US20050089262A1 - Optical circuit fabrication method and device - Google Patents

Optical circuit fabrication method and device Download PDF

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Publication number
US20050089262A1
US20050089262A1 US10/502,847 US50284704A US2005089262A1 US 20050089262 A1 US20050089262 A1 US 20050089262A1 US 50284704 A US50284704 A US 50284704A US 2005089262 A1 US2005089262 A1 US 2005089262A1
Authority
US
United States
Prior art keywords
optical
hollow core
waveguide
hollow
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/502,847
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English (en)
Inventor
Richard Jenkins
Mark McNif
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qinetiq Ltd
Original Assignee
Qinetiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qinetiq Ltd filed Critical Qinetiq Ltd
Assigned to QINETIQ LIMITED reassignment QINETIQ LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: JENKINS, RICHARD MICHAEL, MCNIE, MARK EDWARD
Publication of US20050089262A1 publication Critical patent/US20050089262A1/en
Priority to US11/637,214 priority Critical patent/US7428351B2/en
Abandoned legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2817—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using reflective elements to split or combine optical signals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment

Definitions

  • a base layer such as silica
  • a layer of doped silica with a high refractive index i.e. the core layer
  • the core layer is patterned to form appropriate waveguides.
  • an upper cladding layer of low refractive index material is also deposited on the patterned core layer.
  • waveguides are formed directly on the silicon substrate rather than being fabricated as separate optical fibres.
  • a disadvantage of known photonic circuit devices is the high degree of accuracy with which each optical component has to be aligned with the associated waveguides to ensure an efficient optical connection.
  • it is also necessary to minimise unwanted reflections from the end of each silica waveguide. This requires refractive index matching of the waveguides to the optical components, or the use of a gel or antireflection coating.
  • Lenses may also be required to facilitate the free space coupling of light between components.
  • a photonic light circuit device comprises a semiconductor substrate and two or more optical components wherein one or more hollow core optical waveguides are formed in the semiconductor substrate to optically link said two or more optical components.
  • the alignment slots can thus be fabricated with sufficient accuracy to align the optical component they receive. Placing an optical component in such an alignment slot inherently aligns the optical component and a component alignment or adjustment step is not required. Conventional pick and place techniques of the type used in the manufacture of electronic circuits and the like could be used to place the optical components in the alignment slots.
  • the alignment slots and (especially) the optical components are manufactured with a certain size tolerance.
  • the coupling efficiency between a optical component and an associated hollow core optical waveguide will reduce as the angular error of alignment of the optical component with respect to the hollow core waveguide increases.
  • reduction of the cross-sectional dimensions of the hollow core waveguide will increase the acceptable angular alignment tolerance, albeit at the expense of slightly increased losses in the optical waveguide due to the reduced core dimensions and increased (tighter) lateral alignment tolerances. Therefore, knowledge of the alignment tolerances that will be achieved with a certain optical component (e.g. from knowledge of the manufacturing tolerances of the optical component) will permit the dimensions of the hollow core waveguide to be selected to ensure a high coupling efficiency.
  • the alignment slots may also be formed so as to clamp a solid core optical fibre in place thereby allowing optical inputs/outputs to be made to the PLC.
  • Stepped optical fibre alignment slots may also be provided to hold both the buffer layer and the cladding.
  • the cross-section of the hollow core waveguide should be appropriate for the cross-section of the optical fibre core.
  • leakage into the cladding means that the width of the mode carried by the fibre is actually greater than the core diameter; for example typically the 10 ⁇ m solid core of a single mode glass fibre has a total field width of around 14 ⁇ m diameter.
  • lenses e.g. ball or GRIN rod etc
  • Fibre ends of solid core fibres may be anti-reflection.
  • one or more of the two or more optical components are formed from the material of the semiconductor substrate; i.e. monolithic components may be formed.
  • optical components that make up the PLC, and which are interconnected via the hollow core waveguides formed in the semiconductor substrate may be attached to the semiconductor substrate as described above; in other words, a hybrid device may be formed.
  • one or more optical components are attached to the lid portion.
  • Optical components may be mounted on the lid alone, on the base portion alone, or on both the lid and the base.
  • the lid portion may be formed from semiconductor material, such as silicon, and advantageously one or more optical components may be formed thereon.
  • the lid portion may be formed from glass.
  • the lid should have the same thermal expansion properties as the substrate; for example, by the lid being formed from the same semiconductor material as the substrate.
  • At least some of the internal surfaces of said one or more hollow core optical waveguides carry a reflective coating.
  • the reflective coating may advantageously comprise a layer of material having a refractive index lower than that of the waveguide core within the operating wavelength band.
  • the additional layer of low refractive index material can be selected to provide efficient operation at any required wavelength.
  • Silcon Carbide has a refractive index of 0.06 at 10.6 ⁇ m, making such material particularly suited for inclusion in devices operating at such a wavelength.
  • the shape and dimensions of the hollow waveguide will affect the associated optical guiding properties.
  • tapered hollow waveguides could be used to provide a beam expansion or compression function.
  • the high resolution with which hollow core waveguides can be fabricated using micro-fabrication techniques allows the guiding properties to be tailored as required to optimise PLC operation.
  • the shape of the hollow core optical waveguides may be dictated to some extent by the type of micro-fabrication process used. For example, v-grooves can readily be wet etched in [100] silicon whilst rectangular waveguides can be easily provided in [110] silicon by wet etching. However, deep reactive ion etching (DRIE) provides the greatest ease of manufacture.
  • DRIE deep reactive ion etching
  • the semiconductor substrate comprises at least one alignment slot arranged to receive an optical fibre cable and to optically couple said optical fibre cable with one of said one or more hollow core optical waveguide of the semiconductor substrate.
  • a mode matching means may be advantageously provided in the vicinity of the alignment slot to allow coupling between the modes of an optical fibre and the analogous modes of a hollow core optical waveguide of a different core diameter.
  • the mode matching means couples the fundamental mode of the fibre and the fundamental mode of the hollow core waveguide.
  • the mode spectrum of the optical fibre is matched to the mode spectrum of the hollow core waveguide.
  • the mode matching means may advantageously comprise a GRIN rod, a ball lens, a conventional lens or a Fresnel lens.
  • At least one slot is formed in the semiconductor substrate of the base portion to receive in alignment an optical component.
  • a method of fabricating a photonic light circuit comprising the steps of taking a base portion according to the second or third aspects of the invention and attaching a lid thereto.
  • the additional step of fabricating slots in the semiconductor substrate for the appropriate passive alignment of optical components therein is performed.
  • the slots may be fabricated using micro-fabrication techniques, or by precision engineering techniques such as laser machining.
  • a method of forming a photonic light circuit comprising the steps of; (a) using a master according to the seventh aspect of the invention to permanently form a pattern in a layer of deformable material and (b) introducing at least one optical component into the, at least one alignment slot formed in the deformable material.
  • FIG. 10 illustrates a PLC in which light is coupled into and out of optical fibre cables
  • FIG. 14 show a PLC having both hollow core and solid core waveguides
  • FIG. 1 typical prior art silicon optical bench apparatus is shown.
  • hollow core waveguides in which different internal surfaces have different optical properties can be provided to further decrease the optical losses associated with the waveguide.
  • FIG. 7 A number of techniques are described with reference to FIG. 7 that can be used to form waveguides in which different internal surfaces have different optical properties.
  • FIG. 19 a technique for ensuring accurate alignment of components placed in a slot is shown.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
  • Glass Compositions (AREA)
US10/502,847 2002-01-29 2003-01-28 Optical circuit fabrication method and device Abandoned US20050089262A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US11/637,214 US7428351B2 (en) 2002-01-29 2006-12-12 Optical circuit fabrication method and device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0201969.3A GB0201969D0 (en) 2002-01-29 2002-01-29 Integrated optics devices
GB02019693 2002-01-29
PCT/GB2003/000331 WO2003065091A2 (en) 2002-01-29 2003-01-28 Optical circuit including hollow core optical waveguides

