WO2000051752A1

WO2000051752A1 - Cleaning sponge roller

Info

Publication number: WO2000051752A1
Application number: PCT/JP2000/000441
Authority: WO
Inventors: Koji Mihara; Shuki Gohda; Masao Ide
Original assignee: Aion Co., Ltd.
Priority date: 1999-02-26
Filing date: 2000-01-27
Publication date: 2000-09-08
Also published as: AU2320200A; EP1188492A4; CN1144626C; CN1341045A; KR20010101706A; JP2000246187A; JP3403108B2; EP1188492B1; EP1188492A1; KR100571640B1

Abstract

A PVAt cleaning sponge roller capable of enhancing durability without compromising a cleaning performance, the cleaning sponge roller (1) being constituted of a polyvinylacetal porous material having an elasticity in a wet condition, having a generally cylindrical roll body (3) and a plurality of protrusions (5) formed integrally on the outer peripheral surface (3a) of the roll body (3), and being adapted to clean an object with the tops (5a) of the protrusions (5) in a rotating contact with the object. The protrusions (5) each have a tapering projection base (11) extending from the outer peripheral surface (3a) of the roll body (3) and a projection end (13) having a generally equal sectional shape from the tip face (11b) of the projection base (11) to the top (5a).

Description

Description Sponge roller for cleaning Technical field

The present invention relates to fine particles adhering to the surface of an object to be cleaned, such as abrasive grains, cutting chips, and polishing chips, in a manufacturing process of a substrate such as an aluminum disk for magnetic recording and a semiconductor silicon wafer, after processing steps such as polishing. A cleaning sponge roller capable of removing water extremely efficiently and without damaging the surface of the object to be cleaned. Background art

In the manufacturing process of hard disks, glass disks, silicon wafers, semiconductor elements during the CMP process, or photomasks, liquid crystal glass substrates, etc., silicon oxide, aluminum, High-precision polishing using various abrasive grains such as cerium, so-called polishing processing, is performed. The surface of the object to be polished, such as a hard disk or a silicon wafer that has been polished, is contaminated by abrasive grains and polishing debris, so it is necessary to sufficiently clean the surface before performing the next process.

As a method for cleaning a silicon wafer, RCA cleaning using a mixed solution of ammonia water and hydrogen peroxide, a mixed solution of dilute hydrofluoric acid, hydrochloric acid and hydrogen peroxide water in this order is known. In addition, for cleaning of hard disks, silicon wafers, etc. after the polishing process, a sponge roller for cleaning is used, which is made of a polyvinyl acetal (hereinafter abbreviated as PVAt) porous material and has a plurality of protrusions on the outer surface. Methods are known. Specifically, the top of the projection of the sponge roller is brought into rotational contact with the cleaning surface of the object to be cleaned. This allows The cleaning surface is brushed by the projections, and the object to be cleaned is cleaned well.

The projection of the sponge roller during cleaning frequently repeats a deformation state in which the projection is pressed laterally by the object to be cleaned, and a state in which the deformation is released away from the object to be cleaned, and brushes the surface to be cleaned. At this time, the tensile force acting on the projection concentrates on the base end of the protrusion, and the vicinity of the base end of the protrusion is greatly deformed. Therefore, the vicinity of the base end of the projection is easily cut. Further, since the sponge roller is integrally formed as a whole, it is necessary to replace the sponge opening when a large number of projections are cut.

Such a problem can also be solved by forming the entire protrusion large and increasing its strength. However, if the entire protrusion is formed to be large, a desired brushing effect cannot be obtained, and the cleaning effect may be reduced.

Thus, an object of the present invention is to provide a PVAt-based cleaning sponge roller capable of improving durability without impairing cleaning performance. Disclosure of the invention

In order to achieve the above object, the present invention is directed to a polyvinyl acetal-based porous material having elasticity in a wet state, comprising a substantially cylindrical roll body and a plurality of integrally formed rolls on the outer peripheral surface of the roll body. A cleaning sponge roller for cleaning the body by rotating the top of the projection with the body to be cleaned, the protrusion extending from the outer peripheral surface of the roll body and tapering. And a projecting end having substantially the same cross-sectional shape from the tip of the projecting base to the top.

