JP3403108B2 - Sponge roller for cleaning - Google Patents
Sponge roller for cleaningInfo
- Publication number
- JP3403108B2 JP3403108B2 JP05127499A JP5127499A JP3403108B2 JP 3403108 B2 JP3403108 B2 JP 3403108B2 JP 05127499 A JP05127499 A JP 05127499A JP 5127499 A JP5127499 A JP 5127499A JP 3403108 B2 JP3403108 B2 JP 3403108B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- sponge roller
- base
- protruding
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 title claims description 43
- 230000002093 peripheral effect Effects 0.000 claims description 27
- 239000011148 porous material Substances 0.000 claims description 19
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 claims description 5
- 125000002777 acetyl group Chemical class [H]C([H])([H])C(*)=O 0.000 claims description 5
- 229920002554 vinyl polymer Polymers 0.000 claims description 5
- 239000007788 liquid Substances 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 11
- 230000001680 brushing effect Effects 0.000 description 9
- 238000005498 polishing Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 1
- 238000002459 porosimetry Methods 0.000 description 1
- 238000007127 saponification reaction Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B08B1/32—
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、磁気記録用アルミ
ディスク、半導体シリコンウェハ等の基板の製造工程に
おいて、ポリッシング等の加工工程後、砥粒、切削屑、
研磨屑等、被洗浄体の表面に付着した微細な粒子を、極
めて効率良く、且つ被洗浄体の表面を損傷することなく
除去することが可能な洗浄用スポンジローラに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an abrasive grain, a cutting waste, after a processing step such as polishing in a manufacturing process of a substrate such as an aluminum disk for magnetic recording and a semiconductor silicon wafer.
The present invention relates to a cleaning sponge roller capable of extremely finely removing fine particles such as polishing dust attached to the surface of an object to be cleaned without damaging the surface of the object to be cleaned.
【０００２】[0002]
【従来の技術】ハードディスク、ガラスディスク、シリ
コンウェハ、ＣＭＰ加工工程中の半導体素子、或いはフ
ォトマスク、液晶ガラス基板等の製造工程では、その表
面を極めて精度の高い面に仕上げるために、酸化ケイ
素、アルミナ、セリウム等の各種砥粒を用いた高精度研
磨、いわゆるポリッシング加工が行われている。ポリッ
シング加工されたハードディスクやシリコンウェハ等の
被研磨物の表面は、砥粒や研磨屑によって汚染されるた
め、次工程の処理を行う前に十分に洗浄を施す必要があ
る。2. Description of the Related Art In manufacturing processes of hard disks, glass disks, silicon wafers, semiconductor elements during CMP processing, photomasks, liquid crystal glass substrates, etc., silicon oxide, High-precision polishing using various kinds of abrasive grains such as alumina and cerium, so-called polishing processing is performed. The surface of an object to be polished, such as a hard disk or a silicon wafer, which has been polished is contaminated with abrasive grains and polishing debris, and therefore needs to be sufficiently washed before performing the process of the next step.
【０００３】シリコンウェハの洗浄方法としては、アン
モニア水と過酸化水素の混合液、希弗酸、塩酸と過酸化
水素水の混合液をこの順に使用するＲＣＡ洗浄が知られ
ている。また、ハードディスク、シリコンウェハ等のポ
リッシング工程後の洗浄では、ポリビニルアセタール系
（以下ＰＶＡｔ系と略称する）多孔質体を素材とし、外
表面に複数の突起を有する洗浄用スポンジローラを用い
る方法が知られている。具体的には、スポンジローラの
突起の頂部を、被洗浄体の洗浄面に回転接触させる。こ
れにより、洗浄面が突起によってブラッシングされて、
被洗浄体が良好に洗浄される。As a method for cleaning a silicon wafer, RCA cleaning is known in which a mixed solution of ammonia water and hydrogen peroxide, a diluted hydrofluoric acid, and a mixed solution of hydrochloric acid and hydrogen peroxide water are used in this order. Further, in cleaning the hard disk, silicon wafer, etc. after the polishing step, there is known a method in which a polyvinyl acetal-based (hereinafter referred to as PVAt-based) porous material is used as a material and a cleaning sponge roller having a plurality of protrusions on the outer surface is used. Has been. Specifically, the top of the projection of the sponge roller is brought into rotational contact with the cleaning surface of the object to be cleaned. As a result, the cleaning surface is brushed by the protrusions,
The object to be cleaned is well cleaned.
【０００４】[0004]
【発明が解決しようとする課題】洗浄時のスポンジロー
ラの突起は、被洗浄体によって横方向へ押圧された変形
状態と、被洗浄体から離れた変形解除状態とを頻繁に繰
り返して、洗浄面をブラッシングする。このとき、突起
に作用する引張力が突起の基端に集中し、突起の基端近
傍が大きく変形する。このため、突起の基端近傍が切断
され易い。また、スポンジローラは全体が一体成形され
ているため、多数の突起が切断された場合にはスポンジ
ローラの交換を要する。The projection of the sponge roller at the time of cleaning frequently repeats a deformed state in which it is laterally pressed by the object to be cleaned and a deformed state in which it is separated from the object to be cleaned. To brush. At this time, the tensile force acting on the protrusion is concentrated on the base end of the protrusion, and the vicinity of the base end of the protrusion is largely deformed. Therefore, the vicinity of the base end of the protrusion is easily cut. Further, since the sponge roller is integrally formed as a whole, it is necessary to replace the sponge roller when many protrusions are cut.
【０００５】このような問題は、突起全体を大きく形成
しその強度を増大させることによっても解決可能であ
る。ところが、突起全体を大きく形成すると、所望のブ
ラッシング効果が得られず、洗浄効果の低下を招く恐れ
がある。Such a problem can also be solved by forming the entire projection large and increasing its strength. However, if the entire projection is formed large, the desired brushing effect cannot be obtained, and the cleaning effect may be reduced.
【０００６】そこで、本発明は、洗浄性能を損なうこと
なく耐久性の向上を図ることが可能なＰＶＡｔ系洗浄用
スポンジローラの提供を目的とする。Therefore, an object of the present invention is to provide a PVAt-based cleaning sponge roller capable of improving durability without deteriorating cleaning performance.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するた
め、本発明は、湿潤状態で弾性を有するポリビニルアセ
タール系多孔質素材によって構成され、略円筒形状のロ
ール体と該ロール体の外周面上に一体成形された複数の
突起とを有し、該突起の頂部を被洗浄体に回転接触させ
て該被洗浄体を洗浄する洗浄用スポンジローラであっ
て、前記突起は、前記ロール体の外周面から延びて先細
りする突出基部と、該突出基部の先端から前記頂部まで
ほぼ同一の断面形状を有する突出端部とを備えている。In order to achieve the above object, the present invention comprises a polyvinyl acetal porous material having elasticity in a wet state and has a substantially cylindrical roll body and an outer peripheral surface of the roll body. A sponge roller for cleaning the object to be cleaned by rotating the top of the protrusion into contact with the object to be cleaned, wherein the protrusion is an outer periphery of the roll body. A protruding base portion that extends from the surface and tapers, and a protruding end portion that has substantially the same cross-sectional shape from the tip of the protruding base portion to the top portion are provided.
