US20030229294A1 - Multilayered polymer tubing with braided layer and methods of making and using same - Google Patents
Multilayered polymer tubing with braided layer and methods of making and using same Download PDFInfo
- Publication number
- US20030229294A1 US20030229294A1 US10/358,575 US35857503A US2003229294A1 US 20030229294 A1 US20030229294 A1 US 20030229294A1 US 35857503 A US35857503 A US 35857503A US 2003229294 A1 US2003229294 A1 US 2003229294A1
- Authority
- US
- United States
- Prior art keywords
- tube
- layer
- multilayered
- tubing
- polymer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2813—Scanning microscopes characterised by the application
- H01J2237/2817—Pattern inspection
Definitions
- the invention relates to multilayered polymer tubing which includes at least one layer which is braided and methods of manufacturing and using such tubing.
- Tubing is used to carry fluids in a wide variety of applications.
- polymer tubing is used to carry fluids in medical applications and devices, analytical applications and devices, and so forth.
- Multilayered polymer tubing is also conventional, and has been used in a wide variety of applications.
- U.S. Pat. Nos. 6,293,312 B1, 6,180197 B1, 5,743,304, 5,641,445, 5,638,871, and 5,630,806 all disclose multilayered polymer tubing, using various polymers for various applications.
- the foregoing patents are hereby incorporated by reference as if fully set forth herein.
- a common problem with conventional multilayered tubing is that a unique combination of properties is sometime desirable for a particular application.
- HPLC high pressure liquid chromatography
- a combination of high pressures with the chemical solvents used in the chromatographic analysis means that only a limited number of polymers may be appropriate.
- structural strength, torsion resistance, lubricity, or other characteristics are required for a given application, there simply may not be a suitable polymer which can be easily used for tubing in the application.
- biocompatibility is often an important and desirable characteristic, especially in many medical applications and devices, as well as in many HPLC and other analytical applications.
- Appendix 1 Attached as Appendix 1 hereto are materials describing the various properties and characteristics of several different polymers used in HPLC tubing. Appendix 1 is hereby incorporated by reference as if fully set forth herein. Attached collectively as Appendix 2 hereto are materials describing extruded polymer tubing made from a variety of different polymers and having a variety of useful applications. Appendix 2 is hereby incorporated by reference as if fully set forth herein. The materials of Appendices 1 and 2 describe conventional tubing which is commercially available from Upchurch Scientific of Oak Harbor, Wash.
- a multilayered tube comprising an inner layer of a tube comprising a first polymer, a second layer of a tube comprising a braided layer comprising a metal or a second polymer, and a third layer of a tube comprising a polymer, which can be either the first, second, or still another third polymer.
- the braided tube layer provides mechanical strength and rigidity to the multilayered tube without adversely affecting the desired chemical or other properties of the inner and outer layers of the tube.
- the inner layer comprises polyetheretherketone (PEEK)
- the braided layer comprises metal (such as any one of the following: 316 stainless steel, 400 series stainless steel, gold, silver, platinum, copper, and similar metals and/or alloys)
- the outer layer comprises PEEK.
- the inner layer comprises polyethersulfone (PES)
- the braided layer comprises any one of the materials selected from the following group: aramid fibers (such as those sold under the trademarks KEVLAR and NOMEX, nylon, and the like), graphite fibers, glass fibers, and similar fibrous materials
- the outer layer comprises PES.
- a catheter (or other medical or diagnostic device) comprises a multilayered tube substantially as described herein, where at least one layer is braided.
- an HPLC system comprises at least one multilayered tube substantially as described herein.
- FIG. 1 is a cross-sectional view of a multilayered tube in accordance with the present invention.
- Tube 1 includes an inner tube 5 , a second, braided tube 10 , and a third, outer tube 15 .
- the multilayered tube 1 has an inner tube 5 layer 5 made of PEEK.
- PEEK offers good solvent resistance and mid pressure range capabilities.
- PEEK is useful for a variety of applications with demanding conditions.
- a second layer 10 of tubing Disposed around the inner PEEK layer 5 is a second layer 10 of tubing that is braided.
- This second braided layer 10 of tubing can be made from any one of a number of materials.
- the braided layer 10 can be made of fibers of various materials, including aramids, graphite, glass, and other fibrous materials, or can be made of metal, such as stainless steel, gold, silver, platinum, copper, or other metals.
- this third layer 15 of tubing is made of PEEK and is extruded over the two inner layers of the multilayered tube 1 .
- This inner layer 5 was extruded through conventional means.
- a braided layer 10 made of 316 stainless steel around the inner layer 5 .
- the thickness of the second, braided layer 10 was 0.003′′.