The protruding base may be substantially frustoconical, and the protruding end may be substantially columnar.

In the above configuration, the protrusion base of the projection is divergent toward the outer peripheral surface of the roll body. It has a barbed outer surface, and the cross-sectional area of the protruding base is maximized at the base end (the boundary between the outer peripheral surface of the roll body and the protruding base) and gradually decreases toward the protruding end. For this reason, when the protrusion is pressed in the lateral direction, stress concentration near the base end of the protruding base where the tensile force is concentrated is reduced, and the deformation is dispersed throughout the protruding base, thereby improving the durability of the protrusion.

In addition, the durability of the projection can be improved without affecting the shape of the protruding end, so that the protruding end that comes into contact with the object to be cleaned can be freely set to the optimal shape and shape for brushing. it can.

Further, a cleaning sponge roller composed of a polyvinyl acetal porous sponge is obtained by reacting a viscous liquid mixture containing raw materials in a mold. The mold corresponding to the sponge roller having the above configuration has a first space for forming a roll body and a plurality of second spaces for forming protrusions. Each second space has a base forming space communicating with the first space to form a projecting base, and an end forming space communicating with the base forming space to form a projecting end. The base forming space has an inclined surface extending from the end forming space toward the first space. In producing the sponge roller, the mixed liquid is injected into the first space and flows from the first space into each of the second spaces. At this time, since the base forming space of the second space has an inclined surface extending toward the first space, the mixed liquid is guided by the inclined surface of the base forming space and smoothly flows into the end forming space. At the same time, the air in the second space smoothly moves from the end forming space to the first space, and is discharged from the first space to the atmosphere. As a result, the mixed liquid is reliably filled up to the end of the second space, and the production cost can be reduced by improving the yield.

The height from the outer peripheral surface of the roll body to the tip of the protruding base is preferably 1 Z2 or less, more preferably 1 Z5 or more of the height of the protrusion.

If the height of the protrusion base exceeds 1 Z 2 of the height of the whole protrusion, the protrusion end This is because the amount of deformation of the portion may be suppressed to a small extent and the brushing effect at the time of cleaning may be insufficient, and if it is less than 1 Z5, sufficient strength may not be obtained.

The crossing angle between a straight line connecting the base end and the front end of the outer surface of the protruding base portion at an arbitrary cross section and the outer peripheral surface of the roll body is 30 ° or more. The following are preferred:

When the above-mentioned crossing angle is less than 30 °, the protruding base greatly expands toward the outer peripheral surface, the area of the lower end surface of the protruding base increases, and the total number of protrusions that can be formed on the outer peripheral surface of the roll body is reduced. This is because there is a possibility that the strength may be limited, and if the above-mentioned crossing angle exceeds 60 °, sufficient strength may not be obtained.

Further, the outer surface shape of the protruding base may be a linear inclined surface or a curved inclined surface. BRIEF DESCRIPTION OF THE FIGURES

1A is a partial sectional view showing a cleaning sponge roller according to the first embodiment of the present invention, FIG. 1B is an enlarged perspective view showing a projection of the sponge roller in FIG. 1A, and FIG. It is sectional drawing of (b).

FIG. 2 is a perspective view showing a partly broken mold for molding the sponge roller of FIG.

FIG. 3 is a cross-sectional view illustrating a method for manufacturing the sponge roller of FIG.

FIG. 4 is a side view schematically showing a use state of the sponge roller of FIG.

FIG. 5 is an enlarged view of a main part of FIG.

FIG. 6 is an enlarged view of a main part showing a usage state of a projection to be compared. FIG. 7 is a sectional view showing a projection of a sponge roller according to the second embodiment of the present invention. FIG.

FIG. 8 is a graph showing the results of the comparative experiment. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.