【０００８】前記突出基部を略円錐台状とし、前記突出
端部を略円柱状としても良い。The projecting base portion may have a substantially truncated cone shape, and the projecting end portion may have a substantially cylindrical shape.
【０００９】上記構成では、突起の突出基部は、ロール
体の外周面に向かって末広がり状に形成された外面を有
し、突出基部の断面積は、基端（ロール体の外周面と突
出基部との境界）で最大となり突出端部へ向かって徐々
に減少する。このため、突起が横方向へ押圧されたと
き、引張力が集中する突出基部の基端近傍における応力
集中が緩和され、変形が突出基部全域に分散され、突起
の耐久力が向上する。In the above structure, the projecting base of the projection has an outer surface formed in a divergent shape toward the outer peripheral surface of the roll body, and the cross-sectional area of the projecting base is at the base end (the outer peripheral surface of the roll body and the projecting base portion. It becomes the maximum at the boundary) and gradually decreases toward the protruding end. Therefore, when the protrusion is laterally pressed, the stress concentration in the vicinity of the base end of the protrusion base where the tensile force is concentrated is relaxed, the deformation is dispersed throughout the protrusion base, and the durability of the protrusion is improved.
【００１０】また、突出端部の形状に影響を与えること
なく突起の耐久力を向上させることができるので、被洗
浄体と接触する突出端部を、ブラッシングに最適な寸法
形状に自由に設定することができる。Further, since the durability of the protrusion can be improved without affecting the shape of the protruding end portion, the protruding end portion which comes into contact with the object to be cleaned can be freely set to the optimum size and shape for brushing. be able to.
【００１１】また、ポリビニルアセタール系多孔質スポ
ンジによって構成される洗浄用スポンジローラは、原料
を含み粘性を有する混合液を、型内で反応させることに
よって得られる。上記構成のスポンジローラに対応した
型は、ロール体を形成するための第１空間と、突起を形
成するための複数の第２空間とを有する。各第２空間
は、第１空間に連通し突出基部を形成する基部形成空間
と、基部形成空間に連通し突出端部を形成する端部形成
空間とを有する。基部形成空間は、端部形成空間から第
１空間へ向かって拡がる傾斜面を有する。スポンジロー
ラの製造に際し、混合液は、第１空間へ注入され、第１
空間から各第２空間へ流入する。このとき、第２空間の
基部形成空間は、第１空間へ向かって拡がる傾斜面を有
するので、混合液は、基部形成空間の傾斜面に案内され
て端部形成空間へ円滑に流入する。同時に、第２空間内
の空気は、端部形成空間から第１空間へ円滑に移動し、
第１空間から大気へ放出される。これにより、混合液が
第２空間の末端まで確実に充填され、歩留まりの向上に
よる製造コストの低減を図ることができる。The cleaning sponge roller made of a polyvinyl acetal porous sponge is obtained by reacting a viscous mixed liquid containing raw materials in a mold. The mold corresponding to the sponge roller having the above structure has a first space for forming a roll body and a plurality of second spaces for forming protrusions. Each second space has a base forming space that communicates with the first space and forms a protruding base, and an end forming space that communicates with the base forming space and forms a protruding end. The base forming space has an inclined surface extending from the end forming space toward the first space. When manufacturing the sponge roller, the mixed liquid is injected into the first space and
It flows into each second space from the space. At this time, since the base forming space of the second space has an inclined surface that expands toward the first space, the mixed liquid smoothly flows into the end forming space while being guided by the inclined surface of the base forming space. At the same time, the air in the second space smoothly moves from the end forming space to the first space,
Emitted from the first space to the atmosphere. As a result, the mixed liquid can be reliably filled up to the end of the second space, and the manufacturing cost can be reduced by improving the yield.
【００１２】前記ロール体の外周面から前記突出基部の
先端までの高さは、前記突起の高さの１／２以下が好適
であり、更に１／５以上が好適である。The height from the outer peripheral surface of the roll body to the tip of the protruding base portion is preferably 1/2 or less of the height of the protrusion, and more preferably 1/5 or more.
【００１３】突出基部の高さが突起全体の高さの１／２
を超えた場合には、突出端部の変形量が小さく抑えられ
て洗浄時のブラッシング効果が不十分となる可能性があ
り、１／５未満の場合には、十分な強度が得られない可
能性があるためである。The height of the protrusion base is 1/2 of the height of the entire protrusion.
If it exceeds, the amount of deformation of the protruding end may be suppressed to be small and the brushing effect during cleaning may be insufficient, and if it is less than 1/5, sufficient strength may not be obtained. Because there is a nature.
【００１４】また、任意断面における前記突出基部の外
面の基端と先端とを結ぶ直線と前記ロール体の外周面と
の交叉角度は、３０°以上６０°以下が好適である。The crossing angle between the straight line connecting the base end and the tip of the outer surface of the projecting base and the outer peripheral surface of the roll body in an arbitrary cross section is preferably 30 ° or more and 60 ° or less.
【００１５】上記交叉角度が３０°未満の場合には、突
出基部が外周面に向かって大きく広がり、突出基部の下
端面の面積が増大し、ロール体の外周面上に形成可能な
突起の総数が制限される可能性があるためであり、上記
交叉角度が６０°を超える場合には、十分な強度が得ら
れない可能性があるためである。When the crossing angle is less than 30 °, the projecting base portion greatly expands toward the outer peripheral surface, the area of the lower end surface of the projecting base portion increases, and the total number of protrusions that can be formed on the outer peripheral surface of the roll body. This is because there is a possibility that the strength will be limited, and when the crossing angle exceeds 60 °, sufficient strength may not be obtained.
【００１６】さらに、前記突出基部の外面形状は、直線
的な傾斜面であっても良く、また湾曲する傾斜面であっ
ても良い。Further, the shape of the outer surface of the projecting base portion may be a linear inclined surface or a curved inclined surface.
【００１７】[0017]
【発明の実施の形態】以下、本発明の第１の実施の形態
を、図面に基づいて説明する。BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of the present invention will be described below with reference to the drawings.
【００１８】図１（ａ）は本発明の第１実施形態に係る
洗浄用スポンジローラの全体を示す一部断面図、（ｂ）
は（ａ）のスポンジローラの突起を示す拡大斜視図、
（ｃ）は（ｂ）の断面図である。FIG. 1 (a) is a partial sectional view showing the entire cleaning sponge roller according to the first embodiment of the present invention, (b).
Is an enlarged perspective view showing the projection of the sponge roller in (a),
(C) is a sectional view of (b).
