or alloy of niobium having a target reduced oxygen content of less than about 400 ppm preferably below 200 ppm and more preferably below 100 ppm.
  • the magnesium, containing the oxygen is then removed from the metal powder by evaporation and subsequently by selective chemical leaching or dissolution of the powder.
  • a niobium powder with less than 400 ppm oxygen can be produced by the deoxidization of niobium hydride under partial pressure of argon.
  • Niobium hydride powder would be blended with 0.3 wt.-% magnesium and placed in a vacuum furnace retort, which is evacuated, and backfilled with argon. The pressure in the furnace would be set at about 100 microns with Argon flowing and the vacuum pump running.
  • the furnace temperature would be ramped to about 650° C. in approximately 50° C. increments, held until temperature equalized, then ramped up to 950° C. in approximately 50° C. increments. When the temperature equalized at 950° C. it would be held for about two hours. After such hold, the furnace is shut down. Once the furnace cools its powder content is removed from the retort.
  • the magnesium, containing the oxygen, would then be removed from the metal powder by acid leaching to produce the resulting niobium powder having an oxygen content of less than 300 ppm.
  • the metal hydride powder is deoxidized to an oxygen content of less than about 400 ppm.
  • the powder is consolidated to form a niobium or alloy product, having an oxygen content below about about 400 ppm, or below about 300 ppm or below about 200 ppm or below about 100 ppm, but for many powder metallurgy purposes between about 100 ppm and 150 ppm.
  • a formed refractory metal product (niobium product), having a stabilized grain size, may be produced from metal hydride powder, as treated as described above, by any known powder metallurgy techniques.
  • Exemplary of these powder metallurgy techniques used for forming the products are the following, in which the steps are listed in order of performance. Any of the following single techniques or sequences of techniques may be utilized in the present invention: cold isostatic pressing, sintering, encapsulating, hot isostatic pressing and thermomechanical processing; cold isostatic pressing, sintering, hot isostatic pressing thermomechanical processing; cold isostatic pressing, encapsulating, hot isostatic pressing and thermomechanical processing; cold isostatic pressing, encapsulating and hot isostatic pressing; encapsulating and hot isostatic pressing; cold isostatic pressing, sintering, encapsulating, extruding and thermomechanical processing; cold isostatic pressing, sintering, extruding, and thermomechanical processing; cold isostatic pressing, sintering, and extruding; cold isostatic pressing, encapsulating, extruding and thermomechanical processing; cold isostatic pressing, sintering, and extruding; cold isostatic pressing, en
  • niobium powder with grain size inhibitors would be cold isostatically pressed at 60,000 pounds/sq. in. and room temperature, into a compact with rectangular or, preferably, round cross section, then hermetically encapsulated and hot isostatically pressed (HPed) at 40,000 lbs. 1 sq. in. and 1300° C. for four hours.
  • the HIPed compact would be unencapsulated and converted to sheet or foil by thermomechanical processing steps.
  • a similar process, as illustrated in FIG. 4 , of just cold isostatic pressing, sintering and thermomechanical processing using niobium powder having an oxygen content of less than 300 ppm can be conducted by cold isostatically pressing at 60,000 lbs./sq. in. into a bar shape preform.
  • This preform would be sintered at 1500° C. for two hours in a vacuum of less than about 0.001 Torr to yield a preform having a density of about 95% theoretical density (Th) and less than 400 ppm oxygen.
  • the sintered preform would be converted into sheet and foil by thermomechanical processing steps.
  • Production of a formed niobium sheet or foil having a stable grain size by hot extrusion and thermomechanical processing can be made, using niobium powder having an oxygen content of less than 400 ppm as the starting powder.
  • This powder can be hermetically encapsulated then extruded through a rectangular or, preferably, round die at 1000° C. to produce an extruded product having oxygen content of less than 400 ppm.
  • the extruded product can be converted to sheet or foil by the thermomechanical processing.
  • Niobium sheet or foil with oxygen content of less than 400 ppm can be produced by cold isostatic pressing, hot extrusion and thermomechanical processing. This compact made by cold isostatically pressing could be hermetically encapsulated then extruded at 1000° C. to produce an extruded product with an oxygen content of about 300 ppm which can be converted into sheet and foil by thermomechanical processing steps.
  • Niobium products having stable grain size can be prepared by mechanical pressing, sintering, repressing and resintering.
  • Niobium powder blend having oxygen content of less than 400 ppm can be utilized as the starting powder. It is placed in a die and mechanically pressed, using uniaxial pressure. The pressed tablet should be then sintered at 1500° C. for two hours in a vacuum evacuated to less than about 0.001 Torr. The sintered tablet would then be repressed and resintered at 1500° C. for two hours in a vacuum evacuated to less than about 0.001 Torr.
  • the resintered tablet will have oxygen content of less than about 400 ppm and be suitable for thermomechanical processing to produce a formed niobium product.
  • a copper or steel container is filled with niobium powder, evacuated, hermetically sealed, and extruded through a die to give a 10:1 extrusion ratio.
  • the copper container is removed by acid treatment and the extruded bar is thermo-mechanically processed into a sheet form flat.
  • a steel container is filled with the niobium powder, evacuated, hermetically sealed and HIPed. The steel container is removed by machining and the HIPed piece is thermo mechanically processed into a sheet form flat.
  • Anneals may be used to improve workability of the material in between two deformation steps or to adjust grain size and texture through recrystallization although a final anneal may not be necessary.
  • the powder is canned during the consolidation (usually to protect it from the environment at high temperature), the can will bond to the niobium.
  • the process provides P/M sheets of large size (>100 pounds) having good mechanical properties and small stable grain size, capable of a higher yield than conventional P/M processes for sheet manufacture, typically 50 pounds or less.
  • Low oxygen niobium powder of less than 400 ppm, preferably less than 150 ppm, of non-spherical particles and sizing less than 250 microns FAPD (Fisher Average Particle Diameter), is provided per processes described herein. Powders with a higher content in oxygen cannot be consolidated to full density and/or will not yield good mechanical properties.
  • the powder is consolidated to full density either by HIPing (hot isostatic pressing) or by extrusion. Both methods of consolidation are capable of providing suitable P/M sheet bars with a weight of up to several hundred pounds.
  • Thermomechancial processing of the P/M sheet bar is similar to standard processes.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Powder Metallurgy (AREA)
  • Ceramic Products (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
US10/502,281 2002-01-23 2003-01-21 Stabilized grain size refractory metal powder metallurgy mill products Abandoned US20050118052A1 (en)