FIG. 1A is a partial cross-sectional view showing the entire cleaning sponge roller according to the first embodiment of the present invention, FIG. 1B is an enlarged perspective view showing the projection of the sponge roller shown in FIG. () Is a sectional view of (b).

The cleaning sponge roller 1 is made of a polyvinyl acetal-based porous material (PVAt-based porous material) that has elasticity in a water-containing state. PVAt porous materials harden in the dry state and soften in the wet state. It also has excellent water absorbency and water retention, exhibits favorable flexibility and appropriate rebound resilience when wet, and has excellent abrasion resistance.

As shown in FIG. 1A, the sponge roller 1 has a substantially cylindrical roll body 3 and a plurality of protrusions 5 integrally formed on an outer peripheral surface 3 a of the roll body 3.

As shown in FIGS. 1 (b) and 1 (c), the projections 5 are integrally formed from the projecting base 11 projecting integrally from the outer peripheral surface 3a of the roll body 3 and the tip end surface 1 1b of the projecting base 11. And a protruding end portion 13 which extends in a horizontal direction. The base end surface 11 a of the protruding base 11 is included in the outer peripheral surface 3 a of the roll body 3. The distal end face 11b of the protruding base 11 and the proximal end face 13a of the protruding end 13 almost completely coincide with each other. The protruding base portion 11 has an inclined surface (outer surface) 15 formed linearly and divergently toward the outer peripheral surface 3 a of the roll body 3.

The protruding base portion 11 is formed in a substantially frustoconical shape tapering from the base end surface 11a to the front end surface 11b. The height h from the base end face 1 1a of the protruding base 11 to the tip end face 11b is the height of the protrusion 3 (the base end face 11 of the protruding base 11). (The height from the tip 13 to the tip 13a of the protruding tip 13) H is set within the range of 1 Z 5 or more and 1 Z 2 or less. As shown in FIG. 1 (c), in an arbitrary cross section, the straight line 17 connecting the base end 15a and the tip 15b of the inclined surface 15 almost coincides with the inclined surface 15 and the straight line 1 The intersection angle 0 1 between 7 and the outer peripheral surface 3 a of the roll body 3 is set within a range of 30 ° or more and 60 ° or less.

The protruding end portion 13 extends in a direction substantially perpendicular to the outer peripheral surface 3a of the roll body 3, and has a substantially identical cross-sectional shape from the base end surface 13a to the distal end surface 13b. It is formed in a column shape. The distal end surface 13 b of the protruding end 13 crosses substantially perpendicularly to the outer peripheral surface of the protruding end 13.

The cleaning sponge roller 3 is, for example, a mixture of one or more polyvinyl alcohols (raw materials) having an average degree of polymerization of 300 to 200 and a degree of saponification of 80% or more to form an aqueous solution. Aldehydes as a catalyst, mineral acids as a catalyst, and starch etc. as a pore-forming material, and a mixture thereof is poured into a mold 21 as shown in FIG. 2 and reacted at 50 to 80 ° C. After being removed from the mold 21, the pore-forming material and the like are removed by washing with water.

The mold 21 has an outer mold 23, an inner mold 25, a bottom plate 27, a core rod 29, and a cap 31. The outer mold 23 and the inner mold 25 are both formed in a cylindrical shape. The inner mold 25 has an outer diameter that is the same as or slightly smaller than the inner diameter of the outer mold 23, and is inserted into the outer mold 23. The core rod 29 is inserted almost at the center of the inner mold 25. The bottom plate 27 closes the lower ends 23 a and 25 a of the outer mold 23 and the inner mold 25 and supports the lower end 29 a of the core rod 29. The cap 31 is fitted on the inner peripheral surface of the upper end 23 b of the outer mold 23. The core rod 29 is positioned by the bottom plate 27 and the cap 31.