【００１９】洗浄用スポンジローラ１は、含水状態で弾
性を有するポリビニールアセタール系多孔質素材（ＰＶ
Ａｔ系多孔質素材）から成る。ＰＶＡｔ系多孔質素材
は、乾燥状態で硬化し、湿潤状態で軟化する。また、吸
水性及び保水性に優れ、湿潤時に好ましい柔軟性と適度
な反発弾性を示し、耐磨耗性にも優れている。The cleaning sponge roller 1 is made of a polyvinyl acetal type porous material (PV
At-based porous material). The PVAt porous material is hardened in a dry state and softened in a wet state. Further, it is excellent in water absorption and water retention, exhibits favorable flexibility and appropriate impact resilience when wet, and is also excellent in abrasion resistance.
【００２０】図１（ａ）に示すように、スポンジローラ
１は、略円筒形状のロール体３と、ロール体３の外周面
３ａ上に一体成形された複数の突起５とを有する。As shown in FIG. 1A, the sponge roller 1 has a substantially cylindrical roll body 3 and a plurality of protrusions 5 integrally formed on the outer peripheral surface 3a of the roll body 3.
【００２１】図１（ｂ），（ｃ）に示すように、突起５
は、ロール体３の外周面３ａから一体的に突出する突出
基部１１と、突出基部１１の先端面１１ｂから一体的に
延びる突出端部１３とを有する。突出基部１１の基端面
１１ａは、ロール本体３の外周面３ａに含まれる。突出
基部１１の先端面１１ｂと突出端部１３の基端面１３ａ
とは、ほぼ完全に一致する。突出基部１１は、ロール体
３の外周面３ａに向かって直線的且つ末広がり状に形成
された傾斜面（外面）１５を有する。As shown in FIGS. 1B and 1C, the protrusion 5
Has a projecting base portion 11 that integrally projects from the outer peripheral surface 3 a of the roll body 3, and a projecting end portion 13 that integrally extends from the tip surface 11 b of the projecting base portion 11. The base end surface 11 a of the protruding base portion 11 is included in the outer peripheral surface 3 a of the roll body 3. The front end surface 11b of the protruding base portion 11 and the base end surface 13a of the protruding end portion 13
And are almost an exact match. The protruding base portion 11 has an inclined surface (outer surface) 15 that is formed linearly toward the outer peripheral surface 3 a of the roll body 3 and in a divergent shape.
【００２２】突出基部１１は、基端面１１ａから先端面
１１ｂに向かって先細りする略円錐台状に形成されてい
る。突出基部１１の基端面１１ａから先端面１１ｂまで
の高さｈは、突起３の高さ（突出基部１１の基端面１１
ａから突出先端１３の先端面１３ａまでの高さ）Ｈの１
／５以上１／２以下の範囲内に設定されている。図１
（ｃ）に示すように、任意断面において、傾斜面１５の
基端１５ａと先端１５ｂとを結ぶ直線１７は、傾斜面１
５とほぼ一致し、直線１７とロール体３の外周面３ａと
の交叉角度θ1 は、３０°以上６０°以下の範囲内に設
定されている。The projecting base portion 11 is formed in a substantially truncated cone shape, tapering from the base end surface 11a toward the tip end surface 11b. The height h from the base end surface 11a of the protruding base portion 11 to the tip end surface 11b is the height of the protrusion 3 (the base end surface 11 of the protruding base portion 11).
height from a to the tip surface 13a of the protruding tip 13) H 1
It is set within the range of / 5 or more and 1/2 or less. Figure 1
As shown in (c), in an arbitrary cross section, the straight line 17 connecting the base end 15a and the tip 15b of the inclined surface 15 is the inclined surface 1
5, the intersection angle θ 1 between the straight line 17 and the outer peripheral surface 3a of the roll body 3 is set within the range of 30 ° or more and 60 ° or less.
【００２３】突出端部１３は、ロール体３の外周面３ａ
に対してほぼ垂直方向へ延び、且つ基端面１３ａから先
端面１３ｂまでほぼ同一の断面形状を有する略円柱状に
形成されている。突出端部１３の先端面１３ｂは、突出
端部１３の外周面とほぼ垂直に交叉している。The protruding end portion 13 is the outer peripheral surface 3a of the roll body 3.
Is formed in a substantially columnar shape that extends in a direction substantially perpendicular to, and has substantially the same cross-sectional shape from the base end surface 13a to the tip end surface 13b. The tip surface 13b of the projecting end portion 13 intersects the outer peripheral surface of the projecting end portion 13 substantially vertically.
【００２４】洗浄用スポンジローラ３は、例えば平均重
合度３００〜２０００でケン化度８０％以上のポリビニ
ルアルコール（原料）を一種又はそれ以上混合して水溶
液とし、この水溶液に架橋剤としてアルデヒド類、触媒
として鉱酸類、及び気孔形成材として澱粉等を加え、こ
れらの混合液を図２に示すような型２１内に注入し、５
０〜８０℃で反応させて型２１から取り出した後、水洗
により気孔形成材等を除去することによって得られる。The cleaning sponge roller 3 is made into an aqueous solution by mixing one or more polyvinyl alcohols (raw materials) having an average degree of polymerization of 300 to 2000 and a saponification degree of 80% or more into an aqueous solution. Mineral acids as a catalyst and starch as a pore-forming material are added, and a mixed solution of these is poured into a mold 21 as shown in FIG.
It is obtained by reacting at 0 to 80 ° C., taking out from the mold 21, and then washing with water to remove the pore-forming material and the like.
【００２５】型２１は、外型２３と内型２５と底板２７
と芯棒２９とキャップ３１とを有する。外型２３及び内
型２５は、共に円筒状に形成されている。内型２５は、
外型２３の内径と同一か又はそれよりも僅かに小さい外
径を有し、外型２３内に挿入される。芯棒２９は、内型
２５のほぼ中心に挿入される。底板２７は、外型２３及
び内型２５の下端２３ａ，２５ａを塞ぐと共に、芯棒２
９の下端２９ａを支持する。キャップ３１は、外型２３
の上端２３ｂの内周面に嵌合される。芯棒２９は、底板
２７とキャップ３１とによって位置決めされる。The mold 21 includes an outer mold 23, an inner mold 25 and a bottom plate 27.
It has a core rod 29 and a cap 31. Both the outer die 23 and the inner die 25 are formed in a cylindrical shape. The inner mold 25 is
It has an outer diameter equal to or slightly smaller than the inner diameter of the outer mold 23, and is inserted into the outer mold 23. The core rod 29 is inserted substantially in the center of the inner mold 25. The bottom plate 27 closes the lower ends 23a and 25a of the outer die 23 and the inner die 25, and at the same time, the core rod 2
The lower end 29a of 9 is supported. The cap 31 is the outer mold 23.
Is fitted to the inner peripheral surface of the upper end 23b. The core rod 29 is positioned by the bottom plate 27 and the cap 31.
