TWI905244B - 清洗用海綿滾輪 - Google Patents

清洗用海綿滾輪

Info

Publication number
TWI905244B
TWI905244B TW110129011A TW110129011A TWI905244B TW I905244 B TWI905244 B TW I905244B TW 110129011 A TW110129011 A TW 110129011A TW 110129011 A TW110129011 A TW 110129011A TW I905244 B TWI905244 B TW I905244B
Authority
TW
Taiwan
Prior art keywords
sponge
core
cleaning
water
sintered body
Prior art date
Application number
TW110129011A
Other languages
English (en)
Chinese (zh)
Other versions
TW202208107A (zh
Inventor
大久保絵里
真野稔正
Original Assignee
日商艾翁股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商艾翁股份有限公司 filed Critical 日商艾翁股份有限公司
Publication of TW202208107A publication Critical patent/TW202208107A/zh
Application granted granted Critical
Publication of TWI905244B publication Critical patent/TWI905244B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/14—Wipes; Absorbent members, e.g. swabs or sponges
    • B08B1/143—Wipes
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B13/00—Brushes with driven brush bodies or carriers
    • A46B13/001—Cylindrical or annular brush bodies
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B13/00—Brushes with driven brush bodies or carriers
    • A46B13/02—Brushes with driven brush bodies or carriers power-driven carriers
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B9/00—Arrangements of the bristles in the brush body
    • A46B9/005—Arrangements of the bristles in the brush body where the brushing material is not made of bristles, e.g. sponge, rubber or paper
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47L—DOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L13/00—Implements for cleaning floors, carpets, furniture, walls, or wall coverings
    • A47L13/10—Scrubbing; Scouring; Cleaning; Polishing
    • A47L13/16—Cloths; Pads; Sponges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B22F3/11—Making porous workpieces or articles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0412—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B11/00—Brushes with reservoir or other means for applying substances, e.g. paints, pastes, water
    • A46B11/06—Brushes with reservoir or other means for applying substances, e.g. paints, pastes, water connected to supply pipe or to other external supply means
    • A46B11/063—Brushes with reservoir or other means for applying substances, e.g. paints, pastes, water connected to supply pipe or to other external supply means by means of a supply pipe

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Cleaning Implements For Floors, Carpets, Furniture, Walls, And The Like (AREA)
TW110129011A 2020-08-07 2021-08-06 清洗用海綿滾輪 TWI905244B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-134743 2020-08-07
JP2020134743A JP7595907B2 (ja) 2020-08-07 2020-08-07 洗浄用スポンジローラ

Publications (2)

Publication Number Publication Date
TW202208107A TW202208107A (zh) 2022-03-01
TWI905244B true TWI905244B (zh) 2025-11-21

Family

ID=80117547

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110129011A TWI905244B (zh) 2020-08-07 2021-08-06 清洗用海綿滾輪

Country Status (6)

Country Link
US (1) US20230276931A1 (enExample)
JP (1) JP7595907B2 (enExample)
KR (1) KR20230048117A (enExample)
CN (1) CN116171121A (enExample)
TW (1) TWI905244B (enExample)
WO (1) WO2022030562A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114734374A (zh) * 2022-03-29 2022-07-12 北京国瑞升科技股份有限公司 用于清洁液晶面板的研磨辊及其制备方法
TWI827446B (zh) * 2023-01-16 2023-12-21 孫建忠 出水輪刷構造
TWI875195B (zh) * 2023-09-15 2025-03-01 碩晨生醫股份有限公司 刷輪結構
CN117444820A (zh) * 2023-11-23 2024-01-26 江西和美陶瓷有限公司 一种哑光抛釉瓷砖抛光装置及其方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW447027B (en) * 1997-04-18 2001-07-21 Cabot Microelectronics Corp Polishing pad for a semiconductor substrate
TW200513350A (en) * 2003-08-08 2005-04-16 Mykrolis Corp Method and materials for making a monolithic porous pad cast onto a rotatable base
WO2005065849A1 (ja) * 2003-12-26 2005-07-21 Aion Co., Ltd. 洗浄用スポンジローラー用の中芯
JP2011196535A (ja) * 2010-03-24 2011-10-06 Toray Ind Inc 多孔質プラスチックロールおよびその製造方法、ならびに多孔質プラスチックロールを用いたフィルム搬送装置
US20160135657A1 (en) * 2014-10-17 2016-05-19 Porex Corporation Disposable Porous Cleaning Devices and Methods
JP2019147244A (ja) * 2018-02-27 2019-09-05 国立大学法人埼玉大学 バフ材及び研磨方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5032497B1 (enExample) 1970-04-22 1975-10-21
JPS6027101B2 (ja) 1981-08-18 1985-06-27 松下電器産業株式会社 回転ヘッドアセンブリ−
JPS59197439A (ja) * 1983-04-26 1984-11-09 Asahi Chem Ind Co Ltd 親水性多孔質焼結体
JPH0751640A (ja) * 1993-08-11 1995-02-28 Inax Corp タイルパネルの表面清掃方法
US6070284A (en) 1998-02-04 2000-06-06 Silikinetic Technology, Inc. Wafer cleaning method and system
JP3854085B2 (ja) 2001-03-16 2006-12-06 株式会社荏原製作所 基板処理装置
JP2006272134A (ja) * 2005-03-29 2006-10-12 Dainippon Screen Mfg Co Ltd 基板処理装置
EP1960129B1 (en) 2005-12-06 2017-06-14 Entegris, Inc. A molded rotatable base for a porous pad
JP5301538B2 (ja) 2008-06-06 2013-09-25 アイオン株式会社 洗浄用スポンジローラー用の中芯
JP5538007B2 (ja) 2009-08-20 2014-07-02 アイオン株式会社 洗浄用スポンジ体及び洗浄方法
TWD161994S (zh) 2011-06-08 2014-08-01 伊利諾工具工程公司 海綿刷的刷心之部分（一）
JP2014045093A (ja) * 2012-08-27 2014-03-13 Sharp Corp 基板搬送装置および基板処理装置
JP2015196124A (ja) * 2014-03-31 2015-11-09 株式会社荏原製作所 ロールスポンジホルダー、ロールスポンジの製造方法、基板洗浄装置及び基板処理装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW447027B (en) * 1997-04-18 2001-07-21 Cabot Microelectronics Corp Polishing pad for a semiconductor substrate
TW200513350A (en) * 2003-08-08 2005-04-16 Mykrolis Corp Method and materials for making a monolithic porous pad cast onto a rotatable base
WO2005065849A1 (ja) * 2003-12-26 2005-07-21 Aion Co., Ltd. 洗浄用スポンジローラー用の中芯
JP2011196535A (ja) * 2010-03-24 2011-10-06 Toray Ind Inc 多孔質プラスチックロールおよびその製造方法、ならびに多孔質プラスチックロールを用いたフィルム搬送装置
US20160135657A1 (en) * 2014-10-17 2016-05-19 Porex Corporation Disposable Porous Cleaning Devices and Methods
JP2019147244A (ja) * 2018-02-27 2019-09-05 国立大学法人埼玉大学 バフ材及び研磨方法

Also Published As

Publication number Publication date
CN116171121A (zh) 2023-05-26
JP2022030618A (ja) 2022-02-18
US20230276931A1 (en) 2023-09-07
KR20230048117A (ko) 2023-04-10
JP7595907B2 (ja) 2024-12-09
WO2022030562A1 (ja) 2022-02-10
TW202208107A (zh) 2022-03-01

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