JP5301538B2 - 洗浄用スポンジローラー用の中芯 - Google Patents
洗浄用スポンジローラー用の中芯 Download PDFInfo
- Publication number
- JP5301538B2 JP5301538B2 JP2010515723A JP2010515723A JP5301538B2 JP 5301538 B2 JP5301538 B2 JP 5301538B2 JP 2010515723 A JP2010515723 A JP 2010515723A JP 2010515723 A JP2010515723 A JP 2010515723A JP 5301538 B2 JP5301538 B2 JP 5301538B2
- Authority
- JP
- Japan
- Prior art keywords
- core
- sponge roller
- cleaning
- axial direction
- cleaning sponge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004140 cleaning Methods 0.000 title claims description 45
- 238000001746 injection moulding Methods 0.000 claims description 4
- 238000007373 indentation Methods 0.000 claims description 3
- 230000000630 rising effect Effects 0.000 claims description 2
- 239000011162 core material Substances 0.000 description 67
- 239000007788 liquid Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000005498 polishing Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 2
- 125000002777 acetyl group Chemical class [H]C([H])([H])C(*)=O 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 2
- 230000004323 axial length Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 241000135309 Processus Species 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
- Cleaning Implements For Floors, Carpets, Furniture, Walls, And The Like (AREA)
Description
好ましくは、中芯の端部の一方あるいは双方にフランジを備えることが出来、たとえばネジによって着脱可能にすることもできる。その場合には、該フランジをはずして中芯にスポンジローラーを装着し、つぎにフランジをはめて固定して、使用に供する。フランジは、洗浄工程中にスポンジローラーが中芯上で軸方向にずれることを防ぐ効果がある。
Claims (4)
- 軸方向に延びる内孔(2)、および該内孔から円周外表面に連通する複数の小孔(3)を有する、洗浄用スポンジローラー用の略円筒形の中芯(1)において、該中芯の外表面に、軸方向に細長い突起(4)が円周方向において少なくとも8設けられており、該突起が中芯の外表面から立ち上がるほぼ板状のリブよりなり、該突起(4)の、軸方向に直角な方向から見た横断面が凹凸(5A、5B)を有し、該凹凸の高さが、0.3〜5mmであり、該凸部が中芯の軸に平行な仮想直線上において少なくとも4設けられており、該複数の凹凸が、中芯の周面上で千鳥格子形状に配置されており、該突起(4)が円周方向に延びるさらなるリブ(10)と一体に連結されていることを特徴とする洗浄用スポンジローラー用の中芯。
- 凹凸の頂部近傍に1又は複数の陥入部がある請求項1に記載の中芯。
- 該陥入部の、中芯軸方向の長さが0.3〜10mmであり、かつ該陥入部の深さが0.3〜5mmである請求項2に記載の中芯。
- 射出成形により作られた請求項1〜3のいずれか1項に記載の中芯。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2008/060457 WO2009147747A1 (ja) | 2008-06-06 | 2008-06-06 | 洗浄用スポンジローラー用の中芯 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2009147747A1 JPWO2009147747A1 (ja) | 2011-10-20 |
JP5301538B2 true JP5301538B2 (ja) | 2013-09-25 |
Family
ID=41397839
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010515723A Active JP5301538B2 (ja) | 2008-06-06 | 2008-06-06 | 洗浄用スポンジローラー用の中芯 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8505145B2 (ja) |
JP (1) | JP5301538B2 (ja) |
KR (1) | KR101507633B1 (ja) |
TW (1) | TWI466734B (ja) |
WO (1) | WO2009147747A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9524886B2 (en) | 2009-05-15 | 2016-12-20 | Illinois Tool Works Inc. | Brush core and brush driving method |
KR101980206B1 (ko) * | 2011-06-08 | 2019-05-20 | 일리노이즈 툴 워크스 인코포레이티드 | Pva 스폰지 브러시를 위한 브러시 굴대 |
TWD154970S (zh) * | 2011-06-08 | 2013-07-21 | 伊利諾工具工程公司 | 海綿刷的刷心 |
KR101302808B1 (ko) * | 2011-06-28 | 2013-09-02 | 박승주 | 세정 및 이송용 스폰지 롤러 브러쉬와 그 제조방법 |
KR101336535B1 (ko) * | 2012-03-28 | 2013-12-03 | 박승주 | 세정 및 이송용 스폰지 롤러 브러쉬의 제조방법 |