【００２６】図３に示すように、内型２５の内周面と芯
棒２９の外周面との間には、ロール体３を形成するため
の略円筒状の第１空間３３が区画される。内型２５に
は、突起５を形成するための貫通孔（第２空間）３５が
複数形成されている。各貫通孔３５は、第１空間３３に
連通し突出基部１１を形成する基部形成空間３７と、基
部形成空間３７に連通し突出端部１３を形成する端部形
成空間３９とを有する。基部形成空間３７は、端部形成
空間３９から第１空間３３へ向かって拡がる傾斜面４１
を有する。As shown in FIG. 3, a substantially cylindrical first space 33 for forming the roll body 3 is defined between the inner peripheral surface of the inner mold 25 and the outer peripheral surface of the core rod 29. . A plurality of through holes (second spaces) 35 for forming the protrusions 5 are formed in the inner mold 25. Each through hole 35 has a base forming space 37 that communicates with the first space 33 to form the protruding base 11, and an end forming space 39 that communicates with the base forming space 37 and forms the protruding end 13. The base forming space 37 has an inclined surface 41 that extends from the end forming space 39 toward the first space 33.
Have.
【００２７】混合液は、外型２３とキャップ３１との間
に挿入された注型ノズル４３から第１空間３３へ注入さ
れ、第１空間３３から各貫通孔３５へ流入する。このと
き、混合液は、第１空間３３へ向かって拡がる傾斜面４
１に案内されて端部形成空間３９へ円滑に流入する。同
時に、貫通孔３５内の空気は、端部形成空間３９から第
１空間３３へ円滑に移動し、第１空間３３の上端から大
気へ放出される。これにより、混合液が貫通孔３５（端
部形成空間３９）の末端まで確実に充填される。従っ
て、歩留まりが向上し、製造コストが低減される。The mixed liquid is injected into the first space 33 from the casting nozzle 43 inserted between the outer mold 23 and the cap 31, and flows into each through hole 35 from the first space 33. At this time, the mixed liquid is spread on the inclined surface 4 toward the first space 33.
It is guided by 1 and smoothly flows into the end portion forming space 39. At the same time, the air in the through-hole 35 smoothly moves from the end forming space 39 to the first space 33, and is released from the upper end of the first space 33 to the atmosphere. As a result, the mixed liquid is surely filled up to the end of the through hole 35 (end forming space 39). Therefore, the yield is improved and the manufacturing cost is reduced.
【００２８】なお、ＰＶＡｔ系多孔質素材としては、適
正含水状態における３０％圧縮応力が１５ｇ／ｃｍ2以
上で１５０ｇ／ｃｍ2 以下のものが好ましい。適正含水
状態とは、ＰＶＡｔ系多孔質素材が適正な弾力を発揮し
得る含水状態をいい、含水率（乾燥状態に対する含水状
態の重量％）が、およそ１００％〜１０００％の範囲で
得られる。また、３０％圧縮応力とは、適正含水状態の
ＰＶＡｔ系多孔質素材を、両端面間の距離（長手方向の
高さ）が３０ｍｍとなるように切断し、端面全体に荷重
がかかるようにデジタル式荷重測定器にセットし、長手
方向に３０％（９ｍｍ）押し潰した時の荷重を計測し、
該荷重を端面の面積で割った値として得られる。The PVAt porous material preferably has a 30% compressive stress of 15 g / cm 2 or more and 150 g / cm 2 or less in a proper water content state. The proper hydrated state means a hydrated state in which the PVAt porous material can exhibit appropriate elasticity, and the moisture content (weight% of the hydrated state to the dry state) is obtained in the range of about 100% to 1000%. In addition, 30% compressive stress means that the PVAt porous material with proper water content is cut so that the distance between both end faces (height in the longitudinal direction) is 30 mm, and the load is applied to the entire end face. Set it on a load measuring machine and measure the load when it is crushed by 30% (9 mm) in the longitudinal direction.
It is obtained as a value obtained by dividing the load by the area of the end face.
【００２９】適正含水状態における３０％圧縮応力の好
ましい範囲の上限を１５０ｇ／ｃｍ2 としたのは、この
値が１５０ｇ／ｃｍ2 より大きいＰＶＡｔ系多孔質素材
は、硬すぎてブラッシングに要求される弾性を示さない
ためである。反対に、適正含水状態における３０％圧縮
応力の好ましい範囲の下限を１５ｇ／ｃｍ2 としたの
は、この値が１５ｇ／ｃｍ2 より小さいＰＶＡｔ系多孔
質素材は、柔らかすぎてロール体３を回転した場合に歪
みを生じるためである。[0029] The upper limit of the preferred range of 30% compression stress in the proper moisture state was 150 g / cm 2, this value is 150 g / cm 2 greater than PVAt based porous material is required to brushing too hard This is because it does not exhibit elasticity. Conversely, the lower limit of the preferred range of 30% compression stress in the proper moisture state was 15 g / cm 2, this value is 15 g / cm 2 less than PVAt based porous material, rotating the roll body 3 too soft This is because distortion will occur when this is done.
【００３０】また、ＰＶＡｔ系多孔質素材としては、気
孔率が８５％以上９５％以下、平均気孔径が１０μｍ以
上２００μｍ以下のものが好適である。As the PVAt porous material, those having a porosity of 85% to 95% and an average pore diameter of 10 μm to 200 μm are preferable.
【００３１】気孔率が８５％より小さいと、湿潤時の柔
軟性が不十分となり、また、気孔率が９５％より大きい
と、実用的強度に乏しく、何れも洗浄用途には適さない
ためである。また、平均気孔径が１０μｍよりも小さい
と、湿潤時の弾性が不足して十分なブラッシング効果が
得られず、２００μｍを超えると、目が粗すぎて精密洗
浄には不適当なためである。If the porosity is less than 85%, the flexibility when wet is insufficient, and if the porosity is more than 95%, the practical strength is poor, and neither is suitable for cleaning applications. . On the other hand, if the average pore diameter is smaller than 10 μm, the elasticity when wet is insufficient and a sufficient brushing effect cannot be obtained, and if it exceeds 200 μm, the mesh is too coarse to be suitable for precision cleaning.
【００３２】なお、ここでいう気孔率とは、乾燥機で十
分に乾燥された直方体のＰＶＡｔ系多孔質素材を乾式自
動密時計にて測定し、直方体の見掛け体積と真体積とか
ら、次式（１）にて算出される値である。The porosity referred to here is the following formula from the apparent volume and true volume of a rectangular parallelepiped obtained by measuring a rectangular parallelepiped PVAt porous material sufficiently dried by a dryer with a dry automatic minute clock. This is the value calculated in (1).
【００３３】
気孔率（％）＝（見掛け体積−真体積）／見掛け体積×１００ …（１）
また、平均気孔径は、ＡＳＴＭ（Ｄｅｓｉｒｎａｔｉｏ
ｎ：Ｄ４４０４−８４）に基づく測定値であり、具体的
には、ＰＯＲＵＳ ＭＡＴＥＲＩＡＬＳ，ＩＮＣ社製水
銀ポロシメータを用いた、水銀圧入法細孔測定によって
求められる値である。Porosity (%) = (apparent volume−true volume) / apparent volume × 100 (1) Further, the average pore diameter is ASTM (Desirnatio).
n: D4404-84), specifically, a value determined by mercury porosimetry pore measurement using a mercury porosimeter manufactured by PORUS MATERIALS, INC.