As shown in FIG. 3, a substantially cylindrical first space 33 for forming the roll body 3 is defined between the inner peripheral surface of the inner mold 25 and the outer peripheral surface of the core rod 29. . Inside The mold 25 has a plurality of through holes (second spaces) 35 for forming the protrusions 5. Each through hole 35 communicates with the first space 33 and forms a base forming space 37 that forms the protruding base 11, and an end forming space 3 that communicates with the base forming space 37 and forms the protruding end 13. 9 and. The base forming space 37 has an inclined surface 41 extending from the end forming space 39 to the first space 33. The mixed solution is injected into the first space 33 from the casting nozzle 43 inserted between the outer mold 23 and the cap 31, and flows from the first space 33 into each through hole 35. At this time, the mixed liquid is guided by the inclined surface 41 expanding toward the first space 33, and smoothly flows into the end forming space 39. At the same time, the air in the through hole 35 smoothly moves from the end forming space 39 to the first space 33, and is discharged from the upper end of the first space 33 to the atmosphere. This ensures that the mixed liquid is filled up to the end of the through hole 35 (the end forming space 39). Therefore, the yield is improved and the manufacturing cost is reduced.

As the PVA t based porous material, 3 0% compression stress in the proper moisture condition 1 5 g Z cm ² or more at 1 5 0 g / cm ² or less of what is not preferable. The proper water-containing state means the water-containing state in which the PVAt-based porous material can exhibit proper elasticity, and the water content (% by weight of the water-containing state with respect to the dry state) Power Approx. 100% to 100% Is obtained in the range of The 30% compressive stress is defined as the PVAt-based porous material in an appropriate water content is cut so that the distance (height in the longitudinal direction) between both end faces is 30 mm, and a load is applied to the entire end face. It is set on a digital load measuring device as described above, the load when crushed by 30% (9 mm) in the longitudinal direction is measured, and the load is obtained as a value obtained by dividing the load by the area of the end face.

The 1 5 0 g was a Z cm ² is the upper limit of the preferred range of 3 0% compression stress in the proper moisture conditions, this value is 1 5 0 g / cm ² greater than PVA t-based porous material is too hard Does not show the elasticity required for brushing It is. Conversely, a 5 had a gZ cm ² the lower limit of the preferred range of 3 0% compression stress in the proper moisture conditions, small again P VA t based porous material from this value 1 5 g Z cm ² is This is because distortion occurs when the roll body 3 is rotated because it is too soft.

Further, as the PVAt-based porous material, those having a porosity of 85% to 95% and an average pore diameter of 10; m to 200 m are preferable.

If the porosity is less than 85%, the flexibility when wet becomes insufficient, and if the porosity is more than 95%, the practical strength is poor, and neither is suitable for cleaning use. On the other hand, if the average pore diameter is smaller than 10 m, the elasticity at the time of moistening is insufficient, so that a sufficient brushing effect cannot be obtained. It is appropriate.

The porosity here is determined by measuring a rectangular PVAt-based porous material that has been sufficiently dried in a dryer using a dry automatic close watch, and calculating the following formula from the apparent volume and true volume of the rectangular parallelepiped. This is the value calculated in 1).

Porosity (%) = (apparent volume-true volume) Z Apparent volume X100 ... (1) The average pore diameter is a measured value based on ASTM (Desirnation: D4404-84), Specifically, it is a value obtained by mercury porosimetry using a mercury porosimeter manufactured by PORUS MATE RIALS, INC.

Next, cleaning using the sponge roller 1 will be described.

As shown in FIG. 4, a rotating shaft 7 is inserted into a hollow portion of the sponge roller 1, and the roll body 3 is fixed to the rotating shaft 7. The cleaning of the cleaning target 9 is performed by bringing the top 5 a of the protrusion 5 that rotates with the rotation of the rotating shaft 7 into contact with the cleaning surface 9 a of the cleaning target 9. The top 5 a of the projection 5 is formed by a tip portion including the tip surface 13 b of the projection end 13. The top 5 a of the projection 5 is in a deformed state where it is pressed laterally by the body 9 to be cleaned (FIG. 5). The cleaning surface 9a is brushed by frequently repeating the deformation releasing state away from the object 9 to be cleaned. Due to the brushing action of the projections 9, the body 9 to be cleaned is well cleaned.