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/637,214 Continuation US7428351B2 (en) 2002-01-29 2006-12-12 Optical circuit fabrication method and device

Publications (1)

Publication Number Publication Date
US20050089262A1 true US20050089262A1 (en) 2005-04-28

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US10/502,847 Abandoned US20050089262A1 (en) 2002-01-29 2003-01-28 Optical circuit fabrication method and device
US11/637,214 Expired - Fee Related US7428351B2 (en) 2002-01-29 2006-12-12 Optical circuit fabrication method and device

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Country Status (12)

Country Link
US (2) US20050089262A1 (zh)
EP (2) EP1605287A3 (zh)
JP (1) JP4515768B2 (zh)
KR (1) KR100928408B1 (zh)
CN (1) CN1643413B (zh)
AT (1) ATE304182T1 (zh)
AU (1) AU2003202697A1 (zh)
CA (1) CA2474330A1 (zh)
DE (1) DE60301553T2 (zh)
GB (1) GB0201969D0 (zh)
TW (1) TWI252940B (zh)
WO (1) WO2003065091A2 (zh)

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CN1643413A (zh) 2005-07-20
WO2003065091A2 (en) 2003-08-07
KR20040073600A (ko) 2004-08-19
WO2003065091A3 (en) 2003-11-06
ATE304182T1 (de) 2005-09-15
EP1605287A2 (en) 2005-12-14
US7428351B2 (en) 2008-09-23
US20070165980A1 (en) 2007-07-19
DE60301553T2 (de) 2006-06-22
JP2005516253A (ja) 2005-06-02
DE60301553D1 (de) 2005-10-13
GB0201969D0 (en) 2002-03-13
TWI252940B (en) 2006-04-11
CN1643413B (zh) 2013-02-06
JP4515768B2 (ja) 2010-08-04
TW200302367A (en) 2003-08-01
KR100928408B1 (ko) 2009-11-26
EP1470439B1 (en) 2005-09-07
AU2003202697A1 (en) 2003-09-02
EP1605287A3 (en) 2006-06-21
EP1470439A2 (en) 2004-10-27
CA2474330A1 (en) 2003-08-07

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