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US35114602P 2002-01-23 2002-01-23
US10/502,281 US20050118052A1 (en) 2002-01-23 2003-01-21 Stabilized grain size refractory metal powder metallurgy mill products
PCT/US2003/001823 WO2003062482A2 (en) 2002-01-23 2003-01-21 Stabilized grain size refractory metal powder metallurgy mill products

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US (1) US20050118052A1 (ko)
EP (1) EP1506322A2 (ko)
JP (1) JP2005516116A (ko)
KR (1) KR20040091627A (ko)
CN (1) CN1623005A (ko)
BR (1) BR0307073A (ko)
CA (1) CA2473493A1 (ko)
IL (1) IL162904A0 (ko)
MX (1) MXPA04007104A (ko)
NZ (1) NZ534212A (ko)
PL (1) PL371625A1 (ko)
RS (1) RS64904A (ko)
RU (1) RU2004125856A (ko)
TW (1) TWI262109B (ko)
WO (1) WO2003062482A2 (ko)
ZA (1) ZA200405764B (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090095130A1 (en) * 2007-10-15 2009-04-16 Joseph Smokovich Method for the production of tantalum powder using reclaimed scrap as source material
US11274363B2 (en) * 2019-04-22 2022-03-15 Nxp Usa, Inc. Method of forming a sputtering target

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BRPI0407168A (pt) * 2003-01-31 2006-02-07 Starck H C Inc Tiras de recozimento de metal refratário
KR101364607B1 (ko) * 2013-09-11 2014-02-20 한국지질자원연구원 금속 몰리브덴 분말의 산소 저감에 의한 소결체의 결정립 미세화 방법
US9238852B2 (en) * 2013-09-13 2016-01-19 Ametek, Inc. Process for making molybdenum or molybdenum-containing strip
CN106567048B (zh) * 2016-11-10 2018-11-27 洛阳科威钨钼有限公司 一种大型高纯钼合金旋转靶材的制造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4950327A (en) * 1987-01-28 1990-08-21 Schwarzkopf Development Corporation Creep-resistant alloy of high-melting metal and process for producing the same
US6261337B1 (en) * 1999-08-19 2001-07-17 Prabhat Kumar Low oxygen refractory metal powder for powder metallurgy

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4950327A (en) * 1987-01-28 1990-08-21 Schwarzkopf Development Corporation Creep-resistant alloy of high-melting metal and process for producing the same
US6261337B1 (en) * 1999-08-19 2001-07-17 Prabhat Kumar Low oxygen refractory metal powder for powder metallurgy

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090095130A1 (en) * 2007-10-15 2009-04-16 Joseph Smokovich Method for the production of tantalum powder using reclaimed scrap as source material
US7981191B2 (en) 2007-10-15 2011-07-19 Hi-Temp Specialty Metals, Inc. Method for the production of tantalum powder using reclaimed scrap as source material
US11274363B2 (en) * 2019-04-22 2022-03-15 Nxp Usa, Inc. Method of forming a sputtering target

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KR20040091627A (ko) 2004-10-28
TWI262109B (en) 2006-09-21
WO2003062482A3 (en) 2004-02-26
CN1623005A (zh) 2005-06-01
MXPA04007104A (es) 2004-10-29
TW200307583A (en) 2003-12-16
RS64904A (en) 2006-10-27
EP1506322A2 (en) 2005-02-16
IL162904A0 (en) 2005-11-20
BR0307073A (pt) 2004-12-28
WO2003062482A2 (en) 2003-07-31
CA2473493A1 (en) 2003-07-31
PL371625A1 (en) 2005-06-27
RU2004125856A (ru) 2005-06-10
NZ534212A (en) 2006-04-28
JP2005516116A (ja) 2005-06-02
ZA200405764B (en) 2005-07-20

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