【００３４】次に、スポンジローラ１を用いた洗浄につ
いて説明する。Next, the cleaning using the sponge roller 1 will be described.
【００３５】図４に示すように、スポンジローラ１の中
空部分には、回転軸７が挿入され、ロール体３は回転軸
７に対して固定される。被洗浄体９の洗浄は、回転軸７
の回転に伴って回転移動する突起５の頂部５ａを被洗浄
体９の洗浄面９ａに接触させることにより行う。突起５
の頂部５ａは、突出端部１３の先端面１３ｂを含む先端
部分によって構成される。突起５の頂部５ａは、被洗浄
体９によって横方向へ押圧された変形状態（図５参照）
と、被洗浄体９から離れた変形解除状態とを頻繁に繰り
返して、洗浄面９ａをブラッシングする。突起９のブラ
ッシング作用により、被洗浄体９が良好に洗浄される。As shown in FIG. 4, the rotary shaft 7 is inserted into the hollow portion of the sponge roller 1, and the roll body 3 is fixed to the rotary shaft 7. The cleaning of the cleaning object 9 is performed by the rotating shaft
This is performed by bringing the top portion 5a of the protrusion 5 that rotates and moves in accordance with the rotation of the above into contact with the cleaning surface 9a of the body 9 to be cleaned. Protrusion 5
5 a is formed by a tip portion including the tip surface 13 b of the protruding end portion 13. The top portion 5a of the protrusion 5 is in a deformed state in which it is laterally pressed by the cleaning target 9 (see FIG. 5).
Then, the cleaning surface 9a is brushed by repeatedly repeating the deformation release state in which the cleaning object 9 is separated from the object to be cleaned 9. Due to the brushing action of the protrusions 9, the cleaning target 9 is properly cleaned.
【００３６】ここで、図６に示すように、ロール体３の
外周面３ａ上の基端面５３ａから先端面５３ｂまでほぼ
同一の断面形状を有する略円柱状の突起５３を有するス
ポンジローラ５１を使用した場合、洗浄面９ａに接触し
た突起５３に作用する引張力は基端面５３ａに集中し、
基端面５３ａの近傍が局所的に大きく変形する。加え
て、外周面３ａは、完全な平面ではなく突起５３の突出
方向と反対側に向かって円弧状に傾斜しているため、完
全な平面から突出している場合に比して横方向へ変形し
易い。このため、基端面５３ａの移動方向前端部分５５
が切断され易い。Here, as shown in FIG. 6, a sponge roller 51 having a substantially cylindrical projection 53 having substantially the same cross-sectional shape from the base end surface 53a to the tip end surface 53b on the outer peripheral surface 3a of the roll body 3 is used. In this case, the tensile force acting on the protrusion 53 contacting the cleaning surface 9a is concentrated on the base end surface 53a,
The vicinity of the base face 53a is locally largely deformed. In addition, since the outer peripheral surface 3a is not a perfect flat surface but is inclined in an arc shape toward the side opposite to the protruding direction of the projection 53, it is deformed in the lateral direction as compared with the case where it is projected from a perfect flat surface. easy. Therefore, the front end portion 55 of the base end face 53a in the moving direction is moved.
Is easily cut.
【００３７】一方、本実施形態のスポンジローラ１を使
用した場合でも、図６の場合と同様に、洗浄面９ａに接
触した突起５に作用する引張力は突起５の基端（突出基
部１１の基端面１１ａ）に集中する。しかし、図５に示
すように、突出基部１１は、ロール体３の外周面３ａに
向かって末広がり状に形成された外面１５を有し、突出
基部１１の断面積は、基端面１１ａで最大となり突出端
部１３へ向かって徐々に減少するため、突起５が横方向
へ押圧されたとき、引張力が集中する基端面１１ａの近
傍における応力集中が緩和される。従って、変形が突出
基部１１全域に分散され、基端面１１ａの移動方向前端
４５近傍での切断が確実に防止され、突起５の耐久力が
向上する。On the other hand, even when the sponge roller 1 of this embodiment is used, the tensile force acting on the protrusion 5 in contact with the cleaning surface 9a is the same as in the case of FIG. Concentrate on the base end face 11a). However, as shown in FIG. 5, the protruding base portion 11 has an outer surface 15 formed in a divergent shape toward the outer peripheral surface 3a of the roll body 3, and the cross-sectional area of the protruding base portion 11 becomes maximum at the base end surface 11a. Since the projection 5 gradually decreases toward the protruding end portion 13, when the protrusion 5 is laterally pressed, stress concentration in the vicinity of the base end face 11a where the tensile force is concentrated is relaxed. Therefore, the deformation is dispersed over the entire area of the protruding base portion 11, the cutting of the base end surface 11a near the front end 45 in the moving direction is reliably prevented, and the durability of the protrusion 5 is improved.
【００３８】また、突出端部１３の形状に影響を与える
ことなく突起５の耐久力を向上させることができるの
で、被洗浄体９と接触する突出端部１３を、ブラッシン
グに最適な寸法形状に自由に設定することができる。Further, since the durability of the protrusion 5 can be improved without affecting the shape of the projecting end portion 13, the projecting end portion 13 which comes into contact with the object to be cleaned 9 is formed into a dimension and shape most suitable for brushing. It can be set freely.
【００３９】以上説明したように、本実施形態によれ
ば、突起５の頂部５ａが被洗浄体９と接触して突起５が
横方向へ押圧されたとき、突出基部１１の基端面１１ａ
の近傍における応力集中が緩和されので、変形が突出基
部１１の全域に分散され、突起５の耐久力が向上する。As described above, according to the present embodiment, when the top portion 5a of the protrusion 5 comes into contact with the object to be cleaned 9 and the protrusion 5 is laterally pressed, the base end surface 11a of the protruding base portion 11 is formed.
Since the stress concentration in the vicinity of is relaxed, the deformation is dispersed over the entire area of the protruding base portion 11, and the durability of the protrusion 5 is improved.
【００４０】また、突出端部１３の形状に影響を与える
ことなく突起５の耐久力を向上させることができるの
で、被洗浄体９と接触する突出端部１３を、ブラッシン
グに最適な寸法形状に自由に設定することができ、洗浄
性能を損なうことなく突起５の耐久性の向上を図ること
ができる。Further, since the durability of the projection 5 can be improved without affecting the shape of the projecting end portion 13, the projecting end portion 13 that comes into contact with the object to be cleaned 9 has a dimension and shape optimal for brushing. It can be set freely, and the durability of the protrusion 5 can be improved without impairing the cleaning performance.