Here, as shown in FIG. 6, a substantially cylindrical projection 53 having substantially the same cross-sectional shape from the base end surface 53a to the distal end surface 53b on the outer peripheral surface 3a of the mouth body 3 is provided. When the sponge roller 51 is used, the tensile force acting on the projection 53 in contact with the cleaning surface 9a is concentrated on the base end surface 53a, and the vicinity of the base end surface 53a is largely deformed locally. In addition, the outer peripheral surface 3a is not a perfect plane, but is inclined in an arc shape toward the opposite side to the projection direction of the projection 53, so that the outer peripheral surface 3a is laterally in comparison with the case where the outer peripheral surface 3a projects from the perfect plane. Easy to deform. Therefore, the front end portion 55 of the base end face 53 a in the moving direction is easily cut.

On the other hand, even when the sponge roller 1 of the present embodiment is used, as in the case of FIG. 6, the tensile force acting on the projection 5 in contact with the cleaning surface 9a is the base end of the projection 5 (the base of the projection 11). Concentrate on the proximal end 1 1 a). However, as shown in FIG. 5, the protruding base 11 has an outer surface 15 which is formed to diverge toward the outer peripheral surface 3a of the roll body 3, and the cross-sectional area of the protruding base 11 is Since it becomes the maximum at 11 a and gradually decreases toward the protruding end 13, when the protrusion 5 is pressed in the lateral direction, the stress concentration near the base end face 11 a where the tensile force concentrates is reduced Is done. Therefore, the deformation is dispersed over the entire area of the protruding base portion 11, cutting of the base end surface 11a near the front end 45 in the moving direction is reliably prevented, and the durability of the projection 5 is improved.

In addition, since the durability of the projection 5 can be improved without affecting the shape of the protruding end 13, the protruding end 13 that comes into contact with the object 9 to be cleaned can be freely dimensioned and shaped to be optimal for brushing. Can be set to

As described above, according to the present embodiment, when the top 5 a of the projection 5 comes into contact with the body 9 to be cleaned and the projection 5 is pressed in the lateral direction, the base of the projection base 11 is formed. Since the stress concentration in the vicinity of the end face 11a is reduced, the deformation is distributed over the entire area of the protruding base 11, and the durability of the projection 5 is improved.

In addition, since the durability of the projection 5 can be improved without affecting the shape of the protruding end 13, the protruding end 13 that comes into contact with the object 9 to be cleaned can be freely dimensioned and shaped to be optimal for brushing. The durability of the projection 5 can be improved without impairing the cleaning performance.

The mold 21 into which the mixed liquid is injected during the production of the sponge roller 1 has a first space 33 for forming the roll body 3 and a base forming space 37 for forming the protruding base 11. A projection 5 including an end forming space 39 forming the end 13; a through hole 35 for forming the base; and the base forming space 37 is an inclined surface 4 extending toward the first space 33. With one. The mixed liquid injected into the first space 33 is guided by the inclined surface 41 and smoothly flows into the end forming space 39, and the air in the through hole 35 is discharged from the end forming space 39 to the 1Smoothly moves to space 33 and is released to the atmosphere. Therefore, the mixed liquid is reliably filled up to the closed end of the through hole 35, and the production cost can be reduced by improving the yield.

Next, a tensile strength experiment was performed on the protrusion 5 (target sample) of the sponge roller 1 as shown in FIG. 1 (b) and the protrusion 53 (comparative sample) of the sponge roller 51 as shown in FIG. explain.

The target sample and the comparative sample, both 90% porosity, average pore size of 1 3 0, using the P VA t based porous material 3 0% compression stress in the proper moisture state is 6 0 gZ cm ² did.