- the dimensions of the various layers of the multilayered tube 1 may be varied depending on the need to accommodate various pressures to which the resulting tube 1 will be exposed, and/or depending on the desired flexibility or rigidity of the resulting tube 1 , or other properties or characteristics.
- Braiding various materials has been used for many years.
- the braided layer 10 can be used to add strength or rigidity as desired to the inner layer 5 of tubing.
- the braided layer 10 of tubing in various illustrative embodiments of our invention allows the resulting multilayered tube 1 to operate at substantially higher pressures and under more difficult conditions than would be the case without the braided layer 10 .
- Braiding equipment is commercially available from a number of manufacturers. We have used a Wardwell Rapid 16 Carrier Special Braider that was re-worked by Lloyd and Bouvier of Clinton, Mass.
- fluoropolymer materials may be used for the inner and outer layers of the multilayered tube 1 .
- Such materials offer high solvent resistance and are therefore particularly useful in certain applications where other materials would quickly corrode.
- an FEP layer having an inner diameter of 0.020′′ and an outer diameter of 0.040′′ was used as the substrate, or inner layer 5 .
- a braid 10 made of 316 stainless steel with a layer thickness of 0.003′′ was then made around the first inner layer 5 .
- an outer layer 15 made of FEP and having an inner diameter of 0.046′′ and an outer diameter of 0.062′′ was used as the third, outer layer 15 of the multilayered tube 1 .
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Materials For Medical Uses (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/358,575 US20030229294A1 (en) | 2002-02-04 | 2003-02-04 | Multilayered polymer tubing with braided layer and methods of making and using same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US35426002P | 2002-02-04 | 2002-02-04 | |
US10/358,575 US20030229294A1 (en) | 2002-02-04 | 2003-02-04 | Multilayered polymer tubing with braided layer and methods of making and using same |
Publications (1)
Publication Number | Publication Date |
---|---|
US20030229294A1 true US20030229294A1 (en) | 2003-12-11 |
Family
ID=27734344
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/358,575 Abandoned US20030229294A1 (en) | 2002-02-04 | 2003-02-04 | Multilayered polymer tubing with braided layer and methods of making and using same |
US10/893,614 Expired - Lifetime US7235794B2 (en) | 2002-02-04 | 2004-07-16 | System and method for inspecting charged particle responsive resist |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/893,614 Expired - Lifetime US7235794B2 (en) | 2002-02-04 | 2004-07-16 | System and method for inspecting charged particle responsive resist |
Country Status (6)
Country | Link |
---|---|
US (2) | US20030229294A1 (ja) |
JP (1) | JP2006505093A (ja) |
KR (1) | KR100963450B1 (ja) |
CN (1) | CN1628381B (ja) |
AU (1) | AU2003207700A1 (ja) |
WO (1) | WO2003067652A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080027379A1 (en) * | 2006-07-28 | 2008-01-31 | Taylor Medical, Inc. | Catheter components formed of polymer with particles or fibers |
US8641677B2 (en) | 2010-01-21 | 2014-02-04 | James T. Rawls | Low-profile intravenous catheter device |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7569818B2 (en) * | 2006-03-14 | 2009-08-04 | Applied Materials, Inc. | Method to reduce cross talk in a multi column e-beam test system |
JP5813413B2 (ja) * | 2011-08-22 | 2015-11-17 | 株式会社日立ハイテクノロジーズ | シュリンク前形状推定方法およびcd−sem装置 |
TWI494537B (zh) * | 2013-01-23 | 2015-08-01 | Hitachi High Tech Corp | A pattern measuring method, a device condition setting method of a charged particle beam device, and a charged particle beam device |
CN110133094B (zh) * | 2019-05-14 | 2022-02-15 | 上海华虹宏力半导体制造有限公司 | 测试片及其制造方法和光刻胶缺陷的检测方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4925710A (en) * | 1988-03-31 | 1990-05-15 | Buck Thomas F | Ultrathin-wall fluoropolymer tube with removable fluoropolymer core |