【００４１】また、スポンジローラ１の製造に際して混
合液が注入される型２１は、ロール体３形成用の第１空
間３３と、突出基部１１を形成する基部形成空間３７と
突出端部１３を形成する端部形成空間３９とを含む突起
５形成用の貫通孔３５とを備え、基部形成空間３７は、
第１空間３３へ向かって拡がる傾斜面４１を有する。第
１空間３３へ注入された混合液は、傾斜面４１に案内さ
れて端部形成空間３９へ円滑に流入し、貫通孔３５内の
空気は、端部形成空間３９から第１空間３３へ円滑に移
動して大気へ放出される。従って、混合液が貫通孔３５
の閉塞された末端まで確実に充填され、歩留まりの向上
による製造コストの低減を図ることができる。Further, the mold 21 into which the mixed liquid is injected at the time of manufacturing the sponge roller 1 forms the first space 33 for forming the roll body 3, the base forming space 37 for forming the protruding base 11, and the protruding end portion 13. And a through hole 35 for forming the projection 5 including an end forming space 39 for
It has an inclined surface 41 that widens toward the first space 33. The mixed liquid injected into the first space 33 is guided by the inclined surface 41 and smoothly flows into the end forming space 39, and the air in the through hole 35 smoothly moves from the end forming space 39 to the first space 33. To be released to the atmosphere. Therefore, the mixed liquid is not penetrated through the through hole 35.
It is possible to surely fill up to the closed end of, and to reduce the manufacturing cost by improving the yield.
【００４２】次に、図１（ｂ）に示すようなスポンジロ
ーラ１の突起５（対象サンプル）と、図６に示すような
スポンジローラ５１の突起５３（比較サンプル）とに対
する引張り強度実験について説明する。Next, the tensile strength test for the protrusion 5 (target sample) of the sponge roller 1 as shown in FIG. 1B and the protrusion 53 (comparative sample) of the sponge roller 51 as shown in FIG. 6 will be described. To do.
【００４３】対象サンプル及び比較サンプルには、共に
気孔率が９０％、平均気孔径が１３０μｍ、適正含水状
態における３０％圧縮応力が６０ｇ／ｃｍ2 であるＰＶ
Ａｔ系多孔質素材を使用した。The target sample and the comparative sample were both PV having a porosity of 90%, an average pore diameter of 130 μm, and a 30% compressive stress of 60 g / cm 2 in an appropriately hydrated state.
At porous material was used.
【００４４】対象サンプルの突起５は、その全高Ｈが
４．５ｍｍ、突出端部１３の外径が７．５ｍｍ、突出基
部１１の高さｈが１．５ｍｍ、外面３ａに対する傾斜面
１１の交叉角度θが約４５°（突出基部１１の基端面１
１ａの外径が１０．５ｍｍ）であるものを使用し、比較
サンプルの突起５３は、その全高が４．５ｍｍ，外径が
７．５ｍｍであるものを使用した。The projection 5 of the target sample has a total height H of 4.5 mm, an outer diameter of the projecting end 13 of 7.5 mm, a height h of the projecting base 11 of 1.5 mm, and the inclined surface 11 intersects the outer surface 3a. The angle θ is about 45 ° (proximal end face 1 of the base 11).
The outer diameter of 1a was 10.5 mm), and the protrusion 53 of the comparative sample had an overall height of 4.5 mm and an outer diameter of 7.5 mm.
【００４５】実験は、各サンプルのロール体３をチャッ
ク（図示外）で保持した状態で、突起５，５３をクリッ
プ（図示外）で挟み、突起５，５３に切断が生じる限界
までクリップを引張って、その引張り強度を測定した。In the experiment, while holding the roll body 3 of each sample by a chuck (not shown), the projections 5, 53 are sandwiched by clips (not shown), and the clips are pulled to the limit at which the projections 5, 53 are cut. Then, the tensile strength was measured.
【００４６】実験の結果は、図８に示すように、比較サ
ンプルの引張り強度が１．５９ｋｇ、対象サンプルの引
張り強度が１．８５ｋｇとなり、対象サンプルの引張り
強度が比較サンプルに比して１６．４％増大しているこ
とが確認された。As a result of the experiment, as shown in FIG. 8, the tensile strength of the comparative sample was 1.59 kg, the tensile strength of the target sample was 1.85 kg, and the tensile strength of the target sample was 16. It was confirmed that it increased by 4%.
【００４７】次に、本発明の第２の実施の形態について
説明する。Next, a second embodiment of the present invention will be described.
【００４８】図７は、本実施の形態に係るＰＶＡｔ系洗
浄用スポンジローラ６１の突起６３を示す要部拡大断面
図である。なお、第１実施形態と同様の構成部分には同
一の符号を付してその詳しい説明は省略する。FIG. 7 is an enlarged cross-sectional view of an essential part showing the protrusion 63 of the PVAt cleaning sponge roller 61 according to the present embodiment. The same components as those in the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.
【００４９】本実施の形態の突起６３は、突出基部６５
が湾曲面状の外面６７を有する点と、突出端部１３の外
周面と先端面１３ｂとの間に曲面部分６９が設けられて
いる点とが、第１実施形態と相違するものである。The protrusion 63 of the present embodiment has a protruding base portion 65.
Has a curved outer surface 67, and a curved surface portion 69 is provided between the outer peripheral surface of the projecting end portion 13 and the front end surface 13b, which is a difference from the first embodiment.
【００５０】図７に示す断面において、突出基部６５の
外面６７の基端７１と先端７３とを結ぶ直線７５とロー
ル体３の外周面３ａとの交叉角度θ2 は、３０°以上６
０°以下に設定されている。In the cross section shown in FIG. 7, the intersection angle θ 2 between the straight line 75 connecting the base end 71 and the tip 73 of the outer surface 67 of the projecting base portion 65 and the outer peripheral surface 3a of the roll body 3 is 30 ° or more 6
It is set to 0 ° or less.
【００５１】本実施形態によれば、第１実施形態と同様
に、洗浄性能を損なうことなく突起６３の耐久性の向上
を図ることができると共に、歩留まりの向上による製造
コストの低減を図ることができる。According to this embodiment, similarly to the first embodiment, it is possible to improve the durability of the protrusions 63 without impairing the cleaning performance, and to reduce the manufacturing cost by improving the yield. it can.
【００５２】なお、突出基部１１，６５及び突出端部１
３の断面形状に関し、第１及び第２実施形態では略円形
のものについて説明したが、本発明は、これに限定され
るものではなく、係る断面を矩形や楕円形や長円形等の
種々の形状に設定することができる。The projecting base portions 11 and 65 and the projecting end portion 1
Regarding the cross-sectional shape of No. 3, the first and second embodiments have been described as having a substantially circular shape, but the present invention is not limited to this, and various cross-sectional shapes such as a rectangular shape, an elliptical shape, and an oval shape can be used. The shape can be set.
【００５３】[0053]
【発明の効果】以上説明したように、本発明によれば、
突起の頂部が被洗浄体と接触して突起が横方向へ押圧さ
れたとき、突出基部の基端近傍における応力集中が緩和
されので、変形が突出基部全域に分散され、突起の耐久
力が向上する。As described above, according to the present invention,
When the top of the protrusion comes into contact with the body to be cleaned and the protrusion is laterally pressed, stress concentration near the base end of the protrusion base is relieved, so the deformation is dispersed throughout the protrusion base, improving the durability of the protrusion. To do.