The protrusion 5 of the target sample has a total height H of 4.5 mm, an outer diameter of the protruding end 13 of 7.511111 ^, a height 11 of the protruding base 11 of 1.5 mm, and an outer surface 3a. The crossing angle の of the inclined surface 11 is about 45 ° (the outer diameter of the base end surface 11 a of the protruding base 11 is 10.5 mm). The one having an overall height of 4.5 mm and an outer diameter of 7.5 mm was used. In the experiment, with the roll body 3 of each sample held by a chuck (not shown), the projections 5, 53 were sandwiched by clips (not shown), and the projections 5, 53 were clipped to the limit where cutting occurred. And the tensile strength was measured. As shown in Fig. 8, the tensile strength of the comparative sample was 1.59 kg, the tensile strength of the target sample was 1.85 kg, and the tensile strength of the target sample was lower than that of the comparative sample. It was confirmed that it increased by 16.4%.

Next, a second embodiment of the present invention will be described.

FIG. 7 is an enlarged sectional view of a main part showing a projection 63 of a PVAt-based cleaning sponge roller 61 according to the present embodiment. The same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

The projection 63 according to the present embodiment has a curved portion 69 between the point where the projection base 65 has the curved outer surface 67 and the outer peripheral surface of the projection end 13 and the distal end surface 13b. Is different from the first embodiment.

In the cross section shown in Fig. 5, the intersection angle 0 2 between the straight line 7 5 connecting the base end 7 1 of the outer surface 67 of the protruding base 65 and the end 73 and the outer peripheral surface 3a of the mouth body 3 is 30. It is set to 60 ° or less.

According to this embodiment, similarly to the first embodiment, it is possible to improve the durability of the projection 63 without deteriorating the cleaning performance, and to reduce the manufacturing cost by improving the yield. .

Although the cross-sectional shapes of the protruding base portions 11, 65 and the protruding end portion 13 have been described as being substantially circular in the first and second embodiments, the present invention is not limited to this. The cross section can be set to various shapes such as a rectangle, an ellipse, and an oval. Industrial applicability

As described above, according to the present invention, when the top of the projection comes into contact with the object to be cleaned and the projection is pressed in the lateral direction, stress concentration near the base end of the projection base is alleviated, so that deformation is reduced. Dispersed throughout the base, improving the durability of the projections.

In addition, the durability of the projection can be improved without affecting the shape of the protruding end, so that the protruding end that comes into contact with the object to be cleaned can be freely set to the optimal shape and shape for brushing. As a result, the durability of the projection can be improved without impairing the cleaning performance.

Further, the mold into which the mixed liquid is injected at the time of manufacturing the sponge roller includes a first space for forming the mouth body, a base forming space for forming the protruding base, and an end forming space for forming the protruding end. And a second space for forming a projection, wherein the base forming space has an inclined surface extending toward the first space. The mixed liquid injected into the first space is guided by the inclined surface and smoothly flows into the end forming space, and the air in the space smoothly moves from the end forming space to the first space to the atmosphere. Released. Therefore, the mixed liquid is reliably filled up to the end of the second space, and the production cost can be reduced by improving the yield.

Claims

The scope of the claims

1. A roll made of a polyvinyl acetal-based porous material having elasticity in a wet state and having a substantially cylindrical roll body and a plurality of projections integrally formed on an outer peripheral surface of the roll body. A cleaning sponge roller for rotating the top of the projection to be in contact with the object to be cleaned and cleaning the object to be cleaned,

A cleaning sponge comprising: a projection base extending from an outer peripheral surface of the roll body and tapering, and a projection end having substantially the same cross-sectional shape from the tip of the projection base to the top. roller.

2. The cleaning sponge roller according to claim 1, wherein

The protruding base is formed in a substantially truncated cone shape,

The sponge roller for cleaning, wherein the protruding end is formed in a substantially cylindrical shape.

3. The cleaning sponge roller according to claim 1, wherein

The height from the outer peripheral surface of the roll body to the tip of the protruding base is not less than 1 Z 5 and not more than 1 Z 2 of the height of the protrusion,

A crossing angle between a straight line connecting the base end and the front end of the outer surface of the protruding base in an arbitrary cross section and the outer peripheral surface of the roll body is 30 ° or more and 60 ° or less, wherein the cleaning sponge roller is provided. .