TWI695741B (zh) * | 2019-10-01 | 2020-06-11 | 力晶積成電子製造股份有限公司 | 研磨後清潔裝置 |
JP2022030618A (ja) * | 2020-08-07 | 2022-02-18 | アイオン株式会社 | 洗浄用スポンジローラ |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0592533U (ja) * | 1992-05-13 | 1993-12-17 | 日本エフ・テイ・ビー株式会社 | 弾性ロール体 |
JP3011644U (ja) * | 1994-11-28 | 1995-05-30 | 富士精工株式会社 | 粘着テープ保持具 |
WO2005065849A1 (ja) * | 2003-12-26 | 2005-07-21 | Aion Co., Ltd. | 洗浄用スポンジローラー用の中芯 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3877123A (en) * | 1974-09-04 | 1975-04-15 | Painter Corp E Z | Paint roller core |
US3986226A (en) * | 1974-11-04 | 1976-10-19 | The Wooster Brush Company | Roller cover support for paint roller frame |
JPS596974A (ja) * | 1982-07-05 | 1984-01-14 | カネボウ株式会社 | 洗浄方法 |
DE3741983A1 (de) * | 1987-12-11 | 1989-06-22 | Monti Werkzeuge Gmbh | Rotativ antreibbare werkzeugspannvorrichtung |
JPH0617722Y2 (ja) * | 1990-06-24 | 1994-05-11 | モロフジ株式会社 | 被覆板付き包装用袋 |
US5979009A (en) * | 1995-02-06 | 1999-11-09 | Newell Operating Co. | Roller having slip-on cage for paint roller cover |
DE69631258T2 (de) * | 1995-10-13 | 2004-11-18 | Lam Research Corp., Fremont | Verfahren zum Entfernen von Verunreinigungen durch Bürsten |
EP0844062A1 (en) * | 1996-11-21 | 1998-05-27 | The Procter & Gamble Company | Thermal joining of webs |
US6070284A (en) * | 1998-02-04 | 2000-06-06 | Silikinetic Technology, Inc. | Wafer cleaning method and system |
US6247197B1 (en) * | 1998-07-09 | 2001-06-19 | Lam Research Corporation | Brush interflow distributor |
US6240588B1 (en) * | 1999-12-03 | 2001-06-05 | Lam Research Corporation | Wafer scrubbing brush core |
US20020138935A1 (en) * | 2001-03-29 | 2002-10-03 | Lanz Donald D. | Paint roller cage |
US7841036B2 (en) * | 2004-07-09 | 2010-11-30 | The Procter & Gamble Company | Hand-held roller device with cover for providing benefits to fabrics |
JP2006297178A (ja) | 2005-04-15 | 2006-11-02 | Rindaasu Roojikuto:Kk | スポンジブラシ洗浄具 |
US7255509B2 (en) * | 2005-07-28 | 2007-08-14 | Miguel Wang | Paint roller assembly |
-
2008
- 2008-06-06 WO PCT/JP2008/060457 patent/WO2009147747A1/ja active Application Filing
- 2008-06-06 JP JP2010515723A patent/JP5301538B2/ja active Active
- 2008-06-06 KR KR1020107026983A patent/KR101507633B1/ko active IP Right Grant
- 2008-06-06 US US12/995,560 patent/US8505145B2/en active Active
- 2008-12-01 TW TW97146615A patent/TWI466734B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0592533U (ja) * | 1992-05-13 | 1993-12-17 | 日本エフ・テイ・ビー株式会社 | 弾性ロール体 |
JP3011644U (ja) * | 1994-11-28 | 1995-05-30 | 富士精工株式会社 | 粘着テープ保持具 |
WO2005065849A1 (ja) * | 2003-12-26 | 2005-07-21 | Aion Co., Ltd. | 洗浄用スポンジローラー用の中芯 |
Also Published As
Publication number | Publication date |
---|---|
KR101507633B1 (ko) | 2015-03-31 |
US8505145B2 (en) | 2013-08-13 |
JPWO2009147747A1 (ja) | 2011-10-20 |
KR20110025645A (ko) | 2011-03-10 |
US20110088191A1 (en) | 2011-04-21 |
WO2009147747A1 (ja) | 2009-12-10 |
TW200950893A (en) | 2009-12-16 |
TWI466734B (zh) | 2015-01-01 |
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