【００５４】また、突出端部の形状に影響を与えること
なく突起の耐久力を向上させることができるので、被洗
浄体と接触する突出端部を、ブラッシングに最適な寸法
形状に自由に設定することができ、洗浄性能を損なうこ
となく突起の耐久性の向上を図ることができる。Further, since the durability of the projection can be improved without affecting the shape of the projecting end, the projecting end that comes into contact with the object to be cleaned can be freely set to the optimum size and shape for brushing. Therefore, the durability of the protrusion can be improved without impairing the cleaning performance.
【００５５】また、スポンジローラの製造に際して混合
液が注入される型は、ロール体形成用の第１空間と、突
出基部を形成する基部形成空間と突出端部を形成する端
部形成空間とを含む突起形成用の第２空間とを備え、基
部形成空間は、第１空間へ向かって拡がる傾斜面を有す
る。第１空間へ注入された混合液は、傾斜面に案内され
て端部形成空間へ円滑に流入し、空間内の空気は、端部
形成空間から第１空間へ円滑に移動して大気へ放出され
る。従って、混合液が第２空間の末端まで確実に充填さ
れ、歩留まりの向上による製造コストの低減を図ること
ができる。Further, the mold into which the mixed liquid is injected at the time of manufacturing the sponge roller has a first space for forming a roll body, a base forming space for forming a protruding base and an end forming space for forming a protruding end. And a second space for forming a protrusion, and the base forming space has an inclined surface that expands toward the first space. The mixed liquid injected into the first space is guided by the inclined surface and smoothly flows into the end forming space, and the air in the space smoothly moves from the end forming space to the first space and is released to the atmosphere. To be done. Therefore, the mixed liquid is surely filled up to the end of the second space, and the manufacturing cost can be reduced by improving the yield.
【図１】（ａ）は本発明の第１実施形態に係る洗浄用ス
ポンジローラを示す一部断面図、（ｂ）は（ａ）のスポ
ンジローラの突起を示す拡大斜視図、（ｃ）は（ｂ）の
断面図である。1A is a partial cross-sectional view showing a cleaning sponge roller according to a first embodiment of the present invention, FIG. 1B is an enlarged perspective view showing protrusions of the sponge roller of FIG. 1A, and FIG. It is sectional drawing of (b).
【図２】図１のスポンジローラを成型するための型を一
部破断して示す斜視図である。FIG. 2 is a partially cutaway perspective view of a mold for molding the sponge roller of FIG.
【図３】図１のスポンジローラの製造方法を示す断面図
である。FIG. 3 is a cross-sectional view showing a method of manufacturing the sponge roller of FIG.
【図４】図１のスポンジローラの使用状態を模式的に示
す側面図である。FIG. 4 is a side view schematically showing a usage state of the sponge roller of FIG.
【図５】図４の要部拡大図である。FIG. 5 is an enlarged view of a main part of FIG.
【図６】比較対象とした突起の使用状態を示す要部拡大
図である。FIG. 6 is an enlarged view of an essential part showing a usage state of a protrusion for comparison.
【図７】本発明の第２実施形態に係るスポンジローラの
突起を示す断面図である。FIG. 7 is a sectional view showing a protrusion of a sponge roller according to a second embodiment of the present invention.
【図８】比較実験の結果を示すグラフである。FIG. 8 is a graph showing the results of comparative experiments.
１ 洗浄用スポンジローラ ３ ロール体 ３ａ ロール体の外周面 ５ 突起 １１ 突出基部 １１ａ 突出基部の基端面 １１ｂ 突出基部の先端面 １３ 突出端部 １３ａ 突出端部の基端面 １３ｂ 突出端部の先端面 １５ 突出基部の外面 ６１ 洗浄用スポンジロール ６３ 突出基部 ６７ 突出基部の外面 1 Sponge roller for cleaning 3 rolls 3a Roll body outer peripheral surface 5 protrusions 11 protruding base 11a Proximal end face of base 11b Tip surface of protruding base 13 protruding end 13a Base end face of protruding end 13b Tip surface of protruding end 15 Outer surface of protruding base 61 Cleaning sponge roll 63 protruding base 67 Outer surface of protruding base
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平11−152367（ＪＰ，Ａ) 特開 昭59−6974（ＪＰ，Ａ) 実開 昭60−186085（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) B08B 1/04 H01L 21/304 644 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-11-152367 (JP, A) JP-A-59-6974 (JP, A) Actual development Shou-60-186085 (JP, U) (58) Field (Int.Cl. 7 , DB name) B08B 1/04 H01L 21/304 644
Claims (3)
タール系多孔質素材によって構成され、略円筒形状のロ
ール体と該ロール体の外周面上に一体成形された複数の
突起とを有し、該突起の頂部を被洗浄体に回転接触させ
て該被洗浄体を洗浄する洗浄用スポンジローラであっ
て、 前記突起は、前記ロール体の外周面から延びて先細りす
る突出基部と、該突出基部の先端から前記頂部までほぼ
同一の断面形状を有する突出端部とを備えたことを特徴
とする洗浄用スポンジローラ。1. A protrusion made of a polyvinyl acetal-based porous material having elasticity in a wet state and having a substantially cylindrical roll body and a plurality of protrusions integrally formed on an outer peripheral surface of the roll body, Is a cleaning sponge roller for rotating the top portion of the roller to be brought into contact with the object to be cleaned, wherein the projection has a protruding base portion that extends from the outer peripheral surface of the roll body and is tapered, and a tip of the protruding base portion. A sponge roller for cleaning, comprising: a protruding end portion having substantially the same cross-sectional shape from the top to the top portion.
であって、 前記突出基部は、略円錐台状に形成され、 前記突出端部は、略円柱状に形成されていることを特徴
とする洗浄用スポンジローラ。2. The cleaning sponge roller according to claim 1, wherein the protruding base portion is formed in a substantially truncated cone shape, and the protruding end portion is formed in a substantially cylindrical shape. Sponge roller for cleaning.
であって、 前記ロール体の外周面から前記突出基部の先端までの高
さは、前記突起の高さの１／５以上１／２以下であり、 任意断面における前記突出基部の外面の基端と先端とを
結ぶ直線と前記ロール体の外周面との交叉角度は、３０
°以上６０°以下であることを特徴とする洗浄用スポン
ジローラ。3. The cleaning sponge roller according to claim 1, wherein the height from the outer peripheral surface of the roll body to the tip of the protruding base portion is ⅕ or more and ½ of the height of the protrusion. The intersection angle between the straight line connecting the base end and the tip of the outer surface of the projecting base and the outer peripheral surface of the roll body in an arbitrary cross section is 30
A sponge roller for cleaning, wherein the sponge roller is at least 60 ° and at most 60 °.
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05127499A JP3403108B2 (en) | 1999-02-26 | 1999-02-26 | Sponge roller for cleaning |
| EP00901955A EP1188492B1 (en) | 1999-02-26 | 2000-01-27 | Cleaning sponge roller |
| CNB008042799A CN1144626C (en) | 1999-02-26 | 2000-01-27 | Cleaning sponge roller |
| KR1020017009387A KR100571640B1 (en) | 1999-02-26 | 2000-01-27 | Cleaning sponge roller |
| PCT/JP2000/000441 WO2000051752A1 (en) | 1999-02-26 | 2000-01-27 | Cleaning sponge roller |
| AU23202/00A AU2320200A (en) | 1999-02-26 | 2000-01-27 | Cleaning sponge roller |
| US09/503,626 US6502273B1 (en) | 1996-11-08 | 2000-02-11 | Cleaning sponge roller |
| US10/236,083 US6684447B2 (en) | 1996-11-08 | 2002-09-06 | Cleaning sponge roller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05127499A JP3403108B2 (en) | 1999-02-26 | 1999-02-26 | Sponge roller for cleaning |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000246187A JP2000246187A (en) | 2000-09-12 |
| JP3403108B2 true JP3403108B2 (en) | 2003-05-06 |
Family
ID=12882378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05127499A Expired - Lifetime JP3403108B2 (en) | 1996-11-08 | 1999-02-26 | Sponge roller for cleaning |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP1188492B1 (en) |
| JP (1) | JP3403108B2 (en) |
| KR (1) | KR100571640B1 (en) |
| CN (1) | CN1144626C (en) |
| AU (1) | AU2320200A (en) |
| WO (1) | WO2000051752A1 (en) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1523922B1 (en) | 2000-07-10 | 2011-02-23 | Uni-Charm Corporation | Cleaning article |
| AU2003292719A1 (en) * | 2003-12-26 | 2005-08-12 | Aion Co., Ltd. | Core for washing sponge roller |
| CN1954929B (en) * | 2005-10-26 | 2011-06-15 | 特伦普夫格吕施股份公司 | Mechanical device for cleaning back plat of workpiece cradle |
| EP1960129B1 (en) * | 2005-12-06 | 2017-06-14 | Entegris, Inc. | A molded rotatable base for a porous pad |
| KR101579572B1 (en) * | 2008-06-30 | 2015-12-22 | 아이온 가부시키가이샤 | Sponge roller for cleaning |
| CN101639653B (en) * | 2008-08-01 | 2012-01-04 | 深圳市宝安区松岗富士(中国)制品厂 | Manufacturing process for sponge rollers and press-in device thereof |
| JP5538007B2 (en) * | 2009-08-20 | 2014-07-02 | アイオン株式会社 | Cleaning sponge body and cleaning method |
| SG183419A1 (en) * | 2010-02-22 | 2012-09-27 | Entegris Inc | Post-cmp cleaning brush |
| KR101118161B1 (en) * | 2011-05-27 | 2012-03-12 | 주식회사 엠원테크 | Pva brush roller for cleansing of lcd glass and thereof manufacturing method |
| US20130255721A1 (en) * | 2012-04-03 | 2013-10-03 | Illinois Tool Works Inc. | Concave nodule sponge brush |
| US8778087B2 (en) * | 2012-04-03 | 2014-07-15 | Illinois Tool Works Inc. | Conical sponge brush for cleaning semiconductor wafers |
| CN103243532B (en) * | 2013-04-26 | 2016-01-20 | 邵卫娟 | A kind of meticulous clearer |
| JP6163081B2 (en) * | 2013-11-05 | 2017-07-12 | アイオン株式会社 | Brush roller |
| US10790167B2 (en) | 2014-02-20 | 2020-09-29 | Entegris, Inc. | Nodule ratios for targeted enhanced cleaning performance |
| JP6366544B2 (en) | 2014-07-04 | 2018-08-01 | 株式会社荏原製作所 | Cleaning device and roll cleaning member |
| CN114798653A (en) * | 2014-11-24 | 2022-07-29 | 康宁股份有限公司 | Method and apparatus for cleaning a substrate surface |
| JP2018141030A (en) * | 2017-02-27 | 2018-09-13 | 株式会社エー・アイ・システムプロダクト | Electronic cigarette cleaning liquid and electronic cigarette cleaning method |
| CN110335837A (en) * | 2019-07-05 | 2019-10-15 | 北京理工大学 | A kind of semiconductor crystal wafer cleaning preparation method of porous hydrophilic material and component |
| CN113385463A (en) * | 2021-05-10 | 2021-09-14 | 华清八度光电集团有限公司 | Belt cleaning device is used in production of flexible brilliant silicon solar cell panel of environment-friendly |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE632357C (en) * | 1937-02-01 | Anna Hempel | Rubber brush for cleaning clothes, etc. | |
| JPS596974A (en) * | 1982-07-05 | 1984-01-14 | カネボウ株式会社 | Washing method |
| JPS60186085U (en) * | 1984-05-22 | 1985-12-10 | カネボウ株式会社 | Cleaning roll |
| JPH03257456A (en) * | 1990-03-08 | 1991-11-15 | Fuji Electric Co Ltd | Method for washing cylindrical substrate of electrophotographic sensitive body |
| US6004402A (en) * | 1994-10-06 | 1999-12-21 | Xomed Surgical Products, Inc. | Method of cleaning silicon material with a sponge |
| EP0914216B1 (en) * | 1995-10-13 | 2002-03-20 | Lam Research Corporation | Apparatus for delivery of two chemical products through a brush |
| US5675856A (en) * | 1996-06-14 | 1997-10-14 | Solid State Equipment Corp. | Wafer scrubbing device |
| JP3680185B2 (en) * | 1996-07-19 | 2005-08-10 | アイオン株式会社 | Cleaning roller |
| JPH10180198A (en) * | 1996-10-21 | 1998-07-07 | Ebara Corp | Cleaning device |
-
1999
- 1999-02-26 JP JP05127499A patent/JP3403108B2/en not_active Expired - Lifetime
-
2000
- 2000-01-27 CN CNB008042799A patent/CN1144626C/en not_active Expired - Lifetime
- 2000-01-27 KR KR1020017009387A patent/KR100571640B1/en active IP Right Grant
- 2000-01-27 EP EP00901955A patent/EP1188492B1/en not_active Expired - Lifetime
- 2000-01-27 AU AU23202/00A patent/AU2320200A/en not_active Abandoned
- 2000-01-27 WO PCT/JP2000/000441 patent/WO2000051752A1/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| CN1341045A (en) | 2002-03-20 |
| CN1144626C (en) | 2004-04-07 |
| KR100571640B1 (en) | 2006-04-17 |
| WO2000051752A1 (en) | 2000-09-08 |
| EP1188492B1 (en) | 2006-04-26 |
| JP2000246187A (en) | 2000-09-12 |
| EP1188492A4 (en) | 2003-02-05 |
| KR20010101706A (en) | 2001-11-14 |
| AU2320200A (en) | 2000-09-21 |
| EP1188492A1 (en) | 2002-03-20 |
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