US5676659A (en) * | 1993-11-12 | 1997-10-14 | Medtronic, Inc. | Small diameter, high torque catheter |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59214151A (ja) * | 1983-05-20 | 1984-12-04 | Jeol Ltd | 荷電粒子線装置等における二次元画像デ−タの表示方法 |
JPS62135710A (ja) * | 1985-12-10 | 1987-06-18 | Nec Corp | 微細パタ−ンの検査方法 |
JPH02139844A (ja) * | 1988-11-21 | 1990-05-29 | Seiko Instr Inc | テーブルを用いたビーム走査方法 |
JPH02236105A (ja) * | 1989-03-09 | 1990-09-19 | Toshiba Corp | 電子ビームによる測長方法 |
US5304811A (en) * | 1991-08-09 | 1994-04-19 | Fujitsu Ltd. | Lithography system using charged-particle beam and method of using the same |
JP2869827B2 (ja) * | 1991-09-17 | 1999-03-10 | 株式会社日立製作所 | 走査電子顕微鏡 |
JPH06124681A (ja) * | 1992-10-09 | 1994-05-06 | Nec Corp | 荷電粒子描画装置 |
US5302828A (en) * | 1992-12-03 | 1994-04-12 | Metrologix Corporation | Scanning techniques in particle beam devices for reducing the effects of surface charge accumulation |
JP3409909B2 (ja) * | 1994-03-11 | 2003-05-26 | 株式会社東芝 | ウェーハパターンの欠陥検出方法及び同装置 |
US5663967A (en) * | 1995-10-19 | 1997-09-02 | Lsi Logic Corporation | Defect isolation using scan-path testing and electron beam probing in multi-level high density asics |
JPH10294255A (ja) * | 1997-04-17 | 1998-11-04 | Canon Inc | 電子ビーム照明装置、および該電子ビーム照明装置を備えた露光装置 |
JP3737656B2 (ja) * | 1999-09-27 | 2006-01-18 | 株式会社東芝 | 荷電ビーム露光方法 |
US6570155B1 (en) * | 2000-04-11 | 2003-05-27 | Applied Materials, Inc. | Bi-directional electron beam scanning apparatus |
JP2001304841A (ja) * | 2000-04-26 | 2001-10-31 | Sumitomo Chem Co Ltd | レジストパターンの寸法測定方法 |
JP3519348B2 (ja) * | 2000-07-14 | 2004-04-12 | 株式会社半導体先端テクノロジーズ | パターン測定装置及び測定方法 |
WO2002045153A1 (en) * | 2000-12-01 | 2002-06-06 | Ebara Corporation | Inspection method and apparatus using electron beam, and device production method using it |
US6727507B2 (en) * | 2001-01-22 | 2004-04-27 | Leepl Corporation | Electron beam proximity exposure apparatus and method |
JP2006138864A (ja) * | 2001-08-29 | 2006-06-01 | Hitachi Ltd | 試料寸法測定方法及び走査型電子顕微鏡 |
US6774044B2 (en) * | 2002-01-14 | 2004-08-10 | Taiwan Semiconductor Manufacturing Co., Ltd | Reducing photoresist shrinkage via plasma treatment |
-
2003
- 2003-01-27 JP JP2003566896A patent/JP2006505093A/ja active Pending
- 2003-01-27 KR KR1020047012043A patent/KR100963450B1/ko not_active IP Right Cessation
- 2003-01-27 AU AU2003207700A patent/AU2003207700A1/en not_active Abandoned
- 2003-01-27 CN CN038031981A patent/CN1628381B/zh not_active Expired - Fee Related
- 2003-01-27 WO PCT/US2003/002415 patent/WO2003067652A1/en active Application Filing
- 2003-02-04 US US10/358,575 patent/US20030229294A1/en not_active Abandoned
-
2004
- 2004-07-16 US US10/893,614 patent/US7235794B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4925710A (en) * | 1988-03-31 | 1990-05-15 | Buck Thomas F | Ultrathin-wall fluoropolymer tube with removable fluoropolymer core |
US5676659A (en) * | 1993-11-12 | 1997-10-14 | Medtronic, Inc. | Small diameter, high torque catheter |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080027379A1 (en) * | 2006-07-28 | 2008-01-31 | Taylor Medical, Inc. | Catheter components formed of polymer with particles or fibers |
US8066676B2 (en) | 2006-07-28 | 2011-11-29 | Taylor Medical, Inc. | Catheter components formed of polymer with particles or fibers |
US8641677B2 (en) | 2010-01-21 | 2014-02-04 | James T. Rawls | Low-profile intravenous catheter device |
US9861791B2 (en) | 2010-01-21 | 2018-01-09 | James T. Rawls | Low-profile intravenous catheter device |
Also Published As
Publication number | Publication date |
---|---|
CN1628381A (zh) | 2005-06-15 |
WO2003067652A1 (en) | 2003-08-14 |
CN1628381B (zh) | 2010-06-09 |
JP2006505093A (ja) | 2006-02-09 |
US7235794B2 (en) | 2007-06-26 |
AU2003207700A1 (en) | 2003-09-02 |
KR20040088055A (ko) | 2004-10-15 |
KR100963450B1 (ko) | 2010-06-17 |
US20050067582A1 (en) | 2005-03-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: UPCHURCH SCIENTIFIC, INC., WASHINGTON Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BAILEY, MICHAEL L.;RETTKE, HERBERT G.;REEL/FRAME:013888/0680 Effective date: 20030814 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |